AFM恒力模式下倾角和摩擦力对测量结果影响的研究
|
摘要
纳米测量是纳米科技领域研究的一个重要的分支。原子力显微镜(Atomic Force Microscope,AFM)因具有以nm级分辨率获得样本表面的三维形貌的能力而被用作纳米测量的重要工具。半导体工业的迅速发展对AFM进行纳米尺度的半导体刻线形貌测量的需求尤为迫切。因此对AFM的工作模式及其测量误差的研究有着十分重要的理论和现实意义。恒力模式是AFM的主要工作模式之一,它具有分辨率高和测量速度快等优点,但其测量结果因受样本表面倾角和针尖-样本表面间摩擦力的影响而存在较大的测量误差。为克服上述缺点,本课题研究了摩擦力及倾角对测量结果的影响,并提出了消除该影响的一种新AFM工作模式。
在综述了恒力模式下影响AFM测量结果的各种因素基础上,分析了摩擦力和倾角对测量结果的影响,证明这两个因素是测量误差的重要来源,研究了能够克服这两个因素影响的工作模式的可行性。
研究了恒力模式下针尖和样本表面间的范德瓦尔斯力(van der Waals力,简称为vdW力)和摩擦力,并给出两种常用的悬臂梁——矩形梁和三角梁在法向力和切向力作用时悬臂梁末端的形变及偏转角,建立了恒力模式下针尖和样本表面间摩擦力和样本表面倾角与测量结果之间的数学模型。证明了摩擦力使测量结果产生明显误差,并且扫描方向改变导致的摩擦力方向的变化将使其测量结果产生明显差异。倾角除产生测量误差外,还可能导致样本表面上的一些点在恒力模式下无法得到正确的测量结果,即可能产生测量死点或测量死区。
针对AFM在半导体刻线形貌测量中摩擦力和倾角影响测量结果的问题,提出一种消除倾角和摩擦力影响的AFM工作模式——EIIAF模式,在这种工作模式下,AFM针尖保持与样本表面接触,扫描方向垂直于悬臂梁的长轴方向。在测量过程中,AFM反馈控制器控制扫描器沿z轴移动样本,保持针尖-样本表面间的vdW力恒定。分析了摩擦力和倾角对针尖的受力的影响,研究了悬臂梁末端沿z轴方向偏转角和沿x轴方向扭转角与vdW力之间的关系,建立其数学模型,推导出了样本表面形貌高度的重建算法。提出两个基于EIIAF模式的扩展工作模式:横向恒高模式和补偿模式,并分析了它们的优缺点。在这两种工作模式中,放宽了对vdW力恒定的要求,但仍可得到较精确的测量结果,并使AFM反馈控制器简化。
研究EIIAF模式及其两种扩展模式中摩擦力及倾角与测量结果和测量过程中vdW力之间的数学关系。证明在这三种工作模式下摩擦力和倾角不会对测量结果产生影响。但在两种扩展模式下这两个因素可能导致vdW力的误差,并由此导致在一些情况下出现不可测点或不可测区。能够通过改变扫描器运动方向消除这里的不可测点或不可测区,从而实现对表面任何形貌的测量。
在理论和仿真研究基础上,利用测量梯形截面的Si刻线样本,实验验证了EIIAF模式的可行性,并与恒力模式下测量结果对比,验证新工作模式消除摩擦力和倾角对测量结果影响的效果。实验结果分析证明了由这两个因素导致的恒力模式下的测量误差能够被理论公式适当的描述,并且EIIAF模式能够消除这两个因素给测量带来的影响。
说明校准悬臂梁弹性常数和针尖-样本表面间的摩擦系数对于在该模式下样本表面形貌和vdW力的精确测量是十分重要的。改造原AFM的模拟控制系统为数字控制系统,并在原有功能基础上增加了所提出的新AFM工作模式的测量功能。
Nanometer measurement is an important branch of nanotechnology. Atomic force microscopes (AFM), which obtain three dimensional images of sample surface with nanometer level resolution, are increasingly being used as tools for nanometer dimensional measurement. As the rapid development of semiconductor industry, there is an urgent need for semiconductor step topography measurement. Therefore the research on the operation mode and measurement error of AFM has important academic and practical meanings. The constant force mode is one of the AFM main operation modes, which has the advantage of high resolution and rapid measurement speed and so on. But it still has bigger measurement error due to the inclination angle of sample surface and friction between the tip and sample surface. To overcome the above limitations, the influence on measurement results of the friction and inclination angle is studied, and a novel AFM operation mode which can eliminating the above two factors is proposed in the paper.
Based on the summary about the influence factors on AFM measurement results in the constant force mode, the effects on measurement results of the friction and the inclination angle is analyzed. It shows that these two factors are the important contributors of measurement error. Then the feasibility of overcoming the effects coming from these two factors is studied.
We studied that the van der Waals (vdW) force and friction between the tip and sample surface in the constant force mode, and gave the deformation and deflection at the end of cantilever in the vertical and lateral force of two kinds of cantilevers including rectangular and triangular cantilever. Then the mathematic model of measurement result witch is a function of friction and inclination angle is founded. It shows that the friction leads to significant measurement errors, and the change of the friction direction originating from scanning direction alteration can make results different obviously. The inclination angle not only can bring measurement, but also make that some points on the sample surface not able to get correct measurement results in the constant force mode, which is referred to dead point and dead zone of the measurement.
Aim at the problem of the friction and inclination angle have an influence on the measurement results, an AFM operation mode of eliminating influence of inclination angle and friction——EIIAF mode is presented. In this operation mode, AFM tip keep the contact with the sample surface, and the scanning direction is vertical with the long axis of cantilever. In the measurement process the AFM feedback controller make the scanner move the sample along z-axis and keep the vdW force between the tip and sample surface constant. The effect of friction and inclination angle on force on tip is analyzed, then the relationship of the deflection along z-axis and the torsion along x-axis of the cantilever with the vdW force is studied, and the corresponding mathematic model is also founded. Additionally the reconstructed algorithm of sample surface topography height is proposed. Two extended operation mode is presented based on the EIIAF mode are given, which are lateral constant height mode and the compensating mode. Then their advantages and limitations are analyzed respectively. In these two operation mode, the request of keeping the vdW force constant is not very strict. But the relatively precise measurement result can be obtained, which can simplify the AFM feedback controller.
The mathematic relationship of measurement result and vdW force with the friction and inclination angle in the EIIAF mode and the two extended mode is presented. It proves that in these three operation mode the friction and inclination angle have no effect on the measurement results. But in two extended operation mode, these two factors can make the error of the vdW force, accordingly produce unmeasured point and unmeasured zone. By means of changing the movement direction of scanner the unmeasured point and unmeasured zone can be eliminated and realize the measurement of all surface topography.
Based on the study of theory and simulation, the experiments verify the feasibility of the EIIAF mode by measuring the Si step sample with the trapeziform cross section. And the measurement results are compared with the constant force mode in order to show the effect of eliminating the friction and inclination angle on measurement results. The experimental results show that the measurement error coming from these two factors in the constant force mode can be properly described by the theoretical formula, and the EIIAF mode can eliminate the influence of these two factors.
It shows that the calibration of the flexibility constant and the friction coefficient between the tip and sample surface are very important to the precise measurement of sample topography and vdW force. The AFM is improved from the primary analog control system to digital control system, and add up the measurement function of the proposed novel AFM operation mode in the base of intrinsic functions.
在综述了恒力模式下影响AFM测量结果的各种因素基础上,分析了摩擦力和倾角对测量结果的影响,证明这两个因素是测量误差的重要来源,研究了能够克服这两个因素影响的工作模式的可行性。
研究了恒力模式下针尖和样本表面间的范德瓦尔斯力(van der Waals力,简称为vdW力)和摩擦力,并给出两种常用的悬臂梁——矩形梁和三角梁在法向力和切向力作用时悬臂梁末端的形变及偏转角,建立了恒力模式下针尖和样本表面间摩擦力和样本表面倾角与测量结果之间的数学模型。证明了摩擦力使测量结果产生明显误差,并且扫描方向改变导致的摩擦力方向的变化将使其测量结果产生明显差异。倾角除产生测量误差外,还可能导致样本表面上的一些点在恒力模式下无法得到正确的测量结果,即可能产生测量死点或测量死区。
针对AFM在半导体刻线形貌测量中摩擦力和倾角影响测量结果的问题,提出一种消除倾角和摩擦力影响的AFM工作模式——EIIAF模式,在这种工作模式下,AFM针尖保持与样本表面接触,扫描方向垂直于悬臂梁的长轴方向。在测量过程中,AFM反馈控制器控制扫描器沿z轴移动样本,保持针尖-样本表面间的vdW力恒定。分析了摩擦力和倾角对针尖的受力的影响,研究了悬臂梁末端沿z轴方向偏转角和沿x轴方向扭转角与vdW力之间的关系,建立其数学模型,推导出了样本表面形貌高度的重建算法。提出两个基于EIIAF模式的扩展工作模式:横向恒高模式和补偿模式,并分析了它们的优缺点。在这两种工作模式中,放宽了对vdW力恒定的要求,但仍可得到较精确的测量结果,并使AFM反馈控制器简化。
研究EIIAF模式及其两种扩展模式中摩擦力及倾角与测量结果和测量过程中vdW力之间的数学关系。证明在这三种工作模式下摩擦力和倾角不会对测量结果产生影响。但在两种扩展模式下这两个因素可能导致vdW力的误差,并由此导致在一些情况下出现不可测点或不可测区。能够通过改变扫描器运动方向消除这里的不可测点或不可测区,从而实现对表面任何形貌的测量。
在理论和仿真研究基础上,利用测量梯形截面的Si刻线样本,实验验证了EIIAF模式的可行性,并与恒力模式下测量结果对比,验证新工作模式消除摩擦力和倾角对测量结果影响的效果。实验结果分析证明了由这两个因素导致的恒力模式下的测量误差能够被理论公式适当的描述,并且EIIAF模式能够消除这两个因素给测量带来的影响。
说明校准悬臂梁弹性常数和针尖-样本表面间的摩擦系数对于在该模式下样本表面形貌和vdW力的精确测量是十分重要的。改造原AFM的模拟控制系统为数字控制系统,并在原有功能基础上增加了所提出的新AFM工作模式的测量功能。
Nanometer measurement is an important branch of nanotechnology. Atomic force microscopes (AFM), which obtain three dimensional images of sample surface with nanometer level resolution, are increasingly being used as tools for nanometer dimensional measurement. As the rapid development of semiconductor industry, there is an urgent need for semiconductor step topography measurement. Therefore the research on the operation mode and measurement error of AFM has important academic and practical meanings. The constant force mode is one of the AFM main operation modes, which has the advantage of high resolution and rapid measurement speed and so on. But it still has bigger measurement error due to the inclination angle of sample surface and friction between the tip and sample surface. To overcome the above limitations, the influence on measurement results of the friction and inclination angle is studied, and a novel AFM operation mode which can eliminating the above two factors is proposed in the paper.
Based on the summary about the influence factors on AFM measurement results in the constant force mode, the effects on measurement results of the friction and the inclination angle is analyzed. It shows that these two factors are the important contributors of measurement error. Then the feasibility of overcoming the effects coming from these two factors is studied.
We studied that the van der Waals (vdW) force and friction between the tip and sample surface in the constant force mode, and gave the deformation and deflection at the end of cantilever in the vertical and lateral force of two kinds of cantilevers including rectangular and triangular cantilever. Then the mathematic model of measurement result witch is a function of friction and inclination angle is founded. It shows that the friction leads to significant measurement errors, and the change of the friction direction originating from scanning direction alteration can make results different obviously. The inclination angle not only can bring measurement, but also make that some points on the sample surface not able to get correct measurement results in the constant force mode, which is referred to dead point and dead zone of the measurement.
Aim at the problem of the friction and inclination angle have an influence on the measurement results, an AFM operation mode of eliminating influence of inclination angle and friction——EIIAF mode is presented. In this operation mode, AFM tip keep the contact with the sample surface, and the scanning direction is vertical with the long axis of cantilever. In the measurement process the AFM feedback controller make the scanner move the sample along z-axis and keep the vdW force between the tip and sample surface constant. The effect of friction and inclination angle on force on tip is analyzed, then the relationship of the deflection along z-axis and the torsion along x-axis of the cantilever with the vdW force is studied, and the corresponding mathematic model is also founded. Additionally the reconstructed algorithm of sample surface topography height is proposed. Two extended operation mode is presented based on the EIIAF mode are given, which are lateral constant height mode and the compensating mode. Then their advantages and limitations are analyzed respectively. In these two operation mode, the request of keeping the vdW force constant is not very strict. But the relatively precise measurement result can be obtained, which can simplify the AFM feedback controller.
The mathematic relationship of measurement result and vdW force with the friction and inclination angle in the EIIAF mode and the two extended mode is presented. It proves that in these three operation mode the friction and inclination angle have no effect on the measurement results. But in two extended operation mode, these two factors can make the error of the vdW force, accordingly produce unmeasured point and unmeasured zone. By means of changing the movement direction of scanner the unmeasured point and unmeasured zone can be eliminated and realize the measurement of all surface topography.
Based on the study of theory and simulation, the experiments verify the feasibility of the EIIAF mode by measuring the Si step sample with the trapeziform cross section. And the measurement results are compared with the constant force mode in order to show the effect of eliminating the friction and inclination angle on measurement results. The experimental results show that the measurement error coming from these two factors in the constant force mode can be properly described by the theoretical formula, and the EIIAF mode can eliminate the influence of these two factors.
It shows that the calibration of the flexibility constant and the friction coefficient between the tip and sample surface are very important to the precise measurement of sample topography and vdW force. The AFM is improved from the primary analog control system to digital control system, and add up the measurement function of the proposed novel AFM operation mode in the base of intrinsic functions.
引文
1 G.Binnig, H.Rohrer. Scanning Tunneling Microscopy. Physica B:Physics Of Condensed Matter & C:Atomic, Molecular And Plasma Physics, Optics,. 1984, 127(B-C(1-3)):37~45
2赵平,杨勇,胡小唐.几何量纳米计量方法及仪器.航空精密制造技术. 2001, 37(6):28~32
3王忠祥.纳米材料及器件的测量需求.现代科学仪器. 2004, 2:70~73
4 M.H. Hassan. Small Things and Big Changes in the Developing World. Science. 2005, 309:65~66
5 K.B.L. Steve Rvder, Xiaofan Meng, and Liwei Lin. Characterization Of Out-Of-Plane High Frequency Microresonators By AFM. The 12th International Conference on Solid State Sensors, Actuators and Microsystems. 2003:424~427
6 B. Ebersberger, A. Olbrich,C. Boit. Application of Scanning Probe Microscopy Techniques In Semiconductor Failure Analysis. Microelectronics Reliability. 2001, 41(9-10):1449~ 1458
7 A.S. Paulo, R. Garcé. High-Resolution Imaging Of Antibodies By Tapping-Mode Atomic Force Microscopy: Attractive And Repulsive Tip-Sample Interaction Regimes. Biophysical Journal. 2000, 78(3):1599~1605
8 Z. Reich, R. Kapon,R. Nevo et al. Scanning Force Microscopy In The Applied Biological Sciences. Biotechnology Advances. 2001, 19( 6):451~ 485
9 F. Lin, D. Meier,D. Hoyt Et Al. Atomic Force Microscopy. A Tool for Analysing Coatings. Materials World. 1993, 1(7):393~ 395
10 W. Gao, R.J. Hocken,J.A. Patten et al. Construction And Testing Of A Nanomachining Instrument. Precision Engineering. 2000, 24(4):320~ 328
11 B.O. Su, R. Oshana,M. Menaker et al. Shape Control Using Sidewall Imaging. Proceedings Of SPIE - The International Society For Optical Engineering. 2000, 3998:232~238
12 F. Rubio-Sierra, R. Stark,S. Thalhammer et al. Force-Feedback Joystick As A Low-Cost Haptic Interface For An Atomic-Force-MicroscopyNanomanipulator. Appl. Phys. 2003, 76:903~906
13 L.M. Fok, C.K. Fung,Y.H. Liu et al. Nano-Scale Mechanical Test of Mems Structures By Atomic Force Microscope. Proceedings Of The World Congress On Intelligent Control And Automation (Wcica). 2004, 5:4587~4590
14杨志萍,方曙,王春等.国际纳米科技文献产出分析研究.现代情报. 2006, 7:148~150
15任红轩.世界纳米科技发展趋势分析.新材料产业. 2007(6):14~17
16裘晓辉,白春礼.中国纳米科技研究的进展.前沿科学. 2007, 1(1):6~10
17白春礼.我国纳米科技优势和缺陷.中国粉体工业. 2006(2)
18 S. Gonda, K. Kinoshita,H. Noguchi et al. AFM Measurement Of Linewidth With Sub-Nanometer Scale Precision. Progress In Biomedical Optics And Imaging - Proceedings Of SPIE. 2005, 5752(I):156~162
19 G. Dai, L. Koenders,F. Pohlenz et al. Accurate And Traceable Calibration Of One-Dimensional Gratings. Measurement Science and Technology. 2005, 16(6):1241~ 1249
20 H. Cramer, T. Kiers,P. Vanoppen et al. Total Test Repeatability, A New Figure Of Merit For Cd Metrology Tools. Proceedings Of SPIE - The International Society For Optical Engineering. 2004, 5375(Part 2):1254~1264
21 K. Dirscherl, K.R. Koops. Developments on the NMI-VSL Traceable Scanning Probe Microscope. Proceedings Of SPIE - The International Society For Optical Engineering. 2003, 5190:173~ 177
22 J. Leckenby. Scanning Probe Microscopy - How Does It Work And What Might You Use It For? Iee Colloquium (Digest). 1994(149):5~6
23胡光康.扫描探针显微镜的研究及应用.硕士, 2000:2~12.
24 O. Jusko, X. Zhao,H. Wolff et al. Design And Three Dimensional Calibration Of A Measuring Scanning Tunneling Microscope For Metrological Applications. Rev. Sci. Instrum. 1994, 65:2514ff
25赵克功,高思田,徐毅et al.计量型原子力显微镜.计量学报. 1998, 19(1):1~8
26 N.G. Orji, A. Martinez,R.G. Dixson et al. Progress On Implementation Of A Cd-AFM-Based Reference Measurement System. Proceedings of SPIE - TheInternational Society For Optical Engineering. 2006, 6152 I
27 R. Dixson, N.T. Sullivan,J. Schneir et al. Measurement Of A Cd And Sidewall Angle Artifact With Two-Dimensional Cd AFM Metrology. Proceedings of SPIE - The International Society For Optical Engineering. 1996, 2725:572~ 588
28 J.Schneir, T.H.Mcwaid. Design of an Atomic Force Microscope With Interferometric Position Control. Journal Of Vacuum Science & Technology. 1994, 12(6):3561~3566
29 J.Schneir, T.Mcwaid,T.V.Vorburger. An Instrument For Calibrating Atomic Force Microscope Standards. Proceedings Of SPIE - The International Society For Optical Engineering. 1994, 2196:167~180
30 R. Dixson, A. Guerry. Reference Metrology Using A Next Generation Cd-AFM. Proceedings of SPIE - The International Society For Optical Engineering. 2004, 5375(Part 1):633~ 646
31 N.G. Orji, R.G. Dixson,J. Fu et al. Traceable Pico-Meter Level Step Height Metrology. Wear. 2004, 257(12 Speciss):1264~ 1269
32 R. Dixson, J. Fu,N. Orji Et al. Cd-AFM Reference Metrology At Nist And Sematech. Progress In Biomedical Optics And Imaging - Proceedings Of SPIE. 2005, 5752(I):324~ 336
33高思田,叶孝佑,邵宏伟等.用于纳米级三维表面形貌及微小尺寸测量的原子力显微镜.制造技术与机床. 2004, 8:34~39
34 F. Meli, R. Thalmann. Long-Range AFM Profiler Used for Accurate Pitch Measurements. Measurement Science & Technology. 1998, 9(7):1087~ 1092
35 S. Gonda, K. Kinoshita,H. Noguchi et al. Compact, High-Resolution Homodyne Interferometer For Nanometer-Scale, Multidimensional AFM Metrology. Proceedings of SPIE - The International Society for Optical Engineering. 2004, 5532:229~ 236
36 Q. Huang, S. Gonda,I. Misumi Et Al. Nonlinear And Hysteretic Influence Of Piezoelectric Actuators In AFMs On Lateral Dimension Measurement. Sensors And Actuators, A: Physical. 2006, 125(2):590~ 596
37陈本永,吴昭同,朱若谷.纳米测量技术研究现状与发展趋势.激光杂志. 2000, 21(2):2~6
38 G. Binnig, C.F. Quate,C. Gerber. Atomic Force Microscope. Physical Review Letters. 1986, 56(9):930~933
39 E. Meyer, S.P. Jarvis,N.D. Spencer. Scanning Probe Microscopy In Materials Science. Mrs Bulletin. 2004, 29(7):443~ 445
40 L.Y. Hong Xing You. Atomic Force Microscopy Imaging Of Living Cells: Progress, Problems and Prospects. 1997
41 W.F. Heinz, J.H. Hoh. Spatially Resolved Force Spectroscopy of Biological Surfaces Using The Atomic Force Microscope. Tibtech April. 1999, 17:143~150
42 W. Gutmannsbauer, H.J. Hug,E. Meyer. Scanning Probe Microscopy for Nanometer Inspections And Industrial Applications. Microelectronic Engineering. 1996, 32( 1-4):389~ 409
43 F.J. Giessibl. Advances in Atomic Force Microscopy. Reviews Of Modern Physics,. 2003, 75(3):949~983
44 R.J. Colton. Nanoscale Measurements and Manipulation. Journal Of Vacuum Science And Technology B: Microelectronics And Nanometer Structures. 2004, 22(4):1609~ 1635
45张虎.液相型原子力显微镜的研制及其应用研究.硕士, 2004:1~9.
46 S. Ryder, K.B. Lee,X. Meng et al. AFM Characterization Of Out-Of-Plane High Frequency Microresonators. Sensors and Actuators, A: Physical. 2004, 114(2-3):135~ 140
47 B. Ebersberger, A. Olbrich,C. Boit. Scanning Probe Microscopy in Semiconductor Failure Analysis. Microelectronics Reliability. 2001, 41(8):1231~1236
48 N.C. Santos, M.A. Castanhob. An Overview Of The Biophysical Applications Of Atomic Forcean Overview Of The Biophysical Applications Of Atomic Force Microscopy. Biophysical Chemistry. 2004, 107:133~149
49 A. Murray, J. Leckenby. Scanning Probe Microscopy Applications In Materials Science. American Laboratory. 1997, 29(19):8,10
50 S. Fahlbusch, S. Mazerolle,J.M. Breguet et al. Nanomanipulation In A Scanning Electron Microscope. Journal of Materials Processing Technology. 2005, 167(2-3):371~ 382
51 M. Tortonese. Cantilevers And Tips For Atomic Force Microscopy. IEEEEngineering in Medicine and Biology. 1997, 16(2):28~33
52 P.J. Ryan, G.G. Adams,N.E. Mcgruer et al. Contact Scanning Mode AFM For Nanomechanical Testing Of Free-Standing Structures. Journal of Micromechanics and Microengineering. 2006, 16(5):1040~ 1046
53 A. Gaitas, Y.B. Gianchandani. An Experimental Study Of The Contact Mode AFM Scanning Capability Of Polyimide Cantilever Probes. Ultramicroscopy. 2006, 106(8-9):874~ 880
54 E. Tranvouez, P. Budau,G. Bremond. Topographical and Electrical Study Of Contact And Intermittent Contact Mode Inp AFM Lithography. Nanotechnology. 2006, 17(2):455~ 460
55 J. Kwon, J. Hong,Y.S. Kim et al. Atomic Force Microscope With Improved Scan Accuracy, Scan Speed, And Optical Vision. Review of Scientific Instruments. 2003, 74(10):4378~ 4383
56 Proksch, R. And Schaffer, T.E. And Cleveland, J.P. And Callahan, R.C. And Viani, M.B. Finite Optical Spot Size And Position Corrections In Thermal Spring Constant Calibration. Nanotechnology. 2004, 15(9):1344~ 1350
57 A. Mendez-Vilas, M.L. Gonzalez-Martin,M.J. Nuevo. Optical Interference Artifacts In Contact Atomic Force Microscopy Images. Ultramicroscopy. 2002, 92(3-4):243~ 250
58 O.M. El Rifai, K. Youcef-Toumi. Dynamics Of Contact-Mode Atomic Force Microscopes. Proceedings Of The American Control Conference. 2000, 3:2118~ 2122
59 Jung, Hewon, Shim, Jongyoup And Gweon, Daegab. Enhancement of AFM Image By Compensating The Hysteresis And Creep Effect Within PZT. Proceedings Of SPIE - The International Society For Optical Engineering. 1999, 3740:327~ 330
60 G. Schitter, P. Menold,H.F. Knapp et al. High Performance Feedback For Fast Scanning Atomic Force Microscopes. Review of Scientific Instruments. 2001, 72(8):3320
61 M. Watanabe, S. Baba,T. Nakata et al. An Advanced AFM Sensor For High-Aspect Ratio Pattern Profile In-Line Measurement. Proceedings Of SPIE - The International Society For Optical Engineering. 2006, 6152II:61522
62 G. Schitter, R.W. Stark,A. Stemmer. Fast Contact-Mode Atomic ForceMicroscopy On Biological Specimen By Model-Based Control. Ultramicroscopy. 2004, 100(3-4):253~ 257
63 A.J. Boef. The Influence Of Lateral Forces In Scanning Force Microscopy. Rev. Sci. Instrum. 1991, 62(1):88~92
64 International, A. Guide To Scanner And Tip Related Artifacts In Scanning Tunneling Microscopy And Atomic Force Microscopy. 2004.
65 R. Dixson, J. Schneir,T.H. Mcwaid et al. Toward Accurate Linewidth Metrology Using Atomic Force Microscopy And Tip Characterization. Proceedings of SPIE - The International Society For Optical Engineering. 1996, 2725:589~ 607
66 M. Kopycinska-Muller, R.H. Geiss,D.C. Hurley. Contact Mechanics And Tip Shape In AFM-Based Nanomechanical Measurements. Ultramicroscopy. 2006, 106(6):466~ 474
67 M.R. Vanlandingham, T.F. Juliano,M.J. Hagon. Measuring Tip Shape For Instrumented Indentation Using Atomic Force Microscopy. Measurement Science And Technology. 2005, 16(11):2173~ 2185
68 B.D. Aumond, K. Youcef-Toumi. Experimental High Precision Profilometry Of High Aspect Ratio Samples. Proceedings Of The IEEE International Conference On Systems, Man And Cybernetics. 1998, 5:4435~ 4440
69陈津平,胡晓东,陈峰等.振动与扫描速率综合影响spm图像的实验研究.电子显微学报. 2003, 22(3):242~246
70 P.A. Maurice. Applications of Atomic-Force Microscopy In Environmental Colloid And Surface Chemistry. Colloids and Surfaces A: Physicochemical And Engineering Aspects. 1996, 107:57~ 75
71 A.W. Sparks, S.R. Manalis. Atomic Force Microscopy With Inherent Disturbance Suppression For Nanostructure Imaging. Nanotechnology. 2006, 17(6):1574~ 1579
72 H.-J. Shieh, F.-J. Lin,P.-K. Huang Et Al. Adaptive Displacement Control With Hysteresis Modeling For Piezoactuated Positioning Mechanism. IEEE Transactions On Industrial Electronics. 2006, 53( 3):905~ 914
73 C. Ru, L. Sun,K. Wang. An Adaptive Inverse Method Of Control For A Piezoelectric Actuator. Smart Materials And Structures. 2006, 15(1):14~18
74 Stefan Adamsmair, Peter Hinterdorfer, Bernhard Zagar. Digital SignalProcessing In AFM Topography And Recognition Imaging. SPIE. 2005
75 K. Henriksen, S.L. Stipp. Image Distortion In Scanning Probe Microscopy. 2002, 87:5~16
76 R.V. Gainutdinov, P.A. Arutyunov. Artifacts In Atomic Force Microscopy. Mikroelektronika. 2001, 30(4):257~265
77 T. Schimmel, T. Koch,J. Kueppers et al. True Atomic Resolution Under Ambient Conditions Obtained By Atomic Force Microscopy In The Contact Mode. Applied Physics A: Materials Science And Processing. 1999, 68(4):399~ 402
78 A.L.S. Werner A. Hofer. Adam S. Foster. Theories Of Scanning Probe Microscopes At The Atomic Scale. Reviews of Modern Physics. 2003, 75(2):1287~1331
79 H.-J. Butt, B. Cappella,M. Kappl. Force Measurements With The Atomic Force Microscope: Technique, Interpretation And Applications. Surface Science Reports. 2005, 59:1~152
80 Israelachvili, Jacob N. And Chen, You-Lung and Yoshizawa, Hisae. Relationship between Adhesion And Friction Forces. Journal of Adhesion Science And Technology. 1994, 8(11):1231~ 1249
81 Z. Tao, B. Bhushan. Surface Modification of AFM Si3N4 Probes For Adhesion/Friction Reduction And Imaging Improvement. Journal of Tribology. 2006, 128:865~875
82 J.H. Hoh, A. Engel. Friction Effects On Force Measurements With An Atomic Force Microscope. American Chemical Society. 1993, 9:3310~3312
83 D.F. Ogletree, R.W. Carpick,M. Salmeron. Calibration Of Frictional Forces In Atomic Force Microscopy. Rev. Sci. Instrum. 1996, 67(9):3298~3306
84 R.J. Warmack, X.Y. Zheng,T. Thundat et al. Friction Effects In The Deflection Of Atomic Force Microscope Cantilevers. Rev. Sci. Instrum. 1994, 65(2):394~399
85 M. Radmacher, R. Tillamnn,M. Fritz et al. From Molecules To Cells: Imaging Soft Samples With The Atomic Force Microscope. Science. 1992, 257(5078):1900~1905
86 S. Grafstrom, J. Ackermann,T. Hagen et al. Analysis Of Lateral Force Effects On The Topography In Scanning Force Microscopy. VaccumScience Technology. 1994, 12(3):1559~1564
87 G. Shang, X. Qiu,C. Wang et al. Analysis Of Lateral Force Contribution To The Topography In Contact Mode AFM. Appl. Phys. A. 1998, 66:S333~S335
88 J.P. Aime, Z. Elkaakour,S. Gauthier et al. Role Of The Force Of Friction On Curved Surfaces In Scanning Force Microscopy. Surface Science. 1995, 329(1):149~156
89 C.R. Blanchard, J.B. Campbell. Atomic Force Microscopy. Advanced Materials & Processes. 1995, 148(2):62
90 S. Yumoto, N. Ookubo. Fast Imaging Method Combining Cantilever And Feedback Signals In Contact-Mode Atomic Forcemicroscopy. Appl. Phys. 1999, 69:51~54
91 A.G. Gilicinski, R.M. Rynders,S.E. Beck et al. Study Of Silicon Surface Roughness By Atomic Force Microscopy. Materials Research Society Symposium Proceedings. 1994, 324:391~ 396
92 E.V. Blagov, G.L. Klimchitskaya,A.A. Lobashov et al. How To Describe AFM Constant Force Surfaces In Repulsive Mode. Surface Science. 1996, 349(2):196~ 206
93 Lin, Qi And Meyer, Emily E. And Tadmor, Maria and Israelachvili, Jacob N. And Kuhl, Tonya L. Measurement Of The Long- And Short-Range Hydrophobic Attraction Between Surfactant-Coated Surfaces. Langmuir. 2005, 21(1):251~ 255
94 B. Bhushan, J.N. Israelachvili,U. Landman. Nanotribology: Friction, Wear And Lubrication At The Atomic Scale. Nature. 1995, 374(6523):607~ 616
95 L. Zitzler, S. Herminghaus,F. Mugel. Capillary Forces in Tapping Mode Atomic Force Microscopy. Physical Review B. 2002, 66(155436):155436-1~155436-8
96 S. Novikov, S. Timoshcnkov. Long-Range Electrostatic Forces on The Surfaces Of Aluminum Oxide And Silica Oxide. Advances in Colloid And Interface Science. 2003, 105:341~353
97 D. Peterka, A. Enders,G. Haas et al. Combined Kerr Microscope And Magnetic Force Microscope For Variable Temperature Ultrahigh Vacuum Investigations. Review Of Scientific Instruments. 2003, 74(5):2744~2748
98 R.W. Carpick, N. Agra T,D.F. Ogletree et al. Variation Of The Interfacial Shear Strength And Adhesion Of A Nanometer-Sized Contact. Langmuir. 1996, 12:3334~3340
99 R. Pérez, ?tich, Ivan ,M.C. Payne et al. Surface-Tip Interactions In Noncontact Atomic-Force Microscopy On Reactive Surfaces: Si(111). Phys. Rev. B. 1998, 58(16):10835~10849
100 S. Ciraci, E. Tekman,A. Baratoff et al. Theoretical Study Of Short- And Long-Range Forces And Atom Transfer In Scanning Force Microscopy. Phys. Rev. B. 1992, 46(16):10411~10422
101 R. Garc A, A.S. Paulo. Attractive and Repulsive Tip-Sample Interaction Regimes In Tapping-Mode Atomic Force Microscopy. Physical Review B. 1999, 60(7):4961~4967
102 R.W. Stark, W.M. Heckl. Higher Harmonics Imaging In Tapping-Mode Atomic-Force Microscopy. Review Of Scientific Instruments. 2003, 7(12):5111~5114
103 S. Lee, S. Howell,A. Raman et al. Nonlinear Dynamic Perspectives On Dynamic Force Microscopy. Ultramicroscopy. 2003, 97:185~198
104 A. Sinha. Nonlinear Dynamics of Atomic Force Microscope With Pi Feedback. Journal Of Sound And Vibration. 2005, 288:387~394
105 S.I. Lee, S.W. Howell,A. Raman et al. Nonlinear Dynamics Of Microcantilevers In Tapping Mode Atomic Force Microscopy: A Comparison Between Theory And Experiment. Physical Review B. 2002, 66(115409):115409-1~115409-10
106 R. Garc, A. San Paulo. Dynamics of A Vibrating Tip Near Or In Intermittent Contact With A Surface. Phys. Rev. B. 2000, 61(20):R13381~R13384
107 A. Khurshudov, K. Kato. Wear Of The Atomic Force Microscope Tip Under Light Load, Studied By Atomic Force Microscopy. Ultramicroscopy Letter. 1995, 60:11~16
108 J. Drelich, G.W. Tormoen,E.R. Beach. Determination Of Solid Surface Tension From Particle–Substrate Pull-Off Forces Measured With The Atomic Force Microscope. Journal of Colloid And Interface Science. 2004, 280:484~497
109 B. Bhushan. Nanotribology and Nanomechanics. Wear. 2005,259:1507~1531
110 J.-A. Ruan, B. Bhushan. Atomic-Scale and Microscale Friction Studies Of Graphite And Diamond Using Friction Force Microscopy. Appl. Phys. 1994, 76(9):5022~5035
111 D.F. Ogletree, R.W. Carpick,M. Salmeron. Calibration of Frictional Forces In Atomic Force Microscopy. Rev. Sci. Instrum. 1996, 67(9):3298~3306
112 G. Bogdanovic, A. Meurk,M. Rutland. Tip Friction—Torsional Spring Constant Determination. Colloids And Surfaces B. 2000, 19:397~405
2赵平,杨勇,胡小唐.几何量纳米计量方法及仪器.航空精密制造技术. 2001, 37(6):28~32
3王忠祥.纳米材料及器件的测量需求.现代科学仪器. 2004, 2:70~73
4 M.H. Hassan. Small Things and Big Changes in the Developing World. Science. 2005, 309:65~66
5 K.B.L. Steve Rvder, Xiaofan Meng, and Liwei Lin. Characterization Of Out-Of-Plane High Frequency Microresonators By AFM. The 12th International Conference on Solid State Sensors, Actuators and Microsystems. 2003:424~427
6 B. Ebersberger, A. Olbrich,C. Boit. Application of Scanning Probe Microscopy Techniques In Semiconductor Failure Analysis. Microelectronics Reliability. 2001, 41(9-10):1449~ 1458
7 A.S. Paulo, R. Garcé. High-Resolution Imaging Of Antibodies By Tapping-Mode Atomic Force Microscopy: Attractive And Repulsive Tip-Sample Interaction Regimes. Biophysical Journal. 2000, 78(3):1599~1605
8 Z. Reich, R. Kapon,R. Nevo et al. Scanning Force Microscopy In The Applied Biological Sciences. Biotechnology Advances. 2001, 19( 6):451~ 485
9 F. Lin, D. Meier,D. Hoyt Et Al. Atomic Force Microscopy. A Tool for Analysing Coatings. Materials World. 1993, 1(7):393~ 395
10 W. Gao, R.J. Hocken,J.A. Patten et al. Construction And Testing Of A Nanomachining Instrument. Precision Engineering. 2000, 24(4):320~ 328
11 B.O. Su, R. Oshana,M. Menaker et al. Shape Control Using Sidewall Imaging. Proceedings Of SPIE - The International Society For Optical Engineering. 2000, 3998:232~238
12 F. Rubio-Sierra, R. Stark,S. Thalhammer et al. Force-Feedback Joystick As A Low-Cost Haptic Interface For An Atomic-Force-MicroscopyNanomanipulator. Appl. Phys. 2003, 76:903~906
13 L.M. Fok, C.K. Fung,Y.H. Liu et al. Nano-Scale Mechanical Test of Mems Structures By Atomic Force Microscope. Proceedings Of The World Congress On Intelligent Control And Automation (Wcica). 2004, 5:4587~4590
14杨志萍,方曙,王春等.国际纳米科技文献产出分析研究.现代情报. 2006, 7:148~150
15任红轩.世界纳米科技发展趋势分析.新材料产业. 2007(6):14~17
16裘晓辉,白春礼.中国纳米科技研究的进展.前沿科学. 2007, 1(1):6~10
17白春礼.我国纳米科技优势和缺陷.中国粉体工业. 2006(2)
18 S. Gonda, K. Kinoshita,H. Noguchi et al. AFM Measurement Of Linewidth With Sub-Nanometer Scale Precision. Progress In Biomedical Optics And Imaging - Proceedings Of SPIE. 2005, 5752(I):156~162
19 G. Dai, L. Koenders,F. Pohlenz et al. Accurate And Traceable Calibration Of One-Dimensional Gratings. Measurement Science and Technology. 2005, 16(6):1241~ 1249
20 H. Cramer, T. Kiers,P. Vanoppen et al. Total Test Repeatability, A New Figure Of Merit For Cd Metrology Tools. Proceedings Of SPIE - The International Society For Optical Engineering. 2004, 5375(Part 2):1254~1264
21 K. Dirscherl, K.R. Koops. Developments on the NMI-VSL Traceable Scanning Probe Microscope. Proceedings Of SPIE - The International Society For Optical Engineering. 2003, 5190:173~ 177
22 J. Leckenby. Scanning Probe Microscopy - How Does It Work And What Might You Use It For? Iee Colloquium (Digest). 1994(149):5~6
23胡光康.扫描探针显微镜的研究及应用.硕士, 2000:2~12.
24 O. Jusko, X. Zhao,H. Wolff et al. Design And Three Dimensional Calibration Of A Measuring Scanning Tunneling Microscope For Metrological Applications. Rev. Sci. Instrum. 1994, 65:2514ff
25赵克功,高思田,徐毅et al.计量型原子力显微镜.计量学报. 1998, 19(1):1~8
26 N.G. Orji, A. Martinez,R.G. Dixson et al. Progress On Implementation Of A Cd-AFM-Based Reference Measurement System. Proceedings of SPIE - TheInternational Society For Optical Engineering. 2006, 6152 I
27 R. Dixson, N.T. Sullivan,J. Schneir et al. Measurement Of A Cd And Sidewall Angle Artifact With Two-Dimensional Cd AFM Metrology. Proceedings of SPIE - The International Society For Optical Engineering. 1996, 2725:572~ 588
28 J.Schneir, T.H.Mcwaid. Design of an Atomic Force Microscope With Interferometric Position Control. Journal Of Vacuum Science & Technology. 1994, 12(6):3561~3566
29 J.Schneir, T.Mcwaid,T.V.Vorburger. An Instrument For Calibrating Atomic Force Microscope Standards. Proceedings Of SPIE - The International Society For Optical Engineering. 1994, 2196:167~180
30 R. Dixson, A. Guerry. Reference Metrology Using A Next Generation Cd-AFM. Proceedings of SPIE - The International Society For Optical Engineering. 2004, 5375(Part 1):633~ 646
31 N.G. Orji, R.G. Dixson,J. Fu et al. Traceable Pico-Meter Level Step Height Metrology. Wear. 2004, 257(12 Speciss):1264~ 1269
32 R. Dixson, J. Fu,N. Orji Et al. Cd-AFM Reference Metrology At Nist And Sematech. Progress In Biomedical Optics And Imaging - Proceedings Of SPIE. 2005, 5752(I):324~ 336
33高思田,叶孝佑,邵宏伟等.用于纳米级三维表面形貌及微小尺寸测量的原子力显微镜.制造技术与机床. 2004, 8:34~39
34 F. Meli, R. Thalmann. Long-Range AFM Profiler Used for Accurate Pitch Measurements. Measurement Science & Technology. 1998, 9(7):1087~ 1092
35 S. Gonda, K. Kinoshita,H. Noguchi et al. Compact, High-Resolution Homodyne Interferometer For Nanometer-Scale, Multidimensional AFM Metrology. Proceedings of SPIE - The International Society for Optical Engineering. 2004, 5532:229~ 236
36 Q. Huang, S. Gonda,I. Misumi Et Al. Nonlinear And Hysteretic Influence Of Piezoelectric Actuators In AFMs On Lateral Dimension Measurement. Sensors And Actuators, A: Physical. 2006, 125(2):590~ 596
37陈本永,吴昭同,朱若谷.纳米测量技术研究现状与发展趋势.激光杂志. 2000, 21(2):2~6
38 G. Binnig, C.F. Quate,C. Gerber. Atomic Force Microscope. Physical Review Letters. 1986, 56(9):930~933
39 E. Meyer, S.P. Jarvis,N.D. Spencer. Scanning Probe Microscopy In Materials Science. Mrs Bulletin. 2004, 29(7):443~ 445
40 L.Y. Hong Xing You. Atomic Force Microscopy Imaging Of Living Cells: Progress, Problems and Prospects. 1997
41 W.F. Heinz, J.H. Hoh. Spatially Resolved Force Spectroscopy of Biological Surfaces Using The Atomic Force Microscope. Tibtech April. 1999, 17:143~150
42 W. Gutmannsbauer, H.J. Hug,E. Meyer. Scanning Probe Microscopy for Nanometer Inspections And Industrial Applications. Microelectronic Engineering. 1996, 32( 1-4):389~ 409
43 F.J. Giessibl. Advances in Atomic Force Microscopy. Reviews Of Modern Physics,. 2003, 75(3):949~983
44 R.J. Colton. Nanoscale Measurements and Manipulation. Journal Of Vacuum Science And Technology B: Microelectronics And Nanometer Structures. 2004, 22(4):1609~ 1635
45张虎.液相型原子力显微镜的研制及其应用研究.硕士, 2004:1~9.
46 S. Ryder, K.B. Lee,X. Meng et al. AFM Characterization Of Out-Of-Plane High Frequency Microresonators. Sensors and Actuators, A: Physical. 2004, 114(2-3):135~ 140
47 B. Ebersberger, A. Olbrich,C. Boit. Scanning Probe Microscopy in Semiconductor Failure Analysis. Microelectronics Reliability. 2001, 41(8):1231~1236
48 N.C. Santos, M.A. Castanhob. An Overview Of The Biophysical Applications Of Atomic Forcean Overview Of The Biophysical Applications Of Atomic Force Microscopy. Biophysical Chemistry. 2004, 107:133~149
49 A. Murray, J. Leckenby. Scanning Probe Microscopy Applications In Materials Science. American Laboratory. 1997, 29(19):8,10
50 S. Fahlbusch, S. Mazerolle,J.M. Breguet et al. Nanomanipulation In A Scanning Electron Microscope. Journal of Materials Processing Technology. 2005, 167(2-3):371~ 382
51 M. Tortonese. Cantilevers And Tips For Atomic Force Microscopy. IEEEEngineering in Medicine and Biology. 1997, 16(2):28~33
52 P.J. Ryan, G.G. Adams,N.E. Mcgruer et al. Contact Scanning Mode AFM For Nanomechanical Testing Of Free-Standing Structures. Journal of Micromechanics and Microengineering. 2006, 16(5):1040~ 1046
53 A. Gaitas, Y.B. Gianchandani. An Experimental Study Of The Contact Mode AFM Scanning Capability Of Polyimide Cantilever Probes. Ultramicroscopy. 2006, 106(8-9):874~ 880
54 E. Tranvouez, P. Budau,G. Bremond. Topographical and Electrical Study Of Contact And Intermittent Contact Mode Inp AFM Lithography. Nanotechnology. 2006, 17(2):455~ 460
55 J. Kwon, J. Hong,Y.S. Kim et al. Atomic Force Microscope With Improved Scan Accuracy, Scan Speed, And Optical Vision. Review of Scientific Instruments. 2003, 74(10):4378~ 4383
56 Proksch, R. And Schaffer, T.E. And Cleveland, J.P. And Callahan, R.C. And Viani, M.B. Finite Optical Spot Size And Position Corrections In Thermal Spring Constant Calibration. Nanotechnology. 2004, 15(9):1344~ 1350
57 A. Mendez-Vilas, M.L. Gonzalez-Martin,M.J. Nuevo. Optical Interference Artifacts In Contact Atomic Force Microscopy Images. Ultramicroscopy. 2002, 92(3-4):243~ 250
58 O.M. El Rifai, K. Youcef-Toumi. Dynamics Of Contact-Mode Atomic Force Microscopes. Proceedings Of The American Control Conference. 2000, 3:2118~ 2122
59 Jung, Hewon, Shim, Jongyoup And Gweon, Daegab. Enhancement of AFM Image By Compensating The Hysteresis And Creep Effect Within PZT. Proceedings Of SPIE - The International Society For Optical Engineering. 1999, 3740:327~ 330
60 G. Schitter, P. Menold,H.F. Knapp et al. High Performance Feedback For Fast Scanning Atomic Force Microscopes. Review of Scientific Instruments. 2001, 72(8):3320
61 M. Watanabe, S. Baba,T. Nakata et al. An Advanced AFM Sensor For High-Aspect Ratio Pattern Profile In-Line Measurement. Proceedings Of SPIE - The International Society For Optical Engineering. 2006, 6152II:61522
62 G. Schitter, R.W. Stark,A. Stemmer. Fast Contact-Mode Atomic ForceMicroscopy On Biological Specimen By Model-Based Control. Ultramicroscopy. 2004, 100(3-4):253~ 257
63 A.J. Boef. The Influence Of Lateral Forces In Scanning Force Microscopy. Rev. Sci. Instrum. 1991, 62(1):88~92
64 International, A. Guide To Scanner And Tip Related Artifacts In Scanning Tunneling Microscopy And Atomic Force Microscopy. 2004.
65 R. Dixson, J. Schneir,T.H. Mcwaid et al. Toward Accurate Linewidth Metrology Using Atomic Force Microscopy And Tip Characterization. Proceedings of SPIE - The International Society For Optical Engineering. 1996, 2725:589~ 607
66 M. Kopycinska-Muller, R.H. Geiss,D.C. Hurley. Contact Mechanics And Tip Shape In AFM-Based Nanomechanical Measurements. Ultramicroscopy. 2006, 106(6):466~ 474
67 M.R. Vanlandingham, T.F. Juliano,M.J. Hagon. Measuring Tip Shape For Instrumented Indentation Using Atomic Force Microscopy. Measurement Science And Technology. 2005, 16(11):2173~ 2185
68 B.D. Aumond, K. Youcef-Toumi. Experimental High Precision Profilometry Of High Aspect Ratio Samples. Proceedings Of The IEEE International Conference On Systems, Man And Cybernetics. 1998, 5:4435~ 4440
69陈津平,胡晓东,陈峰等.振动与扫描速率综合影响spm图像的实验研究.电子显微学报. 2003, 22(3):242~246
70 P.A. Maurice. Applications of Atomic-Force Microscopy In Environmental Colloid And Surface Chemistry. Colloids and Surfaces A: Physicochemical And Engineering Aspects. 1996, 107:57~ 75
71 A.W. Sparks, S.R. Manalis. Atomic Force Microscopy With Inherent Disturbance Suppression For Nanostructure Imaging. Nanotechnology. 2006, 17(6):1574~ 1579
72 H.-J. Shieh, F.-J. Lin,P.-K. Huang Et Al. Adaptive Displacement Control With Hysteresis Modeling For Piezoactuated Positioning Mechanism. IEEE Transactions On Industrial Electronics. 2006, 53( 3):905~ 914
73 C. Ru, L. Sun,K. Wang. An Adaptive Inverse Method Of Control For A Piezoelectric Actuator. Smart Materials And Structures. 2006, 15(1):14~18
74 Stefan Adamsmair, Peter Hinterdorfer, Bernhard Zagar. Digital SignalProcessing In AFM Topography And Recognition Imaging. SPIE. 2005
75 K. Henriksen, S.L. Stipp. Image Distortion In Scanning Probe Microscopy. 2002, 87:5~16
76 R.V. Gainutdinov, P.A. Arutyunov. Artifacts In Atomic Force Microscopy. Mikroelektronika. 2001, 30(4):257~265
77 T. Schimmel, T. Koch,J. Kueppers et al. True Atomic Resolution Under Ambient Conditions Obtained By Atomic Force Microscopy In The Contact Mode. Applied Physics A: Materials Science And Processing. 1999, 68(4):399~ 402
78 A.L.S. Werner A. Hofer. Adam S. Foster. Theories Of Scanning Probe Microscopes At The Atomic Scale. Reviews of Modern Physics. 2003, 75(2):1287~1331
79 H.-J. Butt, B. Cappella,M. Kappl. Force Measurements With The Atomic Force Microscope: Technique, Interpretation And Applications. Surface Science Reports. 2005, 59:1~152
80 Israelachvili, Jacob N. And Chen, You-Lung and Yoshizawa, Hisae. Relationship between Adhesion And Friction Forces. Journal of Adhesion Science And Technology. 1994, 8(11):1231~ 1249
81 Z. Tao, B. Bhushan. Surface Modification of AFM Si3N4 Probes For Adhesion/Friction Reduction And Imaging Improvement. Journal of Tribology. 2006, 128:865~875
82 J.H. Hoh, A. Engel. Friction Effects On Force Measurements With An Atomic Force Microscope. American Chemical Society. 1993, 9:3310~3312
83 D.F. Ogletree, R.W. Carpick,M. Salmeron. Calibration Of Frictional Forces In Atomic Force Microscopy. Rev. Sci. Instrum. 1996, 67(9):3298~3306
84 R.J. Warmack, X.Y. Zheng,T. Thundat et al. Friction Effects In The Deflection Of Atomic Force Microscope Cantilevers. Rev. Sci. Instrum. 1994, 65(2):394~399
85 M. Radmacher, R. Tillamnn,M. Fritz et al. From Molecules To Cells: Imaging Soft Samples With The Atomic Force Microscope. Science. 1992, 257(5078):1900~1905
86 S. Grafstrom, J. Ackermann,T. Hagen et al. Analysis Of Lateral Force Effects On The Topography In Scanning Force Microscopy. VaccumScience Technology. 1994, 12(3):1559~1564
87 G. Shang, X. Qiu,C. Wang et al. Analysis Of Lateral Force Contribution To The Topography In Contact Mode AFM. Appl. Phys. A. 1998, 66:S333~S335
88 J.P. Aime, Z. Elkaakour,S. Gauthier et al. Role Of The Force Of Friction On Curved Surfaces In Scanning Force Microscopy. Surface Science. 1995, 329(1):149~156
89 C.R. Blanchard, J.B. Campbell. Atomic Force Microscopy. Advanced Materials & Processes. 1995, 148(2):62
90 S. Yumoto, N. Ookubo. Fast Imaging Method Combining Cantilever And Feedback Signals In Contact-Mode Atomic Forcemicroscopy. Appl. Phys. 1999, 69:51~54
91 A.G. Gilicinski, R.M. Rynders,S.E. Beck et al. Study Of Silicon Surface Roughness By Atomic Force Microscopy. Materials Research Society Symposium Proceedings. 1994, 324:391~ 396
92 E.V. Blagov, G.L. Klimchitskaya,A.A. Lobashov et al. How To Describe AFM Constant Force Surfaces In Repulsive Mode. Surface Science. 1996, 349(2):196~ 206
93 Lin, Qi And Meyer, Emily E. And Tadmor, Maria and Israelachvili, Jacob N. And Kuhl, Tonya L. Measurement Of The Long- And Short-Range Hydrophobic Attraction Between Surfactant-Coated Surfaces. Langmuir. 2005, 21(1):251~ 255
94 B. Bhushan, J.N. Israelachvili,U. Landman. Nanotribology: Friction, Wear And Lubrication At The Atomic Scale. Nature. 1995, 374(6523):607~ 616
95 L. Zitzler, S. Herminghaus,F. Mugel. Capillary Forces in Tapping Mode Atomic Force Microscopy. Physical Review B. 2002, 66(155436):155436-1~155436-8
96 S. Novikov, S. Timoshcnkov. Long-Range Electrostatic Forces on The Surfaces Of Aluminum Oxide And Silica Oxide. Advances in Colloid And Interface Science. 2003, 105:341~353
97 D. Peterka, A. Enders,G. Haas et al. Combined Kerr Microscope And Magnetic Force Microscope For Variable Temperature Ultrahigh Vacuum Investigations. Review Of Scientific Instruments. 2003, 74(5):2744~2748
98 R.W. Carpick, N. Agra T,D.F. Ogletree et al. Variation Of The Interfacial Shear Strength And Adhesion Of A Nanometer-Sized Contact. Langmuir. 1996, 12:3334~3340
99 R. Pérez, ?tich, Ivan ,M.C. Payne et al. Surface-Tip Interactions In Noncontact Atomic-Force Microscopy On Reactive Surfaces: Si(111). Phys. Rev. B. 1998, 58(16):10835~10849
100 S. Ciraci, E. Tekman,A. Baratoff et al. Theoretical Study Of Short- And Long-Range Forces And Atom Transfer In Scanning Force Microscopy. Phys. Rev. B. 1992, 46(16):10411~10422
101 R. Garc A, A.S. Paulo. Attractive and Repulsive Tip-Sample Interaction Regimes In Tapping-Mode Atomic Force Microscopy. Physical Review B. 1999, 60(7):4961~4967
102 R.W. Stark, W.M. Heckl. Higher Harmonics Imaging In Tapping-Mode Atomic-Force Microscopy. Review Of Scientific Instruments. 2003, 7(12):5111~5114
103 S. Lee, S. Howell,A. Raman et al. Nonlinear Dynamic Perspectives On Dynamic Force Microscopy. Ultramicroscopy. 2003, 97:185~198
104 A. Sinha. Nonlinear Dynamics of Atomic Force Microscope With Pi Feedback. Journal Of Sound And Vibration. 2005, 288:387~394
105 S.I. Lee, S.W. Howell,A. Raman et al. Nonlinear Dynamics Of Microcantilevers In Tapping Mode Atomic Force Microscopy: A Comparison Between Theory And Experiment. Physical Review B. 2002, 66(115409):115409-1~115409-10
106 R. Garc, A. San Paulo. Dynamics of A Vibrating Tip Near Or In Intermittent Contact With A Surface. Phys. Rev. B. 2000, 61(20):R13381~R13384
107 A. Khurshudov, K. Kato. Wear Of The Atomic Force Microscope Tip Under Light Load, Studied By Atomic Force Microscopy. Ultramicroscopy Letter. 1995, 60:11~16
108 J. Drelich, G.W. Tormoen,E.R. Beach. Determination Of Solid Surface Tension From Particle–Substrate Pull-Off Forces Measured With The Atomic Force Microscope. Journal of Colloid And Interface Science. 2004, 280:484~497
109 B. Bhushan. Nanotribology and Nanomechanics. Wear. 2005,259:1507~1531
110 J.-A. Ruan, B. Bhushan. Atomic-Scale and Microscale Friction Studies Of Graphite And Diamond Using Friction Force Microscopy. Appl. Phys. 1994, 76(9):5022~5035
111 D.F. Ogletree, R.W. Carpick,M. Salmeron. Calibration of Frictional Forces In Atomic Force Microscopy. Rev. Sci. Instrum. 1996, 67(9):3298~3306
112 G. Bogdanovic, A. Meurk,M. Rutland. Tip Friction—Torsional Spring Constant Determination. Colloids And Surfaces B. 2000, 19:397~405