回转误差分离技术研究
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摘要
精密超精密制造与测量对回转轴具有较高的精密要求,提高轴的回转精度的途径主要有提高零件的加工和装配精度与通过误差分离技术降低回转的影响两种。由于受制造精度提高和制造成本的限制,通过误差分离技术提高回转精度越来越受到重视。本文以误差分离技术中的多步法为基础,提出了基于多周的回转误差分离方法——多周法,建立了多周法的数学模型,并对其频域特性和时域特性进行了分析研究,采用Visual Basic语言编制了回转误差分离程序,该程序不仅适用于圆度仪、圆柱度仪等转台式高精度测量仪器,也适合于高精度加工机床。本文以中原工学院开发的圆柱体直径与形位误差综合测量仪为实验仪器,对回转误差的影响因素进行了分析,在实验规划的基础上,对回转误差分离开展了系列实验,将多周法回转误差分离技术用于圆度误差的测量与评定,并分析了误差分离技术对圆度误差评定结果的影响。研究结果表明:重复测量周数为14周时,回转误差分离的效果较好。
Precision and super-precision manufacturing and measurement have higher precision requirement for rotating shaft.There are two pathes of promoting the shaft’s rotating precision, that is , promoting the manufacturing and assembly precison of the parts and reducing the influence of rotating errors through error separation technique. Based on the multi-step error separation method, a multi-circle based error separation method is proposed, the mathmatical model of which is built, and the frequency and time characteristics are analyzed. The rotating error separation program is developed by using Visual Basic language, which is applicable not only for such roundness measuring instruments and cylindricity measuring instrument as precision measuring instruments withturntables, but also for high precision machine tools. The multi-functional measuring instrument of cylindrical diameters and form & position errors, developed by Zhongyuan University of Technology, Zhengzhou, China, is used as the testing instrument, in this thesis, and the factors of influencing the rotating error separation are analyzed. Based on the testing planning, a series of rotating error separation testing are done. The multi-circle rotating error separation technique is used in the evaluation of roundness errors, and the influence of the error separation technique on the evaluation results of roundness errors. The research results showed that the separation effect of rotating error is better when the number of the repeating measuring circles is selected as 14.
Precision and super-precision manufacturing and measurement have higher precision requirement for rotating shaft.There are two pathes of promoting the shaft’s rotating precision, that is , promoting the manufacturing and assembly precison of the parts and reducing the influence of rotating errors through error separation technique. Based on the multi-step error separation method, a multi-circle based error separation method is proposed, the mathmatical model of which is built, and the frequency and time characteristics are analyzed. The rotating error separation program is developed by using Visual Basic language, which is applicable not only for such roundness measuring instruments and cylindricity measuring instrument as precision measuring instruments withturntables, but also for high precision machine tools. The multi-functional measuring instrument of cylindrical diameters and form & position errors, developed by Zhongyuan University of Technology, Zhengzhou, China, is used as the testing instrument, in this thesis, and the factors of influencing the rotating error separation are analyzed. Based on the testing planning, a series of rotating error separation testing are done. The multi-circle rotating error separation technique is used in the evaluation of roundness errors, and the influence of the error separation technique on the evaluation results of roundness errors. The research results showed that the separation effect of rotating error is better when the number of the repeating measuring circles is selected as 14.
引文
[1]郑丹.超精密加工技术及其发展方向.新技术新工艺[J],2006,5:4-6
[2]李圣怡,戴一帆.超精密加工技术的发展及对策.中国机械工程[J],2000,vol.11(8):841-844
[3]贺大兴,盛伯浩.超精密加工技术的发展现状与趋势.新技术新工艺[J],2006,5:2-3
[4]曹刚.一种回转基准径向误差分离方法研究.哈尔滨工业大学[M],2007.07
[5]雷贤卿.基于误差分离的圆柱度精密测量技术研究[D].西安理工大学,2007.16-17
[6]洪迈生,蔡萍.多步法误差分离技术的比较分析[J].上海交通大学学报,2004.38(6):877-881
[7]王红,曹麟祥.混合多步法误差分离技术.计量学报,1994,15(3):223-225
[8]魏源迁,庞学会,白恩远.三点法误差分离技术理论分析[J].计量学报,1991,12(3):199-205
[9]谭久彬,赵维谦,杨文国.改善多步法谐波抑制的新方法——鉴相法.中国机械工程增刊,2001,(12):161-162
[10]赵维谦,谭久彬.单转位圆度误差分离技术[P].中国:ZL 200510002287.2,2006.05.24
[11]青木保雄,大园成夫.三点法真圆度的测定法の展开[J].精密机械,1966,32(12):27-32
[12] Whitehouse.D.J. Some Theoretical Aspects of Error Separation Techniques in Surface Metrology.J.Phys E: Sci. Instrum.1976, (9):531-536
[13] D.G.Chetwynd and G.J.Siddall.Improving the Accuracy of Roundness Measurement. J.Phys.E, Sci.Instru.1976, 9(7):537-545
[14] H Tanaka, K Tozawa, H Sato, M O-hori. Application of a new straigntness measurement measurement method to large machine tool, Ann.CIRP, 1981, (30): 455-459
[15] G Kakino. A measuring method for the linear error motion of machine tool[J]. Journal of JSPE, 1982, 48(2): 239-244(in Japanese)
[16] Satoshi Kiyono. Basic study of measurement of 2-Dsurface profile[J]. JSME International Journal.1995,Vol.38(3):494-500
[17] Satoshi kiyono,WeiGao.On-machine measurement of mirror profile by mixed method[J]. JSPE Intemational Journal, 1997,Vol.37(2):300-306
[18] O.Horikawa,N.Maruyama,M.Shimada. A low cost,high accuracy roundness measuring system[J]. Precision Engineering. 2001, Vol. 25(3): 200-205
[19] WeiGao, Satoshi kiyono.On-machine roundness measurement of cylindrical workpieces by the combined three-point method Measurement[J]. Vol.21(4): 147-1997
[20]洪迈生,邓宗煌.圆度和回转运动误差的时域二点法分离技术[J].中国机械工程,1997, Vol.8(2):88-92
[21]赵维谦,谭久斌,杨文国,等.基于两步法超精密圆度仪误差分离系统[J].中国机械工程,2000,Vol.11(11):1206-1208
[22]陈卓宁,李江萍,黄培.两步法圆度误差分离的原理及参数选择[J].华中理工大学学报,1994,Vol.22(4):105-109
[23]万华,圆度误差最小区域法的微机计算法[J].计量技术,1992,(1).10-13
[24]侯静,利用最小外接圆法评定圆度误差[J],内蒙古师范大学学报,2006,35 (3):290-292
[25]雷贤卿,李言,李济顺,等.多步法圆度误差分离的演化形式及其谐波抑制分析[J].工业仪表与自动化装置,2006,1:45-46
[26] Horikawa O, Maruyama N,Shimada M.A low cost,high accuracy roundess measuri-ng system[J]. Precision Engineering,2001,25:200-25
[27]叶京生,顾启泰,章燕申.论多步法误差分离技术的测量精度[J].计量学报,1990,11(2):119-123
[28]洪迈生,蔡萍.多步法误差分离技术的比较分析[J].上海交通大学学报. 2004.38(6):877-881
[29]雷贤卿,李言,周彦伟,等.3点法圆度误差分离技术的新算法[J].兵工学报,2007,28(1):73-77
[30]李东升,王伟杰,谭久斌,等.圆度仪测量基准反向法误差分离技术[J].哈尔滨工业大学学报.1998,30(6):26-29
[31]吴瑾华.着眼于虚拟基准的EST研究[D].上海交通大学.2001.68-69
[32] H.Tanaka,et al. Extensive Analysis and Development of Straightness Measurement bySequential-Two-Point Method, Transaction of the ASME,Vol.108, No.2,1986: 176-182
[33]李晓飞,张镭,李会武.几种平面度误差分离方法的分析[J].宇航计测技术.2006.26(2)4-7,50
[34]蔚文平.平面度的在线检测及补偿方法的研究[J].航空精密制造技术,1997,33(5 ):40-43
[35]郝群,刘巽尔,王信义.一种在线测量平面度误差的新方法[J].航空计测技术,1996,16(4):3-5
[36]赵则祥.公差配合与质量控制[M].开封:河南大学出版社,1999:39
[37]赵则祥,赵卓贤,高作昆.几何产品技术规范有关尺寸要素的发展及其实用性分析[J].制造技术与机床,2006,7,41-44
[38]费业泰.误差理论与数据处理[M].北京:机械工业出版社,2004:95-116
[39]洪迈生,魏元雷,李济顺.一维和多维误差分离技术的统一理论[J].中国机工,2000,11(3):245-248
[40] Cao Linxiang, Wang Hong, Li Xiongua, et al.Full-harmonic error separation technique[J].Measurement Science and Technology, 1992, 3(12):1129-1132
[41] Gao Wei.Error separation methods for spindle error measurement with nanometer accuracy[J].Journal of the Japan Society for Precision Engineering, 2001, 67(7):1067-1072.(in Japanese)
[42] Zhang G X, Zhang Y H, Yang S M, et al.A multipoint method for spindle error motion measurement[J].Annals of the CIRP,1997, 46(1):441-445
[43] Cao Linxiang.The measuring accuracy of the multistep method in the error separation techniques[J].J Phys E Sci Instrum, 1988, 22:903-906
[44] Jianming Yu and C.James Li. Optimum error separation technique for in-situ stra-ightness me-asurement in diamond turning. Department of Mechanical Engineering,Aeronautical Engineer-ing and Mechanics Rensselaer Polytechnic Institute Troy, New York
[45] Donaldson, R. R., "A Simple Method for Separating Spindle Error from Test Ro-undness Err-or", Annals of the CIRP, Vol. 21/1 1972
[46] Tanaka, H., "Extensive Analysis and Development of Straightness Measurement b-y Sequential-two-points Method", J. Engng Ind., 108, pp. 176-182, 1986
[47] Tozawa, K., Sato, H., and O-hri, M., "A New Method for the Measurement of t-he Straightn-ess of Machine Tools and Machine Work", Journal of Mec hanical D-esign, 104, pp. 587-592, 19
[48] Oppenheim, A. V., and Schafer, R. W., "Discrete-time Signal Processing", Prentice Hall, Englewood Cliffs, New Jersey, 1989
[2]李圣怡,戴一帆.超精密加工技术的发展及对策.中国机械工程[J],2000,vol.11(8):841-844
[3]贺大兴,盛伯浩.超精密加工技术的发展现状与趋势.新技术新工艺[J],2006,5:2-3
[4]曹刚.一种回转基准径向误差分离方法研究.哈尔滨工业大学[M],2007.07
[5]雷贤卿.基于误差分离的圆柱度精密测量技术研究[D].西安理工大学,2007.16-17
[6]洪迈生,蔡萍.多步法误差分离技术的比较分析[J].上海交通大学学报,2004.38(6):877-881
[7]王红,曹麟祥.混合多步法误差分离技术.计量学报,1994,15(3):223-225
[8]魏源迁,庞学会,白恩远.三点法误差分离技术理论分析[J].计量学报,1991,12(3):199-205
[9]谭久彬,赵维谦,杨文国.改善多步法谐波抑制的新方法——鉴相法.中国机械工程增刊,2001,(12):161-162
[10]赵维谦,谭久彬.单转位圆度误差分离技术[P].中国:ZL 200510002287.2,2006.05.24
[11]青木保雄,大园成夫.三点法真圆度的测定法の展开[J].精密机械,1966,32(12):27-32
[12] Whitehouse.D.J. Some Theoretical Aspects of Error Separation Techniques in Surface Metrology.J.Phys E: Sci. Instrum.1976, (9):531-536
[13] D.G.Chetwynd and G.J.Siddall.Improving the Accuracy of Roundness Measurement. J.Phys.E, Sci.Instru.1976, 9(7):537-545
[14] H Tanaka, K Tozawa, H Sato, M O-hori. Application of a new straigntness measurement measurement method to large machine tool, Ann.CIRP, 1981, (30): 455-459
[15] G Kakino. A measuring method for the linear error motion of machine tool[J]. Journal of JSPE, 1982, 48(2): 239-244(in Japanese)
[16] Satoshi Kiyono. Basic study of measurement of 2-Dsurface profile[J]. JSME International Journal.1995,Vol.38(3):494-500
[17] Satoshi kiyono,WeiGao.On-machine measurement of mirror profile by mixed method[J]. JSPE Intemational Journal, 1997,Vol.37(2):300-306
[18] O.Horikawa,N.Maruyama,M.Shimada. A low cost,high accuracy roundness measuring system[J]. Precision Engineering. 2001, Vol. 25(3): 200-205
[19] WeiGao, Satoshi kiyono.On-machine roundness measurement of cylindrical workpieces by the combined three-point method Measurement[J]. Vol.21(4): 147-1997
[20]洪迈生,邓宗煌.圆度和回转运动误差的时域二点法分离技术[J].中国机械工程,1997, Vol.8(2):88-92
[21]赵维谦,谭久斌,杨文国,等.基于两步法超精密圆度仪误差分离系统[J].中国机械工程,2000,Vol.11(11):1206-1208
[22]陈卓宁,李江萍,黄培.两步法圆度误差分离的原理及参数选择[J].华中理工大学学报,1994,Vol.22(4):105-109
[23]万华,圆度误差最小区域法的微机计算法[J].计量技术,1992,(1).10-13
[24]侯静,利用最小外接圆法评定圆度误差[J],内蒙古师范大学学报,2006,35 (3):290-292
[25]雷贤卿,李言,李济顺,等.多步法圆度误差分离的演化形式及其谐波抑制分析[J].工业仪表与自动化装置,2006,1:45-46
[26] Horikawa O, Maruyama N,Shimada M.A low cost,high accuracy roundess measuri-ng system[J]. Precision Engineering,2001,25:200-25
[27]叶京生,顾启泰,章燕申.论多步法误差分离技术的测量精度[J].计量学报,1990,11(2):119-123
[28]洪迈生,蔡萍.多步法误差分离技术的比较分析[J].上海交通大学学报. 2004.38(6):877-881
[29]雷贤卿,李言,周彦伟,等.3点法圆度误差分离技术的新算法[J].兵工学报,2007,28(1):73-77
[30]李东升,王伟杰,谭久斌,等.圆度仪测量基准反向法误差分离技术[J].哈尔滨工业大学学报.1998,30(6):26-29
[31]吴瑾华.着眼于虚拟基准的EST研究[D].上海交通大学.2001.68-69
[32] H.Tanaka,et al. Extensive Analysis and Development of Straightness Measurement bySequential-Two-Point Method, Transaction of the ASME,Vol.108, No.2,1986: 176-182
[33]李晓飞,张镭,李会武.几种平面度误差分离方法的分析[J].宇航计测技术.2006.26(2)4-7,50
[34]蔚文平.平面度的在线检测及补偿方法的研究[J].航空精密制造技术,1997,33(5 ):40-43
[35]郝群,刘巽尔,王信义.一种在线测量平面度误差的新方法[J].航空计测技术,1996,16(4):3-5
[36]赵则祥.公差配合与质量控制[M].开封:河南大学出版社,1999:39
[37]赵则祥,赵卓贤,高作昆.几何产品技术规范有关尺寸要素的发展及其实用性分析[J].制造技术与机床,2006,7,41-44
[38]费业泰.误差理论与数据处理[M].北京:机械工业出版社,2004:95-116
[39]洪迈生,魏元雷,李济顺.一维和多维误差分离技术的统一理论[J].中国机工,2000,11(3):245-248
[40] Cao Linxiang, Wang Hong, Li Xiongua, et al.Full-harmonic error separation technique[J].Measurement Science and Technology, 1992, 3(12):1129-1132
[41] Gao Wei.Error separation methods for spindle error measurement with nanometer accuracy[J].Journal of the Japan Society for Precision Engineering, 2001, 67(7):1067-1072.(in Japanese)
[42] Zhang G X, Zhang Y H, Yang S M, et al.A multipoint method for spindle error motion measurement[J].Annals of the CIRP,1997, 46(1):441-445
[43] Cao Linxiang.The measuring accuracy of the multistep method in the error separation techniques[J].J Phys E Sci Instrum, 1988, 22:903-906
[44] Jianming Yu and C.James Li. Optimum error separation technique for in-situ stra-ightness me-asurement in diamond turning. Department of Mechanical Engineering,Aeronautical Engineer-ing and Mechanics Rensselaer Polytechnic Institute Troy, New York
[45] Donaldson, R. R., "A Simple Method for Separating Spindle Error from Test Ro-undness Err-or", Annals of the CIRP, Vol. 21/1 1972
[46] Tanaka, H., "Extensive Analysis and Development of Straightness Measurement b-y Sequential-two-points Method", J. Engng Ind., 108, pp. 176-182, 1986
[47] Tozawa, K., Sato, H., and O-hri, M., "A New Method for the Measurement of t-he Straightn-ess of Machine Tools and Machine Work", Journal of Mec hanical D-esign, 104, pp. 587-592, 19
[48] Oppenheim, A. V., and Schafer, R. W., "Discrete-time Signal Processing", Prentice Hall, Englewood Cliffs, New Jersey, 1989