多个MEMS加速度计融合的数字倾角仪
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摘要
倾角仪是测量待测平面倾角的仪器。倾角仪在测绘仪器、建筑机械、设备安装、道路桥梁、天线定位、机器人技术、坦克和舰船火炮平台控制、汽车电子控制、海上平台监控等方面都有着广泛的应用。为了让倾角仪能够在0~360°的角度测量范围内都有非常高的精准度,本文提出了一种新的加速度计布置方案,并根据传感器件输出信号的特性,设计了新的倾角计算方法,实现了该软硬件系统。大量实验测试结果表明本文设计的多个MEMS加速度计融合的数字倾角仪在测量范围和精度上均达到了较高的技术水平,因此具有重要的工程应用价值。
本论文研究的主要内容及创新点:
(1)对国内外倾角仪的研制状况进行了广泛的调研。并对倾角仪内部的主要传感器件的布置方案进行了深入的分析。结合数学理论和实际使用经验,对两种典型的MEMS加速度计布置方案的优缺点进行了详细的阐述。
(2)针对现有数字倾角仪工作性能的不足,结合MEMS加速度计输出信号的特性,提出了一种新的多个MEMS加速度计布置方案——多个加速度计对称展开的布置方案;在此基础上,引入了可信区间和可信加速度计的概念,判定惟一可信加速度计,根据惟一可信加速度计的倾角计算值,结合多个加速度计之间的几何位置关系,计算出待测平面的精确倾角值。
(3)完成了多个MEMS加速度计融合的数字倾角仪的软硬件实现。在系统的设计中,Atmega128L单片机采用中断的方式实现对五个加速度计输出信号的采集,并通过串口将采集的数据信息发送给PC上位机。上位机运行算法计算出倾角值,并通过三维动态显示的方式直观显示倾角仪的测量结果。
Inclinometer is the instrument using for measuring the angle of the under tested plane. Inclinometer have been broadly used in surveying equipment, construction machinery, equipment installation, roads and bridges, antenna positioning, robotics, tanks and artillery platforms ship controlling, automotive electronic controlling, monitoring and other aspects of offshore platforms. In order to make inclinometer have very high accuracy in angle range of 0～360°, this paper presents a new layout scheme of accelerometers. Based on the characteristics of the output signal of accelerometers, this paper designes a new method of angle calculation and realized the hardware and software systems. The large number of experimental results show that the digital inclinometer based on integration of multiple MEMS accelerometers have reached a higher level in measurement range and accuracy , so it has important value for engineering application.
The main content and innovation of this paper:
(1) Doing extensive research on the situation of the inclinometer-conducted at home and abroad. Making in-depth analysis on the layout of the two main sensor devices in inclinometer. Combined the mathematical theory and practical experience, we described the advantages and disadvantages of the two typical MEMS accelerometer layout scheme in detail .
(2) For the lack of performance of existing digital inclinometer, combined with MEMS accelerometer’s features of output signals, we proposed a new MEMS accelerometer layout scheme—multiple accelerometers symmetrical layout scheme . on this basis, we introduced confidence intervals and the concept of confidence accelerometer and the method of determining the only confidence accelerometer. According to the calculating angle of the the only confidence accelerometer and the geometry relationships of the multiple accelerometers, we can calculate the exact angle value of under tested plane.
(3) Completed the hardware and software implementation of the digital inclinometer based on integration of multiple MEMS accelerometers. In the system design, Atmega128L SCM collects the output signals of five accelerometers by interrupt means , and send data information to the host computer through the serial port . Host computer runs algorithms to calculate the angle value and displays angle of the measurement results by the way of three-dimensional dynamic display of visual.
本论文研究的主要内容及创新点:
(1)对国内外倾角仪的研制状况进行了广泛的调研。并对倾角仪内部的主要传感器件的布置方案进行了深入的分析。结合数学理论和实际使用经验,对两种典型的MEMS加速度计布置方案的优缺点进行了详细的阐述。
(2)针对现有数字倾角仪工作性能的不足,结合MEMS加速度计输出信号的特性,提出了一种新的多个MEMS加速度计布置方案——多个加速度计对称展开的布置方案;在此基础上,引入了可信区间和可信加速度计的概念,判定惟一可信加速度计,根据惟一可信加速度计的倾角计算值,结合多个加速度计之间的几何位置关系,计算出待测平面的精确倾角值。
(3)完成了多个MEMS加速度计融合的数字倾角仪的软硬件实现。在系统的设计中,Atmega128L单片机采用中断的方式实现对五个加速度计输出信号的采集,并通过串口将采集的数据信息发送给PC上位机。上位机运行算法计算出倾角值,并通过三维动态显示的方式直观显示倾角仪的测量结果。
Inclinometer is the instrument using for measuring the angle of the under tested plane. Inclinometer have been broadly used in surveying equipment, construction machinery, equipment installation, roads and bridges, antenna positioning, robotics, tanks and artillery platforms ship controlling, automotive electronic controlling, monitoring and other aspects of offshore platforms. In order to make inclinometer have very high accuracy in angle range of 0～360°, this paper presents a new layout scheme of accelerometers. Based on the characteristics of the output signal of accelerometers, this paper designes a new method of angle calculation and realized the hardware and software systems. The large number of experimental results show that the digital inclinometer based on integration of multiple MEMS accelerometers have reached a higher level in measurement range and accuracy , so it has important value for engineering application.
The main content and innovation of this paper:
(1) Doing extensive research on the situation of the inclinometer-conducted at home and abroad. Making in-depth analysis on the layout of the two main sensor devices in inclinometer. Combined the mathematical theory and practical experience, we described the advantages and disadvantages of the two typical MEMS accelerometer layout scheme in detail .
(2) For the lack of performance of existing digital inclinometer, combined with MEMS accelerometer’s features of output signals, we proposed a new MEMS accelerometer layout scheme—multiple accelerometers symmetrical layout scheme . on this basis, we introduced confidence intervals and the concept of confidence accelerometer and the method of determining the only confidence accelerometer. According to the calculating angle of the the only confidence accelerometer and the geometry relationships of the multiple accelerometers, we can calculate the exact angle value of under tested plane.
(3) Completed the hardware and software implementation of the digital inclinometer based on integration of multiple MEMS accelerometers. In the system design, Atmega128L SCM collects the output signals of five accelerometers by interrupt means , and send data information to the host computer through the serial port . Host computer runs algorithms to calculate the angle value and displays angle of the measurement results by the way of three-dimensional dynamic display of visual.
引文
[1] http://www.cnki.com.cn/Article/CJFDTotal-JZJH201002033.htm.
[2] http://www.chinavalue.net/Article/Archive/2011/2/17/194266.html.
[3]李士钊.基于AVR单片机的双轴倾角仪的设计和实现[D].中国知网优秀论文数据库,2009.
[4] http://baike.baidu.com/view/16431.htm
[5]李哲.基于MEMS传感器技术的数字式倾角仪的研究[D].中国知网优秀论文数据库,2008.
[6] Leavitt J, Sideris A. Bobrow J E. High bandwidth tilt measurement using low-cost sensors [J]. IEEE/ASME Transactions on Mechatronics, 2006, 11(3): 320-327
[7]张维胜.倾角传感器原理与发展[J].传感器世界,2002(7):18-21.
[8]童长龙.新型倾斜传感器研究[J].洪都科技,2002.58.
[9]胡琴珠,陈湘萍.基于PIC单片机的倾角传感器的设计[J].贵州工业大学学报,2003(8):48-51.
[10]张洪刚,吴敬国.电容传感器及其纳米量级定位技术[J].传感器技术,2001(10):3-5.
[11]胡仲毅.高精度倾角检测系统[J].贵州:贵州大学, 2006(2)
[12]胡雪梅,王宏颖,等.微电子机械系统的发展与应用[J].西安航空技术高等专科学校学报,2006,24(3):25-27.
[13] http://www.docin.com/p-50802036.html.
[14]尤辉,李川奇,沈连官,等.电容式微加速器的现状与研究方向[J].中国机械工程,1998,9(10):57-62.
[15] http://www.ChinaEM.com.cn
[16] http://baike.baidu.com/view/37086.htm
[17]高国伟.传感器系列讲座(3)—倾角传感器[J].传感器世界,1995,8:29-38.
[18]张伟,梁华为,杨新钢,杨先军.基于MSP430单片机的便携式数字倾角仪的研制[J].工业仪表与自动化装置,2006,02.
[19]鹿麟,林凌. ADXL203型双轴加速计在倾斜度测量中的应用[J].国外电子元器件,2007 (7):61-64
[20] Liang H W, Mei T, and Meng Q H. Design and implementation of a digital inclinometer [A]. Proceedings of the IEEE International Conference on Mechatronics & Automation [C], 2005, 489-492
[21]刘武发,蒋蓁,龚振邦.基于多个MEMS加速度计的双轴倾角计及其应用[J].传感器技术,2005(3):86-88.
[22]雷闹海,杨国龙,叶明浩.基于MAD2020E加速度的0～360°倾角传感器的设计[J].电子设计工程,2009(6):65-66.
[23]徐普君.基于无线传感器网络的机场助航灯光监控系统[D].中国知网优秀论文数据库,2010.
[24]陈凯,徐耀坤. ADXL202双轴加速度计使用经验[J].国外电子元器件,2007(1):67-68
[25] http://baike.baidu.com/view/1997366.htm
[26] http://www.blueidea.com/microsoft/vs2010/
[27] http://baike.baidu.com/view/15762.htm
[28] http://apps.hi.baidu.com/share/detail/15587407
[29] http://topic.csdn.net/u/20071119/09.html
[30] http://topic.csdn.net/t/20001226/13/52304.html
[31] http://wenku.baidu.com/view/a231d2bff121dd36a32d8210.html
[32] Jung H, Kim C J, Kong S H. An optimized MEMS-based electrolytic tilt sensor [J]. Sensors and Actuators A,2007, 139: 23-30
[33] Djambazian H H, Nerguizian C, Nerguizian V,et al. 3D Inclinometer and MEMS Acceleration Sensors [A]. Proceedings of the IEEE International Symposium on Industrial Electronics, 2006,3338-3342
[34] Yotter R A,Baxter R R, Ohno S,et la. On a micro machined fluidic inclinometer [A]. Proceedings of the 12th International Conference on Transducer,Solid-State Sensors,Actuators and Microsystems [C],2003, 1279-1282
[35] Damiano Crescini, Marco Baùand Vittorio Ferrari. MEMS Tilt Sensor with Improved Resolution and Low Thermal Drift[C]. P. Malcovati et al. (eds.), Sensors and Microsystems: AISEM 2009 Proceedings, Lecture Notes in Electrical Engineering,1, Volume54, Sensors and Microsystems, Part 3, 225-228
[36] Yurish, S.Y. Low-cost, dual-axis smart inclinometer[C] .Sensors, 2008 IEEE Digital Object Identifier: 10.1109/ICSENS.2008.4716727, 2008, 1488– 1491
[37] Sang Lee, Young Lim and Joung Mun. Dynamic Characteristics of Analog Inclinometer[C]. IFMBE Proceedings, 1, Volume 14, World Congress on Medical Physics and Biomedical Engineering. 2006, Part 7, 857-860
[38] Guo Qinglei, Liang Huawei,Miao Shifu, Huang Jian. Design of a Plane Inclinometer Based on MEMS Accelerometer[C]. Information Acquisition,2007. ICIA '07. International Conference. 2007, 320 - 323
[39] Xia Kun; Wang Hong-Jie; Zhang Zhen-Guo; Chen Jian-Qiang. Design of a self-balanced system based on AccuStar electronic inclinometer[C] .2009,1- 4
[40] Djambazian,H.H.; Nerguizian,C.; Nerguizian,V.; Saad,M.. 3D Inclinometer and MEMS Acceleration Sensors[C]. Industrial Electronics,IEEE International Symposium. 2006, 3338 - 3342
[41] Ando, B.; Ascia, A.; Baglio, S.; Savalli, N.. A Novel Ferrofluidic Inclinometer [J] . Instrumentation and Measurement , IEEE Transactions . 2007 , 1114 - 1123
[42]焦竹青,熊伟丽,张林,徐保国.基于接近度的多个传感器数据融合方法研究[J].压电与声光, 2009(5):71-774
[43]黄沛,李晓漫.基于灰色理论的一种数据融合方法[J].航空计算技术, 2007(2):26-29
[44]韩峰,朱镭,智小军.基于模糊理论的多个传感器数据融合测量[J].应用光学, 2009(6):988-991
[45]潘昶,张德全.基于模糊数学的数据融合算法[J].指挥控制与仿真, 2009(2):65-66
[46] Jian Wang; Guowei Gao; Penghua Liu. The study on lange-angle CANBUS 2-axis inclinometer of rotary drilling rig[C]. Information Management and Engineering (ICIME), 2010 The 2nd IEEE International Conference . 2010 , 95– 97
[47] Da-wei, Lin; Tao, Guo. Design of Dual-axis Inclinometer Based on MEMS Accelerometer[C]. Measuring Technology and Mechatronics Automation (ICMTMA), 2011 Third International Conference. 2011 , 959 - 961
[2] http://www.chinavalue.net/Article/Archive/2011/2/17/194266.html.
[3]李士钊.基于AVR单片机的双轴倾角仪的设计和实现[D].中国知网优秀论文数据库,2009.
[4] http://baike.baidu.com/view/16431.htm
[5]李哲.基于MEMS传感器技术的数字式倾角仪的研究[D].中国知网优秀论文数据库,2008.
[6] Leavitt J, Sideris A. Bobrow J E. High bandwidth tilt measurement using low-cost sensors [J]. IEEE/ASME Transactions on Mechatronics, 2006, 11(3): 320-327
[7]张维胜.倾角传感器原理与发展[J].传感器世界,2002(7):18-21.
[8]童长龙.新型倾斜传感器研究[J].洪都科技,2002.58.
[9]胡琴珠,陈湘萍.基于PIC单片机的倾角传感器的设计[J].贵州工业大学学报,2003(8):48-51.
[10]张洪刚,吴敬国.电容传感器及其纳米量级定位技术[J].传感器技术,2001(10):3-5.
[11]胡仲毅.高精度倾角检测系统[J].贵州:贵州大学, 2006(2)
[12]胡雪梅,王宏颖,等.微电子机械系统的发展与应用[J].西安航空技术高等专科学校学报,2006,24(3):25-27.
[13] http://www.docin.com/p-50802036.html.
[14]尤辉,李川奇,沈连官,等.电容式微加速器的现状与研究方向[J].中国机械工程,1998,9(10):57-62.
[15] http://www.ChinaEM.com.cn
[16] http://baike.baidu.com/view/37086.htm
[17]高国伟.传感器系列讲座(3)—倾角传感器[J].传感器世界,1995,8:29-38.
[18]张伟,梁华为,杨新钢,杨先军.基于MSP430单片机的便携式数字倾角仪的研制[J].工业仪表与自动化装置,2006,02.
[19]鹿麟,林凌. ADXL203型双轴加速计在倾斜度测量中的应用[J].国外电子元器件,2007 (7):61-64
[20] Liang H W, Mei T, and Meng Q H. Design and implementation of a digital inclinometer [A]. Proceedings of the IEEE International Conference on Mechatronics & Automation [C], 2005, 489-492
[21]刘武发,蒋蓁,龚振邦.基于多个MEMS加速度计的双轴倾角计及其应用[J].传感器技术,2005(3):86-88.
[22]雷闹海,杨国龙,叶明浩.基于MAD2020E加速度的0～360°倾角传感器的设计[J].电子设计工程,2009(6):65-66.
[23]徐普君.基于无线传感器网络的机场助航灯光监控系统[D].中国知网优秀论文数据库,2010.
[24]陈凯,徐耀坤. ADXL202双轴加速度计使用经验[J].国外电子元器件,2007(1):67-68
[25] http://baike.baidu.com/view/1997366.htm
[26] http://www.blueidea.com/microsoft/vs2010/
[27] http://baike.baidu.com/view/15762.htm
[28] http://apps.hi.baidu.com/share/detail/15587407
[29] http://topic.csdn.net/u/20071119/09.html
[30] http://topic.csdn.net/t/20001226/13/52304.html
[31] http://wenku.baidu.com/view/a231d2bff121dd36a32d8210.html
[32] Jung H, Kim C J, Kong S H. An optimized MEMS-based electrolytic tilt sensor [J]. Sensors and Actuators A,2007, 139: 23-30
[33] Djambazian H H, Nerguizian C, Nerguizian V,et al. 3D Inclinometer and MEMS Acceleration Sensors [A]. Proceedings of the IEEE International Symposium on Industrial Electronics, 2006,3338-3342
[34] Yotter R A,Baxter R R, Ohno S,et la. On a micro machined fluidic inclinometer [A]. Proceedings of the 12th International Conference on Transducer,Solid-State Sensors,Actuators and Microsystems [C],2003, 1279-1282
[35] Damiano Crescini, Marco Baùand Vittorio Ferrari. MEMS Tilt Sensor with Improved Resolution and Low Thermal Drift[C]. P. Malcovati et al. (eds.), Sensors and Microsystems: AISEM 2009 Proceedings, Lecture Notes in Electrical Engineering,1, Volume54, Sensors and Microsystems, Part 3, 225-228
[36] Yurish, S.Y. Low-cost, dual-axis smart inclinometer[C] .Sensors, 2008 IEEE Digital Object Identifier: 10.1109/ICSENS.2008.4716727, 2008, 1488– 1491
[37] Sang Lee, Young Lim and Joung Mun. Dynamic Characteristics of Analog Inclinometer[C]. IFMBE Proceedings, 1, Volume 14, World Congress on Medical Physics and Biomedical Engineering. 2006, Part 7, 857-860
[38] Guo Qinglei, Liang Huawei,Miao Shifu, Huang Jian. Design of a Plane Inclinometer Based on MEMS Accelerometer[C]. Information Acquisition,2007. ICIA '07. International Conference. 2007, 320 - 323
[39] Xia Kun; Wang Hong-Jie; Zhang Zhen-Guo; Chen Jian-Qiang. Design of a self-balanced system based on AccuStar electronic inclinometer[C] .2009,1- 4
[40] Djambazian,H.H.; Nerguizian,C.; Nerguizian,V.; Saad,M.. 3D Inclinometer and MEMS Acceleration Sensors[C]. Industrial Electronics,IEEE International Symposium. 2006, 3338 - 3342
[41] Ando, B.; Ascia, A.; Baglio, S.; Savalli, N.. A Novel Ferrofluidic Inclinometer [J] . Instrumentation and Measurement , IEEE Transactions . 2007 , 1114 - 1123
[42]焦竹青,熊伟丽,张林,徐保国.基于接近度的多个传感器数据融合方法研究[J].压电与声光, 2009(5):71-774
[43]黄沛,李晓漫.基于灰色理论的一种数据融合方法[J].航空计算技术, 2007(2):26-29
[44]韩峰,朱镭,智小军.基于模糊理论的多个传感器数据融合测量[J].应用光学, 2009(6):988-991
[45]潘昶,张德全.基于模糊数学的数据融合算法[J].指挥控制与仿真, 2009(2):65-66
[46] Jian Wang; Guowei Gao; Penghua Liu. The study on lange-angle CANBUS 2-axis inclinometer of rotary drilling rig[C]. Information Management and Engineering (ICIME), 2010 The 2nd IEEE International Conference . 2010 , 95– 97
[47] Da-wei, Lin; Tao, Guo. Design of Dual-axis Inclinometer Based on MEMS Accelerometer[C]. Measuring Technology and Mechatronics Automation (ICMTMA), 2011 Third International Conference. 2011 , 959 - 961