PDP电视生产专用涂料涂头的设计参数与流动特性分析
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摘要
平板显示已成为显示领域的主流,作为平板显示重要的一员,等离子显示亦备受社会关注。等离子产业的本土化,是全面提升等离子产品竞争力的关键。涂敷机是制造等离子显示屏的关键设备之一,其可完成等离子显示屏前、后两基板上电介质层、障壁层、保护层等涂层的涂敷工作。
挤压涂敷作为预计量涂敷方法的一种,能很好地应用于大幅面、均匀性与膜厚精度高的连续涂膜工作中。本文设计的等离子屏专用涂敷机的涂敷系统即是采用挤压涂敷的方法。本文提出了涂敷机整体结构的方案设计,基于涂料的沿程阻力与精度要求、矩形微通道的流动特性,详细设计了柱塞泵涂敷系统,认证了柱塞式驱动流体进行预计量涂敷的可行性。本文对涂敷头出口后流体流动的稳定性进行了分析,说明了涂膜内产生气泡的可能机理。
Flat panel display has become the mainstream of the display filed. As an important member of flat panel display, plasma display attracts great attention. Localization of the plasma industry is the key to promote the international competitiveness of plasma products. Precision Application Coater is one of the primary equipments to produce Plasma Display Panel (PDP). It can be used to form dielectric layer, barrier rib, and protective layer for front and rear plasma display substrates.
Extrusion coating, a common premetered method used for precision coating, is ideal for applying a uniform, adherent, and defect-free film of desired thickness onto the surface of wide substrate. This thesis presents a kind of coater using the method of extrusion coating for PDP fabrication. The paper provides an overall structure design. Based on the calculation of flow resistance in circular tubes, the flow characteristic of rectangular micro-channel and the precision in coating, a detailed design of the syringe pump coating system is presented in the paper. Analysis of stability of coating flows from the opening of the die head is also included in this article. As well, possible mechanisms of air entrainment are presented.
挤压涂敷作为预计量涂敷方法的一种,能很好地应用于大幅面、均匀性与膜厚精度高的连续涂膜工作中。本文设计的等离子屏专用涂敷机的涂敷系统即是采用挤压涂敷的方法。本文提出了涂敷机整体结构的方案设计,基于涂料的沿程阻力与精度要求、矩形微通道的流动特性,详细设计了柱塞泵涂敷系统,认证了柱塞式驱动流体进行预计量涂敷的可行性。本文对涂敷头出口后流体流动的稳定性进行了分析,说明了涂膜内产生气泡的可能机理。
Flat panel display has become the mainstream of the display filed. As an important member of flat panel display, plasma display attracts great attention. Localization of the plasma industry is the key to promote the international competitiveness of plasma products. Precision Application Coater is one of the primary equipments to produce Plasma Display Panel (PDP). It can be used to form dielectric layer, barrier rib, and protective layer for front and rear plasma display substrates.
Extrusion coating, a common premetered method used for precision coating, is ideal for applying a uniform, adherent, and defect-free film of desired thickness onto the surface of wide substrate. This thesis presents a kind of coater using the method of extrusion coating for PDP fabrication. The paper provides an overall structure design. Based on the calculation of flow resistance in circular tubes, the flow characteristic of rectangular micro-channel and the precision in coating, a detailed design of the syringe pump coating system is presented in the paper. Analysis of stability of coating flows from the opening of the die head is also included in this article. As well, possible mechanisms of air entrainment are presented.
引文
[1]光电显示网:50寸以上PDP面板仍具竞争力2011年销量可超2500万片. http://display.ofweek.com/2008-06/ART-230002-8400-18542001.html. 2008.6
[2]光电显示网:韩国显示器产业LCD、PDP、OLED、CRT称霸全球. http://display.ofweek.com/2007-02/ART-230002-8100-9032001.html
[3]徐济仁.等离子显示器(PDP)的应用与发展.电子工艺技术. Vol.3 No.24, 2003.5
[4]南京华显高科有限公司.等离子显示板电极的薄膜光刻制造方法及其产品.中国. CN 101047087A [P]. 2007.10
[5]蓝鼎,罗欣莲,万发荣等. TiO2薄膜的制备方法及其对染料敏化太阳电池性能的影响.感光科学与光化学Vol.21 No.4, 2003.7
[6]聂洪波,王延来,果世驹等.料浆涂敷技术制备CuInSe2薄膜
[7]富士胶片株式会社.溶液制膜方法.中国. CN 1481979A [P]. 2004.3.17
[8]富士胶片株式会社.溶液制膜方法及溶液制膜设备.中国. CN 101781403A [P]. 2010.7.21
[9] E. I. du Pont de Nemours and Company. Process for Preparing Oriented Organic Thermoplastic Polymeric Film. United States, US3139407 [P]. 1964.6
[10] Sustin Bagen, Greg Gbson and Hiroyoshi Sago et. Next generation coating technologies for low cost electronics manufacture. IEEE/CPMT Int'l Electronics Manufacturing Technology Symposium, 1996. pp.468—475
[11] Sangjun Han, James Derksen and Jung Hoon Chun. Extrusion Spin Coating: An Efficient and Deterministic Photoresist Coating Method in Microlithography. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, Vol.17 No.1, 2004.2
[12] A. G. Emslie, F. T. Bonner and L. G. Peck. Flow of a viscous liquid on a rotating disk. J. APPL. PHYS, Vol.29 No.5, 1958.5
[13]三星SDI株式会社.制造等离子体显示面板的方法:中国, 1006101420462 [P]. 2007.4.21
[14]西门子公司.用于制造和呈现流体涂层的装置:中国, 200810127577.3 [P]. 2008.6.27
[15]施密德吕纳股份有限公司.对表面涂涂层的方法:中国, 03817289.5 [P]. 2003.5.30
[16]林建忠等.流体力学.清华大学出版社. 2005.9. pp.73—93
[17] Frank M White. Fluid Mechanics [M]. Mc Graw Hill, 2003. pp.215—234
[18]王卫东.面向MEMS设计的微流体流动特性研究[D].西安电子科技大学博士学位论文. 2007.3
[19] Y. Mitsuya. Modified Reynolds equation for ultra-thin film gas lubrication using 1.5 order slip-flow model and considering surface accommodation coefficient [J]. Tribology, Tmns. ASME, Vol.115. 1993. pp.289—294
[20] W. A. Ehert and E. M. Sparrow. Slip flow in rectangular and annular ducts [J]. ASME Journal of Basic Engineering, Vol. 87. 1965. pp.1018—1024
[21] X. B. Chen and Jun Kai. Modeling of Positive-Displacement Fluid Dispensing Processes. IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING, Vol.27 No.3, 2004.7. pp.157-163
[22]巩云鹏,陈良玉.机械设计手册(新版)第5卷.机械工业出版社. 2004.8. pp.34-15—34-30
[23] GB/T 2348—1993液压气动系统及元件缸内径及活塞杆外径[S]
[24] GB/T 2351—2005液压气动系统用硬管外径和软管内径[S]
[25]赵跃进,何献忠.精密机械设计基础.北京理工大学出版社. 2003.9. pp.219—227
[26]滚珠丝杠综合样本.黑田精工.日本
[27]三菱电机.伺服电机使用手册(Vol.2). pp.6-1—6-61
[28]巩云鹏,陈良玉.机械设计手册(新版)第1卷.机械工业出版社. 2004.8. pp.4-82
[29] GB/T3103.1—2002紧固件公差螺栓、螺钉、螺柱和螺母[S]
[30]濮良贵,纪名刚.机械设计(第七版).高等教育出版社. 2004.5. pp.69—84
[31]巩云鹏,陈良玉.机械设计手册(新版)第2卷.机械工业出版社. 2004.8. pp.6-14
[32] GB/T 8606-2003液压快换接头螺纹连接尺寸及技术要求[S]
[33]巩云鹏,陈良玉.机械设计手册(新版)第3卷.机械工业出版社. 2004.8
[34]刘鸿文.材料力学(第4版).高等教育出版社. 2004.1. pp.176—190
[35] Sangjun Han. Modeling and Analysis of Extrusion-Spin Coating: An Efficient and Deterministic Photoresist Coating Method in Microlithography [D]. Massachusetts Institute of Technology, 2001.2
[36] E. B. Gutoff. Modern Coating and Drying Technology. VCH Publishers, Inc., 1992.
[37] L. E. Higgins and B. G. Scriven. Capillary pressure and viscous pressure drop set bounds on coating and bead operability [J]. Chemical Engineering Science,Vol.35, 1980
[38] E. J. Choinski. Patch coating: taking the spin out of thin. Information Display, Vol.7 No11, 1991
[39] W. Mues, J. Hens and L. Boiy. Observation of a dynamic wetting process using laser-doppler velocimetry [J]. AIChE Journal, Vol.35 No.9, 1989
[40] L. Sartor. Slot coating: Fluid mechanics and die design [D]. PhD Thesis, University of Minnesota, 1990
[41] K. Doren, W. Freitag and D. Stoye. Water-Borne Coatings, the Environmentally Friendly Alternative. Hanser Publishers, New York, 1995
[42] R. J. LaPorte. Hydrophilic polymer coatings for medical devices. Technomic Publishing Company, Inc., 1997
[43] H. L. Faust. Menisci studies in bead coating [D]. MS Thesis, Dept. of Chem. Eng., Drexel University, Philadelphia, 1975
[44] K. J. Ruschak. Limiting flow in a pre-metered coating device [J]. Chemical Engineering Science, 1976
[45] J. A. Tallmadge, C. B. Weinberger and H. L. Faust. Bead coating instability: A comparison of speed limit data with theory. AIChE, Vol.25, 1979
[46] B. M. Deryagin and S. M. Levi. Film coating theory. Focal Press, London, 1964
[47] P. Joos, M. Bracke and P. Van Remoortere. The dynamics of wetting. AIChE, Orlando, 1990.3
[48] D. R. Brown. A study of the behavior of a thin sheet of moving liquid [J]. Fluid Mech., Vol.10, 1960. pp.297–305
[49] S. P. Lin. Stability of a viscous liquid curtain [J]. Fluid Mech., Vol.104, 1981. pp. 111–118
[50] L. M. Hocking. A moving fluid interface on a rough surface [J]. Fluid Mech., Vol.76 No.801, 1976
[51] C. W. Hirt and J. M. Brethour. Moving Contact Lines on Rough Surfaces [J]. Presented at the 4th European Coating Symposium 2001, Brussels. Belgium. 2001.10
[52] C. W. Hirt and J. M. Brethour. Contact Lines on Rough Surfaces with Application to Air Entrainment [J]. Presented at the 11th International Coating Science and Technology Symposium, Minneapolis, Minnesota. Unpublished. 2002.9
[53] T. D. Blake and K. J. Ruschak. Wetting: Static and Dynamic Contact Lines. Liquid Film Coating, Chapman and Hall, Eds. S.F. Kistler and P.M. Schweizer, 1997. pp.63
[54] Nick Triantafillopoulos, Johan Gron and Iiro Luostarinen. Operational issues in high-speed curtain coating of paper, Part 1: The principles of curtain coating [J]. TAPPI Journal. Vol.3 No.11. 2004.11
[55] R. J. Dyson, P. D. Howell and C. J. W. Breward. Mathematical modeling of curtain coating
[56]朱克勤,许春晓.粘性流体力学.高等教育出版社. 2009.6. pp.41—43
[2]光电显示网:韩国显示器产业LCD、PDP、OLED、CRT称霸全球. http://display.ofweek.com/2007-02/ART-230002-8100-9032001.html
[3]徐济仁.等离子显示器(PDP)的应用与发展.电子工艺技术. Vol.3 No.24, 2003.5
[4]南京华显高科有限公司.等离子显示板电极的薄膜光刻制造方法及其产品.中国. CN 101047087A [P]. 2007.10
[5]蓝鼎,罗欣莲,万发荣等. TiO2薄膜的制备方法及其对染料敏化太阳电池性能的影响.感光科学与光化学Vol.21 No.4, 2003.7
[6]聂洪波,王延来,果世驹等.料浆涂敷技术制备CuInSe2薄膜
[7]富士胶片株式会社.溶液制膜方法.中国. CN 1481979A [P]. 2004.3.17
[8]富士胶片株式会社.溶液制膜方法及溶液制膜设备.中国. CN 101781403A [P]. 2010.7.21
[9] E. I. du Pont de Nemours and Company. Process for Preparing Oriented Organic Thermoplastic Polymeric Film. United States, US3139407 [P]. 1964.6
[10] Sustin Bagen, Greg Gbson and Hiroyoshi Sago et. Next generation coating technologies for low cost electronics manufacture. IEEE/CPMT Int'l Electronics Manufacturing Technology Symposium, 1996. pp.468—475
[11] Sangjun Han, James Derksen and Jung Hoon Chun. Extrusion Spin Coating: An Efficient and Deterministic Photoresist Coating Method in Microlithography. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, Vol.17 No.1, 2004.2
[12] A. G. Emslie, F. T. Bonner and L. G. Peck. Flow of a viscous liquid on a rotating disk. J. APPL. PHYS, Vol.29 No.5, 1958.5
[13]三星SDI株式会社.制造等离子体显示面板的方法:中国, 1006101420462 [P]. 2007.4.21
[14]西门子公司.用于制造和呈现流体涂层的装置:中国, 200810127577.3 [P]. 2008.6.27
[15]施密德吕纳股份有限公司.对表面涂涂层的方法:中国, 03817289.5 [P]. 2003.5.30
[16]林建忠等.流体力学.清华大学出版社. 2005.9. pp.73—93
[17] Frank M White. Fluid Mechanics [M]. Mc Graw Hill, 2003. pp.215—234
[18]王卫东.面向MEMS设计的微流体流动特性研究[D].西安电子科技大学博士学位论文. 2007.3
[19] Y. Mitsuya. Modified Reynolds equation for ultra-thin film gas lubrication using 1.5 order slip-flow model and considering surface accommodation coefficient [J]. Tribology, Tmns. ASME, Vol.115. 1993. pp.289—294
[20] W. A. Ehert and E. M. Sparrow. Slip flow in rectangular and annular ducts [J]. ASME Journal of Basic Engineering, Vol. 87. 1965. pp.1018—1024
[21] X. B. Chen and Jun Kai. Modeling of Positive-Displacement Fluid Dispensing Processes. IEEE TRANSACTIONS ON ELECTRONICS PACKAGING MANUFACTURING, Vol.27 No.3, 2004.7. pp.157-163
[22]巩云鹏,陈良玉.机械设计手册(新版)第5卷.机械工业出版社. 2004.8. pp.34-15—34-30
[23] GB/T 2348—1993液压气动系统及元件缸内径及活塞杆外径[S]
[24] GB/T 2351—2005液压气动系统用硬管外径和软管内径[S]
[25]赵跃进,何献忠.精密机械设计基础.北京理工大学出版社. 2003.9. pp.219—227
[26]滚珠丝杠综合样本.黑田精工.日本
[27]三菱电机.伺服电机使用手册(Vol.2). pp.6-1—6-61
[28]巩云鹏,陈良玉.机械设计手册(新版)第1卷.机械工业出版社. 2004.8. pp.4-82
[29] GB/T3103.1—2002紧固件公差螺栓、螺钉、螺柱和螺母[S]
[30]濮良贵,纪名刚.机械设计(第七版).高等教育出版社. 2004.5. pp.69—84
[31]巩云鹏,陈良玉.机械设计手册(新版)第2卷.机械工业出版社. 2004.8. pp.6-14
[32] GB/T 8606-2003液压快换接头螺纹连接尺寸及技术要求[S]
[33]巩云鹏,陈良玉.机械设计手册(新版)第3卷.机械工业出版社. 2004.8
[34]刘鸿文.材料力学(第4版).高等教育出版社. 2004.1. pp.176—190
[35] Sangjun Han. Modeling and Analysis of Extrusion-Spin Coating: An Efficient and Deterministic Photoresist Coating Method in Microlithography [D]. Massachusetts Institute of Technology, 2001.2
[36] E. B. Gutoff. Modern Coating and Drying Technology. VCH Publishers, Inc., 1992.
[37] L. E. Higgins and B. G. Scriven. Capillary pressure and viscous pressure drop set bounds on coating and bead operability [J]. Chemical Engineering Science,Vol.35, 1980
[38] E. J. Choinski. Patch coating: taking the spin out of thin. Information Display, Vol.7 No11, 1991
[39] W. Mues, J. Hens and L. Boiy. Observation of a dynamic wetting process using laser-doppler velocimetry [J]. AIChE Journal, Vol.35 No.9, 1989
[40] L. Sartor. Slot coating: Fluid mechanics and die design [D]. PhD Thesis, University of Minnesota, 1990
[41] K. Doren, W. Freitag and D. Stoye. Water-Borne Coatings, the Environmentally Friendly Alternative. Hanser Publishers, New York, 1995
[42] R. J. LaPorte. Hydrophilic polymer coatings for medical devices. Technomic Publishing Company, Inc., 1997
[43] H. L. Faust. Menisci studies in bead coating [D]. MS Thesis, Dept. of Chem. Eng., Drexel University, Philadelphia, 1975
[44] K. J. Ruschak. Limiting flow in a pre-metered coating device [J]. Chemical Engineering Science, 1976
[45] J. A. Tallmadge, C. B. Weinberger and H. L. Faust. Bead coating instability: A comparison of speed limit data with theory. AIChE, Vol.25, 1979
[46] B. M. Deryagin and S. M. Levi. Film coating theory. Focal Press, London, 1964
[47] P. Joos, M. Bracke and P. Van Remoortere. The dynamics of wetting. AIChE, Orlando, 1990.3
[48] D. R. Brown. A study of the behavior of a thin sheet of moving liquid [J]. Fluid Mech., Vol.10, 1960. pp.297–305
[49] S. P. Lin. Stability of a viscous liquid curtain [J]. Fluid Mech., Vol.104, 1981. pp. 111–118
[50] L. M. Hocking. A moving fluid interface on a rough surface [J]. Fluid Mech., Vol.76 No.801, 1976
[51] C. W. Hirt and J. M. Brethour. Moving Contact Lines on Rough Surfaces [J]. Presented at the 4th European Coating Symposium 2001, Brussels. Belgium. 2001.10
[52] C. W. Hirt and J. M. Brethour. Contact Lines on Rough Surfaces with Application to Air Entrainment [J]. Presented at the 11th International Coating Science and Technology Symposium, Minneapolis, Minnesota. Unpublished. 2002.9
[53] T. D. Blake and K. J. Ruschak. Wetting: Static and Dynamic Contact Lines. Liquid Film Coating, Chapman and Hall, Eds. S.F. Kistler and P.M. Schweizer, 1997. pp.63
[54] Nick Triantafillopoulos, Johan Gron and Iiro Luostarinen. Operational issues in high-speed curtain coating of paper, Part 1: The principles of curtain coating [J]. TAPPI Journal. Vol.3 No.11. 2004.11
[55] R. J. Dyson, P. D. Howell and C. J. W. Breward. Mathematical modeling of curtain coating
[56]朱克勤,许春晓.粘性流体力学.高等教育出版社. 2009.6. pp.41—43