电泳沉积法制备纳米晶金刚石场发射阴极研究
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摘要
场发射显示器(FED)集传统的阴极射线管(CRT)显示器与平板显示器(FPD)的优点于一体,具有很大的潜力,有望成为下一代显示器件的主流。以金刚石作为场发射阴极发射体的FED在诸多方面都有着巨大的优势,金刚石场发射阴极的研究是目前FED领域重点开发的方向之一。
本论文以探索性能优良、工艺简单、适合大面积制作的场发射显示器阴极的制备方法为目的,设计了钛基纳米晶金刚石沉积层场发射阴极。通过电泳液配制-电泳沉积-热处理键合-氢等离子体表面处理的工艺流程,制备出Ti-TiC-C网络状层次结构的场发射阴极样品。
通过正交实验,综合研究了纳米晶金刚石沉积层场发射阴极制备工艺中各参数的取值对阴极样品场发射性能的影响,结合对样品表面形貌的微观分析及样品的模拟显示器发光效果,筛选出了阴极样品制备的优化工艺参数。为进一步提升阴极样品的场发射性能,采用氢等离子体处理工艺对样品进行了表面处理,并优化了氢处理工艺参数。
论文进一步研究了温度和真空度对阴极样品场发射性能的影响,得到样品相对稳定工作时的温度和真空度范围,为进一步改善阴极的场发射性能、拓宽器件极限工作条件提供了重要的数据。
利用X射线衍射XRD、拉曼Raman、扫描电子显微镜SEM、原子力显微镜AFM等微观分析方法对样品的成分、结构及表面形貌等进行了分析表征,结合样品的场发射性能,深入剖析了不同工艺条件下制备的样品之间性能差异的内在原因,为提升和改善纳米晶金刚石阴极的场发射性能提供了理论依据和实验数据。
Field emission displays (FED) with all the advantages of CRT and flat panel displays (FPD), have great potential to become the mainstream device of next-generation displays. The FED with diamond as the material of the field emission cathode has huge superiority in many aspects. Currently, the research of diamond field emission cathode has becoming one of the important investigative directions of the FED fields.
The thesis supposed Ti-based nano-diamond coating field emission cathode (FEC) for the purpose of exploring a simple, effective and good performance diamond FEC which is suited to fabricate large-area FED. The cathode has been formed as Ti-TiC-diamond structure through a procedure as solution preparation—electrophoretic deposition—thermal bonding treatment—hydrogen plasma treatment.
According to the orthogonal experimental principle, several groups of experiments have been designed and conducted. The effect of technological parameters on the performance of the samples has been discussed, combined with the morphology and lighting feature of the samples, optimal technological parameters have been determined. The field emission (FE) properties have been promoted by means of hydrogen plasma treatment, and the plasma treatment technological parameters have been optimized.
The influence of temperature and vacuity on FE properties of the Ti-based nano-diamond coating field emission cathode has been investigated, the device's stable work extents of temperature and vacuity has been achieved. The works laid foundation for further study and exploitation of cathode properties improving, work extents extending and device designing.
The ingredient and surface feature of the samples are characterized by XRD, Raman, SEM and AFM, combined with the measuring and analyzing of the FE properties of those samples, the reasons which led to different FE properties of samples prepared in different technological conditions have been explained. These works provide powerful experimental and theoretical foundations for exploring preferable field emission cathode.
本论文以探索性能优良、工艺简单、适合大面积制作的场发射显示器阴极的制备方法为目的,设计了钛基纳米晶金刚石沉积层场发射阴极。通过电泳液配制-电泳沉积-热处理键合-氢等离子体表面处理的工艺流程,制备出Ti-TiC-C网络状层次结构的场发射阴极样品。
通过正交实验,综合研究了纳米晶金刚石沉积层场发射阴极制备工艺中各参数的取值对阴极样品场发射性能的影响,结合对样品表面形貌的微观分析及样品的模拟显示器发光效果,筛选出了阴极样品制备的优化工艺参数。为进一步提升阴极样品的场发射性能,采用氢等离子体处理工艺对样品进行了表面处理,并优化了氢处理工艺参数。
论文进一步研究了温度和真空度对阴极样品场发射性能的影响,得到样品相对稳定工作时的温度和真空度范围,为进一步改善阴极的场发射性能、拓宽器件极限工作条件提供了重要的数据。
利用X射线衍射XRD、拉曼Raman、扫描电子显微镜SEM、原子力显微镜AFM等微观分析方法对样品的成分、结构及表面形貌等进行了分析表征,结合样品的场发射性能,深入剖析了不同工艺条件下制备的样品之间性能差异的内在原因,为提升和改善纳米晶金刚石阴极的场发射性能提供了理论依据和实验数据。
Field emission displays (FED) with all the advantages of CRT and flat panel displays (FPD), have great potential to become the mainstream device of next-generation displays. The FED with diamond as the material of the field emission cathode has huge superiority in many aspects. Currently, the research of diamond field emission cathode has becoming one of the important investigative directions of the FED fields.
The thesis supposed Ti-based nano-diamond coating field emission cathode (FEC) for the purpose of exploring a simple, effective and good performance diamond FEC which is suited to fabricate large-area FED. The cathode has been formed as Ti-TiC-diamond structure through a procedure as solution preparation—electrophoretic deposition—thermal bonding treatment—hydrogen plasma treatment.
According to the orthogonal experimental principle, several groups of experiments have been designed and conducted. The effect of technological parameters on the performance of the samples has been discussed, combined with the morphology and lighting feature of the samples, optimal technological parameters have been determined. The field emission (FE) properties have been promoted by means of hydrogen plasma treatment, and the plasma treatment technological parameters have been optimized.
The influence of temperature and vacuity on FE properties of the Ti-based nano-diamond coating field emission cathode has been investigated, the device's stable work extents of temperature and vacuity has been achieved. The works laid foundation for further study and exploitation of cathode properties improving, work extents extending and device designing.
The ingredient and surface feature of the samples are characterized by XRD, Raman, SEM and AFM, combined with the measuring and analyzing of the FE properties of those samples, the reasons which led to different FE properties of samples prepared in different technological conditions have been explained. These works provide powerful experimental and theoretical foundations for exploring preferable field emission cathode.
引文
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