半导体激光线阵合束光源及外腔反馈光谱合束技术的研究
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摘要
半导体激光器具有转换效率高和使用寿命长等众多优点，但由于自身结构导致的光束质量差和功率密度低的缺点，使得半导体激光器很难作为千瓦、万瓦级直接光源应用在材料加工和国防领域。如何获得高功率、高光束质量的半导体激光光源已成为国际上的重大瓶颈技术问题，美、德等国已将其列入国家级重大计划进行攻克，激光合束被证明是解决该难题的关键技术，美国应用该技术，预实现近衍射极限、100KW级的半导体激光合束光源，以用作高能激光战术武器；德国利用激光合束技术已开发出系列高效节能半导体激光加工机应用在工业加工领域。
本论文从常规激光合束和外腔反馈光谱合束两方面来进行高功率、高光束质量半导体激光合束光源的研究，完成主要工作如下：
1）提出了一种单片器件实现光束穿插、光束质量提高近1倍的整形方法，获得授权发明专利1项，设计并研制出连续功率500W、光束质量12.4mm·mrad的直接输出光源，该结果发表在《中国激光》2012年39卷上。
2）为满足工业应用需求，研制出连续功率935W、600μm光纤耦合输出半导体激光柔性加工光源，作为直接光源成功应用于金属薄板焊接，经查新，国内尚未见报道，该结果发表在《中国激光》2013年40卷上。在此基础上提出了将半导体激光光源应用于钢轨清洗、钢轨修理及导线清洗的三种方法，获得授权发明专利3项。
3）首次提出并实现了基于透射光栅的外腔反馈光谱合束半导体激光光源结构，研制出输出功率50.8W、光束质量3.34mm.mrad的单激光线阵光谱合束光源，其结果发表在《Optical Express》2013年21卷上，审稿人评价：合束功率和光束质量均优于其他（The coupled output power is very higher and the beam quality ismuch better than others）。
4）研制出中心波长为800nm三激光线阵和中心波长为970nm三激光线阵的外腔反馈光谱合束半导体激光光源，证明该合束结构对于不同波长的多个激光单元进行光谱合束的适用性，并提出了将常规激光合束和外腔反馈光谱合束相结合的合束结构。
Diode lasers possess many outstanding advantages, like high conversionefficiency, long lifetime and so on. However, due to the special structure, its beamquality is so poor and its power density is so low that it is difficult for a diode laser tobe as a direct laser source applied in the fields of material processing and nationaldefense. How to obtain a diode laser source with both high power and high beamquality has become an international major bottleneck, which has been listed in thestate-level program by many countries such as America, Germany. The technology oflaser combining has been proven to be a key solution to conquer it. The USA wants todemonstrate a100kW, with near-diffraction-limited beam propagation by combiningthe beams of high power, high efficiency laser diodes for the tactical applications.Germany has developed a series of high efficiency and energy saving laser processingmachines by diode laser combining, applied in the field of industrial manufacturing.
In this paper, the high power, high beam quality diode laser sources areresearched from two aspects of tradition beam combination (TBC) and wavelengthbeam combination (WBC) with external-cavity feedback, and the main accomplishedwork as follows:
1) A beam shaping method of beam compression with a single component is putforward to improve the beam quality by a factor of about one, licensed1inventionpatent. A diode laser source with a CW (continuous wavelength) power of500W anda beam quality of12.4mm·mrad is designed and developed, and the result is publishedin the Chinese journal of laser vol.40,2013.
2) To meet the demand of industrial application, a fiber coupling diode lasersource with a CW power of935W and a fiber diameter of600μm is developed forflexible processing. And it is successfully applied to sheet metal welding as a direct light source, which has not yet been reported in domestic after the novelty search. Theresults are published in Chinese journal of laser vol.39,2012. On the basis of theabove result, three methods of rail cleaning, rail repairs and wire cleaning by diodelaser source are presented, and3authorized invention patents are licensed.
3) A novel structure of wavelength beam combination with external-cavityfeedback based on the transmission grating is first proposed and implemented. Adiode laser source spectrally combined by a single bar is developed with a CW powerof50.8W and a beam quality of3.34mm·mrad, published in Optical Express vol.21,2013, and “The coupled output power is very higher and the beam quality is muchbetter than others”, evaluated by the reviewer.
4) Two laser sources with wavelengths of800nm and970nm are developed,respectively, each of which is combined by three bars with WBC. The conclusion isinferred that the WBC structure is suitable for the emitters with any differentwavelength. Besed on the above, the structure combining WBC with TBC is furtherproposed.
本论文从常规激光合束和外腔反馈光谱合束两方面来进行高功率、高光束质量半导体激光合束光源的研究，完成主要工作如下：
1）提出了一种单片器件实现光束穿插、光束质量提高近1倍的整形方法，获得授权发明专利1项，设计并研制出连续功率500W、光束质量12.4mm·mrad的直接输出光源，该结果发表在《中国激光》2012年39卷上。
2）为满足工业应用需求，研制出连续功率935W、600μm光纤耦合输出半导体激光柔性加工光源，作为直接光源成功应用于金属薄板焊接，经查新，国内尚未见报道，该结果发表在《中国激光》2013年40卷上。在此基础上提出了将半导体激光光源应用于钢轨清洗、钢轨修理及导线清洗的三种方法，获得授权发明专利3项。
3）首次提出并实现了基于透射光栅的外腔反馈光谱合束半导体激光光源结构，研制出输出功率50.8W、光束质量3.34mm.mrad的单激光线阵光谱合束光源，其结果发表在《Optical Express》2013年21卷上，审稿人评价：合束功率和光束质量均优于其他（The coupled output power is very higher and the beam quality ismuch better than others）。
4）研制出中心波长为800nm三激光线阵和中心波长为970nm三激光线阵的外腔反馈光谱合束半导体激光光源，证明该合束结构对于不同波长的多个激光单元进行光谱合束的适用性，并提出了将常规激光合束和外腔反馈光谱合束相结合的合束结构。
Diode lasers possess many outstanding advantages, like high conversionefficiency, long lifetime and so on. However, due to the special structure, its beamquality is so poor and its power density is so low that it is difficult for a diode laser tobe as a direct laser source applied in the fields of material processing and nationaldefense. How to obtain a diode laser source with both high power and high beamquality has become an international major bottleneck, which has been listed in thestate-level program by many countries such as America, Germany. The technology oflaser combining has been proven to be a key solution to conquer it. The USA wants todemonstrate a100kW, with near-diffraction-limited beam propagation by combiningthe beams of high power, high efficiency laser diodes for the tactical applications.Germany has developed a series of high efficiency and energy saving laser processingmachines by diode laser combining, applied in the field of industrial manufacturing.
In this paper, the high power, high beam quality diode laser sources areresearched from two aspects of tradition beam combination (TBC) and wavelengthbeam combination (WBC) with external-cavity feedback, and the main accomplishedwork as follows:
1) A beam shaping method of beam compression with a single component is putforward to improve the beam quality by a factor of about one, licensed1inventionpatent. A diode laser source with a CW (continuous wavelength) power of500W anda beam quality of12.4mm·mrad is designed and developed, and the result is publishedin the Chinese journal of laser vol.40,2013.
2) To meet the demand of industrial application, a fiber coupling diode lasersource with a CW power of935W and a fiber diameter of600μm is developed forflexible processing. And it is successfully applied to sheet metal welding as a direct light source, which has not yet been reported in domestic after the novelty search. Theresults are published in Chinese journal of laser vol.39,2012. On the basis of theabove result, three methods of rail cleaning, rail repairs and wire cleaning by diodelaser source are presented, and3authorized invention patents are licensed.
3) A novel structure of wavelength beam combination with external-cavityfeedback based on the transmission grating is first proposed and implemented. Adiode laser source spectrally combined by a single bar is developed with a CW powerof50.8W and a beam quality of3.34mm·mrad, published in Optical Express vol.21,2013, and “The coupled output power is very higher and the beam quality is muchbetter than others”, evaluated by the reviewer.
4) Two laser sources with wavelengths of800nm and970nm are developed,respectively, each of which is combined by three bars with WBC. The conclusion isinferred that the WBC structure is suitable for the emitters with any differentwavelength. Besed on the above, the structure combining WBC with TBC is furtherproposed.
引文
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