耦合型回音壁模式光学微腔的构建与光学性质研究
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摘要
光学微腔是一种能够把光场限制在微米量级区域中的光学谐振腔。它利用在介电常数不连续的材料界面的反射,散射或衍射,将光能量限制在很小的区域内来回振荡,从而增加光子寿命,减少光场模式数目。当增益介质(偶极子)置于微腔中,它的自发辐射性质受到局域真空场的显著调制,因此产生低阈值的激光。光学微腔在先进光源,信号处理和传感技术等领域有着广泛的应用。空间中多个光学微腔互相靠近组成的耦合腔器件可以人工调制光能在空域和频域的分布,从而获得一系列的新的物理现象和应用,因而受到人们的广泛关注。本文围绕“耦合型回音壁模式光学微腔的构建与光学性质研究”的课题,在半导体微盘激光器、单频紫外微腔激光器以及聚合物微环传感器等方面开展了一系列研究工作。
本论文的主要创新点是：
1.设计出一种具有窄发散角、单方向出射的平面耦合微腔——半螺旋型对称耦合微腔。利用时域有限差分(Finite-Difference Time-Domain, FDTD)仿真技术,设计并优化了这种半导体回音壁模式的品质因子和方向性出射特性。研究结果表明,在通信波段它的光学模式具有很好的单方向出射,TM模式的光束的发散角仅为19度。同时单方向出射的模式的Q值提高,而多方向出射的Q值降低,有利于激光器的单模工作。
2.在聚合物薄膜、光微流以及半导体材料三种体系实现了基于耦合微腔的紫外单频激光器。根据复合腔选模的原理,当两个尺寸不同的微腔平面耦合,自由光谱范围被扩展(即游标效应),在两个腔共同的谐振频率处具有最低的的损耗因而实现单频激射。这种构型的成功实现,为解决制备紫外波段高反射率的DBR反射镜和小周期的光栅所需的高水平工艺要求提供了一个有效简便的途径。
3.实现了一种具有高自发辐射因子的垂直耦合光子分子微盘激光器。这种垂直耦合结构对F-P模式进行了有效的抑制,从而增强回音壁模式激光的自发耦合效率,降低了激光阈值。实验证明,和单个微盘相比,回音壁模式激光自发耦合因子β提高了15倍,高达0.5。当三个相同的微盘垂直耦合时,对F-P模式抑制更有效,从而增大了自发耦合因子,β值高达0.72。同时观察到不同微盘之间的强耦合导致的模式劈裂,模式间耦合强度系数是0.4THz,比量子点与腔模的耦合强度至少高一个数量级。
4.利用纳米压印技术制备了聚合物SU-8微环谐振器,并应用在生物传感领域。微环谐振器在水中的本征品质因子高达8×105,这是迄今芯片上聚合物微环的最高记录。利用这个高性能的器件,可以探测到表面质量密度为12.7pg/mm2的生物分子,等噪声的探测极限低达55.9fg/mm2。
Microcavities are optical resonators which confine the light field in micron or sub-micron volume.The light oscillates in the medium with discontinuous dielectric constants by reflection, scattering or diffraction at the interface.With extending the photon lifetime and reducing the optical modes, the spontaneous emission of gain medium(dipoles) inside the cavity will be significantly modulated by the local vacuum field, and lasing emission of low threshold can occur as well. Microcavities have been widely applied in various fields such as advanced light sources, signal processing and sensing technology.The coupled microcavities consisting of multiple cavities in array can artificially modulate mode patterns in space and frequency to generate a series of new physics phenomena and applications, thus have attracted great attentions.This thesis mainly focuses on the research work in the subject of "Study on the fabrications and optical properties of coupled microcavities based on whispering gallery mode". Research works include:the design and fabrication of semiconductor microdisk laser, single mode UV microlaser and high-Q polymer microring resonator for optical biosensing application. This thesis focuses on the following aspect:
First, we designed symmetric half-spiral microcavities (SHSMs) with high-Q unidirectional emission properties.Mode field patterns and light emissionsare investigatedby the two-dimensional (2-D) finite-difference time domain (FDTD) method. The calculation results show thatan SHSM can support high-quality (Q-104) distorted whispering-gallery modes with directional emissions.Moreover, artificial controls on the Q factor and emission directionality are realized in the coupled size-mismatchedSHSMs, and unidirectional emission from the coupled cavity structure with a divergence of19°is achieved.
Second, single-frequency lasing from coupled asymmetric microcavitiesis achieved in polymer microring, optofludics and semiconductor systems. By coupling two size-mismatched circular microcavities, multi-whispering-gallery modes are successfully suppressed and free spectrum range increases. The single-frequency laser emission is robustly obtained at the common resonance of the two cavities with the lowest loss.These achievements provide a simple and effective way to avoid the challenging fabrication of DBR mirror of high reflectivity in the ultraviolet range and small cycle grating.
Third, we fabricated vertically coupled photonic molecule microdisk laserswith exceptionalspontaneous emission coupling to the lasing whispering gallery modes. The multi-stacks drastically suppress the photonic density of states in thevertical F-P modes, and enhance the spontaneous emission coupling factor β of WGMs to decrease the lasing threshold. The experiment shows the β of the double coupled microdisk laser is0.5which is15times higher than that of single disk laser. When three microdisks are vertically coupled, P can be up to0.72. At the same time, we observe the mode splitting induced by strong coupling between the microdisks and the coupling strength is0.4THz, which is at least one order higher than that between the quantum dots and cavity modes.
Fourth, we fabricated SU-8polymer microring resonator and applied it to the the biosensing work. The device is systematically characterized and the intrinsic Q factor is8×105, which is the highest value so far. Taking advantage of this high performance, a surface mass density of12.7pg/mm2of BSA is detected due to the physical adsorption. The NEDL is approximately55.9fg/mm2in an intensity variation scheme. These results represent the best sensing performance which is achieved with the on-chip polymer ring resonator system.
本论文的主要创新点是：
1.设计出一种具有窄发散角、单方向出射的平面耦合微腔——半螺旋型对称耦合微腔。利用时域有限差分(Finite-Difference Time-Domain, FDTD)仿真技术,设计并优化了这种半导体回音壁模式的品质因子和方向性出射特性。研究结果表明,在通信波段它的光学模式具有很好的单方向出射,TM模式的光束的发散角仅为19度。同时单方向出射的模式的Q值提高,而多方向出射的Q值降低,有利于激光器的单模工作。
2.在聚合物薄膜、光微流以及半导体材料三种体系实现了基于耦合微腔的紫外单频激光器。根据复合腔选模的原理,当两个尺寸不同的微腔平面耦合,自由光谱范围被扩展(即游标效应),在两个腔共同的谐振频率处具有最低的的损耗因而实现单频激射。这种构型的成功实现,为解决制备紫外波段高反射率的DBR反射镜和小周期的光栅所需的高水平工艺要求提供了一个有效简便的途径。
3.实现了一种具有高自发辐射因子的垂直耦合光子分子微盘激光器。这种垂直耦合结构对F-P模式进行了有效的抑制,从而增强回音壁模式激光的自发耦合效率,降低了激光阈值。实验证明,和单个微盘相比,回音壁模式激光自发耦合因子β提高了15倍,高达0.5。当三个相同的微盘垂直耦合时,对F-P模式抑制更有效,从而增大了自发耦合因子,β值高达0.72。同时观察到不同微盘之间的强耦合导致的模式劈裂,模式间耦合强度系数是0.4THz,比量子点与腔模的耦合强度至少高一个数量级。
4.利用纳米压印技术制备了聚合物SU-8微环谐振器,并应用在生物传感领域。微环谐振器在水中的本征品质因子高达8×105,这是迄今芯片上聚合物微环的最高记录。利用这个高性能的器件,可以探测到表面质量密度为12.7pg/mm2的生物分子,等噪声的探测极限低达55.9fg/mm2。
Microcavities are optical resonators which confine the light field in micron or sub-micron volume.The light oscillates in the medium with discontinuous dielectric constants by reflection, scattering or diffraction at the interface.With extending the photon lifetime and reducing the optical modes, the spontaneous emission of gain medium(dipoles) inside the cavity will be significantly modulated by the local vacuum field, and lasing emission of low threshold can occur as well. Microcavities have been widely applied in various fields such as advanced light sources, signal processing and sensing technology.The coupled microcavities consisting of multiple cavities in array can artificially modulate mode patterns in space and frequency to generate a series of new physics phenomena and applications, thus have attracted great attentions.This thesis mainly focuses on the research work in the subject of "Study on the fabrications and optical properties of coupled microcavities based on whispering gallery mode". Research works include:the design and fabrication of semiconductor microdisk laser, single mode UV microlaser and high-Q polymer microring resonator for optical biosensing application. This thesis focuses on the following aspect:
First, we designed symmetric half-spiral microcavities (SHSMs) with high-Q unidirectional emission properties.Mode field patterns and light emissionsare investigatedby the two-dimensional (2-D) finite-difference time domain (FDTD) method. The calculation results show thatan SHSM can support high-quality (Q-104) distorted whispering-gallery modes with directional emissions.Moreover, artificial controls on the Q factor and emission directionality are realized in the coupled size-mismatchedSHSMs, and unidirectional emission from the coupled cavity structure with a divergence of19°is achieved.
Second, single-frequency lasing from coupled asymmetric microcavitiesis achieved in polymer microring, optofludics and semiconductor systems. By coupling two size-mismatched circular microcavities, multi-whispering-gallery modes are successfully suppressed and free spectrum range increases. The single-frequency laser emission is robustly obtained at the common resonance of the two cavities with the lowest loss.These achievements provide a simple and effective way to avoid the challenging fabrication of DBR mirror of high reflectivity in the ultraviolet range and small cycle grating.
Third, we fabricated vertically coupled photonic molecule microdisk laserswith exceptionalspontaneous emission coupling to the lasing whispering gallery modes. The multi-stacks drastically suppress the photonic density of states in thevertical F-P modes, and enhance the spontaneous emission coupling factor β of WGMs to decrease the lasing threshold. The experiment shows the β of the double coupled microdisk laser is0.5which is15times higher than that of single disk laser. When three microdisks are vertically coupled, P can be up to0.72. At the same time, we observe the mode splitting induced by strong coupling between the microdisks and the coupling strength is0.4THz, which is at least one order higher than that between the quantum dots and cavity modes.
Fourth, we fabricated SU-8polymer microring resonator and applied it to the the biosensing work. The device is systematically characterized and the intrinsic Q factor is8×105, which is the highest value so far. Taking advantage of this high performance, a surface mass density of12.7pg/mm2of BSA is detected due to the physical adsorption. The NEDL is approximately55.9fg/mm2in an intensity variation scheme. These results represent the best sensing performance which is achieved with the on-chip polymer ring resonator system.
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