光纤端面加工质量对其性能影响
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摘要
随着光纤传输系统水平的不断提高和深入,对光纤端面的光学传输性能相应提出了新的要求,以适应新技术、新科技、新领域的发展。本论文以提高光纤的传输性能为目标,对裸光纤的端面质量以及研磨抛光技术进行了深入的研究。
本论文研究了由几种不同材料制备的光纤端面的研磨特点,这些研磨特点是通过用研抛机,还有冷却液,以及不同颗粒尺寸的金刚石研磨纸来进行研究的。实验过程如下；首先,将裸光纤粘结在石英玻璃磨具上面；然后,用粒度号不同的金刚石砂纸w40、w20、w10、w5对光纤端面进行研磨；最后,用氧化铈抛光粉对研抛后的光纤端面继续加工。
还研究了用光学干涉法和光纤显微成像法来测量光纤端面的性能参数。分析了端面质量参数,包括光纤表面粗糙度,端面形态,光纤高度,曲率半径,光纤端面完整性,透过率等等。通过分析测试数据,得到性能参数与研磨抛光加工质量的关系,并得出一些重要结论。本实验能够得到无划痕、无花点、无裂纹、光洁度较高、表面粗糙度较低、透过率较高的光纤端面,能够提高光纤的传输性能。
With the constantly improving of the optical fibre transport system level, the end faces of optical fiber of transmission properties to the rear new requirement are raised to new technologies and new technology, and new area of development. This paper to improve performance goal for the transfer of optical fibre, the quality of end-face of the bear optical fibre and lapping-polishing technology were intensively reserched.
The polishing characteristics of end faces of optical fiber consisting of the several different materials were investigated using a polisher.water and diamond grinding papers with different abrasive types and grit sizes. First and foremost, the optical fibre and the abrasive tool of the quartz glass bind together;Secondly, grinded the end-face of the optical fibre with different granularity type,such as W40、W20、W10、W5. Finally,polished the end-face of the optical fibre with CeO2.
The geometrical quality was measured using optical interferometry and fiber optical microscopy. The quality parameters included optical fiber surface roughness, end-face morphology, fiber height, radius of curvature, surface integrity and transmissivity. By analyzing the data, to test the capability parameter lapping and polishing of the processing and quality, and that some important conclusions.This experiment was no scratch and no flaw, rough surface for a low rate, the bett ersurface smoothness.the greater transmissivity. and to improve the performance transport.
本论文研究了由几种不同材料制备的光纤端面的研磨特点,这些研磨特点是通过用研抛机,还有冷却液,以及不同颗粒尺寸的金刚石研磨纸来进行研究的。实验过程如下；首先,将裸光纤粘结在石英玻璃磨具上面；然后,用粒度号不同的金刚石砂纸w40、w20、w10、w5对光纤端面进行研磨；最后,用氧化铈抛光粉对研抛后的光纤端面继续加工。
还研究了用光学干涉法和光纤显微成像法来测量光纤端面的性能参数。分析了端面质量参数,包括光纤表面粗糙度,端面形态,光纤高度,曲率半径,光纤端面完整性,透过率等等。通过分析测试数据,得到性能参数与研磨抛光加工质量的关系,并得出一些重要结论。本实验能够得到无划痕、无花点、无裂纹、光洁度较高、表面粗糙度较低、透过率较高的光纤端面,能够提高光纤的传输性能。
With the constantly improving of the optical fibre transport system level, the end faces of optical fiber of transmission properties to the rear new requirement are raised to new technologies and new technology, and new area of development. This paper to improve performance goal for the transfer of optical fibre, the quality of end-face of the bear optical fibre and lapping-polishing technology were intensively reserched.
The polishing characteristics of end faces of optical fiber consisting of the several different materials were investigated using a polisher.water and diamond grinding papers with different abrasive types and grit sizes. First and foremost, the optical fibre and the abrasive tool of the quartz glass bind together;Secondly, grinded the end-face of the optical fibre with different granularity type,such as W40、W20、W10、W5. Finally,polished the end-face of the optical fibre with CeO2.
The geometrical quality was measured using optical interferometry and fiber optical microscopy. The quality parameters included optical fiber surface roughness, end-face morphology, fiber height, radius of curvature, surface integrity and transmissivity. By analyzing the data, to test the capability parameter lapping and polishing of the processing and quality, and that some important conclusions.This experiment was no scratch and no flaw, rough surface for a low rate, the bett ersurface smoothness.the greater transmissivity. and to improve the performance transport.
引文
[1]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：336
[2]扎齐斯基J.玻璃与非晶态材料.北京：科学出版社,2001
[3]辛企明.光学玻璃金刚石加工机理初探.仪器仪表学报,1990,11(2)：216-219
[4]NAMBA Y,ABE M. Ultraprecision grinding of optical glasses to produce super-smooth surfaces[J]. Annals of CIRP,1993,42(1):417-420
[5]AVRAM E, MAHMOOD W, OZER M. Quantification of scattering from fiber surface irregularities[J]. Journal of Lightwave Technology,2002,20(4):634-637
[6]邓礼东.光纤连接器的现状与发展.现代有线传输,2000,(12)：8-14
[7]宋金声.光纤无源器件市场发展趋势.世界电子元器件,2001,(6)：50-52
[8]陈根祥等.光波技术基础.北京：中国铁道出版社,2004,11
[9]D. Marcuse. Theory of Dielectric Optical Waveguides. New York:Academic,1994,33-35
[10]刘德森等.纤维光学.北京：科学出版社,1987,19-25
[11]廖延彪.光纤光学.北京：清华大学出版社,2000,3：1-18
[12]邓礼东.光纤连接器的现状与发展.现代有线传输,2000,(4)：8-14
[13]黄尚廉,石文江,饶云江.单模光纤连接损耗研究.光子学报,1994,23(2)：127-132
[14]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：90-91
[15]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：234-237
[16]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：244
[17]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：4445
[18]延凤平.光纤通信系统.北京：科学出版社,2006：41-44
[19]陈根祥.光波技术基础.北京：中国铁道出版社,2004：13-17
[20]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：239-242
[21]延凤平.光纤通信系统.北京：科学出版社,2006：30-34
[22]廖延彪.光纤光学.北京：清华大学出版社,2000：1-2
[23]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：50-51
[24]何业明.研磨优质光纤端面之要素[J].光电产品世界,2000,10：24-26
[25]Neauport J, Lamaignere L, Bercegol H. Polishing-induced contamination of fused silica optics and laser induced damage density at 351 nm[J]. Optics Express,2005,13(25):10 163-10 171.
[26]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：64
[27]Camp D W, Kozlowski M R, Sheehan L M, et al. Subsurface damage and polishing compound affect the 355nm laser damage threshold offused silica surfaces [J]. Proc SPIE,1998,3224:356-364.
[28]Nanz Gerd and Camillet.fi L E. Modeling of chemical mechanical polishing:a review[J]. IEEE Transactions on Semiconductor Manufacturing,1995,8(4):382-389.
[29]Chen M J, Dong S, Li D, et al. Study on the influence factors of the surface quality in ultra-precision nding machining of brittle materials [J]. Chinese Journal of Mechanical Engineering,2001,37(3): 14.
[30]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：86-88
[31]D. F. HORNE. OPTICAL PRODUCTION TECHNOLOGY. London,1972
[32]Piao Chenggao, Cai Li. A study on the new principle of Machining Spherical Optical parts by the Lous Shaping Technique. SPIE, Vol.3557 1988
[33]Piao Chenggao, Cai Li. Accuracy analysis of the precision grinding machine using locus forming method. SPIE, Vol.14321 2000
[34]杨建东,田春林等编著.高速精磨技术.北京：国防工业出版社,2003
[35]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：124-126
[36]Geng Shujie, wang Bo, Zhou Cheng zhi. Disussion of Supersmooth Optics Element Testing Technique. S T M,2005, vol:914-917
[37]邬烈恭.光学玻璃加工后的表面结构的研究.现代光学制造技术文集,2002.8
[38]杨力.先进光学制造技术发展研究.光纤技术,1998.3
[39]Zhou Changxin et. Fabrication and Testing of X-ray Optical Elements [R]. Proceeding of SPIE,1992,1720:281-287
[40]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：96100
[41]Shinsuke Matsui, Fumikazu Ohira, Kazuo Matsunaga, et al. Characterization of process damaged layers for optical fiber ends. Proc.7th International precision engineering seminar,1993.700-703
[42]Shinsuke Matsui, Fumikazu Ohira, Kazuo Matsunaga, et al. Characterization of process damaged layers for optical fiber ends. Relation between damaged layer and return loss. Journal of the Japan Society for Precision Engineering,1998,64(10):1467-1471
[2]扎齐斯基J.玻璃与非晶态材料.北京：科学出版社,2001
[3]辛企明.光学玻璃金刚石加工机理初探.仪器仪表学报,1990,11(2)：216-219
[4]NAMBA Y,ABE M. Ultraprecision grinding of optical glasses to produce super-smooth surfaces[J]. Annals of CIRP,1993,42(1):417-420
[5]AVRAM E, MAHMOOD W, OZER M. Quantification of scattering from fiber surface irregularities[J]. Journal of Lightwave Technology,2002,20(4):634-637
[6]邓礼东.光纤连接器的现状与发展.现代有线传输,2000,(12)：8-14
[7]宋金声.光纤无源器件市场发展趋势.世界电子元器件,2001,(6)：50-52
[8]陈根祥等.光波技术基础.北京：中国铁道出版社,2004,11
[9]D. Marcuse. Theory of Dielectric Optical Waveguides. New York:Academic,1994,33-35
[10]刘德森等.纤维光学.北京：科学出版社,1987,19-25
[11]廖延彪.光纤光学.北京：清华大学出版社,2000,3：1-18
[12]邓礼东.光纤连接器的现状与发展.现代有线传输,2000,(4)：8-14
[13]黄尚廉,石文江,饶云江.单模光纤连接损耗研究.光子学报,1994,23(2)：127-132
[14]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：90-91
[15]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：234-237
[16]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：244
[17]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：4445
[18]延凤平.光纤通信系统.北京：科学出版社,2006：41-44
[19]陈根祥.光波技术基础.北京：中国铁道出版社,2004：13-17
[20]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：239-242
[21]延凤平.光纤通信系统.北京：科学出版社,2006：30-34
[22]廖延彪.光纤光学.北京：清华大学出版社,2000：1-2
[23]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：50-51
[24]何业明.研磨优质光纤端面之要素[J].光电产品世界,2000,10：24-26
[25]Neauport J, Lamaignere L, Bercegol H. Polishing-induced contamination of fused silica optics and laser induced damage density at 351 nm[J]. Optics Express,2005,13(25):10 163-10 171.
[26]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：64
[27]Camp D W, Kozlowski M R, Sheehan L M, et al. Subsurface damage and polishing compound affect the 355nm laser damage threshold offused silica surfaces [J]. Proc SPIE,1998,3224:356-364.
[28]Nanz Gerd and Camillet.fi L E. Modeling of chemical mechanical polishing:a review[J]. IEEE Transactions on Semiconductor Manufacturing,1995,8(4):382-389.
[29]Chen M J, Dong S, Li D, et al. Study on the influence factors of the surface quality in ultra-precision nding machining of brittle materials [J]. Chinese Journal of Mechanical Engineering,2001,37(3): 14.
[30]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：86-88
[31]D. F. HORNE. OPTICAL PRODUCTION TECHNOLOGY. London,1972
[32]Piao Chenggao, Cai Li. A study on the new principle of Machining Spherical Optical parts by the Lous Shaping Technique. SPIE, Vol.3557 1988
[33]Piao Chenggao, Cai Li. Accuracy analysis of the precision grinding machine using locus forming method. SPIE, Vol.14321 2000
[34]杨建东,田春林等编著.高速精磨技术.北京：国防工业出版社,2003
[35]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：124-126
[36]Geng Shujie, wang Bo, Zhou Cheng zhi. Disussion of Supersmooth Optics Element Testing Technique. S T M,2005, vol:914-917
[37]邬烈恭.光学玻璃加工后的表面结构的研究.现代光学制造技术文集,2002.8
[38]杨力.先进光学制造技术发展研究.光纤技术,1998.3
[39]Zhou Changxin et. Fabrication and Testing of X-ray Optical Elements [R]. Proceeding of SPIE,1992,1720:281-287
[40]蔡立.光学零件加工技术.北京：兵器工业出版社,2006：96100
[41]Shinsuke Matsui, Fumikazu Ohira, Kazuo Matsunaga, et al. Characterization of process damaged layers for optical fiber ends. Proc.7th International precision engineering seminar,1993.700-703
[42]Shinsuke Matsui, Fumikazu Ohira, Kazuo Matsunaga, et al. Characterization of process damaged layers for optical fiber ends. Relation between damaged layer and return loss. Journal of the Japan Society for Precision Engineering,1998,64(10):1467-1471