激光振动传感器的研究与开发
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摘要
本论文是关于振动传感器的研究与开发的论述,激光振动传感器是利用激光入射到振动的质量块表面,经反射,入射光和反射光干涉后形成驻波。在入射点运用激光接收器探测激光驻波的光强,通过光强的强弱变化就可以探测出振动情况。研究激光振动传感器是为了获得抗电磁干扰、抗腐蚀、耐高温、体积小、重量轻、灵活方便性能更优的新型振动传感器。研究与比较其他类型的振动传感器,本传感器选用标准的CMOS工艺与MEMS工艺相结合,以激光作为探测工具,以硅工艺中的硅材料作为敏感惯性材料。研究开发的过程中采用ANSYS仿真确定悬臂梁的回滞能力和振动范围,利用MATLAB对激光形成的驻波进行仿真,方便结果的处理。前期的研究与开发工作,主要是确定出此传感器的测振方式和具体结构,并从中得到了测振方法,此传感器的最大创新点有两个。一是用激光作为探测工具,不需要光纤,这样既简化了传感器结构,又可以提高测量精度;二是将标准的CMOS工艺与先进的MEMS工艺相结合,可以用硅材料作为敏感元件的材料,性能更高。
This paper is the research and development on the vibration sensors. The laser vibration sensor is using laser to measure vibration, when the incident laser is reflected by the reflector surface of the quality block, the laser light of reflection and incident laser form standing wave after the intervention. In the incident point detect the intensity of standing wave laser light using laser receiver, by the changes of the strength of light intensity the vibration situation can be detected. Research on laser vibration sensor is to obtain a new type of vibration sensors that possess resistance to electromagnetic interference, and corrosion-resistant, heat-resistance, small size, light weight, better performance. Research and compared with other types of vibration sensor, the sensor select the integration of standard CMOS process with MEMS technology ,not only select laser as a tool but also select silicon material in the process as sensitive inertia material. Research and development in the processing, use simulation of ANSYS to determine the ability of delaying and the vibration scope of the cantilever vibration, using MATLAB simulating laser standing wave to get the outcome of the treatment. Early research and development work, mainly determine the approaches of measuring vibration and the concrete structure, and get a method of measurement vibration. The greatest innovation of this sensor has two points. First, using a laser as detection tools, do not need fiber, this not only simplifies sensor structure, but also improve the measurement accuracy. Second, the standard CMOS technology and the advanced MEMS technology are combined; silicon material can be used as a sensor material, and get higher performance.
This paper is the research and development on the vibration sensors. The laser vibration sensor is using laser to measure vibration, when the incident laser is reflected by the reflector surface of the quality block, the laser light of reflection and incident laser form standing wave after the intervention. In the incident point detect the intensity of standing wave laser light using laser receiver, by the changes of the strength of light intensity the vibration situation can be detected. Research on laser vibration sensor is to obtain a new type of vibration sensors that possess resistance to electromagnetic interference, and corrosion-resistant, heat-resistance, small size, light weight, better performance. Research and compared with other types of vibration sensor, the sensor select the integration of standard CMOS process with MEMS technology ,not only select laser as a tool but also select silicon material in the process as sensitive inertia material. Research and development in the processing, use simulation of ANSYS to determine the ability of delaying and the vibration scope of the cantilever vibration, using MATLAB simulating laser standing wave to get the outcome of the treatment. Early research and development work, mainly determine the approaches of measuring vibration and the concrete structure, and get a method of measurement vibration. The greatest innovation of this sensor has two points. First, using a laser as detection tools, do not need fiber, this not only simplifies sensor structure, but also improve the measurement accuracy. Second, the standard CMOS technology and the advanced MEMS technology are combined; silicon material can be used as a sensor material, and get higher performance.
引文
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[26]张启伟.大型结构健康检测概念与检测系统设计.同济大学学报.2001,1,29(1)。
[27]周世东,梅顺良,姚言. Turbo-Code:一种接近理论极限的信道编码.电信科学.1997,4,12(3)。
[28]陈如明.IMT-2000的融合、演进新发展及中国相应策略考虑.电信科学.1999,8,15(5).1-5。
[29]金文毅,谢智斌,曹立勇.Turbo码MAP译码算法及其对数域中的改进算法.第14届南京地区研究生通信年会论文集.1999,10. 383-389。
[30] Bernard Sola.Raleigh Fading Channel sin Mobile Digital Communications System Part1 :Characterization.IEEE Common. Mug.1997,7 ,35(7).90-101。
[31] Bernard Solar.Rayleigh Fading Channel sin Mobile Digital Communications System Part II: Mitigation.IEEE Commun. Mag.1997,7 ,35(7).102-109。
[32] H. W. Engel . M. Hanke and A. Neubauer . Regularization of inverse problems(M) .Blower Academic Publishers,1996。
[33] A .K .Louis.Inverse and schlecht gestellte problem [M]. Teubner Verlag Stuttgart.1989。
[34] A. A. Milkman,C. A. Michelin.Optimal estimation of linear operaomn Hilbert Spaces from inaccurate data [J] SIAM J.Nomer.Amal.1980,16:87-10。
[2]刘迎春,叶湘滨.传感器原理设计与应用.北京:国防科技大学出版社,1997.214-251。
[3]廖言彪.光纤光学.北京:清华大学出版社,2000.197-204。
[4] W.W. Morey,G. A. Ball,H. Singh.Applications of fiber grating sensors.Proc. of SPIE.1996.28 39:2-7。
[5] A.D Kersey,M.A. Davis,T. A. Berk. Progress to wards the development of practical bred Bragg grating instrumentation systems.Proc. of SPIE.1996.28 39:40-63。
[6] P. Ferdinand,S. Magnet,V. Dewynter-Many.Bugged Applications of Bragg Grating Sensors in Europe.Proceedings of the12'th International Conference on Optical Fiber Sensors.Williams burg.USA.1997.14 -19。
[7] Othonos,K. Kali,Fiber Bragg Grating.Fundamental sand Applications in Telecommunications and Sensing.A retch House.1999.Boston,London。
[8] Rant ,F. Haller.Study of the photosensitivity at 193rsm and photosensitivity at 240nm influence of fiber tension: type II Aging Light wave Tech.1997, 15(8).1464-1469。
[9] W. X. Xie, P. Nay, P. Baronage.Experimental evidence of two types of photo refractive effects occurring during photo inscriptions of Bragg gratings written within German silicate fiber.Optics Communications.1993,104:185-195。
[10]贾宏志.光纤光栅传感器的理论和技术研究.中国科学院西安光学精密机械研究所,2000,8。
[11] J I. Archambault.L. Rookie and P .St.Russell.100% reflectivity Bragg reflectors produced in optical fibers by single exciter laser pulses.Electron Let.1993, 29(5):453-455。
[12]梁磊,周雪芳.新型光纤Bragg光栅振动传感技术.武汉理工大学,2003,5,25。
[13]郭威.应力作用下光纤光栅Bragg波长调谐特性的研究.光电子.激光,2000,2。
[14]高飞.振动测量与信号分析.西安:西北工业大学出版社,1989.1-16。
[15]盛秋琴,施可彬等.光纤光栅振动传感匹配检测方法的研究.光学学报.2002,7。
[16]尹进,陈定方.光纤光栅传感系统中的解调技术.湖北工学院学报.2002,6月.17(2)。
[17] Morikis Mio.采用超短法布里振动传感器.现代计量测试.1995.6。
[18]关柏鸥,余有龙.一种高分辨率的光纤光栅传感解调技术.光学学报.2000,11,20(11)。
[19] Jackson D .A,Roberto A B L,Rookie Leda.Simple multiflexing scheme fore fiber optic grating sensor network. Opt. Lott.1993,18(14):1192-1194。
[20] K . A. Yen, C. S. Chou.The Investigation of A Tuna bale Mabry-Perot ChopperFor Light.Bulletin of College of Engineering, N. T. U, 20 01,No .83,: 15-20
[21] Nellen.Metal.Optical Fiber Bragg Grating for Structural Monitor in gin Civil Engineering.l6th Congress of IABSE on Structural Engineering for Meeting Urban Transportation Challenges.2000
[22]梁磊,周雪芳.新型光纤Bragg光栅地震检波器的研究.承德石油高等专科学校学报.2002,3,5(1)。
[23] Cheek. Gosh.Widely Tunable optical Filters Based on Fiber Bragg Gratings.IEEE PHOTO NICS TECHNOLOGY LETTERS. 2002,1 4(9).77-81。
[24] Measures R. Metal.Fiber optic Bragg Gratings for Bridge Monitoring.Cement Concrete Composites.1997,9: 21-23。
[25] Serge M. Mele,Keying Liu.A Passive Wavelength Demodulation System for Guide–wave Bragg Grating Sensors.IEEE Photo.Tech. Lott.1992,4(5):516-518。
[26]张启伟.大型结构健康检测概念与检测系统设计.同济大学学报.2001,1,29(1)。
[27]周世东,梅顺良,姚言. Turbo-Code:一种接近理论极限的信道编码.电信科学.1997,4,12(3)。
[28]陈如明.IMT-2000的融合、演进新发展及中国相应策略考虑.电信科学.1999,8,15(5).1-5。
[29]金文毅,谢智斌,曹立勇.Turbo码MAP译码算法及其对数域中的改进算法.第14届南京地区研究生通信年会论文集.1999,10. 383-389。
[30] Bernard Sola.Raleigh Fading Channel sin Mobile Digital Communications System Part1 :Characterization.IEEE Common. Mug.1997,7 ,35(7).90-101。
[31] Bernard Solar.Rayleigh Fading Channel sin Mobile Digital Communications System Part II: Mitigation.IEEE Commun. Mag.1997,7 ,35(7).102-109。
[32] H. W. Engel . M. Hanke and A. Neubauer . Regularization of inverse problems(M) .Blower Academic Publishers,1996。
[33] A .K .Louis.Inverse and schlecht gestellte problem [M]. Teubner Verlag Stuttgart.1989。
[34] A. A. Milkman,C. A. Michelin.Optimal estimation of linear operaomn Hilbert Spaces from inaccurate data [J] SIAM J.Nomer.Amal.1980,16:87-10。