SU-8胶膜精密铣床设计及加工过程仿真
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摘要
本课题在国家自然科学基金(项目编号:50805077)及河南理工大学博士基金(编号:648605)的资助下,拟根据SU-8胶的性能特点与整平要求,基于现代精密数控机床的发展成果,设计了一台用于铣平SU-8胶膜的用精密铣床,开发了基于LabVIEW软件平台的数控系统,并编写了LabVIEW与Solidworks的专用接口程序,真正意义上实现数字控制与机械加工的协同仿真。具体而言,主要开展了以下几方面的研究工作并取得了相应的成果:
分析了SU-8胶的物理机械性能特点及其铣平加工的要求,在此基础上开发了一台SU-8胶用的精密铣床,并基于三维设计软件Solidworks建立了该铣床的虚拟模型;运用有限元分析法对铣床主轴及整体结构进行了静态和动态分析,分析结果表明本铣床的主轴结构是可靠的,整体布局方案是合理的;开发了基于PC和运动控制卡的开放式数控系统,设计了以PCI-7344运动控制卡为主体的数控系统硬件平台,选定了关键部件的型号及参数;设计了数控系统软件的整体结构,解决了控制过程中的多任务并行、实时处理的关键性问题;利用LabVIEW软件平台开发了本铣床的数控系统软件,设计了软件的人机界面。重点对数控系统的关键技术如译码、插补、刀具补偿等做了深入的研究,编写了相应的程序代码,并进行了数控仿真,仿真结果表明该软件可实现数控系统的全部功能。提出了一种新的圆弧插补算法,较传统算法的计算精度和运算速度有极大的提高;开发了LabVIEW软件与Solidworks/COSMOSMotion模块的专用接口程序,真正实现了数控驱动环境下的机电一体化的过程仿真,并进行了数控圆弧加工的仿真实验,结果证明本课题所设计的SU-8胶用铣床机构及其控制系统的合理性及实用性。
This dissertation focuses on the design of a precision CNC milling machine tool used for milling SU-8 film to control the film thickness and its uniformity quantitatively. Modern design philosophy such as mechanical and electrical integrated design was involved .The major research works are included as follows:
The physical and mechanical properties of the SU-8 photoresist and its processing characteristics were analysised. The whole strategies of mechanical structure were proposed, main parameters of the milling were identified, and the layout of the structure was conducted; Detailed design of the key structures such as spindle components and rail was carried out. Virtual prototype of the whole milling was set up. Finite element analysis method was used on the key components and the overall structure to show the static and dynamic performance of them; Open architecture CNC system based on the PC and motion control card PCI-7344 was built up in the WindowsXP operating system. On the LabVIEW programming platform, the numerical control system software was developed. Key technologies such as decoding, interpolation and blade compensating were researched; Interface program for integration of mechanical simulation with control simulation between LabVIEW and COSMOSMotion were developed. Simulation of the machining procession of a circle interpolation was carried out. Result shows that the simulation response the truth procession actually.
分析了SU-8胶的物理机械性能特点及其铣平加工的要求,在此基础上开发了一台SU-8胶用的精密铣床,并基于三维设计软件Solidworks建立了该铣床的虚拟模型;运用有限元分析法对铣床主轴及整体结构进行了静态和动态分析,分析结果表明本铣床的主轴结构是可靠的,整体布局方案是合理的;开发了基于PC和运动控制卡的开放式数控系统,设计了以PCI-7344运动控制卡为主体的数控系统硬件平台,选定了关键部件的型号及参数;设计了数控系统软件的整体结构,解决了控制过程中的多任务并行、实时处理的关键性问题;利用LabVIEW软件平台开发了本铣床的数控系统软件,设计了软件的人机界面。重点对数控系统的关键技术如译码、插补、刀具补偿等做了深入的研究,编写了相应的程序代码,并进行了数控仿真,仿真结果表明该软件可实现数控系统的全部功能。提出了一种新的圆弧插补算法,较传统算法的计算精度和运算速度有极大的提高;开发了LabVIEW软件与Solidworks/COSMOSMotion模块的专用接口程序,真正实现了数控驱动环境下的机电一体化的过程仿真,并进行了数控圆弧加工的仿真实验,结果证明本课题所设计的SU-8胶用铣床机构及其控制系统的合理性及实用性。
This dissertation focuses on the design of a precision CNC milling machine tool used for milling SU-8 film to control the film thickness and its uniformity quantitatively. Modern design philosophy such as mechanical and electrical integrated design was involved .The major research works are included as follows:
The physical and mechanical properties of the SU-8 photoresist and its processing characteristics were analysised. The whole strategies of mechanical structure were proposed, main parameters of the milling were identified, and the layout of the structure was conducted; Detailed design of the key structures such as spindle components and rail was carried out. Virtual prototype of the whole milling was set up. Finite element analysis method was used on the key components and the overall structure to show the static and dynamic performance of them; Open architecture CNC system based on the PC and motion control card PCI-7344 was built up in the WindowsXP operating system. On the LabVIEW programming platform, the numerical control system software was developed. Key technologies such as decoding, interpolation and blade compensating were researched; Interface program for integration of mechanical simulation with control simulation between LabVIEW and COSMOSMotion were developed. Simulation of the machining procession of a circle interpolation was carried out. Result shows that the simulation response the truth procession actually.
引文
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