高精度多线切割机数控系统关键技术及其应用研究
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摘要
多线切割机是IC(集成电路)、IT(信息技术)、PV(光伏)等行业核心器件基片制造流程中的关键装备。多线切割是目前最先进的切片加工技术,其原理是通过金属线的高速往复运动把磨料带入待切割材料加工区域进行研磨,将待切件同时切割为数百或数千片薄片的创新性切片工艺。但多线切割机制造技术难度大,其核心技术长期被瑞士、日本等国家的极少数公司所垄断,严重制约了我国半导体照明、光伏、集成电路制造等产业的发展。开发具有自主知识产权的多线切割技术及装备,已成为突破国外技术封锁和国内产业瓶颈的关键举措。本文以多线切割机产品开发过程中的关键技术难题为主线,针对多线切割机数控系统关键技术进行深入研究。
根据项目研究目的、内容及要求,给出了项目实施方案和技术路线。依据作者所承担的课题开发任务,研究多线切割的理论基础和技术基础,指出了研究的重点和攻克的难点,总结了多线切割机的国内外研究现状及发展趋势。
针对切割线张力控制线问题,探讨多线切割机走线过程中影响线张力的各种因素,提出一种机电一体化的张力控制策略,该方法用转矩电动机代替张力锤施加张力,这种张力控制方法与传统的控制方法相比能极大地降低线张力波动的强度。理论分析和实验结果都表明:该方法张力控制精度高、易于实现,而且断线故障率低、张力调整方便。机电一体化张力控制的实现为多线切割机走线系统的设计奠定了基础。
针对多电机速度同步系统控制问题,采用机理建模方法,建立了张力电机的运动学数学模型。全面分析了引起多线切割机走线系统稳定性各种不确定因素,指出多线切割机同步系统是一个非线性、时变、多输出的复杂系统。针对走线系统高速运行时数字PID控制系统存在的问题,提出多电机系统速度同步自适应逆控制算法,该系统以主电机为参考模型,由一个系统辨识环节和一个自适应控制器环节构成,引入虚拟模型自适应地调整控制器,使放线电机与主电机具有类似的动态特性。实验结果证明:该算法能有效提高速度同步系统的稳定性、快速性和精确性。
针对排线控制问题,分析了接近开关限位排线方法的局限性,设计了无接近开关的伺服电机排线系统机械结构,建立排线机构的凸轮传动数学模型,通过对凸轮传动模型仿真研究,提出基于电子凸轮传动的排线控制算法,该方法用软件方法为收线电机虚拟一个电子凸轮,该电子凸轮在收线电机的“驱动”下,实现等效于排线动作的交替收、放卷功能,以此电子凸轮的“输出”作为控制量,对排线电机进行伺服控制。实验结果表明:这种实现方法机械结构简单、运行可靠、限位精度高、排线均匀。
针对高速走线换向过程控制问题,分析了加工辊走线速度和主轴传动系统的性能对走线系统的安全性和稳定性的影响,建立传动系统数学模型,研究影响传动系统灵敏度、精度及抑制线速度扰动的各个要素,综合设计传动系统。通过理论分析和实验仿真的方法,深入研究梯形走线规律曲线和双余弦半波速度规律曲线的传动效果,提出单余弦半波走线算法。仿真和实验结果证明:该法方法传动效率高、速度曲线平滑、过渡时间短。
根据多线切割机功能及技术指标要求,开发高精度多线切割机数控系统,设计了工作台进给系统、供砂系统、走线系统、主轴系统等辅助装置,成功研制多线切割机产品。运行实验结果表明:该产品控制系统运行稳定,切片加工精度高。
本文攻克的高精度多线切割机数控系统关键技术,有效解决了多线切割机开发、成果转化和产业化过程中的技术难题,为高性能多线切割机的设计制造提供了重要理论依据和有效实现途径。
Multi-wire saw (MWS) is the key equipment in the core device of the substratemanufacturing process in IC,IT and PV industries. MWS is one of the most advanced slice processing technology. The principle of MWS is putting abrasive slurry in cutting materials processing area through high-speed reciprocating motion of a stainless steel wire, and the materials will be cut into hundreds of thousands of wafers at the same time. But the design and implementation of MWS technology is very hard. And the core technology of MWS have been mastered by minority several countries, such as Japan, Switzerland and so on, which delays the development of related industry of our county. the development of China's independent intellectual property rights of high-precision cutting machine products are very important for breakthroughingmonopolization of foreign technology and bottleneck of domestic industry. Taken the designing process of MWS product in technical difficult problem as clues, the key technologies of MWS are deeply researched in the dissertation.
(1) Based on the project research purposes, contents and requirements, the project implementation and technique realization scheme have been put forward. According to the project tasks undertaken by author, the theory and technique foundation have been deeply researched. The research emphases and the conquered difficulties of this project have been pointed out. And the domestic and foreign research present situation and trend of development have been summarized in the dissertation.
(2) Aimed at the problem of wire tension control, factors that influence wire tension are analyzed. A wire tension control scheme, which torque motor is used to produce tension on wire instead of hammer, based on electromechanical integration is proposed. By using this tension control method, the intensity of fluctuations in tension can be greatly reduced. The theoretical analysis and experiment results proved that themethod has high control precision，flexible realization，low wire-broken malfunction and facile tension adjusting. And the realization of wire tension control scheme based on electromechanical integration laies the foundation for hardware project design of MWS.
(3) Aimed at the problem of multi-motor speed synchronization control, the kinematics model of the tension motor is established by using the mechanical theory modeling method, and uncertainties that disturb the function of wire winding system of MWS is particularized comprehensively. MWS synchronization system is a nonlinear, time-varying, multi-output complex system. Aimed at the problem of PID control system in high speed running, An adaptive inverse control algorithm ,which takes the main motor as reference model and consists of a system identification process and an adaptive controller process, was proposed; When MWS works,the controller is adjusted adaptively to force the supplying and collecting motor to follow the main motor’s output speed, The experiment result proved this algorithm can enhance synchronous system's stability, rapidity and accuracy.
(4) Aimed at the problem of arranging wire servo control, the disadvantages to arranging wire method of close limit switches control system are pointed out. Andarranging wire servo control method of non-close limit switches is designed. The mathematical model of arranging wire structure based on the cam drive is established.By simulation research, the arranging wire control algorithm of electronic cam is realized. This algorithm hypothesized an electronic cam with software method. It can realize alternately supply and collect wire function by driving of collect spool motor. The experimental results proved that the realization of the scheme provided with superiority of simple mechanical structure, stability, high accuracy limit and uniform arranging wire.
(5) Aimed at the problem of multi-motor system synchronized switching directionprocess control, this dissertation studied the reliability and stability of the wire winding system which directly influenced on stability of roller wire speed and performance of main axis transmission system. Mathematical model of transmission system is built, and main parameters of transmission system are designed byresearching each essential factor which influences sensitivity and precision of transmission system. Through theoretical analysis and experiment simulation, transmission effect in trapezoid wire winding curve and the double cosine half-wave speed rule curve is researched. And the wire winding algorithm of single cosine half-wave is proposed. The simulation and experimental result proved that the transmission efficiency is high, the velocity curve is smooth and the transition time is short.
(6) According to the MWS functions and technical specification request, Highaccuracy multi-wire numerical control system is developed, and periphery assistantdevice, which includes the table feed system, sand-supplying system, wire windingsystem and the main axis system, is successfully developed. The MWS product is developed successfully. The experimental result proved that the MWS product has merits of stable control system, high precision of wafer.
The developed key technologies of MWS in this dissertation solved the technical problem in development of MWS and the transformation of achievement and the process of industrial production effectively. It provided important theory basis and effective realized ways for developing MWS.
根据项目研究目的、内容及要求,给出了项目实施方案和技术路线。依据作者所承担的课题开发任务,研究多线切割的理论基础和技术基础,指出了研究的重点和攻克的难点,总结了多线切割机的国内外研究现状及发展趋势。
针对切割线张力控制线问题,探讨多线切割机走线过程中影响线张力的各种因素,提出一种机电一体化的张力控制策略,该方法用转矩电动机代替张力锤施加张力,这种张力控制方法与传统的控制方法相比能极大地降低线张力波动的强度。理论分析和实验结果都表明:该方法张力控制精度高、易于实现,而且断线故障率低、张力调整方便。机电一体化张力控制的实现为多线切割机走线系统的设计奠定了基础。
针对多电机速度同步系统控制问题,采用机理建模方法,建立了张力电机的运动学数学模型。全面分析了引起多线切割机走线系统稳定性各种不确定因素,指出多线切割机同步系统是一个非线性、时变、多输出的复杂系统。针对走线系统高速运行时数字PID控制系统存在的问题,提出多电机系统速度同步自适应逆控制算法,该系统以主电机为参考模型,由一个系统辨识环节和一个自适应控制器环节构成,引入虚拟模型自适应地调整控制器,使放线电机与主电机具有类似的动态特性。实验结果证明:该算法能有效提高速度同步系统的稳定性、快速性和精确性。
针对排线控制问题,分析了接近开关限位排线方法的局限性,设计了无接近开关的伺服电机排线系统机械结构,建立排线机构的凸轮传动数学模型,通过对凸轮传动模型仿真研究,提出基于电子凸轮传动的排线控制算法,该方法用软件方法为收线电机虚拟一个电子凸轮,该电子凸轮在收线电机的“驱动”下,实现等效于排线动作的交替收、放卷功能,以此电子凸轮的“输出”作为控制量,对排线电机进行伺服控制。实验结果表明:这种实现方法机械结构简单、运行可靠、限位精度高、排线均匀。
针对高速走线换向过程控制问题,分析了加工辊走线速度和主轴传动系统的性能对走线系统的安全性和稳定性的影响,建立传动系统数学模型,研究影响传动系统灵敏度、精度及抑制线速度扰动的各个要素,综合设计传动系统。通过理论分析和实验仿真的方法,深入研究梯形走线规律曲线和双余弦半波速度规律曲线的传动效果,提出单余弦半波走线算法。仿真和实验结果证明:该法方法传动效率高、速度曲线平滑、过渡时间短。
根据多线切割机功能及技术指标要求,开发高精度多线切割机数控系统,设计了工作台进给系统、供砂系统、走线系统、主轴系统等辅助装置,成功研制多线切割机产品。运行实验结果表明:该产品控制系统运行稳定,切片加工精度高。
本文攻克的高精度多线切割机数控系统关键技术,有效解决了多线切割机开发、成果转化和产业化过程中的技术难题,为高性能多线切割机的设计制造提供了重要理论依据和有效实现途径。
Multi-wire saw (MWS) is the key equipment in the core device of the substratemanufacturing process in IC,IT and PV industries. MWS is one of the most advanced slice processing technology. The principle of MWS is putting abrasive slurry in cutting materials processing area through high-speed reciprocating motion of a stainless steel wire, and the materials will be cut into hundreds of thousands of wafers at the same time. But the design and implementation of MWS technology is very hard. And the core technology of MWS have been mastered by minority several countries, such as Japan, Switzerland and so on, which delays the development of related industry of our county. the development of China's independent intellectual property rights of high-precision cutting machine products are very important for breakthroughingmonopolization of foreign technology and bottleneck of domestic industry. Taken the designing process of MWS product in technical difficult problem as clues, the key technologies of MWS are deeply researched in the dissertation.
(1) Based on the project research purposes, contents and requirements, the project implementation and technique realization scheme have been put forward. According to the project tasks undertaken by author, the theory and technique foundation have been deeply researched. The research emphases and the conquered difficulties of this project have been pointed out. And the domestic and foreign research present situation and trend of development have been summarized in the dissertation.
(2) Aimed at the problem of wire tension control, factors that influence wire tension are analyzed. A wire tension control scheme, which torque motor is used to produce tension on wire instead of hammer, based on electromechanical integration is proposed. By using this tension control method, the intensity of fluctuations in tension can be greatly reduced. The theoretical analysis and experiment results proved that themethod has high control precision，flexible realization，low wire-broken malfunction and facile tension adjusting. And the realization of wire tension control scheme based on electromechanical integration laies the foundation for hardware project design of MWS.
(3) Aimed at the problem of multi-motor speed synchronization control, the kinematics model of the tension motor is established by using the mechanical theory modeling method, and uncertainties that disturb the function of wire winding system of MWS is particularized comprehensively. MWS synchronization system is a nonlinear, time-varying, multi-output complex system. Aimed at the problem of PID control system in high speed running, An adaptive inverse control algorithm ,which takes the main motor as reference model and consists of a system identification process and an adaptive controller process, was proposed; When MWS works,the controller is adjusted adaptively to force the supplying and collecting motor to follow the main motor’s output speed, The experiment result proved this algorithm can enhance synchronous system's stability, rapidity and accuracy.
(4) Aimed at the problem of arranging wire servo control, the disadvantages to arranging wire method of close limit switches control system are pointed out. Andarranging wire servo control method of non-close limit switches is designed. The mathematical model of arranging wire structure based on the cam drive is established.By simulation research, the arranging wire control algorithm of electronic cam is realized. This algorithm hypothesized an electronic cam with software method. It can realize alternately supply and collect wire function by driving of collect spool motor. The experimental results proved that the realization of the scheme provided with superiority of simple mechanical structure, stability, high accuracy limit and uniform arranging wire.
(5) Aimed at the problem of multi-motor system synchronized switching directionprocess control, this dissertation studied the reliability and stability of the wire winding system which directly influenced on stability of roller wire speed and performance of main axis transmission system. Mathematical model of transmission system is built, and main parameters of transmission system are designed byresearching each essential factor which influences sensitivity and precision of transmission system. Through theoretical analysis and experiment simulation, transmission effect in trapezoid wire winding curve and the double cosine half-wave speed rule curve is researched. And the wire winding algorithm of single cosine half-wave is proposed. The simulation and experimental result proved that the transmission efficiency is high, the velocity curve is smooth and the transition time is short.
(6) According to the MWS functions and technical specification request, Highaccuracy multi-wire numerical control system is developed, and periphery assistantdevice, which includes the table feed system, sand-supplying system, wire windingsystem and the main axis system, is successfully developed. The MWS product is developed successfully. The experimental result proved that the MWS product has merits of stable control system, high precision of wafer.
The developed key technologies of MWS in this dissertation solved the technical problem in development of MWS and the transformation of achievement and the process of industrial production effectively. It provided important theory basis and effective realized ways for developing MWS.
引文
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