宽波段分色膜研制
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摘要
根据某型号产品车长镜对宽波段分色膜的实际需要,利用膜系特征矩阵对分色膜膜系结构进行分析,指出了常用的全介质长(短)波通滤光膜为膜系初始结构的不可行性和采用介质一非介质复合结构的必要性。依据诱导增透原理并参考了太阳能薄膜的结构,进行了以金属为主体的复合结构膜系设计,并使用TFCalc光学薄膜设计软件进行优化。在薄膜的制备过程中,采取高蒸发速率和低沉积速率的措施,使得极薄银膜的光学常数和厚度得到了有效的控制;利用离子束辅助镀膜技术,提高改善了膜系的镀制工艺。通过多次试验,宽波段分色膜虽然没有完全达到设计指标,但基本上能够满足产品的功能要求。
在宽波段分色膜研制过程中,也暴露出了介质膜-金属膜-介质膜结构存在的一些问题,如透射区的拓宽是以牺牲透射率和红外反射率为代价,同时对环境的适应性也不十分理想,还需要进一步开展工作。
According to the effective demand of the breadth wave band dielectric film of the commander's sight, the film characteristic matrix is used to analyze the dielectric film structure. It declares the impossibility of the film initial structure to be acted by all dielectric long (short) wavelength filter coating, and the necessary of adopting dielectric- nondielectric complex structure. We applied the concept of induced and optimized the film whose complex structure with metal as the main body by TFCalc optical thin film design software on the basis of the coating structure of the solar energy. During making process of the thin film, we adopted the measuring of high evaporate rate and low accumulate rate to make the optical constant and thickness of the very thin silver film get a valid control. Meanwhile auxiliary coating technology using ion beam improves the coating craft. Through several times of experiment, the breadth wave band dielectric film has been made basically to satisfy the function request of the product.
With development of the breadth wave band dielectric film, some problems about the quality of the dielectric film - metal film - dielectric film structures are appearing, such as transmission areas to open widely deeply with the sacrifice the transmission rate and infrared reflectivity. At the same time its adaptability of the environment is not ideal and we need do further research.
在宽波段分色膜研制过程中,也暴露出了介质膜-金属膜-介质膜结构存在的一些问题,如透射区的拓宽是以牺牲透射率和红外反射率为代价,同时对环境的适应性也不十分理想,还需要进一步开展工作。
According to the effective demand of the breadth wave band dielectric film of the commander's sight, the film characteristic matrix is used to analyze the dielectric film structure. It declares the impossibility of the film initial structure to be acted by all dielectric long (short) wavelength filter coating, and the necessary of adopting dielectric- nondielectric complex structure. We applied the concept of induced and optimized the film whose complex structure with metal as the main body by TFCalc optical thin film design software on the basis of the coating structure of the solar energy. During making process of the thin film, we adopted the measuring of high evaporate rate and low accumulate rate to make the optical constant and thickness of the very thin silver film get a valid control. Meanwhile auxiliary coating technology using ion beam improves the coating craft. Through several times of experiment, the breadth wave band dielectric film has been made basically to satisfy the function request of the product.
With development of the breadth wave band dielectric film, some problems about the quality of the dielectric film - metal film - dielectric film structures are appearing, such as transmission areas to open widely deeply with the sacrifice the transmission rate and infrared reflectivity. At the same time its adaptability of the environment is not ideal and we need do further research.
引文
1 唐晋发,顾培夫,刘旭,李海峰.现代光学薄膜技术.第1版.杭州:浙江大学出版社,2006.
2 H.K.普尔克尔.玻璃镀膜.第1版.北京:科学出版社,1988.
3 田民波,刘德令.薄膜科学与技术手册.第1版.北京:机械工业出版社,1991.
4 光学零件工艺手册编写组.光学零件工艺手册:下册.第1版.北京:国防工业出版社,1977.
5 唐晋发,郑权.应用薄膜光学.第1版.上海:上海科学技术出版社,1984.
6 林永昌,卢维强.光学薄膜原理.第1版.北京:国防工业出版社,1990.
7 严一心,林鸿海.薄膜技术.第1版.北京:兵器工业出版社,1994.
8 周鹏飞,史大道,陈临.光学零件制造(特种加工部分).第1版.北京:机械工业出版社,1985.
9 唐晋发,顾培夫.光学干涉薄膜.杭州:浙江大学出版社,1986.
10 钟迪生.真空镀膜-光学材料的选择与应用.第1版.辽宁:辽宁大学出版社,2001.
11 郑伟涛.薄膜材料与薄膜技术.第1版.北京:化学工业出版社,2004.
12 H.A.Macloed.Thin-film optical filters.3~(rd)Edition.London.Institude of Physics Publishing,2001
13 李寿山,罗希文.透明热反射镜ZnS/Ag/ZnS膜层的研究.太阳能学报.1985(01):31-34.
14 杨树梅.诱透射宽带通滤光片研究.光学学报.1986(10):36-42.
15 林炳,于天燕,刘定权等.红外/可见光宽带分色片设计与制备.红外与毫米波学报.2004,23(50):393-396.
16 谭宇,赵兴梅.特宽光谱分光膜的镀制.应用光学.2005,26(4):53-55.
17 赵洪范,刘家环.应用/ABCBA/多层周期膜系结构制作二向分光镜.全国光学薄膜学术会议论文集.1993年11月:19-22.
18 Hans Joachim Glaser.大面积玻璃镀膜.第1版.上海:上海交通大学出版社,2006.
19 傅共民,林永昌,卢维强.可见区高透、中远红外高反的分光镜的最佳设计.北京理工大学学报.1994,1:35-39
20 余怀之.红外光学材料.第1版.北京:国防工业出版社,2007.
21 张贵锋.新型红外增透膜与保护膜.红外技术.1995,17(5):23-28.
22 朱震.激光与红外技术中应用的光学薄膜.激光与红外.1993(02):36-41.
23 张殷华,黄伟,张云洞.几种红外薄膜材料的光学特性.光学仪器.2006,28(4):104-108.
24 严晖,胡焕林,孙嵩泉,李万福.石英晶体监控法镀制高精度光学薄膜.真空.2003(5):16-18.
25 胡容.光学薄膜折射率和厚度测试技术及研究.硕士学位论文,南京理工大学.2004.
26 林永昌,尤大纬,李晓谦等.等离子辅助成膜技术.光学仪器.1999,21(4):39-43.
27 朱耀南,涂建军(译).一种光学薄膜生产的新工艺----等离子体辅助蒸镀.第五届江苏省薄膜技术交流会.32-42.
28 况园珠,郑保民,李安杰.光学镀膜用大束密均匀区离子源.光学仪器.2001,23(5):53-57.
29 尤大伟,黄小刚,武建军.用于辅助镀膜的霍尔等离子体源.光学仪器.2001,23(5):58-62.
30 王树林.ITO薄膜的制备及性能研究.硕士学位论文,武汉理工大学.2004.
31 王学华,薛亦渝,赵利,张幼陵.新型光学薄膜研究及发展现状.武汉理工大学学报.2002(2):20-23.
32 Gao Jinsong,Xu Ying,Wang Xiaoyi,Wang Tongtong.ITO thin films prepared by electron beam evaporation with End-Hall ion source assisted without heating to the substrate.2005 Sino-German High Level Expert Symposium on Optical Coatings,Papers and Abstracts Collection.56-62.
2 H.K.普尔克尔.玻璃镀膜.第1版.北京:科学出版社,1988.
3 田民波,刘德令.薄膜科学与技术手册.第1版.北京:机械工业出版社,1991.
4 光学零件工艺手册编写组.光学零件工艺手册:下册.第1版.北京:国防工业出版社,1977.
5 唐晋发,郑权.应用薄膜光学.第1版.上海:上海科学技术出版社,1984.
6 林永昌,卢维强.光学薄膜原理.第1版.北京:国防工业出版社,1990.
7 严一心,林鸿海.薄膜技术.第1版.北京:兵器工业出版社,1994.
8 周鹏飞,史大道,陈临.光学零件制造(特种加工部分).第1版.北京:机械工业出版社,1985.
9 唐晋发,顾培夫.光学干涉薄膜.杭州:浙江大学出版社,1986.
10 钟迪生.真空镀膜-光学材料的选择与应用.第1版.辽宁:辽宁大学出版社,2001.
11 郑伟涛.薄膜材料与薄膜技术.第1版.北京:化学工业出版社,2004.
12 H.A.Macloed.Thin-film optical filters.3~(rd)Edition.London.Institude of Physics Publishing,2001
13 李寿山,罗希文.透明热反射镜ZnS/Ag/ZnS膜层的研究.太阳能学报.1985(01):31-34.
14 杨树梅.诱透射宽带通滤光片研究.光学学报.1986(10):36-42.
15 林炳,于天燕,刘定权等.红外/可见光宽带分色片设计与制备.红外与毫米波学报.2004,23(50):393-396.
16 谭宇,赵兴梅.特宽光谱分光膜的镀制.应用光学.2005,26(4):53-55.
17 赵洪范,刘家环.应用/ABCBA/多层周期膜系结构制作二向分光镜.全国光学薄膜学术会议论文集.1993年11月:19-22.
18 Hans Joachim Glaser.大面积玻璃镀膜.第1版.上海:上海交通大学出版社,2006.
19 傅共民,林永昌,卢维强.可见区高透、中远红外高反的分光镜的最佳设计.北京理工大学学报.1994,1:35-39
20 余怀之.红外光学材料.第1版.北京:国防工业出版社,2007.
21 张贵锋.新型红外增透膜与保护膜.红外技术.1995,17(5):23-28.
22 朱震.激光与红外技术中应用的光学薄膜.激光与红外.1993(02):36-41.
23 张殷华,黄伟,张云洞.几种红外薄膜材料的光学特性.光学仪器.2006,28(4):104-108.
24 严晖,胡焕林,孙嵩泉,李万福.石英晶体监控法镀制高精度光学薄膜.真空.2003(5):16-18.
25 胡容.光学薄膜折射率和厚度测试技术及研究.硕士学位论文,南京理工大学.2004.
26 林永昌,尤大纬,李晓谦等.等离子辅助成膜技术.光学仪器.1999,21(4):39-43.
27 朱耀南,涂建军(译).一种光学薄膜生产的新工艺----等离子体辅助蒸镀.第五届江苏省薄膜技术交流会.32-42.
28 况园珠,郑保民,李安杰.光学镀膜用大束密均匀区离子源.光学仪器.2001,23(5):53-57.
29 尤大伟,黄小刚,武建军.用于辅助镀膜的霍尔等离子体源.光学仪器.2001,23(5):58-62.
30 王树林.ITO薄膜的制备及性能研究.硕士学位论文,武汉理工大学.2004.
31 王学华,薛亦渝,赵利,张幼陵.新型光学薄膜研究及发展现状.武汉理工大学学报.2002(2):20-23.
32 Gao Jinsong,Xu Ying,Wang Xiaoyi,Wang Tongtong.ITO thin films prepared by electron beam evaporation with End-Hall ion source assisted without heating to the substrate.2005 Sino-German High Level Expert Symposium on Optical Coatings,Papers and Abstracts Collection.56-62.