氮化硅表面沉积DLC膜的均匀性与摩擦学特性研究
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摘要
在航空航天工业、空间技术迅速发展的今天,用于改造工作表面的新型固体润滑材料应运而生。类金刚石碳膜是一种高硬度、低摩擦系数、高耐磨性及高化学稳定性的新型薄膜材料,作为固体润滑膜在航空航天、微型电子机器等领域越来越受到重视。要保证DLC膜的润滑效果在航空航天苛刻环境下起到作用,需要对DLC膜的一系列性能进行分析研究。
本文运用实验、理论分析和软件仿真等方法,利用运动学、接触力学、断裂力学模型,从膜的均匀性、承载能力及摩擦磨损性能三方面系统地研究了陶瓷表面DLC膜的特性,为陶瓷表面DLC膜的润滑研究和应用奠定基础。对膜特性的研究从均匀性入手,氮化硅陶瓷片上可容易地得到均匀DLC膜,但对于陶瓷球,均匀性需要评定。本文结合球研磨过程的均匀性分析,对三沟道单自转盘和单沟道三自转盘两种夹具中球的运动进行运动分析和仿真,验证了三沟道单自转盘夹具中陶瓷球表面沉积DLC薄膜的理论均匀性。将其用于等离子体基离子注入沉积试验中,用沉积DLC膜后陶瓷球的圆度及粗糙度测试值验证均匀性。
陶瓷表面薄膜能起到润滑作用的前提是具有一定的膜基结合力。本文利用纳米压痕、划痕试验,从力学角度对仅受法向压力的陶瓷片和陶瓷球表面DLC膜的承载能力,受法向和切向力共同作用的陶瓷片和陶瓷球表面DLC膜的结合力进行研究。同时结合压痕和划痕的形成过程,分析了DLC膜失效过程的力学特征,为陶瓷基体上DLC膜的实际应用提供理论基础。
本文最后对DLC膜的常温球盘摩擦磨损行为进行研究。通过试验参数选择,分析陶瓷基体表面DLC膜在大气中不同载荷及不同速度下的摩擦磨损性能及磨损机制的转变,获得了DLC膜承载的临界载荷和速度边界。
With the rapid development of aerospace industry and space technology, new solid lubricating materials used for improving surface came into being. Diamond-like carton film is a kind of new film material possessed high hardness, low friction coefficient, high abrasion resistance and stability. As the solid lubricant, many researchers in aerospace and miniature electronic machines field pay more and more attention to it. To ensure the DLC film’s lubrication in aerospace harsh environment, performances of DLC film must be analyzed.
Based on experiments, theoretical analysis and the simulation method, using the kinematics, contact mechanics and fracture mechanics, the tribological properties of DLC film were studied which contain film uniformity, carrying capacity and the friction prope rties. These researches provide the foundation of practical application of membrane and the following research on film lubrication.
Firstly study the uniformity of film. Si3N4 ceramics chip’s surface can easily get uniform DLC film, but for ceramic balls, uniformity must be assessed. Reference to the analysis to uniformity of grinding ball, do the researches about motion and simulation to the two fixtures. Comparing the balls’movements in two fixtures, one fixture which makes ball free rolling was choosed to deposite DLC film. At last, measure the roundness and roughness of DLC film to test uniformity.
As the lubrication film, films’adhesion must be tested. Based on nanometer indentation and scratch tests, analyze the bearing capacities of DLC films on surfaces of ceramics plate and ball which were under only normal pressure and under normal and tangential forces. Analyze the forming process of indentation under normal pressure and nicks under the normal pressure and tangential forces, we ca get the mechanical behavior of failure DLC,which provides theory basis to DLC film’s application.
Lastly research about the DLC film’s tribological behavior. Through testing the DLC film’s tribological properties in the atmosphere under different loads and speeds, analyze the wear mechanism under different conditions, and find the critical load and speed which DLC film can bear.
本文运用实验、理论分析和软件仿真等方法,利用运动学、接触力学、断裂力学模型,从膜的均匀性、承载能力及摩擦磨损性能三方面系统地研究了陶瓷表面DLC膜的特性,为陶瓷表面DLC膜的润滑研究和应用奠定基础。对膜特性的研究从均匀性入手,氮化硅陶瓷片上可容易地得到均匀DLC膜,但对于陶瓷球,均匀性需要评定。本文结合球研磨过程的均匀性分析,对三沟道单自转盘和单沟道三自转盘两种夹具中球的运动进行运动分析和仿真,验证了三沟道单自转盘夹具中陶瓷球表面沉积DLC薄膜的理论均匀性。将其用于等离子体基离子注入沉积试验中,用沉积DLC膜后陶瓷球的圆度及粗糙度测试值验证均匀性。
陶瓷表面薄膜能起到润滑作用的前提是具有一定的膜基结合力。本文利用纳米压痕、划痕试验,从力学角度对仅受法向压力的陶瓷片和陶瓷球表面DLC膜的承载能力,受法向和切向力共同作用的陶瓷片和陶瓷球表面DLC膜的结合力进行研究。同时结合压痕和划痕的形成过程,分析了DLC膜失效过程的力学特征,为陶瓷基体上DLC膜的实际应用提供理论基础。
本文最后对DLC膜的常温球盘摩擦磨损行为进行研究。通过试验参数选择,分析陶瓷基体表面DLC膜在大气中不同载荷及不同速度下的摩擦磨损性能及磨损机制的转变,获得了DLC膜承载的临界载荷和速度边界。
With the rapid development of aerospace industry and space technology, new solid lubricating materials used for improving surface came into being. Diamond-like carton film is a kind of new film material possessed high hardness, low friction coefficient, high abrasion resistance and stability. As the solid lubricant, many researchers in aerospace and miniature electronic machines field pay more and more attention to it. To ensure the DLC film’s lubrication in aerospace harsh environment, performances of DLC film must be analyzed.
Based on experiments, theoretical analysis and the simulation method, using the kinematics, contact mechanics and fracture mechanics, the tribological properties of DLC film were studied which contain film uniformity, carrying capacity and the friction prope rties. These researches provide the foundation of practical application of membrane and the following research on film lubrication.
Firstly study the uniformity of film. Si3N4 ceramics chip’s surface can easily get uniform DLC film, but for ceramic balls, uniformity must be assessed. Reference to the analysis to uniformity of grinding ball, do the researches about motion and simulation to the two fixtures. Comparing the balls’movements in two fixtures, one fixture which makes ball free rolling was choosed to deposite DLC film. At last, measure the roundness and roughness of DLC film to test uniformity.
As the lubrication film, films’adhesion must be tested. Based on nanometer indentation and scratch tests, analyze the bearing capacities of DLC films on surfaces of ceramics plate and ball which were under only normal pressure and under normal and tangential forces. Analyze the forming process of indentation under normal pressure and nicks under the normal pressure and tangential forces, we ca get the mechanical behavior of failure DLC,which provides theory basis to DLC film’s application.
Lastly research about the DLC film’s tribological behavior. Through testing the DLC film’s tribological properties in the atmosphere under different loads and speeds, analyze the wear mechanism under different conditions, and find the critical load and speed which DLC film can bear.
引文
1李光,孙跃,夏立芳,马欣新.类金刚石碳膜的摩擦学性能及摩擦机制.金属热处理. 2001,26(10):1~4
2 Aisenberg S, Chabot R. Ion–beam deposition of thin films of diamond-like carbon. J.Appl.Phys. 1971,(42):2953~2958
3 Holland L. Application of layer of carbonaceous material to a surface. US Patent No.4,382,100,1983
4 Angus J C, Koidl P, Domitz S. Plasma-Deposited Thin Films. In J.Mort and F.Jansen(eds.), CRC Press, Boca Raton, Florida.1986:89
5刘洪喜. PIII技术合成碳化钛和类金刚石薄膜研究.哈尔滨工业大学硕士学位论文. 2003:1~20
6 Li L H, Tian J Z, Cai X,et al. Influence of ion energies on the surface morphology of carbon films. Surf.Coat.Technol.,2005,(6):41~245
7 Robertson J. Diamond-like amorphous carbon. Mat.Sci.Engin. Reports,2002,(37): 129~281
8 Liu X Y,Chu P K,Ding C X.Surface Modification of Titanium,Titanium Alloys and Related Materials for Biomedical Applications.Mat.Sci.Engin.Reports,2004,(47): 49~121
9 J.R.Conrad, R.A.Dodd, S.Han, M.Madapura, J.Scheuer, K.Sridharan. Ion Beam Assisted Coating and Surface Modification with Plasma Source Ion Implantation. J.Vac.Sci.Technol. 1990,8(4):3146~3151
10王松雁,汤宝寅,孙剑飞等.用于材料表面改性的多功能等离子体浸没离子注入装置.物理. 1997,26(6):362~366
11牟魁峰.低摩擦系数DLC膜的制备及摩擦性能的研究.哈尔滨工业大学硕士学位论文. 2006:1~10
12黎明,温诗铸.纳米压痕技术及其应用[J].中国机械工程. 2002,13(16):1437~ 1440
13 J.A.Rund, D.Josell, F.Spacepen and A.L.Greer. A new method for tensile testing of thin films[J]. J. Mater.Res. 1993,8(l):112~116
14 C.J.Shute et al. Determination of yielding and debonding in Al-Cu thin films from residual stress measurements Via diffraction[J]. J.Mater.Res. 1991,6(5): 950~956
15 N.Gane. The direct measurement of the strength of metals on a submicrometre scale[J]. Pro.Roy.Soc.Land A. 1970,(317):367~391
16 A.E.Giannakopoulos, S.Suresh. Determination of elastoplastic properties byinstrumented sharp indentation[J]. Scripta Materialia. 1999,40(10):1191~1198
17 D.Lorenz. Pop-in Effect as Homogeneous Nucleation of Dislocation during Nanoindentation. Physical Review B. 2003,67(4):172101~172108.
18 H.Pelletier. Predictive model to estimate the stress-strain curves of bulk metals using nanoindentation[J]. Tribology International. 2006,(39):593~606
19 E.G.Herbert, G.M.Pharr, W.C.Oliver, B.N.Lucas, J.L.Hay. On the measurement of stress-strain curves by spherical indentation[J]. Thin Solid Films. 2001,(398):331~ 335
20易茂祥.类金刚石碳膜开裂现象的理论研究.合肥工业大学学报(科学版). 1997,20(3):128~131
21马德军.测定金属薄膜及小体积材料屈服强度与硬化指数的连续压入法研究[D].西安:西安交通大学,1999:40~57
22苗树翻,严一心,杭凌侠.不锈钢(3Cr13)镀类金刚石薄膜的研究.西安工业学院学报. 2006,26(2):103~106
23朱守星,朱世根等. DLC膜在磨损?表面改性及力电耦合作用下电电特性.材料科学与工艺. 2006,(5):466~468
24张瑞军,马洪涛.掺氮类金刚石薄膜的纳米力学及纳米摩擦特性研究.摩擦学学报. 2005,25(6):531~533
25 K.Enke, H.Dimigen,H.Hubsch. Frictional properties of diamond like carbon layers. Appl.Phys.Lett. 1980,(36):291~296
26 Erdemir A, Bindal C, Fenske G R,et al. Characterization of transfer layers forming on surfaces sliding against diamond-like carbon[J].Surface and coating technology, 1996,(86287):692~697
27 L iu Y, Erdemir A. Influence of environmental parameters on the frictional behavior of DLC coat ings [J]. Surface and Coating Technology. 1997,(94): 463~468
28 Mohrbacher H, Celis J P. Friction mechanisms in hydrogenized amorphous carbon coatings[J]. Diamond and Related Materials. 1995,(4):1267~1270
29 Byung Chul Na, Akihiro Tanaka. Tribological characteristics of diamond like carbon films based on hardness of mating materials. ASIATRIB 2002 International Conference, Jeju Island, Korea, 2002:147~148
30 Liu Y, Erdemir A, Meletis E I. A study of the wear mechanism of diamond-like carbon films [J]. Surface and coating technology. 1996,(82):48~56
31 E.Francis.A.Kennedy, L.David, A.Erdemir, J.B.Woodford. Tribological behavior of hard carbon coatings on steel substrates. Wear. 2003,(255):854~858
32张瑞军,马洪涛.掺氮类金刚石薄膜的纳米力学及纳米摩擦特性研究.摩擦学学报. 2005,25(6):530~533
33 Ronkainon H. Effect of tribofilm formation on the tribological performance of hydrogenated carbon coatings [ J ] . Surf . Coat Technol. 1996 ,(95):60~87
34 P.P.Psyllaki, M.Jeandin, D.I.Pantelis, M.Allouard. Pin-on-disc testing of PE-CVD diamond-like carbon coatings on tool steel substrates. Surf.Coat.Technol. 2000, (130):297~303
35 Jiaren Jiang, R.D.Arnell. The Effect of sliding on wear of diamond lide carbon coatings. Wear. 1998,(218):223~231
36程广贵,丁建宁,凌智勇等.纳米弹性复合DLC薄膜的制备及其摩擦性能研究.摩擦学学报. 2008,28(3):207~211
37张葵.陶瓷轴承的性能及发展动态.轴承. 2002,(5):33~34
38 Samandi M.et al. International Workshop on Plasma Based Ion Implantation. Wisconsin. 1993:4~6
39田修波,杨士勤等.等离子体浸没离子注入技术的应用与发展趋势.机械工人,2004(4):24~27
40汤宝寅,王浪平.滚珠全方位离子注入与沉积表面强化处理方法.中国,CN14 14135A[P]. 2003:4~30
41 Ido,M., Hazi.T and Nakazima, M. On the miniature ball bearings-on the effect of revolutional radius in lapping steel balls(inJapanese). J.Japan Soc.Precision Engng. 1960,(8):470~475
42 Tabor D. Hardness of Metals. Oxford University Press,1951:100~134
43 Hay J L, Pharr G M. Instrumented Indentation Testing. Kuhn H, Medlin D, eds. ASM Handbook Volume 8, Mechanical Testing and Evaluation (10th edition). Ohio, ASM International, Materials Park. 2000:232~243
44张泰华.微/纳米力学测试技术及其应用.机械工业出版社, 2004:8~18
45 Sneddon I N. The Relation Between Load and Penetration in the Axisymmetric Boussinesq Problem for a Punch of Arbitrary Profile. Int.J.Eng.Sci., 1965,(3):47~ 56
46 Johnson K L. Contact Mechanics. Cambridge University Press,1985:45~110
47龚江宏.陶瓷材料断裂力学.清华大学出版社, 2001: 83~121
48 Fang Tong. Near-surafce Mechanical Properties of Optical Materials in Deterministic Microgrinding. Dissertation for the Doctoral Degree in University of Rochester,1997:114
49贾俊辉,戚震中.表面膜附着力的压痕法测定[J].机械工程材料. 1988,(6):31
2 Aisenberg S, Chabot R. Ion–beam deposition of thin films of diamond-like carbon. J.Appl.Phys. 1971,(42):2953~2958
3 Holland L. Application of layer of carbonaceous material to a surface. US Patent No.4,382,100,1983
4 Angus J C, Koidl P, Domitz S. Plasma-Deposited Thin Films. In J.Mort and F.Jansen(eds.), CRC Press, Boca Raton, Florida.1986:89
5刘洪喜. PIII技术合成碳化钛和类金刚石薄膜研究.哈尔滨工业大学硕士学位论文. 2003:1~20
6 Li L H, Tian J Z, Cai X,et al. Influence of ion energies on the surface morphology of carbon films. Surf.Coat.Technol.,2005,(6):41~245
7 Robertson J. Diamond-like amorphous carbon. Mat.Sci.Engin. Reports,2002,(37): 129~281
8 Liu X Y,Chu P K,Ding C X.Surface Modification of Titanium,Titanium Alloys and Related Materials for Biomedical Applications.Mat.Sci.Engin.Reports,2004,(47): 49~121
9 J.R.Conrad, R.A.Dodd, S.Han, M.Madapura, J.Scheuer, K.Sridharan. Ion Beam Assisted Coating and Surface Modification with Plasma Source Ion Implantation. J.Vac.Sci.Technol. 1990,8(4):3146~3151
10王松雁,汤宝寅,孙剑飞等.用于材料表面改性的多功能等离子体浸没离子注入装置.物理. 1997,26(6):362~366
11牟魁峰.低摩擦系数DLC膜的制备及摩擦性能的研究.哈尔滨工业大学硕士学位论文. 2006:1~10
12黎明,温诗铸.纳米压痕技术及其应用[J].中国机械工程. 2002,13(16):1437~ 1440
13 J.A.Rund, D.Josell, F.Spacepen and A.L.Greer. A new method for tensile testing of thin films[J]. J. Mater.Res. 1993,8(l):112~116
14 C.J.Shute et al. Determination of yielding and debonding in Al-Cu thin films from residual stress measurements Via diffraction[J]. J.Mater.Res. 1991,6(5): 950~956
15 N.Gane. The direct measurement of the strength of metals on a submicrometre scale[J]. Pro.Roy.Soc.Land A. 1970,(317):367~391
16 A.E.Giannakopoulos, S.Suresh. Determination of elastoplastic properties byinstrumented sharp indentation[J]. Scripta Materialia. 1999,40(10):1191~1198
17 D.Lorenz. Pop-in Effect as Homogeneous Nucleation of Dislocation during Nanoindentation. Physical Review B. 2003,67(4):172101~172108.
18 H.Pelletier. Predictive model to estimate the stress-strain curves of bulk metals using nanoindentation[J]. Tribology International. 2006,(39):593~606
19 E.G.Herbert, G.M.Pharr, W.C.Oliver, B.N.Lucas, J.L.Hay. On the measurement of stress-strain curves by spherical indentation[J]. Thin Solid Films. 2001,(398):331~ 335
20易茂祥.类金刚石碳膜开裂现象的理论研究.合肥工业大学学报(科学版). 1997,20(3):128~131
21马德军.测定金属薄膜及小体积材料屈服强度与硬化指数的连续压入法研究[D].西安:西安交通大学,1999:40~57
22苗树翻,严一心,杭凌侠.不锈钢(3Cr13)镀类金刚石薄膜的研究.西安工业学院学报. 2006,26(2):103~106
23朱守星,朱世根等. DLC膜在磨损?表面改性及力电耦合作用下电电特性.材料科学与工艺. 2006,(5):466~468
24张瑞军,马洪涛.掺氮类金刚石薄膜的纳米力学及纳米摩擦特性研究.摩擦学学报. 2005,25(6):531~533
25 K.Enke, H.Dimigen,H.Hubsch. Frictional properties of diamond like carbon layers. Appl.Phys.Lett. 1980,(36):291~296
26 Erdemir A, Bindal C, Fenske G R,et al. Characterization of transfer layers forming on surfaces sliding against diamond-like carbon[J].Surface and coating technology, 1996,(86287):692~697
27 L iu Y, Erdemir A. Influence of environmental parameters on the frictional behavior of DLC coat ings [J]. Surface and Coating Technology. 1997,(94): 463~468
28 Mohrbacher H, Celis J P. Friction mechanisms in hydrogenized amorphous carbon coatings[J]. Diamond and Related Materials. 1995,(4):1267~1270
29 Byung Chul Na, Akihiro Tanaka. Tribological characteristics of diamond like carbon films based on hardness of mating materials. ASIATRIB 2002 International Conference, Jeju Island, Korea, 2002:147~148
30 Liu Y, Erdemir A, Meletis E I. A study of the wear mechanism of diamond-like carbon films [J]. Surface and coating technology. 1996,(82):48~56
31 E.Francis.A.Kennedy, L.David, A.Erdemir, J.B.Woodford. Tribological behavior of hard carbon coatings on steel substrates. Wear. 2003,(255):854~858
32张瑞军,马洪涛.掺氮类金刚石薄膜的纳米力学及纳米摩擦特性研究.摩擦学学报. 2005,25(6):530~533
33 Ronkainon H. Effect of tribofilm formation on the tribological performance of hydrogenated carbon coatings [ J ] . Surf . Coat Technol. 1996 ,(95):60~87
34 P.P.Psyllaki, M.Jeandin, D.I.Pantelis, M.Allouard. Pin-on-disc testing of PE-CVD diamond-like carbon coatings on tool steel substrates. Surf.Coat.Technol. 2000, (130):297~303
35 Jiaren Jiang, R.D.Arnell. The Effect of sliding on wear of diamond lide carbon coatings. Wear. 1998,(218):223~231
36程广贵,丁建宁,凌智勇等.纳米弹性复合DLC薄膜的制备及其摩擦性能研究.摩擦学学报. 2008,28(3):207~211
37张葵.陶瓷轴承的性能及发展动态.轴承. 2002,(5):33~34
38 Samandi M.et al. International Workshop on Plasma Based Ion Implantation. Wisconsin. 1993:4~6
39田修波,杨士勤等.等离子体浸没离子注入技术的应用与发展趋势.机械工人,2004(4):24~27
40汤宝寅,王浪平.滚珠全方位离子注入与沉积表面强化处理方法.中国,CN14 14135A[P]. 2003:4~30
41 Ido,M., Hazi.T and Nakazima, M. On the miniature ball bearings-on the effect of revolutional radius in lapping steel balls(inJapanese). J.Japan Soc.Precision Engng. 1960,(8):470~475
42 Tabor D. Hardness of Metals. Oxford University Press,1951:100~134
43 Hay J L, Pharr G M. Instrumented Indentation Testing. Kuhn H, Medlin D, eds. ASM Handbook Volume 8, Mechanical Testing and Evaluation (10th edition). Ohio, ASM International, Materials Park. 2000:232~243
44张泰华.微/纳米力学测试技术及其应用.机械工业出版社, 2004:8~18
45 Sneddon I N. The Relation Between Load and Penetration in the Axisymmetric Boussinesq Problem for a Punch of Arbitrary Profile. Int.J.Eng.Sci., 1965,(3):47~ 56
46 Johnson K L. Contact Mechanics. Cambridge University Press,1985:45~110
47龚江宏.陶瓷材料断裂力学.清华大学出版社, 2001: 83~121
48 Fang Tong. Near-surafce Mechanical Properties of Optical Materials in Deterministic Microgrinding. Dissertation for the Doctoral Degree in University of Rochester,1997:114
49贾俊辉,戚震中.表面膜附着力的压痕法测定[J].机械工程材料. 1988,(6):31