LTCC专用烧结炉的结构设计及温度场实验研究
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摘要
随着LTCC(Low Temperature Co-fired Ceramic,低温共烧陶瓷)产业规模的不断扩大,国内外企业和研究机构加大了对LTCC专用烧结炉的研制。长期研究表明,烧结炉的温度均匀性和烧结曲线的满足性一直是影响高性能LTCC产品质量的重要因素,因此深入研究烧结炉内传热过程的物理机理,建立一套完善的理论模型,优化烧结炉的结构设计和开展温度场实验研究是十分必要的。
本文根据目前LTCC烧结设备发展的趋势,结合“微组装关键设备研制及集成技术研究”项目的具体要求,对采用辐射与强制对流综合传热方式、用于LTCC低温共烧工艺的LTCC专用烧结炉系统的结构设计及其温度场技术,开展基础性的研究,在充分研究论证的基础上,提出了具体的整体设计方案。论文系统阐述了LTCC专用烧结炉炉内的热工过程特点,分析了炉内气体的流动状态,进行了温度场的实验研究。重点阐述系统关键技术的设计和实现。应用已有技术,并通过温度场实验研究和关键技术攻关,深入探讨LTCC专用烧结炉炉内传热过程的物理机理,理论上分析炉内温度场和气氛流场,建立了传热数学模型,从而为合理地设计和布置炉内结构及组织炉内气体流动来改善炉内温度均匀性提供了有力的理论依据,并进一步通过实验予以验证,得出的结论可准确地指导生产实践,有利于节能降耗,提高产品产量和质量,并为炉子的结构优化奠定基础。
With the manufacturing expansion of LTCC (Low Temperature Co-fired Ceramic) industry, national and international enterprises and research institutes quickly develop LTCC sintering furnace. According to the Long-term research, the results showed that the temperature uniformity in a sintering furnace was an important factor that affects the quality of LTCC products, and therefore, it is necessary to study the physical mechanism of heat transfer in a furnace, establish a complete theoretical model, optimize structure design of the sintering furnace and study on temperature field experiment.
According to the current development trends of the LTCC sintering equipment, based on and combined with the "Micropackage equipment manufacture and integrated technique research" project concrete requirements, this paper carry out foundational research on the structure design and the temperature field technology of LTCC dedicated sintering furnace system, which adopt the manner of radiation and forced convection heat transfer integrated approach, is used for LTCC low temperature co-fired technics. Based on the sufficient full feasibility study and argumentation, a concrete overall design project is put forward in this paper. In the present work, the characteristics of thermal process were first described, then gas flow pattern was analyzed, and finally experiments were performed. Thesis focuses on describe the pivotal technologies design and realization of the system. Through application of the mature technique, experiments of temperature field, and solving difficult situation of pivotal technique, the physical mechanism of heat transfer in the LTCC special sintering furnace has been discussed intensively, both temperature and flow fields were analyzed in theory, the mathanatics modeling of temperature field has been constructed, and, further give an identification through experiment and then temperature uniformity in the furnace can be obtained by the optimizing physical structure and gas flow, these measures can guide process correctly, be propitious to economize energy and decline consume, increase output and quality, and establish the basis for structure optimization.
本文根据目前LTCC烧结设备发展的趋势,结合“微组装关键设备研制及集成技术研究”项目的具体要求,对采用辐射与强制对流综合传热方式、用于LTCC低温共烧工艺的LTCC专用烧结炉系统的结构设计及其温度场技术,开展基础性的研究,在充分研究论证的基础上,提出了具体的整体设计方案。论文系统阐述了LTCC专用烧结炉炉内的热工过程特点,分析了炉内气体的流动状态,进行了温度场的实验研究。重点阐述系统关键技术的设计和实现。应用已有技术,并通过温度场实验研究和关键技术攻关,深入探讨LTCC专用烧结炉炉内传热过程的物理机理,理论上分析炉内温度场和气氛流场,建立了传热数学模型,从而为合理地设计和布置炉内结构及组织炉内气体流动来改善炉内温度均匀性提供了有力的理论依据,并进一步通过实验予以验证,得出的结论可准确地指导生产实践,有利于节能降耗,提高产品产量和质量,并为炉子的结构优化奠定基础。
With the manufacturing expansion of LTCC (Low Temperature Co-fired Ceramic) industry, national and international enterprises and research institutes quickly develop LTCC sintering furnace. According to the Long-term research, the results showed that the temperature uniformity in a sintering furnace was an important factor that affects the quality of LTCC products, and therefore, it is necessary to study the physical mechanism of heat transfer in a furnace, establish a complete theoretical model, optimize structure design of the sintering furnace and study on temperature field experiment.
According to the current development trends of the LTCC sintering equipment, based on and combined with the "Micropackage equipment manufacture and integrated technique research" project concrete requirements, this paper carry out foundational research on the structure design and the temperature field technology of LTCC dedicated sintering furnace system, which adopt the manner of radiation and forced convection heat transfer integrated approach, is used for LTCC low temperature co-fired technics. Based on the sufficient full feasibility study and argumentation, a concrete overall design project is put forward in this paper. In the present work, the characteristics of thermal process were first described, then gas flow pattern was analyzed, and finally experiments were performed. Thesis focuses on describe the pivotal technologies design and realization of the system. Through application of the mature technique, experiments of temperature field, and solving difficult situation of pivotal technique, the physical mechanism of heat transfer in the LTCC special sintering furnace has been discussed intensively, both temperature and flow fields were analyzed in theory, the mathanatics modeling of temperature field has been constructed, and, further give an identification through experiment and then temperature uniformity in the furnace can be obtained by the optimizing physical structure and gas flow, these measures can guide process correctly, be propitious to economize energy and decline consume, increase output and quality, and establish the basis for structure optimization.
引文
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