LD泵浦绿光小功率全固态连续激光器及其驱动源的研究
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摘要
随着半导体激光技术和固体激光材料的飞速发展,采用半导体激光器作为泵浦源的全固态激光器为固体激光技术带来了一次革命性的突破,自上个世纪末以来半导体泵浦固体激光器(Diode Pumped Solid-State Laser,DPSSL)正在成为激光研究领域中的一个重要课题。半导体泵浦固体激光器以其结构紧凑、整体性强、转换效率高、光束质量好、输出稳定、使用寿命长等一系列优点,在科研、国防、航空航天、生物医药、光谱分析、工业生产、信息科学和娱乐文化等领域日益得到广泛深入的应用。
论文依据对DPSSL模型的理论分析,结合激光晶体与倍频晶体特性设计了可根据DPSSL工作条件调整的单管半导体端泵浦系统和平凹直腔与腔内倍频的稳定高效连续单管端泵浦DPSSL结构。论文还研究设计了最大驱动电流可达7A,电流输出峰峰纹波仅为±0.16%的DPSSL高稳定恒流驱动源,可以满足功率单管半导体激光器和新型单管串联集成半导体激光模块驱动要求,驱动源具有开机关机电流缓变保护、限流保护等自保护功能,而且在驱动源中还研究设计了外控模拟调制和TTL方波调制接口,可以接受0～5V模拟信号对激光器输出功率的模拟调制,和外控TTL方波调制频率达20kHz。并采用这种高稳定恒流驱动源驱动功率单管半导体激光器作为泵浦源,研制出了单管LD端泵浦腔内倍频532nm绿光激光器,在16.7%的高光—光转换效率下得到了输出功率稳定性达±2.57%的350mW连续激光输出。
With the development of laser material and diode laser technology, the diode pumped solid-state laser (DPSSL) is becoming one of significant item in the laser researching field. DPSSL has a lot of advanced characteristic such as compacting structure、stabilization、high efficiency、high beam factor、long lifetime etc.. so the DPSSL is applied to more fields such as science researching、war industry、navigate and spaceflight、national defense、biology and medicine、spectrum analysis、information and communication、circumstance protecting and amusement etc..
Based of theory model of DPSSL and characteristic of laser crystal, octave crystals to designs the high efficiency and adjustable coupling focus system of pump light and the high efficiency stability flat-concave and frequency-doubling resonance structure for the single laser diode end-pumped solid state laser. And the max current of driver is up to7A and the peak-peak ripple of current is blow±0.16%. The protect circuit is designed for long lifetime of laser diode such as on and off delay of driver、max current limited、reverse current limited and max operating temperature limit of laser diode. In addition, the input circuit of analog and TTL modulating signal is designed in this driver for receiving the exterior modulating signal, the exterior modulating analog signal could be the 0~5V voltage signal and the frequency of exterior TTL modulating signal can be up to 20kHz. To use the driver the output power of the 16.7% high optics-optics transition efficiency 532nm green light laser is 350mW, the power stability of this laser is up to±2.57%.
论文依据对DPSSL模型的理论分析,结合激光晶体与倍频晶体特性设计了可根据DPSSL工作条件调整的单管半导体端泵浦系统和平凹直腔与腔内倍频的稳定高效连续单管端泵浦DPSSL结构。论文还研究设计了最大驱动电流可达7A,电流输出峰峰纹波仅为±0.16%的DPSSL高稳定恒流驱动源,可以满足功率单管半导体激光器和新型单管串联集成半导体激光模块驱动要求,驱动源具有开机关机电流缓变保护、限流保护等自保护功能,而且在驱动源中还研究设计了外控模拟调制和TTL方波调制接口,可以接受0～5V模拟信号对激光器输出功率的模拟调制,和外控TTL方波调制频率达20kHz。并采用这种高稳定恒流驱动源驱动功率单管半导体激光器作为泵浦源,研制出了单管LD端泵浦腔内倍频532nm绿光激光器,在16.7%的高光—光转换效率下得到了输出功率稳定性达±2.57%的350mW连续激光输出。
With the development of laser material and diode laser technology, the diode pumped solid-state laser (DPSSL) is becoming one of significant item in the laser researching field. DPSSL has a lot of advanced characteristic such as compacting structure、stabilization、high efficiency、high beam factor、long lifetime etc.. so the DPSSL is applied to more fields such as science researching、war industry、navigate and spaceflight、national defense、biology and medicine、spectrum analysis、information and communication、circumstance protecting and amusement etc..
Based of theory model of DPSSL and characteristic of laser crystal, octave crystals to designs the high efficiency and adjustable coupling focus system of pump light and the high efficiency stability flat-concave and frequency-doubling resonance structure for the single laser diode end-pumped solid state laser. And the max current of driver is up to7A and the peak-peak ripple of current is blow±0.16%. The protect circuit is designed for long lifetime of laser diode such as on and off delay of driver、max current limited、reverse current limited and max operating temperature limit of laser diode. In addition, the input circuit of analog and TTL modulating signal is designed in this driver for receiving the exterior modulating signal, the exterior modulating analog signal could be the 0~5V voltage signal and the frequency of exterior TTL modulating signal can be up to 20kHz. To use the driver the output power of the 16.7% high optics-optics transition efficiency 532nm green light laser is 350mW, the power stability of this laser is up to±2.57%.
引文
1 R.Newman. Excitation of the Nd~(?) fluorescence in CaWO, by receir bination radiation in GaAs. In: J. Appl.Phys., 1963(4):437
2 R. J. Keys and T.M.Quist. Inrection luminescent pumping ofCaF_2:U~(?) with GaAs diode laser. In: J. Appl. Phys., 1964(4) :50～57
3 M.Ross. YAG laser operation by semiconductor laser pumping. In: Proc. IEEE, 1968(56): 196
4 L.C.Conant and C.W.Reno. GaAs laser diode pumped Nd:YAG laer. In:Appl. Opt., 1974(13) :24—57
5 J.E.Jackson and R. R. Rice. Output fluctuations of high-frquency pulse-pumped Nd:YAG laser. In: J.App. Phys., 1974(45):23-53
6 G.I.Farmer and Y.C.Kiang. Low-current-density LED-pumped Nd:YAG laser using a solid cylindrical reflector. In: J. Appl. Phys., 1974(45): 1356-1371
7 D. A. Draegert. Single-diode end-pumped Nd: YAG Laser. IEEE J. Quantum Electro., 1973(QE-9) : 1146-1149
8 L. J. Rosenkrantz. GaAs diode-pumped Nd:YAG laser. In: J. Appl. Phys., 1973(43):4603—4605
9 R. B. Chesler and Singh. Performance model for end-pumped miniature Nd:YAG laser. In:J.Appl. Phys., 1973(44) :5441-5443
10 H. P. Weben, T.C. Damen, H. G. Damielmeyler and B. C. Tofield. Nd-ultraphosphate laser. In:Appl. Phys. Lett., 1973(22): 534-536
11 M. Sarowatarj. T. Kimura, T. Yamada and J. Nakano. LiNdP_40_(12) laser pumped with and Al_2Ga_(12)As electrolurninescent diode. In:Appl. Phys. Lett., 1975(27):682—684
12 K. Kubode and K. Otsuka. Effelent LiNdP_4O_(12) laser pumped with alaser diode. In: Appl. Opt., 1979(18): 3882-3883
13 J. Stone and C. A. Burrus. Neodymium-doped fiber laser: Room temperature cw operation with an injection laser pump. In:Appl. Opt., 1974(13): 1256-1258
14 K. Kubodera and J. Noda. Pure single-mode LiNdP_1O_(12) solid-state transmitter for 1.3um fiber-opticc communication. In: Appl. Opt., 1982 (21) :3466～3469
15 L. B. Allen Jr., R. R. Rice, H. G. Koenig and D. D. Mayer. Linear array configuration and applications of the double-sided heat sink diode. Advanances in Laser Engineering and Application. In: Proc.SPIE, Vol.247, 1980:100-105
16 B. Zhou, T. J. Kane, G. J. Dixon and R. L. Byer. Efficient frequency-stable laser-diode-pumped Nd:YAG laser. In: Opt. Lett., 1985(10):62—64
17 D.L.Sipes.Highly effcient neodymium:yttrium aluminum garnet laser end pumped by semiconductor laser array.In:Appl.Phys.Lett.,1985(47):74-76
18 F.Hanson.Laser diode transverse pumping of neodymium laser rods.In:Conf.Laser Electro-Opt.,Opt.Soc.Amer.Washington DC.,1987:ThU3
19 R.R.Rice and C.A.Krebs.progress in diode pumped lasers.Conf.In:Lasers Electro-Opt.Baltimore MD.,1987:TuD5
20 M.K.Reed,W.J.Kozlovsky and R.L.Byer.Diode-laser array pumped neodymium slab oscillators.In:Opt.Lett.,1988(13):204-206
21 T.Y.Fan,G.J.Dixion and R.L.Buer.Efficient GaAlAs diode-laser-pumped operation of Nd:YLF at 1.047um with intracavity doubling to 532.6nm.In:Opt.Lett.,1986(11):204-206
22 W.J.Konzlovsky,T.Y.Fan and R.L.Byer.Diode-pumped continuous-wave Nd:glass.In:Opt.Lett.,1986(11):788-790
23 T.Y.Fan,A.Cordova-Plaza,M.J.F.Digonner,R.L.Byer and H.J.Shaw.Nd:MgO:LiNbO_3 spectroscopy and laser devices.In:J.Opt.Soc.Amer.B,1987(3):140-148
24 R.Allen,L.EsteroWitz,L.Doldberg,J.F.Weller and M.Storm.Diode-pumped 2 um holmium laser.In:Election Lett.,1986(22):947
25 T.Y.Fan and R.L.Byer.Modeling and CW operation of a quasi-three-level 946nm Nd:YAG laser.In:IEEE J.Quantum Electron,1987(QE-23):605-612
26 W.P.Risk and W.Lenth.Room temperature CW 946nm Nd:YAG laser pumped by laser-diode-array and intracavity frequency doubling to 473nm.In:Opt.Lett.,1987(12):993-995
27 赵鸿.二极管侧面泵浦倍频固体激光技术研究:[硕士学位论文].西安:中科院西安光学精密机械研究所,2001
28 戴特力.半导体二极管泵浦固体激光器.成都:四川大学出版社,1993
29 贾玉磊.355nm、266nm全固态之外激光器:[硕士学位论文].济南:山东师范大学,2002
30 宋婷婷.晶体控温系统及其在全固化激光倍频中的应用:[硕士学位论文].武汉:华中科技大学,2004
31 白杨.半导体激光单端泵浦的大功率全固态Nd:YVO_4/LBO连续绿光激光器研究:[硕士学位论文].西安:西北大学,2004
32 O..Hall et al.,In:Appl,opt.,1980(19):3041
33 A.J.Alfrey,In:IEEE J.QE25,1989:760
34 赵致名.大功率全固态Nd:YVO_1/LBO连续绿光激光器研究:[硕士学位论文].西安:西北大学,2003
35 姚建铨,徐德刚.全固态激光及非线性光学频率变换技术.北京:科学出版社,2007:142-144
36 姚建铨,徐德刚.全固态激光及非线性光学频率变换技术.北京:科学出版社,2007:144-146
37 J.R.Oconnor,Appl.Phyys.Lett.,9,(1966)407.
38 陈进.高功率LD泵浦的内腔倍频Nd:YAG激光器研究:[硕士学位论文].天津:天津大学,2002
39 薛庆华,郑权.用被动调Q激光器腔外倍频检验KTP的切割质量.光子学报.2003(9)
40 Chen Chuangtian,Wu Yichang,Jiang Aidong et al.New nonlinear optical crystal:LiB_3O_5.J.In:Opt.Soc.Am.(B).1989,6(4):616-621
41 He S.Z.,Tan S,Wang P.Z.Fuzzy self-tuning of PID controller.In:Fuzzy Sets and Syst.1993(56):37-46
42 W.Koechner.Solid-State Laser Enginnering.In:5th Edition.Springer,1999
43 钱列加.高光学质量、高平均功率非稳腔Nd:YAG激光器.光学学报.Vol.15,No.3,1995(3):257-262
44 夏瑞东,孙茂权.Nd:YAG激光器非稳腔设计与性能研究.应用激光.Vol.15,No.6,1995(12):271-273
45 周睿,姚建铨,徐德刚等.绿光输出达85W的全固态绿光激光器谐振腔研究.中国激光.Vol.31,No.6,2004(6):641-645
46 魏义勇,宋标.LD端面泵浦高效Nd:YVO_4激光器的研究.滁州学院学报,2006(6):67-69
2 R. J. Keys and T.M.Quist. Inrection luminescent pumping ofCaF_2:U~(?) with GaAs diode laser. In: J. Appl. Phys., 1964(4) :50～57
3 M.Ross. YAG laser operation by semiconductor laser pumping. In: Proc. IEEE, 1968(56): 196
4 L.C.Conant and C.W.Reno. GaAs laser diode pumped Nd:YAG laer. In:Appl. Opt., 1974(13) :24—57
5 J.E.Jackson and R. R. Rice. Output fluctuations of high-frquency pulse-pumped Nd:YAG laser. In: J.App. Phys., 1974(45):23-53
6 G.I.Farmer and Y.C.Kiang. Low-current-density LED-pumped Nd:YAG laser using a solid cylindrical reflector. In: J. Appl. Phys., 1974(45): 1356-1371
7 D. A. Draegert. Single-diode end-pumped Nd: YAG Laser. IEEE J. Quantum Electro., 1973(QE-9) : 1146-1149
8 L. J. Rosenkrantz. GaAs diode-pumped Nd:YAG laser. In: J. Appl. Phys., 1973(43):4603—4605
9 R. B. Chesler and Singh. Performance model for end-pumped miniature Nd:YAG laser. In:J.Appl. Phys., 1973(44) :5441-5443
10 H. P. Weben, T.C. Damen, H. G. Damielmeyler and B. C. Tofield. Nd-ultraphosphate laser. In:Appl. Phys. Lett., 1973(22): 534-536
11 M. Sarowatarj. T. Kimura, T. Yamada and J. Nakano. LiNdP_40_(12) laser pumped with and Al_2Ga_(12)As electrolurninescent diode. In:Appl. Phys. Lett., 1975(27):682—684
12 K. Kubode and K. Otsuka. Effelent LiNdP_4O_(12) laser pumped with alaser diode. In: Appl. Opt., 1979(18): 3882-3883
13 J. Stone and C. A. Burrus. Neodymium-doped fiber laser: Room temperature cw operation with an injection laser pump. In:Appl. Opt., 1974(13): 1256-1258
14 K. Kubodera and J. Noda. Pure single-mode LiNdP_1O_(12) solid-state transmitter for 1.3um fiber-opticc communication. In: Appl. Opt., 1982 (21) :3466～3469
15 L. B. Allen Jr., R. R. Rice, H. G. Koenig and D. D. Mayer. Linear array configuration and applications of the double-sided heat sink diode. Advanances in Laser Engineering and Application. In: Proc.SPIE, Vol.247, 1980:100-105
16 B. Zhou, T. J. Kane, G. J. Dixon and R. L. Byer. Efficient frequency-stable laser-diode-pumped Nd:YAG laser. In: Opt. Lett., 1985(10):62—64
17 D.L.Sipes.Highly effcient neodymium:yttrium aluminum garnet laser end pumped by semiconductor laser array.In:Appl.Phys.Lett.,1985(47):74-76
18 F.Hanson.Laser diode transverse pumping of neodymium laser rods.In:Conf.Laser Electro-Opt.,Opt.Soc.Amer.Washington DC.,1987:ThU3
19 R.R.Rice and C.A.Krebs.progress in diode pumped lasers.Conf.In:Lasers Electro-Opt.Baltimore MD.,1987:TuD5
20 M.K.Reed,W.J.Kozlovsky and R.L.Byer.Diode-laser array pumped neodymium slab oscillators.In:Opt.Lett.,1988(13):204-206
21 T.Y.Fan,G.J.Dixion and R.L.Buer.Efficient GaAlAs diode-laser-pumped operation of Nd:YLF at 1.047um with intracavity doubling to 532.6nm.In:Opt.Lett.,1986(11):204-206
22 W.J.Konzlovsky,T.Y.Fan and R.L.Byer.Diode-pumped continuous-wave Nd:glass.In:Opt.Lett.,1986(11):788-790
23 T.Y.Fan,A.Cordova-Plaza,M.J.F.Digonner,R.L.Byer and H.J.Shaw.Nd:MgO:LiNbO_3 spectroscopy and laser devices.In:J.Opt.Soc.Amer.B,1987(3):140-148
24 R.Allen,L.EsteroWitz,L.Doldberg,J.F.Weller and M.Storm.Diode-pumped 2 um holmium laser.In:Election Lett.,1986(22):947
25 T.Y.Fan and R.L.Byer.Modeling and CW operation of a quasi-three-level 946nm Nd:YAG laser.In:IEEE J.Quantum Electron,1987(QE-23):605-612
26 W.P.Risk and W.Lenth.Room temperature CW 946nm Nd:YAG laser pumped by laser-diode-array and intracavity frequency doubling to 473nm.In:Opt.Lett.,1987(12):993-995
27 赵鸿.二极管侧面泵浦倍频固体激光技术研究:[硕士学位论文].西安:中科院西安光学精密机械研究所,2001
28 戴特力.半导体二极管泵浦固体激光器.成都:四川大学出版社,1993
29 贾玉磊.355nm、266nm全固态之外激光器:[硕士学位论文].济南:山东师范大学,2002
30 宋婷婷.晶体控温系统及其在全固化激光倍频中的应用:[硕士学位论文].武汉:华中科技大学,2004
31 白杨.半导体激光单端泵浦的大功率全固态Nd:YVO_4/LBO连续绿光激光器研究:[硕士学位论文].西安:西北大学,2004
32 O..Hall et al.,In:Appl,opt.,1980(19):3041
33 A.J.Alfrey,In:IEEE J.QE25,1989:760
34 赵致名.大功率全固态Nd:YVO_1/LBO连续绿光激光器研究:[硕士学位论文].西安:西北大学,2003
35 姚建铨,徐德刚.全固态激光及非线性光学频率变换技术.北京:科学出版社,2007:142-144
36 姚建铨,徐德刚.全固态激光及非线性光学频率变换技术.北京:科学出版社,2007:144-146
37 J.R.Oconnor,Appl.Phyys.Lett.,9,(1966)407.
38 陈进.高功率LD泵浦的内腔倍频Nd:YAG激光器研究:[硕士学位论文].天津:天津大学,2002
39 薛庆华,郑权.用被动调Q激光器腔外倍频检验KTP的切割质量.光子学报.2003(9)
40 Chen Chuangtian,Wu Yichang,Jiang Aidong et al.New nonlinear optical crystal:LiB_3O_5.J.In:Opt.Soc.Am.(B).1989,6(4):616-621
41 He S.Z.,Tan S,Wang P.Z.Fuzzy self-tuning of PID controller.In:Fuzzy Sets and Syst.1993(56):37-46
42 W.Koechner.Solid-State Laser Enginnering.In:5th Edition.Springer,1999
43 钱列加.高光学质量、高平均功率非稳腔Nd:YAG激光器.光学学报.Vol.15,No.3,1995(3):257-262
44 夏瑞东,孙茂权.Nd:YAG激光器非稳腔设计与性能研究.应用激光.Vol.15,No.6,1995(12):271-273
45 周睿,姚建铨,徐德刚等.绿光输出达85W的全固态绿光激光器谐振腔研究.中国激光.Vol.31,No.6,2004(6):641-645
46 魏义勇,宋标.LD端面泵浦高效Nd:YVO_4激光器的研究.滁州学院学报,2006(6):67-69