基于新型菱形放大机构的微位移工作台结构研究
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摘要
近年来,随着科学技术的迅猛发展,人们的研究从宏观领域扩展到微观领域,尤其是在光学、生物工程和微电子技术等学科,被操作对象正不断地向微小化发展,因而对精密机械和仪器的小型化与精度要求越来越高,对高精度微位移操作系统的研制提出了迫切的要求。微位移技术在尖端工业生产和科学研究领域内占有极其重要的地位,受到了国内外的广泛重视和深入研究。现有微位移工作台均具有较高的工作精度,但它们的工作行程较小,应用受到一定限制。本文提出并设计了一种新型微位移工作台,以菱形放大机构对驱动元件的输出位移进行放大,增大微位移工作台的工作行程,使其应用范围更加广泛。
本文所作的主要工作如下：
(1)本文采用MTp型压电陶瓷驱动器作为驱动装置,并对其迟滞、非线性等特性进行了研究,根据实验数据计算出空载下其迟滞和非线性误差。同时,对传动机构采用的柔性铰链进行理论分析,得出其转动刚度计算公式,并应用有限元方法对公式计算进行验证。
(2)因压电陶瓷驱动器输出位移较小,为了获得较大的输出位移,本文通过对比选型,提出了一种理论上放大12倍的菱形放大机构,并采用有限元静力学分析方法对其结构各参数进行优化。之后,对确定参数后的菱形放大机构运用有限元方法进行最大应力和模态分析,对其可行性和安全性做了进一步验证。
(3)根据所采用的驱动装置、菱形放大机构以及导向机构等,最终确定了微位移工作台的总体结构,设计出一种基于新型菱形放大机构的微位移工作台。利用材料力学理论,获得工作台的危险截面处最大应力、刚度和固有频率等重要参数的计算公式,并通过已知的选用参数求值。然后采用有限元方法进行验证,确保工作台设计的合理性。
(4)本文试制了微位移工作台系统并进行实验,将实验结果与理论计算结果进行比较,实验所获得的微位移工作台实际输出位移的放大倍数约为5.85倍,与设计的菱形放大机构理论值12倍有一定差距。最后对误差原因进行分析,并提出相应的改进方法来提高工作台的性能。
With the dramatic development of scientific technology in recent years, the research area of human being is expanded from macroscopic field to microcosmic field. Particularly in photology, bioengineering and microelectronic technology, the operation objects are becoming smaller and smaller, therefore requirements on miniaturization and precision of instruments are getting higher and higher, which leads urgent research on micromanipulation system with high positioning accuracy. Since the micro-displacement worktable plays an important role in modern advanced industrial production and scientific research area, it is attracting increasing interest and intensive study all over the world. Although the existing micro-displacement worktables can provide high precision, their travel ranges are small and application areas are limited. In order to overcome these disadvantages, a novel micro-displacement worktable is proposed in this paper, which utilizes the rhombic amplification mechanism to amplify the output displacement of the driving element.
The main achievements in this thesis include the following aspects:
(1) The MTp piezoelectric ceramic is adopted as the driving element in this paper. Its hysteresis and nonlinear characteristics are studied, and its hysteresis and nonlinear errors are calculated as well according to the experimental data. Meanwhile, the flexure hinge, which serves as the transmission structure, is analyzed theoretically to deduce the calculation formula of rotational stiffness. Afterwards, the finite element method is used to prove the correctness of this formula.
(2) Since piezoelectric ceramic can only output small displacement, a rhombic amplification mechanism is proposed to enlarge the displacement. Its amplification factor is 12 in theory, and its parameters are optimized by static analysis of finite element method. With the selected parameters and finite element method, the maximum stress analysis and model analysis of this optimized rhombic amplification mechanism are carried out to verify its feasibility and security.
(3) On the basis of driving element, rhombic amplification mechanism and guide mechanism, the general structure of the micro-displacement worktable is determined, and a micro-displacement worktable based on a novel rhombic amplification mechanism is designed. By utilizing theory of mechanics of materials, the formulas of maximum stress, stiffness and natural frequency of the dangerous section are obtained, and these values are calculated with selected parameters. The finite element method is employed to confirm the design rationality of this mechanism.
(4) The micro-displacement worktable is trial-produced and the relevant experimental test is carried out, which indicates that the actual amplification factor of this rhombic amplification mechanism is 5.85, lower than theoretical value of 12. In the end, the causes of error are analyzed, and corresponding approaches to improve the performances of micro-displacement worktable are put forward.
本文所作的主要工作如下：
(1)本文采用MTp型压电陶瓷驱动器作为驱动装置,并对其迟滞、非线性等特性进行了研究,根据实验数据计算出空载下其迟滞和非线性误差。同时,对传动机构采用的柔性铰链进行理论分析,得出其转动刚度计算公式,并应用有限元方法对公式计算进行验证。
(2)因压电陶瓷驱动器输出位移较小,为了获得较大的输出位移,本文通过对比选型,提出了一种理论上放大12倍的菱形放大机构,并采用有限元静力学分析方法对其结构各参数进行优化。之后,对确定参数后的菱形放大机构运用有限元方法进行最大应力和模态分析,对其可行性和安全性做了进一步验证。
(3)根据所采用的驱动装置、菱形放大机构以及导向机构等,最终确定了微位移工作台的总体结构,设计出一种基于新型菱形放大机构的微位移工作台。利用材料力学理论,获得工作台的危险截面处最大应力、刚度和固有频率等重要参数的计算公式,并通过已知的选用参数求值。然后采用有限元方法进行验证,确保工作台设计的合理性。
(4)本文试制了微位移工作台系统并进行实验,将实验结果与理论计算结果进行比较,实验所获得的微位移工作台实际输出位移的放大倍数约为5.85倍,与设计的菱形放大机构理论值12倍有一定差距。最后对误差原因进行分析,并提出相应的改进方法来提高工作台的性能。
With the dramatic development of scientific technology in recent years, the research area of human being is expanded from macroscopic field to microcosmic field. Particularly in photology, bioengineering and microelectronic technology, the operation objects are becoming smaller and smaller, therefore requirements on miniaturization and precision of instruments are getting higher and higher, which leads urgent research on micromanipulation system with high positioning accuracy. Since the micro-displacement worktable plays an important role in modern advanced industrial production and scientific research area, it is attracting increasing interest and intensive study all over the world. Although the existing micro-displacement worktables can provide high precision, their travel ranges are small and application areas are limited. In order to overcome these disadvantages, a novel micro-displacement worktable is proposed in this paper, which utilizes the rhombic amplification mechanism to amplify the output displacement of the driving element.
The main achievements in this thesis include the following aspects:
(1) The MTp piezoelectric ceramic is adopted as the driving element in this paper. Its hysteresis and nonlinear characteristics are studied, and its hysteresis and nonlinear errors are calculated as well according to the experimental data. Meanwhile, the flexure hinge, which serves as the transmission structure, is analyzed theoretically to deduce the calculation formula of rotational stiffness. Afterwards, the finite element method is used to prove the correctness of this formula.
(2) Since piezoelectric ceramic can only output small displacement, a rhombic amplification mechanism is proposed to enlarge the displacement. Its amplification factor is 12 in theory, and its parameters are optimized by static analysis of finite element method. With the selected parameters and finite element method, the maximum stress analysis and model analysis of this optimized rhombic amplification mechanism are carried out to verify its feasibility and security.
(3) On the basis of driving element, rhombic amplification mechanism and guide mechanism, the general structure of the micro-displacement worktable is determined, and a micro-displacement worktable based on a novel rhombic amplification mechanism is designed. By utilizing theory of mechanics of materials, the formulas of maximum stress, stiffness and natural frequency of the dangerous section are obtained, and these values are calculated with selected parameters. The finite element method is employed to confirm the design rationality of this mechanism.
(4) The micro-displacement worktable is trial-produced and the relevant experimental test is carried out, which indicates that the actual amplification factor of this rhombic amplification mechanism is 5.85, lower than theoretical value of 12. In the end, the causes of error are analyzed, and corresponding approaches to improve the performances of micro-displacement worktable are put forward.
引文
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[14]Yi-Cheng Hsu, Ying-Chien Tsai, Yeh-Lin Ho, et al. A novel fiber alignment shift measurement and correction technique in laser-welded laser module packaging [J]. Journal of Lightwave Technology,2005,23(2):486-494.
[15]刘天军,侯丽雅,章维一.细胞操作用锻针器的设计[J].机械设计,2004,21(4)：14-15.
[16]马建旭,王立鼎,吴一辉.微电子机械系统在生物医学领域中的应用[J].光学精密工程,1996,4(1)：1-6.
[17]纪华伟.压电陶瓷驱动的微位移工作台建模与控制技术研究[D].杭州：浙江大学,2006.
[18]桑武斌.二维超精工件台及其控制系统的研究[D].杭州：浙江大学,2008.
[19]付春楠.基于压电驱动的摩擦式微位移工作台的研究[D].大连：大连理工大学,2010.
[20]杨宜民.新驱动及其应用[M].北京：机械工业出版社,1997.
[21]杨兴.磁场与位移感知型超磁致伸缩微位移执行器及其相关技术研究[D].大连：大连理工大学,2001.
[22]魏强.纳米定位微位移工作台的控制技术研究[D].济南：山东大学,2006.
[23]周晓峰.基于PZT微定位系统控制研究[D].杭州：浙江大学,2004.
[24]黄金永.空间用精密微位移平台的研究[D].杭州：浙江大学,2010.
[25]曾彬.摩擦驱动微位移试验平台的设计和研究[D].上海：东华大学,2007.
[26]刘登云,杨志刚,程光明,等.微位移机构的现状及趋势[J].机械设计与制造,2007,(1)：156-158
[27]李圣怡,黄长征,王贵林.微位移机构研究[J].航空精密制造技术,2000,36(4)：5-9.
[28]曲炳郡,李路明,张玉玲,等.形状记忆合金薄膜微驱动器过程准可控研究[J].大连理工大学学报,2001,41(1)：64-66.
[29]雷勇,陈本永,杨元兆,等.纳米级微动工作台的研究现状及发展趋势[J].浙江理工大学学报,2006,23(1)：72-75.
[30]Fu J., Young R. D., Vorburger T. V. Long-range scanning for scanning tunneling microscopy[J]. Review of Scientific Instruments,1992,63(4):2200-2205.
[31]Shinno, Hidenori, Hashizume. Nanometer positioning of a linear motor-driven ultraprecision aerostatic table system with electrorheological fluid dampers [J]. CIRP Annals-Manufacutring Technology,1999,48(1):289-292.
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