高电荷态离子与固体表面相互作用过程中x-ray发射研究
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摘要
高电荷态离子与固体表面相互作用过程中x射线发射研究涉及能量转移机制、离子中性化、原子结构和能级寿命等，具有重要的学术价值，在表面分析和加工、短波辐射源开发等方面具有潜在的应用价值。本论文主要包括以下几个方面：
1．介绍高电荷态离子与物质相互作用的过程和发展现状，以及兰州重离子加速器国家实验室ECR离子源上建成的用于高电荷态离子与固体表面相互作用研究的物理实验终端。
2．通过对高电荷态离子(Ar~(q+))与固体靶表面相互作用发射的x射线的研究，给出了靶原子发射的x射线对于入射离子动能的依赖关系。
3．计算了实验中得到的Ar~(q+)与金属靶(Nb，Mo，Zr)相互作用激发出的靶原子x射线的产额及截面，利用结合能修正的二体碰撞近似理论与实验值比较，得到较好的符合。
4．计算了实验中得到的Ar~(q+))与金属靶Al相互作用激发出的靶原子K壳x射线的产额及截面，理论上用2pπ-2pσ分子轨道耦合理论和考虑Ar离子2p壳层空穴在固体内的衰减来处理，理论计算结果和实验结果符合较好。
The investigations about the x-ray emission spectrums in the interaction of slow highly charged ions(SHCI) with solid surface are fundamental in the research of energy transfer mechanism, neutralization process, atomic structure and life time of the incident SHCI . It is also important in the applied research, such as the surface analyzation and modification, the development of short wave source. This thesie includes the following aspects:
1. The research backgound of the interaction between SHCI and solid surface are introduced. The experimental platform about these researches in ECR ion source of HIRFL is also introduced.
2. The x-ray intensities of target induced by Argon ions are investigated. A very simple model is proposed to estimated the threshold effects in the x-ray emission of the target x-ray varing with the incident energy.
3. The x-ray yields and cross sections of Nb, Mo and Zr are investigated experimentally and theoratically. The experimental results are explained basically in the framework of the binding-energy-modified BEA theory.
4. Al K-shell x-ray yields and cross sections are measured in the collision of Al with highly charged Ar~(q+) ions (q=12～16). The explanation of the experimental data is under the framework of 2pπ-2pσrotational coupling combined with the Auger-effect in the nuetralization process of the incident Ar ions below the surface. The calculation results are in good agreement with the experimental results.
1．介绍高电荷态离子与物质相互作用的过程和发展现状，以及兰州重离子加速器国家实验室ECR离子源上建成的用于高电荷态离子与固体表面相互作用研究的物理实验终端。
2．通过对高电荷态离子(Ar~(q+))与固体靶表面相互作用发射的x射线的研究，给出了靶原子发射的x射线对于入射离子动能的依赖关系。
3．计算了实验中得到的Ar~(q+)与金属靶(Nb，Mo，Zr)相互作用激发出的靶原子x射线的产额及截面，利用结合能修正的二体碰撞近似理论与实验值比较，得到较好的符合。
4．计算了实验中得到的Ar~(q+))与金属靶Al相互作用激发出的靶原子K壳x射线的产额及截面，理论上用2pπ-2pσ分子轨道耦合理论和考虑Ar离子2p壳层空穴在固体内的衰减来处理，理论计算结果和实验结果符合较好。
The investigations about the x-ray emission spectrums in the interaction of slow highly charged ions(SHCI) with solid surface are fundamental in the research of energy transfer mechanism, neutralization process, atomic structure and life time of the incident SHCI . It is also important in the applied research, such as the surface analyzation and modification, the development of short wave source. This thesie includes the following aspects:
1. The research backgound of the interaction between SHCI and solid surface are introduced. The experimental platform about these researches in ECR ion source of HIRFL is also introduced.
2. The x-ray intensities of target induced by Argon ions are investigated. A very simple model is proposed to estimated the threshold effects in the x-ray emission of the target x-ray varing with the incident energy.
3. The x-ray yields and cross sections of Nb, Mo and Zr are investigated experimentally and theoratically. The experimental results are explained basically in the framework of the binding-energy-modified BEA theory.
4. Al K-shell x-ray yields and cross sections are measured in the collision of Al with highly charged Ar~(q+) ions (q=12～16). The explanation of the experimental data is under the framework of 2pπ-2pσrotational coupling combined with the Auger-effect in the nuetralization process of the incident Ar ions below the surface. The calculation results are in good agreement with the experimental results.
引文
[1] T. Schenkel, A. V. Barnes, T. R. Niedermayr, et al. Deposition of Potential Energy in Solids by Slow, Highly Charged Ions. Phys. Rev. Lett, Vol.83, No.21, 1999: 4273～4276
[2] M.Hattass, T.Schenkel, A.V. Barnes, et al. Charge Equilibration Time of Slow, Highly Charged Ions in Solids. Phys Rev Lett, Vol.82, No.24, 1999: 4795～4798
[3] N.Stolterfoht, V.Hoffmann, D.Niemann, et al. Plasmon Production by the Decay of Hollow Ne Atoms near an Al Surface. Phys Rev A, Vol.61, No.5, 2000: 052902-1～052902-8
[4] G.Xiao, G. Schiwietz, P.L.Grand, et al. Indications for Nuclear-Track Guided Electrons Induced by Fast Heavy Ions in Insulators. Phys Rev Lett, Vol.79, No.10, 1997: 1821～1824
[5] H.Winter, F.Aumayr. Hollow atoms. J.Phys. Phys. B, Vol.32, 1999: 39～65.
[6] H.D.Hagstrum. Auger Ejection of Electrons from Tungsten by Noble Gas Ions. Phys. Rev. Vol.96, No.2, 1954: 325-335
[7] H.D.Hagstrum. Theory of Auger Ejection of Electrons from Metals by Ions. Vol.96, No.2, 1954: 336-365
[8] M. Delaunay, M. Fehringer, R. Geller, et al. Electron emission from a metal surface bombarded by slow highly charged ions. Phys. Rev. B, Vol.35, No.9, 1987: 4232～4235
[9] T. Schenkel, A. V. Barnes, A. V. Hamza, et al. Synergy of Electronic Excitations and Elastic Collision Spikes in Sputtering of Heavy Metal Oxides, Phys. Rev. Lett, Vol.80, No.19, 1998: 4325-4328
[10] T. Schenkel, A. V. Hamza, A. V. Barnes, Ablation of GaAs by Intense, Ultrafast Electronic Excitation from Highly Charged Ions. Phys. Rev. Lett, Vol.81, No.12, 1998: 2590-2593
[11] J.G.Gillaspy, D.C.Parks, L.P.Ratliff. Masked Ion Lithography with Highly Charged Ions. J. Vac. Sci. Tech.B, Vol. 16, No.6, 1998: 3294-3297
[12] M. Hattass, T. Schenkel, A. V. Hamza, et al. Charge Equilibration Time of Slow, Highly Charged Ions in Solids. Phys. Rev. Lett, Vol.82, No.24, 1999: 4795-4798
[13] D. Niemann, M. Grether, M. Rosler, et al. Plasmon Excitation by Multiply Charged Ne~(q+) Ions Interacting with an Al Surface. Phys. Rev. Lett, Vol.80, No.15, 1998: 3328-3331
[14] N. Stolterfoht, D. Niemann, V. Hoffmann, Plasmon production by the decay of hollow Ne atoms near an Al surface. Phys. Rev. A, Vol.61, No.5, 2000:052902-1～052902-8
[15] Y.Morishita, S.Ninomiya, Y.Yamazaki,et al. Visible Light Emission from slow Highly Charged Ions Transmitted Through a Ni Microcanillary. Physica Scripta, Vol.80, 1999:212-214
[16] C. Lemell, J. Stockl, J. Burgdorfer, et al. Multicharged Ion Impact on Clean Au(111): Suppression of Kinetic Electron Emission in Glancing Angle Scattering. Phys. Rev. Lett, Vol.81, No.9, 1998: 1965-1968
[17] J. P. Briand, L. de Billy, P. Charles, et al. Production of hollow atoms by the excitation of highly charged ions in interaction with a metallic surface. Phys. Rev. Lett, Vol.65, No.2, 1990:159-162
[18] H. Winter, F. Aumayr, Europhysics News, Vol. 33 No.6 2002:
[19] A.Arnau, F.Aumayr, P.M.Echenique, et al. Interaction of Slow Muticharged Ions with Solid Surfaces. Surface Science Reports, Vol.27, No.2, 113-239
[20] T.Schenkel,A.V.Hamza,A.V.Barnes, et al. Interaction of slow, very highly charged ions with surfaces. Progress in Surface Science, Vol.61, No.2, 1999:23-84
[21] H. Ryufuku, K. Sasaki, T. Watanabe. Oscillatory behavior of charge transfer cross sections as a function of the charge of projectiles in low-energy collisions. Phys.Rev.A, Vol.21, No.3, 1980:745～750
[22] A. Niehaus. A Classical Model for Multiple-Electron Capture in Slow Collisions of Highly Charged Ions with Atoms. J. Phys. Phys. B, Vol.19, No.18, 1986:2925～2937
[23] J. Burgdorfer, R.Morgenstem, A. Niehaus. Angular momentum distribution in the classical over-barrier model for electron into highly charged Slow Projectiles. J. Phys. Phys. B, Vol.19, No.14, 1986:507～513
[24] J. Burgdorfer, P Lemer, F. W. Meyer. Above-surface neutralization of highly charged ions: The classical over-the-barrier model. Phys Rev A, Vol. 44, No.9, 1991: 5674～5685.
[25] J. Burgdorfer, F. W. Meyer. Image acceleration of Multiply Charged Ions by Metallic Surfaces. Phys RevA, Vol. 47, No.1, 1993: R20～R23.
[26] R. Kohrbrück, K. Sommer, J. P. Biersack, et al. Auger-electron emission from slow, highly charged ions interacting with solid Cu targets. Phys. Rev. A, Voi.45, No.7, 1992:4653～4660
[27] R. Kohrbrück, N. Stolterfoht, S. Schippers, et al. Electron emission following the interaction of highly charged ions with a Pt(110) target. Phys. Rev. A, Vol.48, No.5 1993: 3731-3740
[28] R. Schuch, D. Schneider, D. A. Knapp. Evidence for internal dielectronic excitation of slow highly charged uranium ions. Phys. Rev. Lett, Vol.70, No.8, 1993: 1073-1076
[29] Briand J.-P, L. de Billy, P. Charles, On The Mechanism of Formation of Hollow Atoms Below a Surface. Nucl. Instrum. Meth. Phys. Res. B, Vol. 87, No.1, 1994: 138-141
[30] F. Aumayr, H. Kurz, D. Schneider. Emission of electrons from a clean gold surface induced by slow, very highly charged ions at the image charge acceleration limit. Phys. Rev. Lett. Vol.71, No.12, 1993: 1943-1946
[31] H. Kurz, F. Aumayr, H.P. Winter, et al. Electron emission and image-charge acceleration for the impact of very highly charged ions on clean gold. Phys. Rev. A, Vol. 49, No.6, 1994: 4693-4702
[32] C. Lemell, H. P. Winter, F. Aumayr. et al. Image acceleration of highly charged ions by metal surfaces. Phys. Rev. A, Vol.53, No.2, 1996: 880-885
[33] J.J.Ducre'e, F.Casali, U.Thumm, et al. Extended classical over-barrier model for collisions of highly charged ions with conducting and insulating surfaces. Phys. Rev. A, Vol.57, No.1, 1998: 338-350
[34] K. Mochiji, N. Itabashi, S. Yamamoto, Desorption induced by electronic potential energy of multiply charged. Surf. Sci, Vol.357, No. 1996: 673-677
[35] E. Fermi. The Ionization Loss of Energy in Gases and in Condensed Materials. Phys. Rev. Vol.57, No.6, 1940: 485-493
[36] P. M. EcheniqueR, M. NieminenR, H. Ritchie. Density functional calculation of stopping power of an electron gas for slow ions. Solid State Communications, Vol.37, No. 10, 779-820
[37] M. Grether, D. Niemann, A. Spieler, N. Stolterfoht. Formation and filling of hollow Ne atoms below an Al surface. Phys. Rev. A, Vol.56, No.5, 1997: 3794-3803
[38] F. J. Garcia, de Abajo, P. M. Echenique. Wake-potential formation in a thin foil. Phys. Rev. B, Vol.45, No.15, 1992: 8771-8774
[39] U. Fano and W. Lichten Interpretation of Ar~+-Ar collisions at 50 keV, Phys. Rev. Lett, 1965, 14: 627-629.
[40] W. Lichten, Molecular wave functions and inelastic atomic collisions, Phys. Rev. 1967, 164: 131-142.
[41] M. Barat and W. Lichten, Extension of the electron promotion model to asymmetric atomic collisions, Phys. Rev. 1972, A6:211-229.
[42] W. E. Meyerhof, K-Vacancy sharing in near-symmertric heavy-ion collisions, Phys. Rev. Lett, 1973, 31: 1341-1344.
[43] 张子民 博士论文(2003)
[44] Briand J.-P, S. Thuriez, G. Giardino, et al. Observation of Hollow Atoms or Ions above Insulator and Metal Surfaces. Phys. Rev. Lett. Vol.77, No.8, 1996:1452～1455
[45] B. d'Etat, J. P. Briand, G. Ban, et al. Interaction of Ar~(17+) ions on metallic surfaces at grazing incidence. Phys. Rev. A 48,No.2, 1993:1098-1106
[46] J. Lindhard, M. Scharff and H.E. Schiott, Mat. Fys. Medd. Dan. Vid. Selsk., Vol.33, No. 14 (1963).
[47] F. Aumayr, HP. Winter, J. Limburg, et al. Comment on "Observation of Hollow Atoms or Ions above Insulator and Metal Surfaces". Phys. Rev. Lett. Vol.79, No. 13, 1997:2590
[48] 原子核物理实验方法 复旦大学 清华大学 北京大学 合编 北京：原子能出版社 1994：284-286
[49] G. Basbas, W, Brandt, and R.H. Ritchie, Phys. Rev. A. 7,1971 (1973)
[50] A. Russek, Phys. Rev. A 4, 1918 (1971).
[51] J.S. Briggs and J. Macek, J. Phys. B: Atom. Molee. Phys., 8, 1909 (1975).
[52] J.D. Gacia and R.J. Fortner, Rev. Mod. Phys. 45, 111 (1973)
[53] R.W. Fink, Rev. Mod. Phys 38, 513 (1966)
[54] J.S. Briggs, Rep. Prog. Phys. 39, 217 (1976)
[55] R. Anholt, W.E. Meyerhof, and A. Salin, Phys.Rev.A 16,951 (1977)
[2] M.Hattass, T.Schenkel, A.V. Barnes, et al. Charge Equilibration Time of Slow, Highly Charged Ions in Solids. Phys Rev Lett, Vol.82, No.24, 1999: 4795～4798
[3] N.Stolterfoht, V.Hoffmann, D.Niemann, et al. Plasmon Production by the Decay of Hollow Ne Atoms near an Al Surface. Phys Rev A, Vol.61, No.5, 2000: 052902-1～052902-8
[4] G.Xiao, G. Schiwietz, P.L.Grand, et al. Indications for Nuclear-Track Guided Electrons Induced by Fast Heavy Ions in Insulators. Phys Rev Lett, Vol.79, No.10, 1997: 1821～1824
[5] H.Winter, F.Aumayr. Hollow atoms. J.Phys. Phys. B, Vol.32, 1999: 39～65.
[6] H.D.Hagstrum. Auger Ejection of Electrons from Tungsten by Noble Gas Ions. Phys. Rev. Vol.96, No.2, 1954: 325-335
[7] H.D.Hagstrum. Theory of Auger Ejection of Electrons from Metals by Ions. Vol.96, No.2, 1954: 336-365
[8] M. Delaunay, M. Fehringer, R. Geller, et al. Electron emission from a metal surface bombarded by slow highly charged ions. Phys. Rev. B, Vol.35, No.9, 1987: 4232～4235
[9] T. Schenkel, A. V. Barnes, A. V. Hamza, et al. Synergy of Electronic Excitations and Elastic Collision Spikes in Sputtering of Heavy Metal Oxides, Phys. Rev. Lett, Vol.80, No.19, 1998: 4325-4328
[10] T. Schenkel, A. V. Hamza, A. V. Barnes, Ablation of GaAs by Intense, Ultrafast Electronic Excitation from Highly Charged Ions. Phys. Rev. Lett, Vol.81, No.12, 1998: 2590-2593
[11] J.G.Gillaspy, D.C.Parks, L.P.Ratliff. Masked Ion Lithography with Highly Charged Ions. J. Vac. Sci. Tech.B, Vol. 16, No.6, 1998: 3294-3297
[12] M. Hattass, T. Schenkel, A. V. Hamza, et al. Charge Equilibration Time of Slow, Highly Charged Ions in Solids. Phys. Rev. Lett, Vol.82, No.24, 1999: 4795-4798
[13] D. Niemann, M. Grether, M. Rosler, et al. Plasmon Excitation by Multiply Charged Ne~(q+) Ions Interacting with an Al Surface. Phys. Rev. Lett, Vol.80, No.15, 1998: 3328-3331
[14] N. Stolterfoht, D. Niemann, V. Hoffmann, Plasmon production by the decay of hollow Ne atoms near an Al surface. Phys. Rev. A, Vol.61, No.5, 2000:052902-1～052902-8
[15] Y.Morishita, S.Ninomiya, Y.Yamazaki,et al. Visible Light Emission from slow Highly Charged Ions Transmitted Through a Ni Microcanillary. Physica Scripta, Vol.80, 1999:212-214
[16] C. Lemell, J. Stockl, J. Burgdorfer, et al. Multicharged Ion Impact on Clean Au(111): Suppression of Kinetic Electron Emission in Glancing Angle Scattering. Phys. Rev. Lett, Vol.81, No.9, 1998: 1965-1968
[17] J. P. Briand, L. de Billy, P. Charles, et al. Production of hollow atoms by the excitation of highly charged ions in interaction with a metallic surface. Phys. Rev. Lett, Vol.65, No.2, 1990:159-162
[18] H. Winter, F. Aumayr, Europhysics News, Vol. 33 No.6 2002:
[19] A.Arnau, F.Aumayr, P.M.Echenique, et al. Interaction of Slow Muticharged Ions with Solid Surfaces. Surface Science Reports, Vol.27, No.2, 113-239
[20] T.Schenkel,A.V.Hamza,A.V.Barnes, et al. Interaction of slow, very highly charged ions with surfaces. Progress in Surface Science, Vol.61, No.2, 1999:23-84
[21] H. Ryufuku, K. Sasaki, T. Watanabe. Oscillatory behavior of charge transfer cross sections as a function of the charge of projectiles in low-energy collisions. Phys.Rev.A, Vol.21, No.3, 1980:745～750
[22] A. Niehaus. A Classical Model for Multiple-Electron Capture in Slow Collisions of Highly Charged Ions with Atoms. J. Phys. Phys. B, Vol.19, No.18, 1986:2925～2937
[23] J. Burgdorfer, R.Morgenstem, A. Niehaus. Angular momentum distribution in the classical over-barrier model for electron into highly charged Slow Projectiles. J. Phys. Phys. B, Vol.19, No.14, 1986:507～513
[24] J. Burgdorfer, P Lemer, F. W. Meyer. Above-surface neutralization of highly charged ions: The classical over-the-barrier model. Phys Rev A, Vol. 44, No.9, 1991: 5674～5685.
[25] J. Burgdorfer, F. W. Meyer. Image acceleration of Multiply Charged Ions by Metallic Surfaces. Phys RevA, Vol. 47, No.1, 1993: R20～R23.
[26] R. Kohrbrück, K. Sommer, J. P. Biersack, et al. Auger-electron emission from slow, highly charged ions interacting with solid Cu targets. Phys. Rev. A, Voi.45, No.7, 1992:4653～4660
[27] R. Kohrbrück, N. Stolterfoht, S. Schippers, et al. Electron emission following the interaction of highly charged ions with a Pt(110) target. Phys. Rev. A, Vol.48, No.5 1993: 3731-3740
[28] R. Schuch, D. Schneider, D. A. Knapp. Evidence for internal dielectronic excitation of slow highly charged uranium ions. Phys. Rev. Lett, Vol.70, No.8, 1993: 1073-1076
[29] Briand J.-P, L. de Billy, P. Charles, On The Mechanism of Formation of Hollow Atoms Below a Surface. Nucl. Instrum. Meth. Phys. Res. B, Vol. 87, No.1, 1994: 138-141
[30] F. Aumayr, H. Kurz, D. Schneider. Emission of electrons from a clean gold surface induced by slow, very highly charged ions at the image charge acceleration limit. Phys. Rev. Lett. Vol.71, No.12, 1993: 1943-1946
[31] H. Kurz, F. Aumayr, H.P. Winter, et al. Electron emission and image-charge acceleration for the impact of very highly charged ions on clean gold. Phys. Rev. A, Vol. 49, No.6, 1994: 4693-4702
[32] C. Lemell, H. P. Winter, F. Aumayr. et al. Image acceleration of highly charged ions by metal surfaces. Phys. Rev. A, Vol.53, No.2, 1996: 880-885
[33] J.J.Ducre'e, F.Casali, U.Thumm, et al. Extended classical over-barrier model for collisions of highly charged ions with conducting and insulating surfaces. Phys. Rev. A, Vol.57, No.1, 1998: 338-350
[34] K. Mochiji, N. Itabashi, S. Yamamoto, Desorption induced by electronic potential energy of multiply charged. Surf. Sci, Vol.357, No. 1996: 673-677
[35] E. Fermi. The Ionization Loss of Energy in Gases and in Condensed Materials. Phys. Rev. Vol.57, No.6, 1940: 485-493
[36] P. M. EcheniqueR, M. NieminenR, H. Ritchie. Density functional calculation of stopping power of an electron gas for slow ions. Solid State Communications, Vol.37, No. 10, 779-820
[37] M. Grether, D. Niemann, A. Spieler, N. Stolterfoht. Formation and filling of hollow Ne atoms below an Al surface. Phys. Rev. A, Vol.56, No.5, 1997: 3794-3803
[38] F. J. Garcia, de Abajo, P. M. Echenique. Wake-potential formation in a thin foil. Phys. Rev. B, Vol.45, No.15, 1992: 8771-8774
[39] U. Fano and W. Lichten Interpretation of Ar~+-Ar collisions at 50 keV, Phys. Rev. Lett, 1965, 14: 627-629.
[40] W. Lichten, Molecular wave functions and inelastic atomic collisions, Phys. Rev. 1967, 164: 131-142.
[41] M. Barat and W. Lichten, Extension of the electron promotion model to asymmetric atomic collisions, Phys. Rev. 1972, A6:211-229.
[42] W. E. Meyerhof, K-Vacancy sharing in near-symmertric heavy-ion collisions, Phys. Rev. Lett, 1973, 31: 1341-1344.
[43] 张子民 博士论文(2003)
[44] Briand J.-P, S. Thuriez, G. Giardino, et al. Observation of Hollow Atoms or Ions above Insulator and Metal Surfaces. Phys. Rev. Lett. Vol.77, No.8, 1996:1452～1455
[45] B. d'Etat, J. P. Briand, G. Ban, et al. Interaction of Ar~(17+) ions on metallic surfaces at grazing incidence. Phys. Rev. A 48,No.2, 1993:1098-1106
[46] J. Lindhard, M. Scharff and H.E. Schiott, Mat. Fys. Medd. Dan. Vid. Selsk., Vol.33, No. 14 (1963).
[47] F. Aumayr, HP. Winter, J. Limburg, et al. Comment on "Observation of Hollow Atoms or Ions above Insulator and Metal Surfaces". Phys. Rev. Lett. Vol.79, No. 13, 1997:2590
[48] 原子核物理实验方法 复旦大学 清华大学 北京大学 合编 北京：原子能出版社 1994：284-286
[49] G. Basbas, W, Brandt, and R.H. Ritchie, Phys. Rev. A. 7,1971 (1973)
[50] A. Russek, Phys. Rev. A 4, 1918 (1971).
[51] J.S. Briggs and J. Macek, J. Phys. B: Atom. Molee. Phys., 8, 1909 (1975).
[52] J.D. Gacia and R.J. Fortner, Rev. Mod. Phys. 45, 111 (1973)
[53] R.W. Fink, Rev. Mod. Phys 38, 513 (1966)
[54] J.S. Briggs, Rep. Prog. Phys. 39, 217 (1976)
[55] R. Anholt, W.E. Meyerhof, and A. Salin, Phys.Rev.A 16,951 (1977)