物体表面轮廓光学动态检测与特征识别
|
摘要
光学三维轮廓测量由于其非接触性、高精度与高分辨率、测量速度快、自动化程度高，被公认是最有前途的三维轮廓测量方法，物体三维表面轮廓测量在现代工业及实际生产中起着越来越重要的作用，对动态物体与目标的三维轮廓特征的快速检测与识别尚存在高精度动态过程检测的问题，这已成为目标特征识别、工业与工程在线检测的热点和亟待解决的问题。在广泛调研、归纳和总结的基础上，对国内外研究物体表面三维形貌测量这一学科领域内容和发展前景有了一个全面的了解。再根据我们的条件，本文主要针对动态目标的三维轮廓的检测和特征识别问题，在激光测距扫描特征轮廓提取与结构光条纹三维轮廓检测与识别开展研究。
(1)提出了利用最小二乘估计器构造自适应滤波器的思想，基于目标本身形态的总体尺度范围特征设定滤波窗口，结合目标先验特征，建立了激光测距扫描特征轮廓提取与目标识别定位模型，实现从三维动态物体的一维特征数据进行目标定位识别的目的。通过算法分析与实验结果分析表明，该算法能够满足实时条件下的目标识别要求。
(2)提出了利用自适应标准模版匹配，分选破损的公路路面，解决高速公路破损路面结构光图像分选问题，从而实现对高速公路路面形变的快速实时检测。
(3)提出一种数字三色条纹相移形貌投影栅线法，通过单帧条纹投影图像，利用三步光强相移算法完成物体表面的形貌重建；提高了从单帧条纹投影图像重建物体三维轮廓的质量，不需要相移装置而误差较小，成本较低，简易实用，将有利于推广到动态实时分析。
Optical measurement of objects' 3D surface profiles is well-known as themost promising 3D profile measurement method for its features such asnon-contact measurement, high accuracy and high resolution, high speedmeasurement and high automation degree. The measurement of objects' 3Dsurface profiles is more and more important in the modern industry andpractical manufacture. But high precision and dynamic procedure measurementfor rapid measurement and identification of dynamic objects' 3D profilesand characteristics becomes the hotspots and the desiderating issues ofobject charactertistic identification and industry and engine onlinemeasurement. Based on wide-ranging investigation and generalization,according to our condition, the researching direction had been determinedto study of characteristic distillation from laser distance measurementprofile and 3D profile measurement of stuctrued light fringe for themeasurement and characteristic identification of dynamic object's 3Dprofile.
1. This paper introduces a new arithmetic approach to the objectidentification of lidar range image by using the least squares estimationand linear glide updater for the design of a filter. The filter window isset up in accordance to the characteristics of object shape size and objects'prior characteristic. This arithmetic approach can have an easy access tothe process of object identification. The arithemetic analysis andexpirements results illuminate that the arithemetic is fit to real-timeobject identification.
2. An algorithm of self-adopted standard template matching is introduced.The algorithm, which based on characteristic image identification, pick outthe distress pavement road surfaces, solve the structured light imagesclassification problem of highway pavement distree road surface and realizehigh-speed and real-time measurement of high-way pavement surfacesdeformation.
3. The tricolor fringe phase-shifting technique in digital projectiongrating profilometrY to reconstruct the profiles of object surface is proposed. Only one fringe pattern is used to reconstuct the profiles of objectsurface by the advanced thchnique combined with a three-step phase-shiftingalgorithm without any phase-shifitng devices. The technique improves theobjects' 3D profile reconstruction quality from single fringe pattern byprojection grating. The proposed technique is economical and practicle andmaybe use for the dynamic tea-time analysis. The experiment illuminates thatthe technique is right and feasible.
(1)提出了利用最小二乘估计器构造自适应滤波器的思想，基于目标本身形态的总体尺度范围特征设定滤波窗口，结合目标先验特征，建立了激光测距扫描特征轮廓提取与目标识别定位模型，实现从三维动态物体的一维特征数据进行目标定位识别的目的。通过算法分析与实验结果分析表明，该算法能够满足实时条件下的目标识别要求。
(2)提出了利用自适应标准模版匹配，分选破损的公路路面，解决高速公路破损路面结构光图像分选问题，从而实现对高速公路路面形变的快速实时检测。
(3)提出一种数字三色条纹相移形貌投影栅线法，通过单帧条纹投影图像，利用三步光强相移算法完成物体表面的形貌重建；提高了从单帧条纹投影图像重建物体三维轮廓的质量，不需要相移装置而误差较小，成本较低，简易实用，将有利于推广到动态实时分析。
Optical measurement of objects' 3D surface profiles is well-known as themost promising 3D profile measurement method for its features such asnon-contact measurement, high accuracy and high resolution, high speedmeasurement and high automation degree. The measurement of objects' 3Dsurface profiles is more and more important in the modern industry andpractical manufacture. But high precision and dynamic procedure measurementfor rapid measurement and identification of dynamic objects' 3D profilesand characteristics becomes the hotspots and the desiderating issues ofobject charactertistic identification and industry and engine onlinemeasurement. Based on wide-ranging investigation and generalization,according to our condition, the researching direction had been determinedto study of characteristic distillation from laser distance measurementprofile and 3D profile measurement of stuctrued light fringe for themeasurement and characteristic identification of dynamic object's 3Dprofile.
1. This paper introduces a new arithmetic approach to the objectidentification of lidar range image by using the least squares estimationand linear glide updater for the design of a filter. The filter window isset up in accordance to the characteristics of object shape size and objects'prior characteristic. This arithmetic approach can have an easy access tothe process of object identification. The arithemetic analysis andexpirements results illuminate that the arithemetic is fit to real-timeobject identification.
2. An algorithm of self-adopted standard template matching is introduced.The algorithm, which based on characteristic image identification, pick outthe distress pavement road surfaces, solve the structured light imagesclassification problem of highway pavement distree road surface and realizehigh-speed and real-time measurement of high-way pavement surfacesdeformation.
3. The tricolor fringe phase-shifting technique in digital projectiongrating profilometrY to reconstruct the profiles of object surface is proposed. Only one fringe pattern is used to reconstuct the profiles of objectsurface by the advanced thchnique combined with a three-step phase-shiftingalgorithm without any phase-shifitng devices. The technique improves theobjects' 3D profile reconstruction quality from single fringe pattern byprojection grating. The proposed technique is economical and practicle andmaybe use for the dynamic tea-time analysis. The experiment illuminates thatthe technique is right and feasible.
引文
1. Markus ChristianAmann, Thierry Bosch, RistoMyllyla, etal. Laser ranging: Acritical review of usual techniques ordistance measurement [5]. Opt. Eng, 2001, 40(1):10-19.
2. R Myllyla, J Marsalis, J Kostamovaara, et al. Imaging distance measurements using TOF lidar[J]. J. Opt., 1998, 29, 188-193.
3. Kobayashi. Handbook on experimental mechanics, New 5ersey: Prentic-Hall, Englewood Cliffs, 1987.
4．云大真，于万明．结构分析光测力学．大连：大连理工大学出版社，1996．
5. Takeda M, Ina H, Koboyashi S. Fourier-transform method of fringe-pattern analysis for computer based topography and interferometry. J. Opt. Soc. Am., 1982, 72(1):156-160
6. M. Takeda K. Mutoh. Fourier transform profilometry for the automatic measurement of 3D object shapes. Appl. Opt. 1983, 22(24):3977-3987
7. J. Li, X. Y. Su, L. R. Guo. An improved Fourier transform profilometry for automatic measurement of 3D object shapes. Opt. Engng., 1990, 29(24):1439-1444
8. J. F. Lin, X. Y. Su, Two-dimensional Fourier transform profilometry for the automatic measurement of three-dimensional object shapes. Opt. Engng., 1995, 34(11):3297-3302
9. V. Srinivasan, H. C. Liu, M. Halioua. Automated phase-measuring profilometry of 3D diffuse objects., Appl. Opt., 1984, 28(18):3105-3108
10. X. Y. Su, W. S. Zhou, G. VonBally et al. Automated phase-measuring profilometry using defocused projection of a Ronchi grating. Opt. Commun., 1992, 94(6):561-573
11. X. Y. Su, G. VonBally, D. Vukicevic, Phase-stepping grating profilometry: utilization of intensity modulation analysis in complex objects evaluation. Opt. Common., 1993, 98(1/2/3):141-150
12. T. R. Hudge, C. Quan, P. J. Bryanston-Cross, Holographic deformation measurements by Fourier transform technique with automatic phase unwrapping. Opt. Engng., 1992, 31(3):533-543
13. C. 5. Tay, C. Quan, H. M. Shang, Shap identification using phase shifting interferometry and liquid-crystal phase modulator. Optics & Laser Technology, 1998, (30):545-550
14. Henril 0. Saldner, Jonathan M. Huntley, Shape Measurement of Discontinuous Objects Using Projected Fringes and Temporal Phase Unwrapping. IEEE 0-8186-7943-3/97, 44-50
15. Y. M. He, C. J. Tay, H. M. Shange, Deformation and Profile Measurement using the Digital Projection Grating Method. Optics & Lasers in Engineering, 1998, (30):367-377
16. Piotr Garbat, Malgorzata Kujawnska, Combining fringe projection method of 3D object monitoring with virtual reality environment: concept and initial results. Proceedings of the First International Symposium on 3D Data Processing Visualization and Transmission (3DPVT. 02), 0-7695-1521-5/02, 2002 IEEE
17. Takasaki H. Generation of surface contours by moire Dattern. Appl. Opt., 1970, 9(4):942-947
18. Yoshizaw T. The recent trend of moire metrology. J Robotics Mechatron, 1991, 3(3):80-85
19. Srinivasan V, Liu HC, Halioua M. Automated phase measuring profilometry of 3D diffuse object. Appl. Opt. 1984, 23(18):3105-3108
20. Wen-Sen Zhou, Xian-Yu Su. A direct mapping algorithm for phase-measuring profilometry. J Mod Opt., 1994, 41(1):89-93
21. Li J. L., Xianyu su, Su HJ. Removal Of carrier frequency in phase-shifting techniques. Opt Lasers Eng, 1998, 30(1):107-115.
22. Zhang H, Lalor MJ, Buron DR. Spationtemporal phase unwrapping for the measurement of discontinuous objects in dynamic fringe-projection phase-shifting profilometry. Appl. Opt., 1999, 38(16):3534-3541
23. T. R. Judge, P. J. Bryanston-Cross. A review of phase unwrapping techniques in fringe analysis. Opt. & Laser in Engng., 1994, 21(4):199-239
24. Xianyu Su, Likun Su. New 3D Drofilometry based on modulation measurement. Proc SPIE, 1998, 3558:1-7
25. Xianyu Su, Likun Su, Wansong Li. A new Fourier transform profilometry based on modulation measurement. Proc. SPIE, 1999, 3749:438-439
26. Likun Su, Xianyu Su, Wansong Li. Application of modulation measurement profilometry to objects with surface holes. Appl. Opt., 1999, 38(7):1153-1158
27. J. Li, X. Y. Su, L. R. Guo, An improved Fourier transform profilometry for automatic measurement of 3D object shades. Opt. Engng., 1990, 29(24):1439-1444
28．郝煜栋，赵洋，李达成，光学投影式三维轮廓测量技术综述。光学技术．，1998，(5)：57-60
29. P. Graebling, A. Lallenment, D. Y. Zhou, E. Hirsch, Optical High-precision trhee0dimensional vision-based quality control of manufactured parts by use of synthetic images and knowledge for image-data evaluatin and interpretation. Appl. Opt., 2002, 41(14):2627-2643
30. S. H. Wang, C. J. ray, C. G. Quan, H. M. shang, Investigation of membrane deformation by a fringe projection method. Appl. Opt. 2002, 41(1):101-107
31. C. J. Tay, C. Quan, H. M. Shang, Shape identification using phase shifting interferometry and liquid-crystal phase modulator. Optics & Laser Technology. 1998, (30):545-550
32. G. Stoilov & T. Dragostinov. Phase-steping Interferometry: Five-frame Algorithm with an Arbitrary Step. Opt. & Laser in Engng., 1997, (28):61-69
33．钱克矛，吴小平．相移技术中五步等步长Stoilov算法的性能分析．光学技术，2001，27(1)：13-16
34．候立周，强锡富，孙晓明．几种任意步距步进相移算法的误差分析与对比．光学技术，199，(5)：7-10
35. J. L. Li, X. Y. Su, H. J. Su, Removal of carrier frequency in phase-shifting techniques. Opt. & Laser In Eng., 1998, (30):107-115
36. K. Creath, Y. Y. Chen, Contouring aspheric surfaces using two-wavelength phase shifting interferometry. Optical Acta., 1985, (32):1455-1464
37. T. Tsuruta, N. Shiotake, J. Tsujjuchi, K. Matsuda, Holographic generation of contour map of diffusely reflecting surface by using immersion method. Jpn. J. Appl. Phys., 1967, (6):661-662
38. X. J. Xie, M. J. Lalor, D. R. Burton, M. M. Shaw. Phase-unwrapping algorithm in the presence of discontinuities using a system with crossed grating. Opt. & Laser in Eng., 1998, (29):49-59
39．陈晓荣，蔡萍，施文康．光学非接触三维形貌测量技术新进展．光学精密工程，2002，10(5)：528-532
40. Y. Hosni, L. Ferreira. Laser based system for reverse engineering. Computer and Eng., 1994, 26(2):387-394
41．居琰，汪同庆，刘建胜，王贵新，陈雍乐．基于光切法的三维脚型测量仪原理及系统设计．传感器技术，2002，21(4)：18-21
42．李兵，罗意平，王昭，蒋庄德．多光刀三维轮廓快速测量方法研究．光子学报，2003，32(6)：738-741
43．张广军，田叙．结构光三维视觉及其在工业中的应用．北京航空航天大学学报，1996，22(6)：650-654
44．李晓莹，马炳和，苑伟政．基于光切法的微结构三维尺寸测量．航空精密制造技术，1998，34(5)：38-40
45．吴剑波，桑波，赵宏，谭玉山．光切法三维测量在逆向工程中的问题分析．西安交通大学学报，2001，35(9)：949-953
46．张舜德，卢秉恒，丁玉成．自调心伪双CCD光切360°三维轮廓测量系统．光子学报，2000， 29(9)：824-828
47．陈伟民，王晓林，黄尚廉．双光源光切法三维轮廓测量的误差分析．仪器仪表学报，1996，17(2)：149-153
48．吴剑波，崔振，赵宏，谭玉山．光刀中心自适应阈值提取法．工具技术，2000，10：27-29
49．王晓林，陈伟民，黄尚廉．光切法三维轮廓测量的原理及其应用．光学技术，1997，(3)：39-43
50. Kai Wolf, Dieter Roller, Dirk Schafer. An approach to computer-aided quality control based on 3D coordinate metrology. Journal of Materials Processing Technology, 2000, (107):96-110
51. R. Jones, C. Wykes. Holographic and speckle interferometry. Cambridge University Press, Cambridge. 1989
52．方强，陈家璧著．全息散斑计量学．北京：科学出版社，1995
53. Domenica paolitti, Givseppe schirripa spagnolo. Automatic digital Speckle pattern interferomtry contouring inartwork surface inspection. Opitical Engineering, 1995, (32):1348-1353
54. Rodriguez vera R, Keer D. Dsiplacement and shape information using electronic speckle contouring. SPIE., 1993, (2004):52-62
55．候立周，强锡富．数字散斑干涉技术在形貌测量中的应用及进展．宇航计测技术，1999，19(3)：45-50
56. K. Creath. Phase shifting speckle interferometry. Appl. Opt., 1985, (24):3053-3058
57. S. Winther, G. A. Slettemoen. An ESPI contouring technique in strain analysis. Proc. SPIE., 1984, (473):44-47
58. B. D. Bergquist, P. C. Montgonery. Contouring by electronic speckle pattern interferometry(ESPI). Proc. SPIE., 1985, (599)L189-195
59. Rodriguez vera R., Kerr D. Mendoza santoyo E. Electronic speckle contouring. J. Opt. Soc. Am., 1992, (A9):2000-2008
60. Ganesan A. R., Sirohi R. S. New method of computing using digital speckle pattern interferometry(DSP). Proc. SPIE., 1988, (954):327-332
61. Shi D, Qin J, Hung YY. Automated measurement of 3D shapes by a dual beam digital speckle interferometric technique. Proc. SPIE., 1991, (1554A):680-689
62. Joenathan C, Pfister B, Tiziani HJ. Contouring by electronic speckle pattern interferometry employing dual beam illumination. Appl. Opt. 1990, (29):1905-1911
63. Peng X, Diao HY, Zou YL, Tiziani H. Coutouring by modified dual beam ESPE based on tilting illumination beams. Optics, 1992, (90):61-64
64. Zou Y, Pedrini G, Tizian H. Contouring by electronic speckle pattern interferometry employing divergent dual beam illumination. J. M. Opt., 1994, (41):1637-1652
65. Peng X, Zou YL, Diao HY, Tizian HJ. A simplified multi wavelength ESPI contouring technique based on a diode laser system. Optics, 1992, (91):81-85
66. Zou Y, Peng X, Tiziani H. Two wavelength DSPI surface contouring through the temperature modulation of a laser diode. Optics, 1993, (94):155-158
67. Franze B, Tiziani HJ. Multiple wavelength n oblique incidence interferometer for rough surface measurement using laser diodes. J. M. Opt., 1998, (45):861-872
68．乐开端，王创社，赵宏，谭玉山．大动态范围形变测量．光子学报，1998，27(6)：558-562
69. Leenderz J. A. Interferometric displacement measurement on scatting surface utilizing speckle effect. J. Phys. E:Sci. Instrument, 1970, (3):214-218
70. Buffersj N, Leenderz J. A. Holographic and video techniques applied to engineering measurement. Trans. Inst. Measure, 1971, (14):349-354
71. Jones R, Wykes C. Holographics and speckle interferometry. Cambridge University Press, Cambridge, 1989.
72. Hildebrand BO., Haines KA, Multiple wavelength and multiple source holography applied to contour generation, J. Opt. Soc. Am., 1967, (58):155-162
73. Minsky M. Microscopy Apparatus. U. S. Patent. No. 3013467. Dec. 19, 1961
74. Zinser G. Topographic measurements at the fundus with the Heidelberg retina tomography.视觉科学, 1992, 13(4):1-9
75. Wilson r. Depth response of scanning microscopes. Optik, 1989, 81(3):113-118
76. Sheppard CJR, Matthews HJ. The extended-focus, auto-focus and surface-profiling techniques of confocal microscopy. Mod. Opt., 1988, 35(1):145-154
77. Sheppard CJR, Gu M. Approximation to the three-dimensional optical transfer function. J. Opt. Soc. Am. (A)., 1991, 8(4):692-694
78. Gu M, Sheppard CJR. Three-dimensional partially-coherent image for mation in confocal microscopes with a finite-sized detector. Mod. Opt. 1994, 41(9):1701-1715
79. Tiziani HJ, Achi R, Kramen R Netal. Theoretical analysis of confocal microscopy with microlenses. Appl. Opt., 1996, 35(1):120-125
80．田维坚，丁志华，郭履容等．一种全场三维共焦检测的新方法．光学学报，1998，18(6)：757-761
81．吴世法．近代光学成像技术与图像处理．第一版．北京：国防工业出版社，1997，242-253
82．邓小强，刘力，杨莉松，王桂英，徐至展．超分辨在共焦三维形貌检测术中的应用．光学学报，2001，21(7)：853-856
83．杨莉松，王桂英，王建岗，步扬，徐至展．反射式光纤共焦扫描成像的研究．光学学报，1999，19(7)：962-967
84．孔兵，王昭，谭玉山，弥宁．共焦显微镜三维轮廓快速测量方法及其误差分析．光子学报，2000，29(6)：549-553
85. Sherrington and E.H. Smith. The Significance of surface topography in engineering. Prec. Eng., 1986, 8(2)
86. K. mitsui. In-process sensors for surface roughness and their applications. Prec. Eng., 1986, 8(4)
87. Karl H. Guenther, Peter G. Wierer. Surface roughness measurements of low-scatter mirrors and roughness standards. Appl. Opt., 1984, 23(21):3820-3835
88. Bharat Bhushan, James C. Wyantand, Chris L. Koliopoulos. Measurement of surface topography of magnetic tapes by mirau interferometry., Appl. Opt., 1985, 24(10):1489-1497
89．王世华，周肇飞等．便携式表面粗糙度测量仪．计量学报，1995，18(1)：28-31
90. M. Shiraishi: In-process measurement of surface roughness in turning by laser beam. ASME J Eng. for Industry, 1981, 103(2):203-209
91. Tsuguo Kohno, Norimitsu Ozawa. High precision optical surface sensor. Appl. Opt. 1998, 27(1):103-108
92. M. J. Offside, M. G. Somekh. A phase-sensitive optical heterodyne interferometer for surface height measurement. Trans. Inst. M. C., 1991, 1392):115-124
93. M. J. Downs, W. H. Mc givem and H. J. Ferguson. Optical system for measurement the profile of super-smooth surface., Prec, Eng., 1985, 7(4):211-215
94. Basil A. Omar, Alan J. Hooloway and David C. Emmony. Differential phase quadrature surface profiling interferometer. Appl. Opt., 1990, 29(31):4715-4719
95．武勇军：用于在线检测表面粗糙度的激光外差干涉仪的研究[D]清华大学博士后出站报告，1996
96．WYKO公司1996年NT-2000产品介绍
97．高宏：表面形貌非接触测量方法的研究[D]清华大学博士学位论文，1991
98．ZYGO公司1996年Newview 2000产品介绍
99. Y. Matsuno, H. Yamada, etal. The microtopography of the grinding wheel surface with SEM. Ann. CIRP., 1975, 24(1)
100．戴道宜．扫描隧道显微镜．物理，1985，14(4)
101. John M. Guerrao Photon tunneling microscopy. Appl. Opt., 1990, 29(26):3741-3751
102. Chin Y. Poon, Bharat Bhushan. Comparison of surface measurements by stylus profiler, AFM and non-contact optical profiler. Wear, 1995, 190:76-88
103. Jean M. Bennet, Virgil Elingsand Kevin Kjoller. Recent development in profiling optical surfaces Appl. Opt., 1993, 32(19):3442-3447
104. K. J. Stoutand, L. Blunt. A. Route to Standardization of 3D Surface Topography. Characterization and Functional Verification. ISMTII 1996, Hayama Kanagawa Pref. JAPAN
105．朱星．近场光学与近场光学显微镜．北京大学学报(自然科学版)．，197，33(3)：394-407
106. Suzuki M, Kanaya M. Application of Moire topography measurement methods in industry. Opt. & Laser Engng., 1988, 8(3):171-188
107．王昭，赵宏，谭玉山．相移阴影莫尔轮廓术的相位去包裹处理新技术．半导体光电，1998，19(5)：347-350
108. J. Degrieck, W. Van Paepegem*, P. Boone. Application of digital phase-shift shadow Moire to micro deformation measurements of curved surfaces. Opt. & Laser in Enginerring, 2001, (36)29-40
109. K. Patorski. Moire methods in interferometry. Opt. & Laser in Enginerring, 1998, 8:147-170
110. P. Carre, lnstalation et utilisation du comparateur photoelectrique et interferential du Bureau International des Poids et Mesures, Metrologia, 1966, 2:13-23
111. H. Bruning, D. R. Herriott, J. E. Gallagher, et al., Digital wavefront measurement interferometer for testing optical surfaces and lenses, App. Opt.,1974, 13:2693-2703
112. J. C. Wyant, Use of an ac Heterodyne Lateral Shear Interferometer with Real-Time Wavefront Correction Systems, App. Opt., 1975, 14:2622-2626
113. C. J. M organ, Least squares estimation.in phase-measurement interferometry, Opt. Lett., 1982, 7:368-370
114. O. Y. Kwon, Multichannel phase-shifted interferometer, Opt. Lett., 1984.9:59-61
115. J. E. Greivenkamp, Generalized data reduction for heterodyne interferometry, Opt. Eng., 1984, 23:350-352
116. R. N. Smart and J. Strong, J. Opt. Soc. Am., 1972, 62:737-
117. R. N. Shagam and J. C. Wyant, Optical Frequency Shifter for Heterodyne Interferometers Using Simple Rotating Polarization Retarders, App. Opt., 1978, 17:3034-3041
118. Y. Ishii, J. Chen and K. Murata, Digital Phase-Measuring Interferometry with a Tunable Laser Diode, Opt. Left., 1987, 12:233-235
119. Y. Ishii and R. Onodera, Phase-extraction algorithm in laser diode phase-shifting interferometry, Opt. Lett., 1995, 20:1883-1885
120. J. Schwider, R. Burow, K, E. Elssner, J. Grzanna, R. Spolaczyk, and K. Merkel, Digital Wavefront Measuring Interferometry: Some Systematic Error Sources, App. Opt., 1983, 22:3421-3432
121. Y. Y. Cheng and J. C. Wyant, Phase-shifter calibration in phase-shifting interferometry, App. Opt., 1985, 24:3049-3052
122. P. Hariharan, B. F. Oreb, T. Eiju, Digital phase-shifting interferometer: a simple error-compensating phase calculation algorithm, App. Opt., 1987, 26: 2504-2506
123. C. Ai, and J. C. Wyant, Effect of piezoelectric transducer nonlinearity on phase shift interferometry, App. Opt., 1987, 26:1112-111
124. K. K. innstactter, A. W. Lohmann, J. Schwider and N. Streibl, Accuracy of phase shift interferometry, App. Opt., 1988, 27:5062-5089
125. J. Schwider, O. FalkenstOrfer, H. Schreiber, A. ZOller, et al., New compensating four-phase algorithm for phase-shift interferometry, Opt. Eng., 1993, 32:1883-1885
126. K. Greath and P. Hariharan, Phase-shifting errors in Interferometric tests with high-numerical-aperture reference surfaces, App. Opt., 1994, 33:24-25
127. P. de Groot, Phase-shift calibration errors in interferometers with spherical Fizeau cavities, App. Opt., 1995, 34:2856-2863
128. J. Schwider, T. Dresel, and B. Manzke, Some considerations of reduction of reference phase error in phase-stepping interferometry, App. Opt., 1999, 38:655-659
129. K. Freischlad and C. L. Koliopoulos, Fourier description of digital phase-measuring interferometry, J. Opt. Soc. Am., 1990, A7:542-551
130. G. Lai, T. Yatagai, Generalized phase-shifting interferometry, J. Opt. Soc. Am., 1991, A8:822-827
131. K. G. Larkin, and B. F. Oreb, Design and assessment of Symmetrical Phase-Shifting Algorithms, J. Opt. Soc. Am., 1992, A9:1740-1748
132. G. S. Han and S. W. Kim, Numerical correction of reference phases in phase-shifting interferometry by iterative least-square sfitting, App. Opt., 1994, 33:7321-7325
133. I.B. Kong, S.-W. Kim, General algorithm of phase-shifting interferometry by iterative least-square sfitting, Opt. Eng., 1995, 34:183-188
134. C. Rathjen. Statistical properties of phase-shift algorithms, J. Opt. Soc. Am., 1995, A12:1997-2008
135. K. Hibino, Susceptibility of systematic error-compensating algorithms to random noise in phase-shifting interferometry, App. Opt., 1997, 36:2084-2093
136. K. Hibino, B. F. Oreb, D.I. Farrant, and K. G. Larkin, Phase-shifting algorithms for nonlinear and spatiallynon uniform phase shifts, J. Opt. Soc. A m., 1997, A 14:918-930
137. D. W. Phillion, General methods for generating phase-shifting interferometry algorithms, App. Opt., 1997, 36:8098-8115
138. C. T. Farrell, M. A. Player, Phase step measurement and variable step algorithms in phase-shifting interferometry, Meas. Sci. Techol., 1992, 3:953-958
139. C. T. Farrell, and M. A. Player, Phase-step insensitive algorithms for phase-shifting interferometry. Meas. Sci. Techol., 1994, 5:648-652
140. B. Zhao, A statistical method for fringe intensity-correlatederror in phase-shifting measurement: The effect of quantization error on the N-bucket algorithm, Meas. Sci. technol., 1997, 8:147-153
141. A. Dobroiu, P. C. Logofatu, D. Apostol and V. Damian, Statistical self -calibrating algorithm for three-sample phase-shift interferometry, Meas. Sci. technol., 1997, 8:738-745
142. E. W. Rogala and H. H. Barrett, Phase-shifting interferometry and maximum-likelihood estimation theory, App. Opt., 1997, 36:8871-8876
143. E. W. Rogala, H. H. Barrett, Phase-shifting interferometry and maximum-likelihood estimation theory Ⅱ: A generalized solution, App. Opt., 1998, 37:7253-7258
144. Y. Surrel, Phase stepping: a new self-calibrating algorithm, App. Opt., 1993, 32:3598-3600
145. B. Zhao, Y. Surrel, Phase shifting: six-sample self-calibrating algorithm insensitive to the second harmonic in the fringe signal, Opt. Eng., 1995, 34:2821-2822
146. K. Hibino, B. F. Oreb, D. I. Farrant, K. G. Larkin, Phase-shifting interferometry for non-sinusoidal waveforms with phase-shift errors, J. Opt. Soc. Am., 1995, A12:761-768
147. K. Hibino, B.F. Oreb, D.I. Farrant, K.G. Larkin, Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts, J. Opt. Soc. Am., 1997, A14:918-930
148. Y. Surrel, Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts: comment, J. Opt. Soc. Am., 1998, A15:1227-1233
149. K. Hibino, B. F. 0reb, D. I. Farrant, K. G. Larkin, Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts: reply to comment, J. Opt. Soc. Am., 1998, A15:1234-1235
150. B. Gutmann, H. Weber, Phase-shifter calibracation and error detection in phase-shifting applications: a new method, App. Opt., 1998, 37:7624-7631
151. G. D. Lassahn, J. K. Lassahn, P. L. raylor, V. A. Deason, Multi phase fringe analysis with unkown phase shifts, Opt. Eng., 1994, 33:2039-2044
152. B. Strobel, Processing of interferometric phase maps as complex-valued phasor Images, App. Opt., 1996, 35:2192-2198
153. P. de G root, Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window, App. Opt., 1995, 34:4723-4730
154. P. de Oroot, Vibration in phase-shifting interferometry, J. Opt. Soc. Am., 1995, A12:354-365
155. P. de Groot, L. Deck, Numerical simulations of vibration in phase-shifting interferometry, App. Opt., 1996, 35:2172-2178
156. L. Deck, P. de Groot, Punctuated quadrature phase-shifting interferometry, Opt. Lett., 1998, 23:19-21
157. M. Melozzi, L. Pazzati and A. Mazzoni, Vibration-insensitive interferometer for on-line measurements, App. Opt., 1995, 34:5595-5600
158. P. Harihamn, Digital phase-stepping interferometry" effects of multiply reflected beams, App. Opt., 1987, 26:2506-2507
159. C. Ai, J. C. Wyant, Efect of Spurious Reflection on Phase Shift Interferometry, App. Opt., 1988, 27: 3039-3045
160. C. Brophy, Efect of intensity error correlation on the computed phase of phase-shifting interferometry, J. Opt. Soc. Am., 1990, A7:537-541
161. X. Chen, M. Gramaglia and J. A. Yeazell, Phase-shifting interferometry with uncalibrated phase shifts, App. Opt., 2000, 39:585-591
162. K. Hibino and M. Yamauchi, Phase-measuring algorithm to suppress spatially nonuniform phase modulation in a two-beam interferometer, Opt. Rev., 2000, 7: 543-549
163. K. A. Goldberg and J. Bokor, Fourier-transform method of phase-shift determination, App. Opt., 2001, 40:2886-2894
164. T. Suzuki, X. F. Zhao and O. Sasaki, Phase-locked phase-shifting laser diode interferometer with photothermal modulation, App. Opt., 2001, 40:2126-2131
165. L. L. Deck, Fourier-transform phase-shifting interferometry, App. Opt., 2003, 42:2354-2365
166. B. K. A. Ngoi, K. Venkatakrishnan and N.R. Sivakumar, Phase-shifting interferometry immune to vibration, App. Opt., 2001, 40:3211-3213
167. J. M. Huntley and H. O. Saldner, Temporal phase-unwrapping algorithm for automatic interferogram analysis, App. Opt., 1993, 32:3047-3052
168. H. O. Saldner and J. M. Huntley, Temporal phase unwrapping: application to surface profiling of discontinuous objects, App. Opt., 1997, 36:2770-2775
169. C. Joenathan, B. Franze, P. Haible and H. J. Tiziani, Speckle interferometry with temporal phase evaluation for measuring large-object deformation, App. Opt., 1998, 37: 2608-2614
170. L. R. van den Doel, L. J. van Vliet, Temporalphase-unwrapping algorithm for dynamic interference pattern analysis in interference-contract microscopy, App. Opt., 2001, 40:4487-4500
171. G. Pedrini, I. Alexcenko, W. Osten and H. J. Tiziani, Temporal phase unwrapping of digital hologram sequences, App. Opt., 2003, 42:5846-5853
172. J. M. Huntley, G. H. Kaufmann and D. Kerr, Phase-shifting dynamic interferometry at 1 k Hz, App. Opt., 1999, 38: 6556-6563
173. F Blsis. Review of 20 years of rangesensor development [A]. Proceedings of SPIE & IS & T Electronic Imaging[C].SPIE2003Vol. 5013.
174. R Baribeau, M Rioux. Influence of speckle on laser range finders[J]. Appl. Opt., 1991, 30: 2873-2878.
175．陈伟民等．双光源光切法三维轮廓测量的误差分析[J]．仪器仪表学报，1996，17(2)：149-153．
176. Li H J, Yang Shenghui. Using range profiles as feature vectors to identify aerospace objects[J]. IEEE Transactions on Antennas and Propagation, 1993, 41(3): 261～268
177．李跃华，李兴国．小波谱估计用于雷达目标成像和识别[J]．红外与毫米波学报，1999，18(4)：283～288
178．李跃华，高敦堂，沈庆宏等．小波神经网络的毫米波雷达目标一维距离像识别[J]．南京理工大学学报，2002，26(1)：20～23
179．D．格罗彼．时间序列分析辨识与适应性滤波[M]．北京：科学出版社，1987
180. Robinson PM., No-parametric estimation for time series models[J], J. Time series Anal., 1983, 4:185～208
181．G．C．古德温，孙贵生．自适应滤波、预测与控制．北京：科学出版社，1992
182. Charles K Chui. An Introduction to Wavelets, Academic Press, 1995:89～120
183. Mallat S. Characterization of signals from multiscale edges. IEEE Trans. PAMI, 1989, 1(7):674～69
184. Mallat S. Singularity detection and processing with wavelets. IEEE Trans. on IT, 1992, 38: 617～643
185．ZHANG Xu-Sheng，et al．The methods of extracting signal envelope-from Hilbert transform to wavelet transorm．Journal of Electronics(张绪省等，信号包络提取方法．从希尔伯特变换到小波变换，电子科学学刊)，1997，(1)：120～123
186. Chen F, Brown G, Song M. Overview of three-dimensional shape measurement using optical methods[J]. Opt Eng, 2000, 39(1):10-22
187. Su Xianyu, Chen Wenjing. Fourier transform profilometry: a review[J]. Optics and Laser in Engineering, 2001, 35(5)263-284
188. Zhong J G, Zhao J. Three-dimensional shape measurement system with digit light projector[J]. Proc SPIE, 2002, 4778:95-I04
189. Mitsuo Takeda, Kazuhiro Mutoh. Fourier transform profilometry for the automatic measurement of 3-D object shapes[J]. Applied Optics, 1983, 22(24)3977-3982
190．徐建强．物体曲面相貌检测的微机图像处理．山东工业大学硕士学位论文．1998：20-23
191. Halioua M, Hsin-ChuLiu. Optical three-dimensional sensing by phase measuring profilometry[J]. Optics and Lasers in Engineering, 1989, 11(3):185～215
192. He X Y, Zou D Q, Liu S et al. Phase-shifting analysis in Moire interferometry and its application in electronic packaging[J]. Opt. Enging., 1998, 37(5):1410～1419
193. Quan C, He X Y, Wang C F et al. Shape measurement of small objects using LCD fringe projection with phase shifting[J]. Optics Commun., 2001, 189(1～3):21～29
194. Kwon O Y, Shough D M. Multi channel grating phase-shift interferometers [J]. Proc. SPIE, 1985, 599:273～278
195. Kujawinska M, Wojciak J. Spatial phase-shifting technique offringe pattern analysis in photomechanics [J]. Proc. SPIE, 1991, 1554B:503～513
196．周灿林．相位锁定循环投影技术及其应用．光子学报，2000，29(2)：157～160
197．翁嘉文，钟金钢．加窗傅里叶变换在三维形貌测量中的应用．光子学报，2003，32(8)：993～996
198．李方，周灿林．一种新的双频光栅轮廓术．光子学报，2005，34(4)：632～635
199. Skydan O A, Lalor M J, Burton D R. Using coloured structured light in 3-D surface measurement [J]. Optics and Lasers in Engineering, 2005, 44:65-78
200. Carre P. Installation et utilization du comphotoeclec trique interferentied du Burear International Poidest Measures[C]. Metrologia, 1966, (2):13-23
201. G. Stoilov & T. Dragostinov. Phase-stepping Interferometry: Five-frame Algorithm with an Arbitrary Step. Opt. & Laser in Engng., 1997, (18):61-69
202．周灿林，王蕴珊，司书春．基于单步相移算法的投影技术及其应用．计量技术， 2000，(5)：5-8
203．康新，何小元．两步相移实现投影栅相位测量轮廓术．光学学报，2003，23(1)：75-79
204．高成勇，王蕴珊，司书春，徐建强．一种基于非定步长相移相位恢复算法的研究．光电子-激光，2002，13(9)：L956-958
205．潘伟，赵毅．提高光栅投影测量精度的相移精确测量法．上海交通大学学报，2003，37(7)：1068-1071
206. Saul Almaz an-Cu ellar, Daniel Malacara-Hern andez, Manuel Serv. Two steps phase shifting algorithm using analytic wavelets. Optics Communications, 2002, (212)71-84
207. B. K. A Ngoi. K. Venkatakrishnan. N. R. Sivakumar. T. Bo. Instantaneous phase shifting arrangement for micosurface profiling of flat surfaces. Optics Communications, 2001, (190):109-116
208. Mongyu Liua, Wei-Hung Sua, Karl Reichardb, Shizhuo Yina. Calibration-based phase-shifting projected fringe profilometry for accurate absolute 3D surface profile measurement. Optics Communications, 2003, (216):65-80
209．陈文静，苏显渝，曹益平，向立群，张启灿．基于双色条纹投影的快速傅里叶变换轮廓术．光学学报，2003，23(10)：1153-1157
2. R Myllyla, J Marsalis, J Kostamovaara, et al. Imaging distance measurements using TOF lidar[J]. J. Opt., 1998, 29, 188-193.
3. Kobayashi. Handbook on experimental mechanics, New 5ersey: Prentic-Hall, Englewood Cliffs, 1987.
4．云大真，于万明．结构分析光测力学．大连：大连理工大学出版社，1996．
5. Takeda M, Ina H, Koboyashi S. Fourier-transform method of fringe-pattern analysis for computer based topography and interferometry. J. Opt. Soc. Am., 1982, 72(1):156-160
6. M. Takeda K. Mutoh. Fourier transform profilometry for the automatic measurement of 3D object shapes. Appl. Opt. 1983, 22(24):3977-3987
7. J. Li, X. Y. Su, L. R. Guo. An improved Fourier transform profilometry for automatic measurement of 3D object shapes. Opt. Engng., 1990, 29(24):1439-1444
8. J. F. Lin, X. Y. Su, Two-dimensional Fourier transform profilometry for the automatic measurement of three-dimensional object shapes. Opt. Engng., 1995, 34(11):3297-3302
9. V. Srinivasan, H. C. Liu, M. Halioua. Automated phase-measuring profilometry of 3D diffuse objects., Appl. Opt., 1984, 28(18):3105-3108
10. X. Y. Su, W. S. Zhou, G. VonBally et al. Automated phase-measuring profilometry using defocused projection of a Ronchi grating. Opt. Commun., 1992, 94(6):561-573
11. X. Y. Su, G. VonBally, D. Vukicevic, Phase-stepping grating profilometry: utilization of intensity modulation analysis in complex objects evaluation. Opt. Common., 1993, 98(1/2/3):141-150
12. T. R. Hudge, C. Quan, P. J. Bryanston-Cross, Holographic deformation measurements by Fourier transform technique with automatic phase unwrapping. Opt. Engng., 1992, 31(3):533-543
13. C. 5. Tay, C. Quan, H. M. Shang, Shap identification using phase shifting interferometry and liquid-crystal phase modulator. Optics & Laser Technology, 1998, (30):545-550
14. Henril 0. Saldner, Jonathan M. Huntley, Shape Measurement of Discontinuous Objects Using Projected Fringes and Temporal Phase Unwrapping. IEEE 0-8186-7943-3/97, 44-50
15. Y. M. He, C. J. Tay, H. M. Shange, Deformation and Profile Measurement using the Digital Projection Grating Method. Optics & Lasers in Engineering, 1998, (30):367-377
16. Piotr Garbat, Malgorzata Kujawnska, Combining fringe projection method of 3D object monitoring with virtual reality environment: concept and initial results. Proceedings of the First International Symposium on 3D Data Processing Visualization and Transmission (3DPVT. 02), 0-7695-1521-5/02, 2002 IEEE
17. Takasaki H. Generation of surface contours by moire Dattern. Appl. Opt., 1970, 9(4):942-947
18. Yoshizaw T. The recent trend of moire metrology. J Robotics Mechatron, 1991, 3(3):80-85
19. Srinivasan V, Liu HC, Halioua M. Automated phase measuring profilometry of 3D diffuse object. Appl. Opt. 1984, 23(18):3105-3108
20. Wen-Sen Zhou, Xian-Yu Su. A direct mapping algorithm for phase-measuring profilometry. J Mod Opt., 1994, 41(1):89-93
21. Li J. L., Xianyu su, Su HJ. Removal Of carrier frequency in phase-shifting techniques. Opt Lasers Eng, 1998, 30(1):107-115.
22. Zhang H, Lalor MJ, Buron DR. Spationtemporal phase unwrapping for the measurement of discontinuous objects in dynamic fringe-projection phase-shifting profilometry. Appl. Opt., 1999, 38(16):3534-3541
23. T. R. Judge, P. J. Bryanston-Cross. A review of phase unwrapping techniques in fringe analysis. Opt. & Laser in Engng., 1994, 21(4):199-239
24. Xianyu Su, Likun Su. New 3D Drofilometry based on modulation measurement. Proc SPIE, 1998, 3558:1-7
25. Xianyu Su, Likun Su, Wansong Li. A new Fourier transform profilometry based on modulation measurement. Proc. SPIE, 1999, 3749:438-439
26. Likun Su, Xianyu Su, Wansong Li. Application of modulation measurement profilometry to objects with surface holes. Appl. Opt., 1999, 38(7):1153-1158
27. J. Li, X. Y. Su, L. R. Guo, An improved Fourier transform profilometry for automatic measurement of 3D object shades. Opt. Engng., 1990, 29(24):1439-1444
28．郝煜栋，赵洋，李达成，光学投影式三维轮廓测量技术综述。光学技术．，1998，(5)：57-60
29. P. Graebling, A. Lallenment, D. Y. Zhou, E. Hirsch, Optical High-precision trhee0dimensional vision-based quality control of manufactured parts by use of synthetic images and knowledge for image-data evaluatin and interpretation. Appl. Opt., 2002, 41(14):2627-2643
30. S. H. Wang, C. J. ray, C. G. Quan, H. M. shang, Investigation of membrane deformation by a fringe projection method. Appl. Opt. 2002, 41(1):101-107
31. C. J. Tay, C. Quan, H. M. Shang, Shape identification using phase shifting interferometry and liquid-crystal phase modulator. Optics & Laser Technology. 1998, (30):545-550
32. G. Stoilov & T. Dragostinov. Phase-steping Interferometry: Five-frame Algorithm with an Arbitrary Step. Opt. & Laser in Engng., 1997, (28):61-69
33．钱克矛，吴小平．相移技术中五步等步长Stoilov算法的性能分析．光学技术，2001，27(1)：13-16
34．候立周，强锡富，孙晓明．几种任意步距步进相移算法的误差分析与对比．光学技术，199，(5)：7-10
35. J. L. Li, X. Y. Su, H. J. Su, Removal of carrier frequency in phase-shifting techniques. Opt. & Laser In Eng., 1998, (30):107-115
36. K. Creath, Y. Y. Chen, Contouring aspheric surfaces using two-wavelength phase shifting interferometry. Optical Acta., 1985, (32):1455-1464
37. T. Tsuruta, N. Shiotake, J. Tsujjuchi, K. Matsuda, Holographic generation of contour map of diffusely reflecting surface by using immersion method. Jpn. J. Appl. Phys., 1967, (6):661-662
38. X. J. Xie, M. J. Lalor, D. R. Burton, M. M. Shaw. Phase-unwrapping algorithm in the presence of discontinuities using a system with crossed grating. Opt. & Laser in Eng., 1998, (29):49-59
39．陈晓荣，蔡萍，施文康．光学非接触三维形貌测量技术新进展．光学精密工程，2002，10(5)：528-532
40. Y. Hosni, L. Ferreira. Laser based system for reverse engineering. Computer and Eng., 1994, 26(2):387-394
41．居琰，汪同庆，刘建胜，王贵新，陈雍乐．基于光切法的三维脚型测量仪原理及系统设计．传感器技术，2002，21(4)：18-21
42．李兵，罗意平，王昭，蒋庄德．多光刀三维轮廓快速测量方法研究．光子学报，2003，32(6)：738-741
43．张广军，田叙．结构光三维视觉及其在工业中的应用．北京航空航天大学学报，1996，22(6)：650-654
44．李晓莹，马炳和，苑伟政．基于光切法的微结构三维尺寸测量．航空精密制造技术，1998，34(5)：38-40
45．吴剑波，桑波，赵宏，谭玉山．光切法三维测量在逆向工程中的问题分析．西安交通大学学报，2001，35(9)：949-953
46．张舜德，卢秉恒，丁玉成．自调心伪双CCD光切360°三维轮廓测量系统．光子学报，2000， 29(9)：824-828
47．陈伟民，王晓林，黄尚廉．双光源光切法三维轮廓测量的误差分析．仪器仪表学报，1996，17(2)：149-153
48．吴剑波，崔振，赵宏，谭玉山．光刀中心自适应阈值提取法．工具技术，2000，10：27-29
49．王晓林，陈伟民，黄尚廉．光切法三维轮廓测量的原理及其应用．光学技术，1997，(3)：39-43
50. Kai Wolf, Dieter Roller, Dirk Schafer. An approach to computer-aided quality control based on 3D coordinate metrology. Journal of Materials Processing Technology, 2000, (107):96-110
51. R. Jones, C. Wykes. Holographic and speckle interferometry. Cambridge University Press, Cambridge. 1989
52．方强，陈家璧著．全息散斑计量学．北京：科学出版社，1995
53. Domenica paolitti, Givseppe schirripa spagnolo. Automatic digital Speckle pattern interferomtry contouring inartwork surface inspection. Opitical Engineering, 1995, (32):1348-1353
54. Rodriguez vera R, Keer D. Dsiplacement and shape information using electronic speckle contouring. SPIE., 1993, (2004):52-62
55．候立周，强锡富．数字散斑干涉技术在形貌测量中的应用及进展．宇航计测技术，1999，19(3)：45-50
56. K. Creath. Phase shifting speckle interferometry. Appl. Opt., 1985, (24):3053-3058
57. S. Winther, G. A. Slettemoen. An ESPI contouring technique in strain analysis. Proc. SPIE., 1984, (473):44-47
58. B. D. Bergquist, P. C. Montgonery. Contouring by electronic speckle pattern interferometry(ESPI). Proc. SPIE., 1985, (599)L189-195
59. Rodriguez vera R., Kerr D. Mendoza santoyo E. Electronic speckle contouring. J. Opt. Soc. Am., 1992, (A9):2000-2008
60. Ganesan A. R., Sirohi R. S. New method of computing using digital speckle pattern interferometry(DSP). Proc. SPIE., 1988, (954):327-332
61. Shi D, Qin J, Hung YY. Automated measurement of 3D shapes by a dual beam digital speckle interferometric technique. Proc. SPIE., 1991, (1554A):680-689
62. Joenathan C, Pfister B, Tiziani HJ. Contouring by electronic speckle pattern interferometry employing dual beam illumination. Appl. Opt. 1990, (29):1905-1911
63. Peng X, Diao HY, Zou YL, Tiziani H. Coutouring by modified dual beam ESPE based on tilting illumination beams. Optics, 1992, (90):61-64
64. Zou Y, Pedrini G, Tizian H. Contouring by electronic speckle pattern interferometry employing divergent dual beam illumination. J. M. Opt., 1994, (41):1637-1652
65. Peng X, Zou YL, Diao HY, Tizian HJ. A simplified multi wavelength ESPI contouring technique based on a diode laser system. Optics, 1992, (91):81-85
66. Zou Y, Peng X, Tiziani H. Two wavelength DSPI surface contouring through the temperature modulation of a laser diode. Optics, 1993, (94):155-158
67. Franze B, Tiziani HJ. Multiple wavelength n oblique incidence interferometer for rough surface measurement using laser diodes. J. M. Opt., 1998, (45):861-872
68．乐开端，王创社，赵宏，谭玉山．大动态范围形变测量．光子学报，1998，27(6)：558-562
69. Leenderz J. A. Interferometric displacement measurement on scatting surface utilizing speckle effect. J. Phys. E:Sci. Instrument, 1970, (3):214-218
70. Buffersj N, Leenderz J. A. Holographic and video techniques applied to engineering measurement. Trans. Inst. Measure, 1971, (14):349-354
71. Jones R, Wykes C. Holographics and speckle interferometry. Cambridge University Press, Cambridge, 1989.
72. Hildebrand BO., Haines KA, Multiple wavelength and multiple source holography applied to contour generation, J. Opt. Soc. Am., 1967, (58):155-162
73. Minsky M. Microscopy Apparatus. U. S. Patent. No. 3013467. Dec. 19, 1961
74. Zinser G. Topographic measurements at the fundus with the Heidelberg retina tomography.视觉科学, 1992, 13(4):1-9
75. Wilson r. Depth response of scanning microscopes. Optik, 1989, 81(3):113-118
76. Sheppard CJR, Matthews HJ. The extended-focus, auto-focus and surface-profiling techniques of confocal microscopy. Mod. Opt., 1988, 35(1):145-154
77. Sheppard CJR, Gu M. Approximation to the three-dimensional optical transfer function. J. Opt. Soc. Am. (A)., 1991, 8(4):692-694
78. Gu M, Sheppard CJR. Three-dimensional partially-coherent image for mation in confocal microscopes with a finite-sized detector. Mod. Opt. 1994, 41(9):1701-1715
79. Tiziani HJ, Achi R, Kramen R Netal. Theoretical analysis of confocal microscopy with microlenses. Appl. Opt., 1996, 35(1):120-125
80．田维坚，丁志华，郭履容等．一种全场三维共焦检测的新方法．光学学报，1998，18(6)：757-761
81．吴世法．近代光学成像技术与图像处理．第一版．北京：国防工业出版社，1997，242-253
82．邓小强，刘力，杨莉松，王桂英，徐至展．超分辨在共焦三维形貌检测术中的应用．光学学报，2001，21(7)：853-856
83．杨莉松，王桂英，王建岗，步扬，徐至展．反射式光纤共焦扫描成像的研究．光学学报，1999，19(7)：962-967
84．孔兵，王昭，谭玉山，弥宁．共焦显微镜三维轮廓快速测量方法及其误差分析．光子学报，2000，29(6)：549-553
85. Sherrington and E.H. Smith. The Significance of surface topography in engineering. Prec. Eng., 1986, 8(2)
86. K. mitsui. In-process sensors for surface roughness and their applications. Prec. Eng., 1986, 8(4)
87. Karl H. Guenther, Peter G. Wierer. Surface roughness measurements of low-scatter mirrors and roughness standards. Appl. Opt., 1984, 23(21):3820-3835
88. Bharat Bhushan, James C. Wyantand, Chris L. Koliopoulos. Measurement of surface topography of magnetic tapes by mirau interferometry., Appl. Opt., 1985, 24(10):1489-1497
89．王世华，周肇飞等．便携式表面粗糙度测量仪．计量学报，1995，18(1)：28-31
90. M. Shiraishi: In-process measurement of surface roughness in turning by laser beam. ASME J Eng. for Industry, 1981, 103(2):203-209
91. Tsuguo Kohno, Norimitsu Ozawa. High precision optical surface sensor. Appl. Opt. 1998, 27(1):103-108
92. M. J. Offside, M. G. Somekh. A phase-sensitive optical heterodyne interferometer for surface height measurement. Trans. Inst. M. C., 1991, 1392):115-124
93. M. J. Downs, W. H. Mc givem and H. J. Ferguson. Optical system for measurement the profile of super-smooth surface., Prec, Eng., 1985, 7(4):211-215
94. Basil A. Omar, Alan J. Hooloway and David C. Emmony. Differential phase quadrature surface profiling interferometer. Appl. Opt., 1990, 29(31):4715-4719
95．武勇军：用于在线检测表面粗糙度的激光外差干涉仪的研究[D]清华大学博士后出站报告，1996
96．WYKO公司1996年NT-2000产品介绍
97．高宏：表面形貌非接触测量方法的研究[D]清华大学博士学位论文，1991
98．ZYGO公司1996年Newview 2000产品介绍
99. Y. Matsuno, H. Yamada, etal. The microtopography of the grinding wheel surface with SEM. Ann. CIRP., 1975, 24(1)
100．戴道宜．扫描隧道显微镜．物理，1985，14(4)
101. John M. Guerrao Photon tunneling microscopy. Appl. Opt., 1990, 29(26):3741-3751
102. Chin Y. Poon, Bharat Bhushan. Comparison of surface measurements by stylus profiler, AFM and non-contact optical profiler. Wear, 1995, 190:76-88
103. Jean M. Bennet, Virgil Elingsand Kevin Kjoller. Recent development in profiling optical surfaces Appl. Opt., 1993, 32(19):3442-3447
104. K. J. Stoutand, L. Blunt. A. Route to Standardization of 3D Surface Topography. Characterization and Functional Verification. ISMTII 1996, Hayama Kanagawa Pref. JAPAN
105．朱星．近场光学与近场光学显微镜．北京大学学报(自然科学版)．，197，33(3)：394-407
106. Suzuki M, Kanaya M. Application of Moire topography measurement methods in industry. Opt. & Laser Engng., 1988, 8(3):171-188
107．王昭，赵宏，谭玉山．相移阴影莫尔轮廓术的相位去包裹处理新技术．半导体光电，1998，19(5)：347-350
108. J. Degrieck, W. Van Paepegem*, P. Boone. Application of digital phase-shift shadow Moire to micro deformation measurements of curved surfaces. Opt. & Laser in Enginerring, 2001, (36)29-40
109. K. Patorski. Moire methods in interferometry. Opt. & Laser in Enginerring, 1998, 8:147-170
110. P. Carre, lnstalation et utilisation du comparateur photoelectrique et interferential du Bureau International des Poids et Mesures, Metrologia, 1966, 2:13-23
111. H. Bruning, D. R. Herriott, J. E. Gallagher, et al., Digital wavefront measurement interferometer for testing optical surfaces and lenses, App. Opt.,1974, 13:2693-2703
112. J. C. Wyant, Use of an ac Heterodyne Lateral Shear Interferometer with Real-Time Wavefront Correction Systems, App. Opt., 1975, 14:2622-2626
113. C. J. M organ, Least squares estimation.in phase-measurement interferometry, Opt. Lett., 1982, 7:368-370
114. O. Y. Kwon, Multichannel phase-shifted interferometer, Opt. Lett., 1984.9:59-61
115. J. E. Greivenkamp, Generalized data reduction for heterodyne interferometry, Opt. Eng., 1984, 23:350-352
116. R. N. Smart and J. Strong, J. Opt. Soc. Am., 1972, 62:737-
117. R. N. Shagam and J. C. Wyant, Optical Frequency Shifter for Heterodyne Interferometers Using Simple Rotating Polarization Retarders, App. Opt., 1978, 17:3034-3041
118. Y. Ishii, J. Chen and K. Murata, Digital Phase-Measuring Interferometry with a Tunable Laser Diode, Opt. Left., 1987, 12:233-235
119. Y. Ishii and R. Onodera, Phase-extraction algorithm in laser diode phase-shifting interferometry, Opt. Lett., 1995, 20:1883-1885
120. J. Schwider, R. Burow, K, E. Elssner, J. Grzanna, R. Spolaczyk, and K. Merkel, Digital Wavefront Measuring Interferometry: Some Systematic Error Sources, App. Opt., 1983, 22:3421-3432
121. Y. Y. Cheng and J. C. Wyant, Phase-shifter calibration in phase-shifting interferometry, App. Opt., 1985, 24:3049-3052
122. P. Hariharan, B. F. Oreb, T. Eiju, Digital phase-shifting interferometer: a simple error-compensating phase calculation algorithm, App. Opt., 1987, 26: 2504-2506
123. C. Ai, and J. C. Wyant, Effect of piezoelectric transducer nonlinearity on phase shift interferometry, App. Opt., 1987, 26:1112-111
124. K. K. innstactter, A. W. Lohmann, J. Schwider and N. Streibl, Accuracy of phase shift interferometry, App. Opt., 1988, 27:5062-5089
125. J. Schwider, O. FalkenstOrfer, H. Schreiber, A. ZOller, et al., New compensating four-phase algorithm for phase-shift interferometry, Opt. Eng., 1993, 32:1883-1885
126. K. Greath and P. Hariharan, Phase-shifting errors in Interferometric tests with high-numerical-aperture reference surfaces, App. Opt., 1994, 33:24-25
127. P. de Groot, Phase-shift calibration errors in interferometers with spherical Fizeau cavities, App. Opt., 1995, 34:2856-2863
128. J. Schwider, T. Dresel, and B. Manzke, Some considerations of reduction of reference phase error in phase-stepping interferometry, App. Opt., 1999, 38:655-659
129. K. Freischlad and C. L. Koliopoulos, Fourier description of digital phase-measuring interferometry, J. Opt. Soc. Am., 1990, A7:542-551
130. G. Lai, T. Yatagai, Generalized phase-shifting interferometry, J. Opt. Soc. Am., 1991, A8:822-827
131. K. G. Larkin, and B. F. Oreb, Design and assessment of Symmetrical Phase-Shifting Algorithms, J. Opt. Soc. Am., 1992, A9:1740-1748
132. G. S. Han and S. W. Kim, Numerical correction of reference phases in phase-shifting interferometry by iterative least-square sfitting, App. Opt., 1994, 33:7321-7325
133. I.B. Kong, S.-W. Kim, General algorithm of phase-shifting interferometry by iterative least-square sfitting, Opt. Eng., 1995, 34:183-188
134. C. Rathjen. Statistical properties of phase-shift algorithms, J. Opt. Soc. Am., 1995, A12:1997-2008
135. K. Hibino, Susceptibility of systematic error-compensating algorithms to random noise in phase-shifting interferometry, App. Opt., 1997, 36:2084-2093
136. K. Hibino, B. F. Oreb, D.I. Farrant, and K. G. Larkin, Phase-shifting algorithms for nonlinear and spatiallynon uniform phase shifts, J. Opt. Soc. A m., 1997, A 14:918-930
137. D. W. Phillion, General methods for generating phase-shifting interferometry algorithms, App. Opt., 1997, 36:8098-8115
138. C. T. Farrell, M. A. Player, Phase step measurement and variable step algorithms in phase-shifting interferometry, Meas. Sci. Techol., 1992, 3:953-958
139. C. T. Farrell, and M. A. Player, Phase-step insensitive algorithms for phase-shifting interferometry. Meas. Sci. Techol., 1994, 5:648-652
140. B. Zhao, A statistical method for fringe intensity-correlatederror in phase-shifting measurement: The effect of quantization error on the N-bucket algorithm, Meas. Sci. technol., 1997, 8:147-153
141. A. Dobroiu, P. C. Logofatu, D. Apostol and V. Damian, Statistical self -calibrating algorithm for three-sample phase-shift interferometry, Meas. Sci. technol., 1997, 8:738-745
142. E. W. Rogala and H. H. Barrett, Phase-shifting interferometry and maximum-likelihood estimation theory, App. Opt., 1997, 36:8871-8876
143. E. W. Rogala, H. H. Barrett, Phase-shifting interferometry and maximum-likelihood estimation theory Ⅱ: A generalized solution, App. Opt., 1998, 37:7253-7258
144. Y. Surrel, Phase stepping: a new self-calibrating algorithm, App. Opt., 1993, 32:3598-3600
145. B. Zhao, Y. Surrel, Phase shifting: six-sample self-calibrating algorithm insensitive to the second harmonic in the fringe signal, Opt. Eng., 1995, 34:2821-2822
146. K. Hibino, B. F. Oreb, D. I. Farrant, K. G. Larkin, Phase-shifting interferometry for non-sinusoidal waveforms with phase-shift errors, J. Opt. Soc. Am., 1995, A12:761-768
147. K. Hibino, B.F. Oreb, D.I. Farrant, K.G. Larkin, Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts, J. Opt. Soc. Am., 1997, A14:918-930
148. Y. Surrel, Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts: comment, J. Opt. Soc. Am., 1998, A15:1227-1233
149. K. Hibino, B. F. 0reb, D. I. Farrant, K. G. Larkin, Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts: reply to comment, J. Opt. Soc. Am., 1998, A15:1234-1235
150. B. Gutmann, H. Weber, Phase-shifter calibracation and error detection in phase-shifting applications: a new method, App. Opt., 1998, 37:7624-7631
151. G. D. Lassahn, J. K. Lassahn, P. L. raylor, V. A. Deason, Multi phase fringe analysis with unkown phase shifts, Opt. Eng., 1994, 33:2039-2044
152. B. Strobel, Processing of interferometric phase maps as complex-valued phasor Images, App. Opt., 1996, 35:2192-2198
153. P. de G root, Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window, App. Opt., 1995, 34:4723-4730
154. P. de Oroot, Vibration in phase-shifting interferometry, J. Opt. Soc. Am., 1995, A12:354-365
155. P. de Groot, L. Deck, Numerical simulations of vibration in phase-shifting interferometry, App. Opt., 1996, 35:2172-2178
156. L. Deck, P. de Groot, Punctuated quadrature phase-shifting interferometry, Opt. Lett., 1998, 23:19-21
157. M. Melozzi, L. Pazzati and A. Mazzoni, Vibration-insensitive interferometer for on-line measurements, App. Opt., 1995, 34:5595-5600
158. P. Harihamn, Digital phase-stepping interferometry" effects of multiply reflected beams, App. Opt., 1987, 26:2506-2507
159. C. Ai, J. C. Wyant, Efect of Spurious Reflection on Phase Shift Interferometry, App. Opt., 1988, 27: 3039-3045
160. C. Brophy, Efect of intensity error correlation on the computed phase of phase-shifting interferometry, J. Opt. Soc. Am., 1990, A7:537-541
161. X. Chen, M. Gramaglia and J. A. Yeazell, Phase-shifting interferometry with uncalibrated phase shifts, App. Opt., 2000, 39:585-591
162. K. Hibino and M. Yamauchi, Phase-measuring algorithm to suppress spatially nonuniform phase modulation in a two-beam interferometer, Opt. Rev., 2000, 7: 543-549
163. K. A. Goldberg and J. Bokor, Fourier-transform method of phase-shift determination, App. Opt., 2001, 40:2886-2894
164. T. Suzuki, X. F. Zhao and O. Sasaki, Phase-locked phase-shifting laser diode interferometer with photothermal modulation, App. Opt., 2001, 40:2126-2131
165. L. L. Deck, Fourier-transform phase-shifting interferometry, App. Opt., 2003, 42:2354-2365
166. B. K. A. Ngoi, K. Venkatakrishnan and N.R. Sivakumar, Phase-shifting interferometry immune to vibration, App. Opt., 2001, 40:3211-3213
167. J. M. Huntley and H. O. Saldner, Temporal phase-unwrapping algorithm for automatic interferogram analysis, App. Opt., 1993, 32:3047-3052
168. H. O. Saldner and J. M. Huntley, Temporal phase unwrapping: application to surface profiling of discontinuous objects, App. Opt., 1997, 36:2770-2775
169. C. Joenathan, B. Franze, P. Haible and H. J. Tiziani, Speckle interferometry with temporal phase evaluation for measuring large-object deformation, App. Opt., 1998, 37: 2608-2614
170. L. R. van den Doel, L. J. van Vliet, Temporalphase-unwrapping algorithm for dynamic interference pattern analysis in interference-contract microscopy, App. Opt., 2001, 40:4487-4500
171. G. Pedrini, I. Alexcenko, W. Osten and H. J. Tiziani, Temporal phase unwrapping of digital hologram sequences, App. Opt., 2003, 42:5846-5853
172. J. M. Huntley, G. H. Kaufmann and D. Kerr, Phase-shifting dynamic interferometry at 1 k Hz, App. Opt., 1999, 38: 6556-6563
173. F Blsis. Review of 20 years of rangesensor development [A]. Proceedings of SPIE & IS & T Electronic Imaging[C].SPIE2003Vol. 5013.
174. R Baribeau, M Rioux. Influence of speckle on laser range finders[J]. Appl. Opt., 1991, 30: 2873-2878.
175．陈伟民等．双光源光切法三维轮廓测量的误差分析[J]．仪器仪表学报，1996，17(2)：149-153．
176. Li H J, Yang Shenghui. Using range profiles as feature vectors to identify aerospace objects[J]. IEEE Transactions on Antennas and Propagation, 1993, 41(3): 261～268
177．李跃华，李兴国．小波谱估计用于雷达目标成像和识别[J]．红外与毫米波学报，1999，18(4)：283～288
178．李跃华，高敦堂，沈庆宏等．小波神经网络的毫米波雷达目标一维距离像识别[J]．南京理工大学学报，2002，26(1)：20～23
179．D．格罗彼．时间序列分析辨识与适应性滤波[M]．北京：科学出版社，1987
180. Robinson PM., No-parametric estimation for time series models[J], J. Time series Anal., 1983, 4:185～208
181．G．C．古德温，孙贵生．自适应滤波、预测与控制．北京：科学出版社，1992
182. Charles K Chui. An Introduction to Wavelets, Academic Press, 1995:89～120
183. Mallat S. Characterization of signals from multiscale edges. IEEE Trans. PAMI, 1989, 1(7):674～69
184. Mallat S. Singularity detection and processing with wavelets. IEEE Trans. on IT, 1992, 38: 617～643
185．ZHANG Xu-Sheng，et al．The methods of extracting signal envelope-from Hilbert transform to wavelet transorm．Journal of Electronics(张绪省等，信号包络提取方法．从希尔伯特变换到小波变换，电子科学学刊)，1997，(1)：120～123
186. Chen F, Brown G, Song M. Overview of three-dimensional shape measurement using optical methods[J]. Opt Eng, 2000, 39(1):10-22
187. Su Xianyu, Chen Wenjing. Fourier transform profilometry: a review[J]. Optics and Laser in Engineering, 2001, 35(5)263-284
188. Zhong J G, Zhao J. Three-dimensional shape measurement system with digit light projector[J]. Proc SPIE, 2002, 4778:95-I04
189. Mitsuo Takeda, Kazuhiro Mutoh. Fourier transform profilometry for the automatic measurement of 3-D object shapes[J]. Applied Optics, 1983, 22(24)3977-3982
190．徐建强．物体曲面相貌检测的微机图像处理．山东工业大学硕士学位论文．1998：20-23
191. Halioua M, Hsin-ChuLiu. Optical three-dimensional sensing by phase measuring profilometry[J]. Optics and Lasers in Engineering, 1989, 11(3):185～215
192. He X Y, Zou D Q, Liu S et al. Phase-shifting analysis in Moire interferometry and its application in electronic packaging[J]. Opt. Enging., 1998, 37(5):1410～1419
193. Quan C, He X Y, Wang C F et al. Shape measurement of small objects using LCD fringe projection with phase shifting[J]. Optics Commun., 2001, 189(1～3):21～29
194. Kwon O Y, Shough D M. Multi channel grating phase-shift interferometers [J]. Proc. SPIE, 1985, 599:273～278
195. Kujawinska M, Wojciak J. Spatial phase-shifting technique offringe pattern analysis in photomechanics [J]. Proc. SPIE, 1991, 1554B:503～513
196．周灿林．相位锁定循环投影技术及其应用．光子学报，2000，29(2)：157～160
197．翁嘉文，钟金钢．加窗傅里叶变换在三维形貌测量中的应用．光子学报，2003，32(8)：993～996
198．李方，周灿林．一种新的双频光栅轮廓术．光子学报，2005，34(4)：632～635
199. Skydan O A, Lalor M J, Burton D R. Using coloured structured light in 3-D surface measurement [J]. Optics and Lasers in Engineering, 2005, 44:65-78
200. Carre P. Installation et utilization du comphotoeclec trique interferentied du Burear International Poidest Measures[C]. Metrologia, 1966, (2):13-23
201. G. Stoilov & T. Dragostinov. Phase-stepping Interferometry: Five-frame Algorithm with an Arbitrary Step. Opt. & Laser in Engng., 1997, (18):61-69
202．周灿林，王蕴珊，司书春．基于单步相移算法的投影技术及其应用．计量技术， 2000，(5)：5-8
203．康新，何小元．两步相移实现投影栅相位测量轮廓术．光学学报，2003，23(1)：75-79
204．高成勇，王蕴珊，司书春，徐建强．一种基于非定步长相移相位恢复算法的研究．光电子-激光，2002，13(9)：L956-958
205．潘伟，赵毅．提高光栅投影测量精度的相移精确测量法．上海交通大学学报，2003，37(7)：1068-1071
206. Saul Almaz an-Cu ellar, Daniel Malacara-Hern andez, Manuel Serv. Two steps phase shifting algorithm using analytic wavelets. Optics Communications, 2002, (212)71-84
207. B. K. A Ngoi. K. Venkatakrishnan. N. R. Sivakumar. T. Bo. Instantaneous phase shifting arrangement for micosurface profiling of flat surfaces. Optics Communications, 2001, (190):109-116
208. Mongyu Liua, Wei-Hung Sua, Karl Reichardb, Shizhuo Yina. Calibration-based phase-shifting projected fringe profilometry for accurate absolute 3D surface profile measurement. Optics Communications, 2003, (216):65-80
209．陈文静，苏显渝，曹益平，向立群，张启灿．基于双色条纹投影的快速傅里叶变换轮廓术．光学学报，2003，23(10)：1153-1157