激光位移传感器输出特性分析及应用
摘要
光学精密测量相比传统的测量方式具有非接触性、高灵敏度、高精度及快速与实时性等优点,在科学研究、工业生产、空间技术、国防等领域得到了广泛应用,是一种非常先进的测量技术。基于三角测量法的激光位移传感器近年来得到了快速发展,在零件的尺寸测量,三维轮廓测量,产品质量检测等领域极大的提高了测量效率和精度。利用激光位移传感器对零件进行非接触式测量是光学精密测量领域的重要研究内容,其采用激光三角法测量原理：测量系统发出的激光束经过聚焦后照射到被测物体表面,经漫反射后光线由成像透镜成像到光敏元件接受面上,通过光电转换器转换为电信号,电信号的输出大小仅与被测点的位置有关,当测点高度发生变化,像点位置随之改变,引起传感器输出信号发生变化。
激光三角位移传感器测量零件时受零件表面特性：表面粗糙度、表面颜色、表面倾斜角等影响较大,测量之前对各种影响因素进行实验研究,分析其对测量精度的影响规律。测量盘形凸轮廓线时以测量角最小原则合理的布置激光位移传感器,通过计算确定传感器的安装位置及角度。
本文的主要工作如下：
1.根据被测物体表面的不同特性,对激光位移传感器进行了实验研究,重点分析了被测物体表面粗糙度、倾斜角、表面曲率等对测量结果的影响规律,并找出相应的措施减少测量误差。
2.建立盘形凸轮廓线测量模型,对激光位移传感器的安装位置和角度进行精确计算,通过模拟分析了测量盘形凸轮廓线的可行性,对传感器测量值和凸轮廓线参数之间的关系进行了推理,最后完成静态测量实验及数据处理。
Compared to traditional measurement, because it's non-contact, high sensitivity, fast and real-time and high accuracy, optical precision measurement has been widely used in scientific research, industrial production, space technology and defense, it is a very advanced measurement techniques. Laser displacement sensor based on triangulation has been rapidly developed in recent years and its application is extremely broad. In detecting the size of the part, three-dimensional profile measurement, product quality inspection and other areas, the method greatly improved the efficiency and accuracy of industrial production. It is an important research area using laser displacement sensor in non-contact measurement of parts. The technology uses laser triangulation measurement principle, the focused laser beam from the sensor emitted to the object surface, the light is diffused and reflected to the test surface through the imaging lens.The output signal of sensor only have relations with the position of measured points, when the surface height of point changes, the image point of sensor also changes accordingly, causing the sensor output signal changes.
In the measurement of part by laser triangulation displacement sensor, surface characteristics:roughness, surface color, surface tilt angle, they have greet impact on measurement accuracy. Before measuring the part, make experimental study for various factors, analyzes the law to affect the measurement precision. When measure the cam profile, make reasonable arrangement of the laser displacement sensor, minimize the measurement error by calculating the installation position and angle.
The main work of this paper is as follows:
1.According to different characteristics of the measuring surface, the laser displacement sensor was studied by experiment. Analyze the law of the measurement results caused by surface roughness, tilt angles, and surface curvature of object and find the appropriate measures to reduce measurement error.
2-Developed the model for measuring disk-shaped cam profile, made accurate calculation for mounting position and angle of laser displacement sensor, simulated feasibility of the measurement, and reasoned the relationship between the measurements and parameters of cam profile. Proceeded non-contact static measurement to cam profile based on the calibration results of the sensor and processed the data.
激光三角位移传感器测量零件时受零件表面特性：表面粗糙度、表面颜色、表面倾斜角等影响较大,测量之前对各种影响因素进行实验研究,分析其对测量精度的影响规律。测量盘形凸轮廓线时以测量角最小原则合理的布置激光位移传感器,通过计算确定传感器的安装位置及角度。
本文的主要工作如下：
1.根据被测物体表面的不同特性,对激光位移传感器进行了实验研究,重点分析了被测物体表面粗糙度、倾斜角、表面曲率等对测量结果的影响规律,并找出相应的措施减少测量误差。
2.建立盘形凸轮廓线测量模型,对激光位移传感器的安装位置和角度进行精确计算,通过模拟分析了测量盘形凸轮廓线的可行性,对传感器测量值和凸轮廓线参数之间的关系进行了推理,最后完成静态测量实验及数据处理。
Compared to traditional measurement, because it's non-contact, high sensitivity, fast and real-time and high accuracy, optical precision measurement has been widely used in scientific research, industrial production, space technology and defense, it is a very advanced measurement techniques. Laser displacement sensor based on triangulation has been rapidly developed in recent years and its application is extremely broad. In detecting the size of the part, three-dimensional profile measurement, product quality inspection and other areas, the method greatly improved the efficiency and accuracy of industrial production. It is an important research area using laser displacement sensor in non-contact measurement of parts. The technology uses laser triangulation measurement principle, the focused laser beam from the sensor emitted to the object surface, the light is diffused and reflected to the test surface through the imaging lens.The output signal of sensor only have relations with the position of measured points, when the surface height of point changes, the image point of sensor also changes accordingly, causing the sensor output signal changes.
In the measurement of part by laser triangulation displacement sensor, surface characteristics:roughness, surface color, surface tilt angle, they have greet impact on measurement accuracy. Before measuring the part, make experimental study for various factors, analyzes the law to affect the measurement precision. When measure the cam profile, make reasonable arrangement of the laser displacement sensor, minimize the measurement error by calculating the installation position and angle.
The main work of this paper is as follows:
1.According to different characteristics of the measuring surface, the laser displacement sensor was studied by experiment. Analyze the law of the measurement results caused by surface roughness, tilt angles, and surface curvature of object and find the appropriate measures to reduce measurement error.
2-Developed the model for measuring disk-shaped cam profile, made accurate calculation for mounting position and angle of laser displacement sensor, simulated feasibility of the measurement, and reasoned the relationship between the measurements and parameters of cam profile. Proceeded non-contact static measurement to cam profile based on the calibration results of the sensor and processed the data.
引文
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[2]付小宁,牛建军,陈靖编著.光电探测技术与系统[M].—北京：电子工业出版社,2010,1.
[3]杨芳.基于激光三角法的机车轮缘直径大位移量检测方法的研究[D].华中科技大学硕士学位论文,2006,2.
[4]庄葆华,张吉华,叶声华.激光三角测距法及其在汽车工业中的应用[J].汽车技术,1993,11.
[5]刘岩,左春怪,张玉梅.大型圆柱工件形位误差检测方法[J].辽宁工程技术大学学报,2007,6,26(3)
[6]冯俊艳,冯其波,匡翠方.高精度激光三角位移传感器的技术现状[J].应用光学,2004,25(3)
[7]黄睿.激光位移传感器及输出特性的研究[D].北京交通大学硕士学位论文,2010,6.
[8]Qibo Feng, Bing Zhang, Cuifang Kuang. A straightness measurement system using a single-model fiber-coupled lasure module[J]. Optics & Laser Technology,2003,9.
[9]匡翠方,冯其波,李学哲等.表面形貌与位置对激光位移传感器接受光强的影响[J].计量技术,2004,(01)
[10]You Feng-ling, Qibo Feng, Zhang Bin. A new method for measuring laser beam straightness error based on common-path compensation [J]. Optoel ectronics Lettlers,2009,9.
[11]Zhifeng Zhang, Qibo Feng, Zhan Gao, Cuifang Kuang, Cheng Fei, Zhang Li, Jiyun Ding. A new laser displacement sensor based on triangulation for gauge real-time measurement[J]. Optics & Laser Technology(40).
[12]黄战华,蔡怀宇,李贺桥等.三角法激光测量系统的误差分析及消除方法[J].光电工程,2006,29(3)
[13]周坤,季海焦,刘海滨.激光三角法测量中被测物面表面特性对测量精度影响的分析[J].光学与光电技术,2009,7(2)：P1-2.
[14]庄葆华,王少清等.高精度激光三角法位移测量被测面倾斜影响研究[J].计量技术,1996,2.
[15]张吉华,庄葆华,蒋诚志.激光三角法轮廓测量[J].天津大学学报,1995,2.
[16]德国mti instrumen公司技术资料.http://www.gk-z.com/zt146112/-Intro.html.
[17]李杰.基于激光三角法检测轮胎表面形貌[D].长春理工大学硕士学位论文,2009,3.
[18]朱万彬.激光位移传感器在物体表面形状测量中的应用[J].光机电信息,2010,27(10)
[19]刘立波.基于DSP的激光三角测距传感器研究[D].上海交通大学硕士学位论文.2008,1.
[20]王晓嘉,高隽,王磊.激光三角法综述[J].仪器仪表学报,2009,4.
[21]钱晓凡,吕晓旭,钟丽云.提高激光三角法测量精度的新方法[J].激光杂志,2000,21(3)
[22]李演楷,张云辉等.引伸计的测量原理及改进方法[J].工程与实验,2010,50(3)
[23]朱尚明,葛运建.激光三角法测距传感器的设计与实现[J].工业仪表与自动化装置,1998(2)
[24]刘伟,韩旭东,艾华.激光三角法在位移测量中的应用[J].光学精密工程2004,12(4)
[25]赵俊梅,林祥德.非接触方法测量薄膜厚度的研究[J].机械管理开发,2006,4.
[26]谭海燕,赵小军.基于激光三角法的零件表面粗糙度在线测量[J].机床与液压,2010,3,38(6)
[27]徐涛.数值计算方法[M].吉林科学技术出版社.1998.
[28]吴剑锋,王文,陈子辰.激光三角法测量误差分析与精度提高研究[J].机电 工程,2003,20(5)
[29]刘先卓,王树奎,陈锦生等,激光测量技术及其应用[J].机械设计与制造,2003,6.
[30]常城,张志峰.激光三角法测量的误差研究[J].中国科技信息,2006.
[31]贾冰.影响待测物面测量误差的因素及补偿方法[D].兰州理工大学硕士学位论文,2009,4.
[32]李有堂,贾冰.影响待测物面测量误差的因素及补偿[J].机械设计与制造,2010(2).
[33]刘业峰.车身零部件激光三角法检测关键技术研究[D].吉林大学硕士学位论文,2007,4.
[34]王红敏.基于三坐标测量机的盘形凸轮廓线测量[J].工具技术,2005,39.
[35]冯鉴.盘形凸轮廓线的检测装置研究与开发[D].西南交通大学硕士学位论文,2008.7.
[36]钱永明,曹清林.凸轮廓线测试台的设计[J].机械科学与技术,2001,20(12)
[37]赵俊梅,林祥德.非接触方法测量薄膜厚度的研究[J].机械管理与开发,2006,4.
[38]郭亚丽,韩焱.圆柱工件同轴度非接触测量方法[J].计算与测试,2009,28(1)
[39]华艳秋,庄惠忠,黄立新.光学测量传感器的设计与分析[J].工业控制计算机,2009,22(1)
[40]汤思佳.基于激光三角法厚度绝对测量技术研究[J].长春理工大学硕士学位论文.2010,3.
[41]张晓东.基于线阵CCD的物体表面形貌检测技术研究[D].哈尔滨工业大学硕士学位论文.2009,6.
[42]杨耀全,张冬生,杨勇.一种大范围激光三角测距传感器的标定方法[J].仪器仪表学报,2003,24(4).
[43]陈念年,张佳成等.一种高精度单点激光三角测距方法[J].自动化测试,2010,18(5)
[44]王勋.激光三角法面型测量研究[D],长春理工大学硕士学位论文,2008,12.
[45]卢晋人,黄元庆.激光三角法测量表面形貌[J].厦门大学学报,2004,1.
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