光电集成加速度地震检波器的理论与实验研究
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摘要
现代工业的飞速发展,对油气能源的需求日益增加。随着油气勘探开发的不断深入,面对的勘探目标越来越隐蔽,越来越复杂,提高勘探技术已成当务之急。地震勘探法是查明地下地质构造,寻求油气田或其他勘探目标的一种物探方法。地震检波器是地震勘探仪器正常工作的第一个环节,是任何一代地震勘探仪器不可缺少的一个组成部分,它的性能好坏对勘探系统有着直接的影响。
本研究为国家自然科学基金资助项目“光电集成加速度地震检波技术理论和实验研究”(NO.40274047)的主课题。光电集成加速度地震检波器是一种新型微光机电加速度地震检波器,具有高精度、高灵敏度、体积小、集成度高等优点,适合在高温高寒等恶劣环境下稳定工作。本论文主要完成以下工作:
1.详细分析了光电集成加速度地震检波器的工作原理。对简谐振子和波导干涉仪进行了详尽的理论和工艺实验研究,并获得了有参考价值的工艺参数。
2.对光电集成加速度地震检波器的调制方法进行了深入研究,提出了两种调制方案。首先对声光波导相位调制器进行了理论和实验研究。根据声光调制的机理,从弹性波的理论出发,系统地分析了声表面波的激励及传播方式,对叉指换能器的工作机理进行了详细的分析推导。对氧化锌薄膜和叉指换能器进行优化设计,并深入探讨了氧化锌薄膜、叉指换能器的制备工艺,进行了大量实验研究,取得了较好的工艺参数。
3.鉴于声光波导相位调制器制作工艺复杂,考虑系统单片集成的工艺性,本课题采用激光光源调制方案实现光电集成加速度地震检波器的信号调制。详细分析了带有反馈系统的半导体激光光源调制和信号处理电路的工作原理,提出了基于FPGA的数字信号处理电路的设计方案,该方案提高了电路的稳定性、灵活性,增强了抗干扰能力,而且具有修改简单的优点。详细讨论了低通滤波模块设计过程,基于ROM查找表法的分布式算法具有硬件资源占用少,结构紧凑,工作频率高的突出优点。进行了仿真验证,为系统的数字化奠定了基础。
4.在理论分析、设计、计算和工艺实验的基础上,研制出光电集成加速度地震检波器实验样机,并进行了模拟实验研究,实验结果表明,所设计的样机在地震勘探频带范围内有良好的线性和较高的输出,各项性能指标达到设计要求。
With the development of modern industry, the demands for oil energy are expanding increase. Because the easily discoverable oil energy has been exploited, the prospecting becomes more and more difficult, and it is urgent for us to improve the prospecting technology. To survey the geologic structure under ground or explore the energy, people use the method of seismic prospecting. Seismic geophone, which works first in the seismic prospecting, decides the quality of the exploration system.
The research work of the dissertation is the main research item of the project“The theoretical and experimental research on photo-electronic integrated acceleration seismic geophone technology”(NO.40274047), supported by National Natural Science Foundation of China. The photo-electronic integrated acceleration seismic geophone, which is a novel MOEMS (Micro-Optic-Electro-Mechanical- System) acceleration seismic geophone, is of the advantages such as potential high sensitivity, wide bandwidth, high degree of accuracy and environmental ruggedness, and suitable for mass production. The research work of the dissertation mainly includes four aspects as follows:
1. The principle of the photo-electronic integrated acceleration seismic geophone is researched. Lots of theoretical researches and process craft researches of harmonic oscillator and waveguide interferometer have been done. A feasible process flow is made and valuable technological parameter is obtained.
2. The principle of acousto-optic waveguide phase modulation is studied. Starting with the theory of elastic wave, the motivation and the transmission of the SAW (Surface Acoustic Wave) is researched and the principle of IDT (Interdigital Transducers) is discussed. The optimization structure design of ZnO thin film and IDT are obtained and lots of the experimental craft of them have been done.
3. Because the fabrication technology of the acousto-optic waveguide phase modulator is complex, and it is very difficult and expensive to monolithic integrated with M-Z interferometer and harmonic oscillator, the laser diode modulation is proposed. The principles of the laser diode modulation with a feedback control system and the signal processing method are analyzed. The realization scheme of signal processing of the geophone using FPGA (Field Programmable Gate Array) is proposed, which can improve the stability, flexibility and anti-interference of the circuit. The LPF (Low-Pass Filter) modular in the signal processing of the geophoneis issued. The DA (Distributed arithmetic) has many merits such as compact, engaging little resource, high working frequency. The simulation of the processing is performed, and this work establishes the groundwork for the further digitalization of the geophone.
4. On the basis of the theory analyze and craft experiments, the system prototype has been fabricated and tested. The experimental result shows that the there are good linearity and high output in seismic prospecting domain and performance indexes reach the demands.
本研究为国家自然科学基金资助项目“光电集成加速度地震检波技术理论和实验研究”(NO.40274047)的主课题。光电集成加速度地震检波器是一种新型微光机电加速度地震检波器,具有高精度、高灵敏度、体积小、集成度高等优点,适合在高温高寒等恶劣环境下稳定工作。本论文主要完成以下工作:
1.详细分析了光电集成加速度地震检波器的工作原理。对简谐振子和波导干涉仪进行了详尽的理论和工艺实验研究,并获得了有参考价值的工艺参数。
2.对光电集成加速度地震检波器的调制方法进行了深入研究,提出了两种调制方案。首先对声光波导相位调制器进行了理论和实验研究。根据声光调制的机理,从弹性波的理论出发,系统地分析了声表面波的激励及传播方式,对叉指换能器的工作机理进行了详细的分析推导。对氧化锌薄膜和叉指换能器进行优化设计,并深入探讨了氧化锌薄膜、叉指换能器的制备工艺,进行了大量实验研究,取得了较好的工艺参数。
3.鉴于声光波导相位调制器制作工艺复杂,考虑系统单片集成的工艺性,本课题采用激光光源调制方案实现光电集成加速度地震检波器的信号调制。详细分析了带有反馈系统的半导体激光光源调制和信号处理电路的工作原理,提出了基于FPGA的数字信号处理电路的设计方案,该方案提高了电路的稳定性、灵活性,增强了抗干扰能力,而且具有修改简单的优点。详细讨论了低通滤波模块设计过程,基于ROM查找表法的分布式算法具有硬件资源占用少,结构紧凑,工作频率高的突出优点。进行了仿真验证,为系统的数字化奠定了基础。
4.在理论分析、设计、计算和工艺实验的基础上,研制出光电集成加速度地震检波器实验样机,并进行了模拟实验研究,实验结果表明,所设计的样机在地震勘探频带范围内有良好的线性和较高的输出,各项性能指标达到设计要求。
With the development of modern industry, the demands for oil energy are expanding increase. Because the easily discoverable oil energy has been exploited, the prospecting becomes more and more difficult, and it is urgent for us to improve the prospecting technology. To survey the geologic structure under ground or explore the energy, people use the method of seismic prospecting. Seismic geophone, which works first in the seismic prospecting, decides the quality of the exploration system.
The research work of the dissertation is the main research item of the project“The theoretical and experimental research on photo-electronic integrated acceleration seismic geophone technology”(NO.40274047), supported by National Natural Science Foundation of China. The photo-electronic integrated acceleration seismic geophone, which is a novel MOEMS (Micro-Optic-Electro-Mechanical- System) acceleration seismic geophone, is of the advantages such as potential high sensitivity, wide bandwidth, high degree of accuracy and environmental ruggedness, and suitable for mass production. The research work of the dissertation mainly includes four aspects as follows:
1. The principle of the photo-electronic integrated acceleration seismic geophone is researched. Lots of theoretical researches and process craft researches of harmonic oscillator and waveguide interferometer have been done. A feasible process flow is made and valuable technological parameter is obtained.
2. The principle of acousto-optic waveguide phase modulation is studied. Starting with the theory of elastic wave, the motivation and the transmission of the SAW (Surface Acoustic Wave) is researched and the principle of IDT (Interdigital Transducers) is discussed. The optimization structure design of ZnO thin film and IDT are obtained and lots of the experimental craft of them have been done.
3. Because the fabrication technology of the acousto-optic waveguide phase modulator is complex, and it is very difficult and expensive to monolithic integrated with M-Z interferometer and harmonic oscillator, the laser diode modulation is proposed. The principles of the laser diode modulation with a feedback control system and the signal processing method are analyzed. The realization scheme of signal processing of the geophone using FPGA (Field Programmable Gate Array) is proposed, which can improve the stability, flexibility and anti-interference of the circuit. The LPF (Low-Pass Filter) modular in the signal processing of the geophoneis issued. The DA (Distributed arithmetic) has many merits such as compact, engaging little resource, high working frequency. The simulation of the processing is performed, and this work establishes the groundwork for the further digitalization of the geophone.
4. On the basis of the theory analyze and craft experiments, the system prototype has been fabricated and tested. The experimental result shows that the there are good linearity and high output in seismic prospecting domain and performance indexes reach the demands.
引文
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