复合电流驱动的永磁同步平面电机基础研究
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摘要
永磁同步平面电动机直接利用电磁能产生平面运动,具有出力密度高、低热耗、高精度的特点,相对于传统的二维平面定位装置具有反应快、灵敏度高、随动性好和结构简单等优点,在现代半导体微细加工装备和其它超精密二维平面定位装置中有广阔的应用前景。本文提出一种复合电流驱动的九相永磁同步平面电动机,并进行以下几个方面的研究。
首先,建立永磁同步平面电机的数学模型,利用标量磁位和边界条件对平面电动机永磁阵列产生的磁场进行解析,通过等效和简化获得气隙中磁感应强度的表达式,进而依据洛伦兹力法和法拉第电磁感应定律推导出平面电动机所产生的电磁力和空载反电动势的表达式,并建立电机的电压平衡方程。
其次,在前面解析的基础上研究该种类型平面电机的设计方法,推导电磁设计流程,确定平面电机的主要尺寸,分析电机性能和结构参数之间的关系,确定动子线圈和定子永磁体的设计思路。借助于Maxwell 3D建立单元平面电机的有限元仿真模型,利用有限元法分别分析铁磁边界、永磁体厚度和线圈截面参数等对电机性能的影响,为电机的优化设计提供理论基础。
最后,参照前面的设计方法,设计加工一台样机,并利用实验室现有条件对样机进行实验,测量样机的静磁场、静态推力和空载反电动势波形,并将实验结果和仿真结果进行对比,验证样机设计的合理性。
Permanent magnet synchronous planar motors use electromagnetic plane produce planar motion directly, so it have high density, low heat consumption and high precision features. Compared with conventional two-dimensional plane positioning device, planar motors have many advantages such as fast response, high sensitivity, good mobility and simple structure, so it have a broad application prospects in the modern semiconductor micro-fabrication equipment and other ultra-precision two-dimensional plane positioning device. This paper proposed a new permanent magnet synchronous planar motor drived by a current which complex of nine phase.We will research on the following aspects.
First, we build the mathematical model of the permanent magnet synchronous planar motor, using the scalar magnetic potential and the boundary conditions analysis the magnetic field which is generated by the permanent magnet array, obtained the expression of the magnetic flux density in the air gap through equivalent and simplified, then we derive the expression of the electromagnetic force and the back electromotive force which are generated by the planar motor according to Los Lenz power law and Faraday's law of electromagnetic induction. Also the motor voltage equations is established.
Secondly, study the design method about planar motor of this type based on previous analytical, derive the magnetic design process, determine the major size of the planar motor, analysis the relationship between the electrical properties and the structural parameters, definite the design ideas of the coil and the permanent magnet. We build the finite element simulation model of the single planar motor through the instrumentality of Maxwell 3D. Using finite element method analysis the impact of magnetic boundary, permanent magnet thickness and coil cross-section parameters on the electrical properties, that provide theory to the optimal design of the motor.
Finally, reference to the previous design method, a prototype motor is designed and processed, and experiment on the prototype motor use of laboratory existing conditions, measuring magnetic field, static thrust, and no-load EMF waveforms of the prototype motor. At last the experimental results and simulation results are compared to verify that the prototype design is reasonable.
首先,建立永磁同步平面电机的数学模型,利用标量磁位和边界条件对平面电动机永磁阵列产生的磁场进行解析,通过等效和简化获得气隙中磁感应强度的表达式,进而依据洛伦兹力法和法拉第电磁感应定律推导出平面电动机所产生的电磁力和空载反电动势的表达式,并建立电机的电压平衡方程。
其次,在前面解析的基础上研究该种类型平面电机的设计方法,推导电磁设计流程,确定平面电机的主要尺寸,分析电机性能和结构参数之间的关系,确定动子线圈和定子永磁体的设计思路。借助于Maxwell 3D建立单元平面电机的有限元仿真模型,利用有限元法分别分析铁磁边界、永磁体厚度和线圈截面参数等对电机性能的影响,为电机的优化设计提供理论基础。
最后,参照前面的设计方法,设计加工一台样机,并利用实验室现有条件对样机进行实验,测量样机的静磁场、静态推力和空载反电动势波形,并将实验结果和仿真结果进行对比,验证样机设计的合理性。
Permanent magnet synchronous planar motors use electromagnetic plane produce planar motion directly, so it have high density, low heat consumption and high precision features. Compared with conventional two-dimensional plane positioning device, planar motors have many advantages such as fast response, high sensitivity, good mobility and simple structure, so it have a broad application prospects in the modern semiconductor micro-fabrication equipment and other ultra-precision two-dimensional plane positioning device. This paper proposed a new permanent magnet synchronous planar motor drived by a current which complex of nine phase.We will research on the following aspects.
First, we build the mathematical model of the permanent magnet synchronous planar motor, using the scalar magnetic potential and the boundary conditions analysis the magnetic field which is generated by the permanent magnet array, obtained the expression of the magnetic flux density in the air gap through equivalent and simplified, then we derive the expression of the electromagnetic force and the back electromotive force which are generated by the planar motor according to Los Lenz power law and Faraday's law of electromagnetic induction. Also the motor voltage equations is established.
Secondly, study the design method about planar motor of this type based on previous analytical, derive the magnetic design process, determine the major size of the planar motor, analysis the relationship between the electrical properties and the structural parameters, definite the design ideas of the coil and the permanent magnet. We build the finite element simulation model of the single planar motor through the instrumentality of Maxwell 3D. Using finite element method analysis the impact of magnetic boundary, permanent magnet thickness and coil cross-section parameters on the electrical properties, that provide theory to the optimal design of the motor.
Finally, reference to the previous design method, a prototype motor is designed and processed, and experiment on the prototype motor use of laboratory existing conditions, measuring magnetic field, static thrust, and no-load EMF waveforms of the prototype motor. At last the experimental results and simulation results are compared to verify that the prototype design is reasonable.
引文
1.杨金明,吴捷,张宇,潘剑飞.平面电动机的现状及发展.微特电机, 2003,(6): 31~35
2.曹家勇,朱煜,汪劲松等.平面电动机设计、控制与应用技术综述.电工技术学报, 2005,(4): 1~8
3.马春燕,王振民,陈燕.平面电动机发展现状.微电机, 2008, (1): 35~38
4.许雯霞.基于DSP的永磁平面电机运动控制系统研究.武汉理工大学硕士学位论文. 2008: 8~15
5. J. F. Pan, N. C. Cheung, W. C. Gan. A Novel Planar Switched Reluctance Motor for Industrial Applications. IEEE Trans. Magn. 2006,42(10): 2836~2839
6. Shalom J. I. Modeling of Sawyer Planar Sensor and Motor Dependence on Planar Yaw Angle Rotation[C]. Proc.of the IEEE Intel. Conf. on Robotics and Automation Albuquerque, New Mexico. 1997: 499~504.
7. Fujii N, Fujitake M. Two-Dimensional Drive Characteristics by Circular Shaped Motor [J]. IEEE Trans.on Industry Applications, 1999,35(4): 167~173.
8. Peter Dittrich. 3 - DOF Planar Induction Motor[J]. IEEE International Conference on Electro/information Technology. May.2006:81~86
9.郝晓红,梅雪松,张东升等.动磁型同步表面电机的磁场和推力.西安交通大学学报, 2006,(7): 823~826
10. Junichi Tsuchiya, Gunji Kimura. Mover Structure and Thrust Characteristic of Moving-Magnet-type Surface Motor [C]. The 27th Annual Conf. of the IEEE Industrial Electronics Society, 2001: 1469~1474
11. J. W. Jansen, C. M. M. van Lierop, E. A. Lomonova, and A. J. A. Vandenput. Modeling of Magnetically Levitated Planar Actuators With Moving Magnets. IEEE Trans. Magn. 2007,43 (1): 15~25
12. Y. Ueda and H. Ohsaki, A Planar Actuator with a Small Mover Traveling over Large Yaw and Translational Displacements, IEEE Trans. Magn. 2008,44(5): 609~616
13. J. de Boeij, E. Lomonova, A. J. A. Vandenput. Optimization of Contactless Planar Actuator With Manipulator. IEEE Trans. Magn. 2008,44(6): 1118~1121
14. J. H. Choi, J. H. Park, Y. S. Baek. Design and Experimental Validation of Performance for a Maglev Moving-Magnet-Type Synchronous PM Planar Motor. IEEE Trans. Magn. 2006,42,(10): 3419~3421
15. Jeong Woo Jeon, Mitica Caraiani, Yong Joo Kim. Development of Magnetic Levitated Stage for Wide Area Movements[J]. Proceeding of International Conference on Electrical Machines and Systems. 2007:1486~1491
16. D. Ebihara, M. Watada. Study of a Basic Structure of Surface Motor. IEEE Trans. Magn. 1989,25(5): 3916~3918
17. Jiayong Cao, Yu Zhu, Jinsong Wang. A Novel Synchronous Permanent Magnet Planar Motor and Its Model for Control Applications. IEEE Trans. Magn. 2005,41(6): 2156~2162
18. Han-Sam Cho, Hyun-Kyo Jung. Analysis and Design of Synchronous Permanent-Magnet Planar Motors[J]. IEEE Trans.on Energy Conversion. 2002,17(4): 492~499
19. Gao W, Dejima S, Yanai H. A Surface Motor-Driven Planar Motion Stage Integrated with an xyθz Surface Encoder for Precision Positioning. Precision Eng. 2004,(28): 329~337
20. Flores Filho A. F, Susin A. A, Silveira da M. A. Application of Neodymium-Iron-Boron Permanent Magnets on the Assembling of a Novel Planar Actuator[J] .IEEE Trans.on Magn.1999,35(5): 4034~4035
21. Chaodong Li, Shi Xu, Runfeng Liu. Dynamic Analysis and Optimal Design of a Novel Small 2-D planar Ultrasonic Motor. IEEE Ultrasonics Sympoisum. 2006: 2269~2272
22. Fujii N, Okinaga K. Linear x-y Synchronous Motor without Force Ripple and Core Loss for Precision Two-Dimension Drive[J]. IEEE Trans on Magnetics, 2002,38(5):3273~3275
23. Asakawa T. Two Dimensional Position Device. US:4626749, 1986
24. Hazelton A J. Planar Electric Motor with Two Sided Magnet Array. US:2002/0149270, 2002
25. Hazelton A J. Compact Planar Motor Having Multiple Degrees of Freedom. US:6097114, 2000
26. Asakawa T. Two-Dimensional Precise Positioning Device for Use in A Semiconductor Manufacturing Apparatus. US:4535278, 1985
27. Asakawa T. Two Dimensional Driving for Use in A Positioning Device in A Semiconductor Manufacturing Apparatus. US:4555650, 1985
28. Hazelton A J. Planar Electric Motor with Dual Coil and Magnet Arrays. US:6144119, 2000
29. Hazelton A J, Gery J M. Wedge and Transverse Magnet Arrays. US:6188147, 2001
30. Hazelton A J, Gery J M. Planar Electric Motor and Positioning Device Having Transverse Magnets. US:6285097, 2001
31. Han-Sam Cho, Chang-Hwan Im, Hyun-Kyo Jung. Magnetic Field Analysis of 2-D Permanent Magnet Array for Planar Motor. IEEE Trans.on Magn. 2001,37(5): 3762~3766
32. Huang J H, Kim H, Chun J S. Planar Motor. US:6548917, 2001
33. Kim W J. High-Precision Planar Magnetic Levitation. PhD Thesis,MIT, 1997
34. Trumper D L, Kim W J, Williams M E. Magnetic Arrays. US:5631618, 1997
35. Cho H S, Jung H K. Effect of Coil Position and Width on Back-EMF Constant of Permanent Magnet Planar Motors. Electric Machines and DrivesConference, IEMDC of IEEE International, 2001:430~435
36. Hazelton A J, Binnard M B, Gery J M. Electric Motors and Positioning Device Having Moving Magnet Arrays and Six Degrees of Freedom. US:6208045
37. Hazelton A J, Tanaka K, Hayashi Y. Reaction Force Isolation System for A Planar Motor. US:6252234, 2001
38. Binnard M B. Planar Motors with Linear Coil Arrays. US:6445093, 2002
39.寇宝泉,贵献国,吴红星等.复合电流驱动九相平面电机、直线-旋转电机及其驱动器[P]. 200910138883.1
40.张盛峰.永磁直线同步电动机关键技术的研究.沈阳工业大学硕士学位论文. 2007: 23~26
41. J. de Boeij, E. Lomonova, A.J.A. Vandenput. Modeling Ironless Permanent- Magnet Planar Actuator Structures. IEEE Trans. On Magnetics. 2006,42(8): 2009~2016
42.郭亮.新型同步电机的分析与优化研究.浙江大学博士学位论文. 2006: 29~31
43.武瑛.新型无接触供电系统的研究.中国科学院研究生院博士学位论文. 2004:49~51
44.秦世耀.空芯动圈式直线永磁同步电动机的研究分析.太原理工大学硕士学位论文. 2002:40~42
45.李红涛.长初级直线感应电动机的设计及其电磁场与温度场研究.哈尔滨理工大学硕士学位论文. 2008:20~23
46.彭威.长初级直线感应电动机的设计与研究.哈尔滨工业大学硕士学位论文. 2007: 20~28
47.刘晓.空心式永磁直线伺服电机及其驱动控制系统研究.浙江大学博士学位论文. 2008: 70~71
48. Jeong-Woo Jeon, Mitica Caraiani, Yong-Joo Kim. Development of Magnetic Levitated Stage for Wide Area Movements. Proceeding of International Conference on Electrical Machines and Systems. 2007: 1486~1491
2.曹家勇,朱煜,汪劲松等.平面电动机设计、控制与应用技术综述.电工技术学报, 2005,(4): 1~8
3.马春燕,王振民,陈燕.平面电动机发展现状.微电机, 2008, (1): 35~38
4.许雯霞.基于DSP的永磁平面电机运动控制系统研究.武汉理工大学硕士学位论文. 2008: 8~15
5. J. F. Pan, N. C. Cheung, W. C. Gan. A Novel Planar Switched Reluctance Motor for Industrial Applications. IEEE Trans. Magn. 2006,42(10): 2836~2839
6. Shalom J. I. Modeling of Sawyer Planar Sensor and Motor Dependence on Planar Yaw Angle Rotation[C]. Proc.of the IEEE Intel. Conf. on Robotics and Automation Albuquerque, New Mexico. 1997: 499~504.
7. Fujii N, Fujitake M. Two-Dimensional Drive Characteristics by Circular Shaped Motor [J]. IEEE Trans.on Industry Applications, 1999,35(4): 167~173.
8. Peter Dittrich. 3 - DOF Planar Induction Motor[J]. IEEE International Conference on Electro/information Technology. May.2006:81~86
9.郝晓红,梅雪松,张东升等.动磁型同步表面电机的磁场和推力.西安交通大学学报, 2006,(7): 823~826
10. Junichi Tsuchiya, Gunji Kimura. Mover Structure and Thrust Characteristic of Moving-Magnet-type Surface Motor [C]. The 27th Annual Conf. of the IEEE Industrial Electronics Society, 2001: 1469~1474
11. J. W. Jansen, C. M. M. van Lierop, E. A. Lomonova, and A. J. A. Vandenput. Modeling of Magnetically Levitated Planar Actuators With Moving Magnets. IEEE Trans. Magn. 2007,43 (1): 15~25
12. Y. Ueda and H. Ohsaki, A Planar Actuator with a Small Mover Traveling over Large Yaw and Translational Displacements, IEEE Trans. Magn. 2008,44(5): 609~616
13. J. de Boeij, E. Lomonova, A. J. A. Vandenput. Optimization of Contactless Planar Actuator With Manipulator. IEEE Trans. Magn. 2008,44(6): 1118~1121
14. J. H. Choi, J. H. Park, Y. S. Baek. Design and Experimental Validation of Performance for a Maglev Moving-Magnet-Type Synchronous PM Planar Motor. IEEE Trans. Magn. 2006,42,(10): 3419~3421
15. Jeong Woo Jeon, Mitica Caraiani, Yong Joo Kim. Development of Magnetic Levitated Stage for Wide Area Movements[J]. Proceeding of International Conference on Electrical Machines and Systems. 2007:1486~1491
16. D. Ebihara, M. Watada. Study of a Basic Structure of Surface Motor. IEEE Trans. Magn. 1989,25(5): 3916~3918
17. Jiayong Cao, Yu Zhu, Jinsong Wang. A Novel Synchronous Permanent Magnet Planar Motor and Its Model for Control Applications. IEEE Trans. Magn. 2005,41(6): 2156~2162
18. Han-Sam Cho, Hyun-Kyo Jung. Analysis and Design of Synchronous Permanent-Magnet Planar Motors[J]. IEEE Trans.on Energy Conversion. 2002,17(4): 492~499
19. Gao W, Dejima S, Yanai H. A Surface Motor-Driven Planar Motion Stage Integrated with an xyθz Surface Encoder for Precision Positioning. Precision Eng. 2004,(28): 329~337
20. Flores Filho A. F, Susin A. A, Silveira da M. A. Application of Neodymium-Iron-Boron Permanent Magnets on the Assembling of a Novel Planar Actuator[J] .IEEE Trans.on Magn.1999,35(5): 4034~4035
21. Chaodong Li, Shi Xu, Runfeng Liu. Dynamic Analysis and Optimal Design of a Novel Small 2-D planar Ultrasonic Motor. IEEE Ultrasonics Sympoisum. 2006: 2269~2272
22. Fujii N, Okinaga K. Linear x-y Synchronous Motor without Force Ripple and Core Loss for Precision Two-Dimension Drive[J]. IEEE Trans on Magnetics, 2002,38(5):3273~3275
23. Asakawa T. Two Dimensional Position Device. US:4626749, 1986
24. Hazelton A J. Planar Electric Motor with Two Sided Magnet Array. US:2002/0149270, 2002
25. Hazelton A J. Compact Planar Motor Having Multiple Degrees of Freedom. US:6097114, 2000
26. Asakawa T. Two-Dimensional Precise Positioning Device for Use in A Semiconductor Manufacturing Apparatus. US:4535278, 1985
27. Asakawa T. Two Dimensional Driving for Use in A Positioning Device in A Semiconductor Manufacturing Apparatus. US:4555650, 1985
28. Hazelton A J. Planar Electric Motor with Dual Coil and Magnet Arrays. US:6144119, 2000
29. Hazelton A J, Gery J M. Wedge and Transverse Magnet Arrays. US:6188147, 2001
30. Hazelton A J, Gery J M. Planar Electric Motor and Positioning Device Having Transverse Magnets. US:6285097, 2001
31. Han-Sam Cho, Chang-Hwan Im, Hyun-Kyo Jung. Magnetic Field Analysis of 2-D Permanent Magnet Array for Planar Motor. IEEE Trans.on Magn. 2001,37(5): 3762~3766
32. Huang J H, Kim H, Chun J S. Planar Motor. US:6548917, 2001
33. Kim W J. High-Precision Planar Magnetic Levitation. PhD Thesis,MIT, 1997
34. Trumper D L, Kim W J, Williams M E. Magnetic Arrays. US:5631618, 1997
35. Cho H S, Jung H K. Effect of Coil Position and Width on Back-EMF Constant of Permanent Magnet Planar Motors. Electric Machines and DrivesConference, IEMDC of IEEE International, 2001:430~435
36. Hazelton A J, Binnard M B, Gery J M. Electric Motors and Positioning Device Having Moving Magnet Arrays and Six Degrees of Freedom. US:6208045
37. Hazelton A J, Tanaka K, Hayashi Y. Reaction Force Isolation System for A Planar Motor. US:6252234, 2001
38. Binnard M B. Planar Motors with Linear Coil Arrays. US:6445093, 2002
39.寇宝泉,贵献国,吴红星等.复合电流驱动九相平面电机、直线-旋转电机及其驱动器[P]. 200910138883.1
40.张盛峰.永磁直线同步电动机关键技术的研究.沈阳工业大学硕士学位论文. 2007: 23~26
41. J. de Boeij, E. Lomonova, A.J.A. Vandenput. Modeling Ironless Permanent- Magnet Planar Actuator Structures. IEEE Trans. On Magnetics. 2006,42(8): 2009~2016
42.郭亮.新型同步电机的分析与优化研究.浙江大学博士学位论文. 2006: 29~31
43.武瑛.新型无接触供电系统的研究.中国科学院研究生院博士学位论文. 2004:49~51
44.秦世耀.空芯动圈式直线永磁同步电动机的研究分析.太原理工大学硕士学位论文. 2002:40~42
45.李红涛.长初级直线感应电动机的设计及其电磁场与温度场研究.哈尔滨理工大学硕士学位论文. 2008:20~23
46.彭威.长初级直线感应电动机的设计与研究.哈尔滨工业大学硕士学位论文. 2007: 20~28
47.刘晓.空心式永磁直线伺服电机及其驱动控制系统研究.浙江大学博士学位论文. 2008: 70~71
48. Jeong-Woo Jeon, Mitica Caraiani, Yong-Joo Kim. Development of Magnetic Levitated Stage for Wide Area Movements. Proceeding of International Conference on Electrical Machines and Systems. 2007: 1486~1491