具有大进给力的纳米级热驱动部件研究
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摘要
为了实现具有进给力的纳米级进给，根据国内外纳米级驱动部件的研究现状及发展趋势，结合国家“863”高科技计划资助项目“具有大进给力的纳米级驱动部件关键技术的研究”，本文首次提出一种在准静态条件下使用的具有双边对称结构的纳米级热驱动部件设计方案，并且研制纳米级热驱动部件及试验系统。为了解决纳米级热驱动部件控制精度和响应速度之间的矛盾，针对非线性、时变的特点，提出一种补偿措施和一类多阶指数函数逐级递推的建模方法，然后，利用此补偿措施和建模方法，建立纳米级热驱动部的广义数学模型，并开展相应的控制策略研究。论文内容包括：
第一章，阐述了超精密加工的重要意义，结合国内外纳米级驱动部件的研究现状及发展趋势，提出了本文的研究内容，及各章节的安排。
第二章，首次提出双边对称驱动的具有大进给力的纳米级热驱动部件结构，研究驱动部件进给量与输入功率、转化效率、物理参数、几何参数，以及环境因素之间的关系，并且分析驱动部件的响应特性和非线性特性。
第三章，从导热微分方程出发，建立纳米级热驱动部件的数学模型，并且针对一类时间常数相差较大的多阶指数函数，首次提出一种多阶指数函数的逐级递推式拟合算法。最后，利用可控系统极点可以任意配置的原理，通过零极点相消建立纳米级热驱动部件的广义数学模型，从而为解决驱动速度和控制精度之间的矛盾提供基础。
第四章，为了兼顾纳米级热驱动部件的鲁棒性、响应速度和控制精度，研究基于广义数学模型的改进型滑模变结构控制策略、逐级递推式滑模变结构自适应控制策略和基于惩罚函数的多模态平稳过渡策略。
第五章，介绍纳米级热驱动部件的硬件电路及其软件设计要点，阐述以单片机为核心的控制系统，介绍纳米级热驱动部件试验系统的硬件和软件，首次提出基于半主动控制的绝热模块和基于半导体致冷器控制的热流控制模块，说明高精度电感测位仪的二次仪表与测控计算机的数据传输，以及测控计算机的软件开发。
第六章，在纳米级热驱动部件试验系统上进行驱动部件的试验及应用研究，重点开展基于广义数学模型的改进型滑模变结构控制、逐级递推式滑模变结构控制及基于惩罚函数的多模态平稳过渡策略的试验研究。
第七章，对全文进行总结，并且展望下一步的研究工作。
In order to realize nano feeding under large feeding force, according to the research state of nano feeding device and development tendency all over the world, combing with china "863" Program "the key technic research of nano precision drive parts having large feeding force", a scheme of nano precision drive parts with bilateral symmetrical structure using in quasi-static state conditions is proposed, the nano precision thermal drive parts are developed and the experimental system is established. To solve the contradiction between control precision and response speed, in allusion to the characteristics of nonlinear and time-variation, a compensatory method and stepped exponential fitting method are presented, and then, the mathematic modal is established based on these methods, and the research of corresponding control strategy is done. Including:
Chapter 1, the importance of super precision processing is represented, combing with the research state and the developmental tendency of nano feeding device all over the world, the research content and the arrangement of each chapter are presented in this chapter.
Chapter 2, the structure of bilateral symmetrical drive parts having large feeding force is presented, the researches on the relation of feeding quantity with input power, invert efficiency, physical parameters, geometrical parameters, and environmental factors is made, and the response and nonlinear characteristic of the drive parts is analyzed.
Chapter 3, the mathematic modal of drive parts is established based on thermal conduction differential equation, in illusion to the multistage exponential function with large discrepant time constant, the stepped exponential fitting method is proposed. Then, according to the principle that the pole of controllable system can be arbitrarily collocated, the generalized mathematic modal of drive parts is established by the offset between poles and zeroes.
Chapter 4, to give attention to robust, response speed and control precision, the improved slide mode and alterable structure control strategy based on the generalized mathematic modal, the stepped gradual slide mode and alterable structure self-adaptive control strategy, and multistage smooth transition strategy based on penalty function are researched.
Chapter 5, the hardware circuit and software design outline of nano precision thermal drive parts are introduced in this chapter, the control system is presented. The hardware and software of the experimental system of the nano precision thermal drive parts are dissertated, the data transfer and software design of metrical computer and the high precision inductance measure displacement quadratic instrument are explained.
Chapter 6, the applied research of the drive parts is made based on the experimental system of the nano precision thermal drive parts. The improved slide mode and alterable structure control strategy based on the generalized mathematic modal, the stepped gradual slide mode and alterable structure self-adaptive control strategy, and multistage smooth transition strategy based on penalty function are emphasized in this chapter.
Chapter 7, the full paper is generalized and the next research work is prospected.
第一章，阐述了超精密加工的重要意义，结合国内外纳米级驱动部件的研究现状及发展趋势，提出了本文的研究内容，及各章节的安排。
第二章，首次提出双边对称驱动的具有大进给力的纳米级热驱动部件结构，研究驱动部件进给量与输入功率、转化效率、物理参数、几何参数，以及环境因素之间的关系，并且分析驱动部件的响应特性和非线性特性。
第三章，从导热微分方程出发，建立纳米级热驱动部件的数学模型，并且针对一类时间常数相差较大的多阶指数函数，首次提出一种多阶指数函数的逐级递推式拟合算法。最后，利用可控系统极点可以任意配置的原理，通过零极点相消建立纳米级热驱动部件的广义数学模型，从而为解决驱动速度和控制精度之间的矛盾提供基础。
第四章，为了兼顾纳米级热驱动部件的鲁棒性、响应速度和控制精度，研究基于广义数学模型的改进型滑模变结构控制策略、逐级递推式滑模变结构自适应控制策略和基于惩罚函数的多模态平稳过渡策略。
第五章，介绍纳米级热驱动部件的硬件电路及其软件设计要点，阐述以单片机为核心的控制系统，介绍纳米级热驱动部件试验系统的硬件和软件，首次提出基于半主动控制的绝热模块和基于半导体致冷器控制的热流控制模块，说明高精度电感测位仪的二次仪表与测控计算机的数据传输，以及测控计算机的软件开发。
第六章，在纳米级热驱动部件试验系统上进行驱动部件的试验及应用研究，重点开展基于广义数学模型的改进型滑模变结构控制、逐级递推式滑模变结构控制及基于惩罚函数的多模态平稳过渡策略的试验研究。
第七章，对全文进行总结，并且展望下一步的研究工作。
In order to realize nano feeding under large feeding force, according to the research state of nano feeding device and development tendency all over the world, combing with china "863" Program "the key technic research of nano precision drive parts having large feeding force", a scheme of nano precision drive parts with bilateral symmetrical structure using in quasi-static state conditions is proposed, the nano precision thermal drive parts are developed and the experimental system is established. To solve the contradiction between control precision and response speed, in allusion to the characteristics of nonlinear and time-variation, a compensatory method and stepped exponential fitting method are presented, and then, the mathematic modal is established based on these methods, and the research of corresponding control strategy is done. Including:
Chapter 1, the importance of super precision processing is represented, combing with the research state and the developmental tendency of nano feeding device all over the world, the research content and the arrangement of each chapter are presented in this chapter.
Chapter 2, the structure of bilateral symmetrical drive parts having large feeding force is presented, the researches on the relation of feeding quantity with input power, invert efficiency, physical parameters, geometrical parameters, and environmental factors is made, and the response and nonlinear characteristic of the drive parts is analyzed.
Chapter 3, the mathematic modal of drive parts is established based on thermal conduction differential equation, in illusion to the multistage exponential function with large discrepant time constant, the stepped exponential fitting method is proposed. Then, according to the principle that the pole of controllable system can be arbitrarily collocated, the generalized mathematic modal of drive parts is established by the offset between poles and zeroes.
Chapter 4, to give attention to robust, response speed and control precision, the improved slide mode and alterable structure control strategy based on the generalized mathematic modal, the stepped gradual slide mode and alterable structure self-adaptive control strategy, and multistage smooth transition strategy based on penalty function are researched.
Chapter 5, the hardware circuit and software design outline of nano precision thermal drive parts are introduced in this chapter, the control system is presented. The hardware and software of the experimental system of the nano precision thermal drive parts are dissertated, the data transfer and software design of metrical computer and the high precision inductance measure displacement quadratic instrument are explained.
Chapter 6, the applied research of the drive parts is made based on the experimental system of the nano precision thermal drive parts. The improved slide mode and alterable structure control strategy based on the generalized mathematic modal, the stepped gradual slide mode and alterable structure self-adaptive control strategy, and multistage smooth transition strategy based on penalty function are emphasized in this chapter.
Chapter 7, the full paper is generalized and the next research work is prospected.
引文
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