溶胶—凝胶法制备钇钡铜氧薄膜的研究
|
摘要
YBCO高温超导薄膜在红外探测器、量子干涉器等众多领域有非常广阔的应用前景，目前制备这种薄膜的主要方法有磁控溅射，激光脉冲沉积等。本研究旨在采用溶胶—凝胶法制得具有钙钛矿结构的致密YBCO薄膜。以无机盐为出发原料研究了溶胶形成过程中的化学反应及成膜机理，探讨了Si基板上薄膜缓冲层的技术等。进一步用扫描电镜、透射电镜和X射线衍射仪研究了薄膜组织结构和结晶情况，分析了缓冲层和衬底对YBCO薄膜制备的影响、以及不同热处理条件对薄膜结晶结构及性能的影响。研究结果表明：
(1)采用Y、Ba和Cu的无机盐为出发原料，采用乳酸、α—甲基丙烯酸及二乙烯三胺作络合剂，可以制得易于成膜且稳定性良好的无氟系YBCO溶胶。
(2)用Sol-Gel法在Si基板上制的钇稳定氧化锆(YSZ)和钛酸锶(STO)薄膜作为Si与YBCO间的缓冲层是可行的。
(3)根据本文热处理过程的工艺探索，认为热处理气氛、气流量及处理温度是影响薄膜质量及性能的重要因素，通过优化工艺过程，在钛酸锶(STO)单晶上制得的YBCO薄膜表面质量良好，室温电阻200Ω左右；而在预制了钛酸锶(STO)缓冲层的Si基板上制备的YBCO薄膜的室温电阻为300Ω左右。
(4)电子衍射表明YSZ作缓冲层制得的薄膜中具有YBa_2Cu_4O_8超导结构。XRD测试表明由溶胶制成的YBCO粉末具有YBa_2Cu_3O_(7-δ)超导结构。
YBCO high temperature superconductor film holds great promise for applications in infrared detector,quanta interferometer and so on.Presently the main methods of preparing YBCO films have magnetron sputtering and laser deposition.In this paper the dense YBCO with perovskite structure were expected to be prepared by Sol-Gel process.The confecting methods of sol were discussed using inorganic salt as precursors,and the FT-IR was adopted to analyse the chemical reaction and film forming mechanism of stable sol. The techniques of preparing film buffer layers on Si were studied.The SEM,TEM and XRD were adopted to study the crystal structure of films. The influences of buffer layers,substrate and heat treatment condition on the crystal structure and performance of the YBCO films were discussed. The results are listed as follows:
(1) The inorganic acetate of Y, Ba and Cu were used as precursors, and diethylenetriaminejactic acid and a-methacrylic acid as complexing agents, respectively.The stable fluorine-free YBCO sol can be obtained.
(2) The YSZ and STO buffer layers were prepared by Sol-Gel process on Si substrates.the YSZ and STO films could be used as the buffer layers between Si substrate and YBCO films.
(3) According to the study of heat treatment process, heat treatment ambience,airflow and heat treatment temperature were considerd as the important influences on the quality and property of YBCO films.Through optimizing the process,the YBCO films were prepared on STO single crystal, and their room temperature resistance was about 200 YBCO films also were fabricated on the STO buffered Si substrate,and their room temperature resistance was about 300D.
(4) Through electron diffraction, it was determined the films of YBa2Cu4O8 superconducting structure had been prepared using YSZ as buffer layers. Through XRD testing,it was indicated the YBCO powder had YBa2Cu3O7- superconducting structure.
(1)采用Y、Ba和Cu的无机盐为出发原料，采用乳酸、α—甲基丙烯酸及二乙烯三胺作络合剂，可以制得易于成膜且稳定性良好的无氟系YBCO溶胶。
(2)用Sol-Gel法在Si基板上制的钇稳定氧化锆(YSZ)和钛酸锶(STO)薄膜作为Si与YBCO间的缓冲层是可行的。
(3)根据本文热处理过程的工艺探索，认为热处理气氛、气流量及处理温度是影响薄膜质量及性能的重要因素，通过优化工艺过程，在钛酸锶(STO)单晶上制得的YBCO薄膜表面质量良好，室温电阻200Ω左右；而在预制了钛酸锶(STO)缓冲层的Si基板上制备的YBCO薄膜的室温电阻为300Ω左右。
(4)电子衍射表明YSZ作缓冲层制得的薄膜中具有YBa_2Cu_4O_8超导结构。XRD测试表明由溶胶制成的YBCO粉末具有YBa_2Cu_3O_(7-δ)超导结构。
YBCO high temperature superconductor film holds great promise for applications in infrared detector,quanta interferometer and so on.Presently the main methods of preparing YBCO films have magnetron sputtering and laser deposition.In this paper the dense YBCO with perovskite structure were expected to be prepared by Sol-Gel process.The confecting methods of sol were discussed using inorganic salt as precursors,and the FT-IR was adopted to analyse the chemical reaction and film forming mechanism of stable sol. The techniques of preparing film buffer layers on Si were studied.The SEM,TEM and XRD were adopted to study the crystal structure of films. The influences of buffer layers,substrate and heat treatment condition on the crystal structure and performance of the YBCO films were discussed. The results are listed as follows:
(1) The inorganic acetate of Y, Ba and Cu were used as precursors, and diethylenetriaminejactic acid and a-methacrylic acid as complexing agents, respectively.The stable fluorine-free YBCO sol can be obtained.
(2) The YSZ and STO buffer layers were prepared by Sol-Gel process on Si substrates.the YSZ and STO films could be used as the buffer layers between Si substrate and YBCO films.
(3) According to the study of heat treatment process, heat treatment ambience,airflow and heat treatment temperature were considerd as the important influences on the quality and property of YBCO films.Through optimizing the process,the YBCO films were prepared on STO single crystal, and their room temperature resistance was about 200 YBCO films also were fabricated on the STO buffered Si substrate,and their room temperature resistance was about 300D.
(4) Through electron diffraction, it was determined the films of YBa2Cu4O8 superconducting structure had been prepared using YSZ as buffer layers. Through XRD testing,it was indicated the YBCO powder had YBa2Cu3O7- superconducting structure.
引文
[1] 周光召，朱光亚．共同走向科字(下)．北京：新华出版社．1997：450-550．
[2] 刘敬乾．超导物理发展的启示．成都大学学报，第13卷第2期．1994：53-58．
[3] 刘景和，李艳红等．高Tc超导材料的进展及其在军事上的应用．长春光学精密机械学院学报，第21卷第3期，1998：104-107．
[4] 李宏成，王瑞兰等．高温超导薄膜红外探测器研究．低温与超导，第22卷第3期，1994：42-47．
[5] 李言荣等．电子材料导论．北京：清华大学出版社．2001：137-175．
[6] 贾德昌．周玉等．电子材料．哈尔滨：哈尔滨工业大学出版社．2000：130-150．
[7] 杨烈宇，关文译，顾卓明编著．材料表面薄膜技术．北京：人民交通出版社，1991：673-692．
[8] 李灏，刘安生等．YBCO／CeO_2／Si多层膜超导材料的分析电镜研究．中国稀土学报．第14卷第3期．1996：234-238．
[9] 王又青，粟飙，王秋良等．在金属基片上激光沉积YBCO超导薄膜．光学学报．第19卷第5期．1999：647-650．
[10] 张宏，吴艺雄等．用MOCVD法在YSZ衬底上制备YBCO膜．低温物理学报．第21卷第4期．1999：269-273．
[11] 杨坚，李汉青.MOD法制备YBCO超导薄膜．稀有金属．第18卷第3期．1994：182-186．
[12] M L Kullbergt, M T LanaganS.A sol-gel method for preparing oriented YBa_2Cu_3O_(7-δ) films on silver substrates.Supercond.Sci.Tech 4(1991) 337-342.
[13] 朱卫东．溶胶—凝胶法制备BST薄膜及性能研究．兰州大学．硕士论文．5,2001:5-8．
[14] 徐如人，庞文琴等．无机合成与制备化学．北京：高等教育出版社．2001：560-570．
[15] 张玉根．氧化物超导体研究中的金属配合物．化学通报．第7期.1994：25-29．
[16] 尹邦跃，王零森等．乙二醇在络合物溶胶—凝胶法中的应用研究．第27卷第3期．1999：338-341．
[17] 张德等．溶胶—凝胶法的技术发展与应用现状．地质科技情报1999：103-106．
[18] Takashi MONDE, Hiromitsu KOZUKA,and Sumio SAKKA.Superconducting Oxide Thin Films Prepared by Sol-Gel Technique Using Metal Alkoxides.Chemistry Letters,1998:287-290
[19] Shingo Katayama and Masahiro Sekine.Fabrication of highly oriented YBa_2Cu_4O_8 films by alkoxide sol-gel methods. Journal of Applied Physics.71 (1992)2795-2798.
[20] Hirohiko Murakami,Seiji Yaegashi,Junya Nishino,Yuh Shiohara and Shoji Tanaka.Low-Temperature Synthesis of YBa_2Cu_3O_(7-δ) and YBa_2Cu_4O_8 by Sol-Gel Method. Japanese Jouranal of Applied Physics.29 (1990) 2715-2719.
[21] Toshiya Kumagai,Takaaki Manabe,Wakichi Kondo,Hidehiro Minamiue ,Susumu Mizuta.Effects od Heat Treatment Conditions on the Critical Current Densities of Ba_2YCu_3O_(7-y) Films Prepared by the Dipping-Pyrolysis Process.Japanese Jouranal of Applied Physics.29 (1990) L940-L942.
[22] Toshiya KUMAGAI,Hiroshi YOKOTA,Kenji KAWAGUCHI and Susumu MIZUTA.Preparation of Superconducting YBa_2Cu_3O_(7-δ) Thin Films by the Dipping-Pyrolysis Process Using Organic Acid Salts.Chemistry Letters. 1987:1645-1646.
[23] Srlvatsan Satnyamurtny. Kamel Salma. metal-organic decomposition techniques for the deposition of buffer layers and Y123 for coated-conductor fabrication. Physica C. 329 (2000) 58-68.
[24] B.Zhao, Z.Y. Sun . K.Shi.Preparation of YBa_2Cu_3O(7-δ) .films by MOD method using trifluoroacetate as precursor.Physica C .386 (2003) 342-347.
[25] Martina Falter, Brigitte Schlobach.Chemical solution deposition of YBa_2Cu_3O_(7-δ) films by dip coating.Physica C.372-376 (2002) 46-49.
[26] J,T.Dawley, P.G.Clem,M.P.Siegal,D.L.Overmyer,and.A.Rodriguez. Thick Sol-gel Derived YBa_2Cu_3O_(7-δ) Films. IEEE Transactions on Applied Supperconductivity. 11(2001)2873-2876.
[27] B.Zhao.H.B.Yao.Effect of precursor stoichiometry on the superconducting properties of fluorine-free sol-gel YBCO thin films.Physica C.386 (2003) 348-352.
[28] L.F.Admaiai, L.Daza, P.Grange, B.Delmon.Synthesis of YBa_2Cu_3O(7-x) superconductor with fibre structure by the sol-gel method.Journal of materials science letters.13(1994) 668-670.
[29] H.Kozuka, and H.R.Zhuang.Preparation of superconducting Bi-Sr-Ca-Cu-O ceramics by the sol-gel method. Journal Of Materials Science.25 (1990)4762-4766.
[30] L.S.Hung,S.T.Lee,and G.H.Braunstein.Epitaxially oriented YBa_2Cu_3O_(7-δ) thin fihns on<100>MgO prepared by metallo-organic decomposition J.Appl.phys.66(1), 1989:463-466.
[31] T.nishio ,Y.fujiki. Preparation of superconducting YBa_2Cu_3O_(7-x) fibres through metal citrate gel as a precursor.Journal of materials science letters 12(1993)394-398.
[32] Aiko Aoki, Satoru Ohno and Yuji Muramatsu.Preparation of
Y-Ba-Cu oxide precursor by the citrate gel process. Journal of Non-Crystalline Solids 147&148 (1992) 720-723.
[33] R.S.Liu,W.N.Wang,C.T.Chang and P.T.Wu.Synthesis and Characterization of High-Tc Superconducting Oxides by the Modified Citrate Gel Process.Japanese Jouranal of Applied Physics.28 (1989) L2155-L2157.
[34] 袁启华，唐福龙，雷家衍.sol-Gel法制备YBa_2Cu_3O_(7-δ)超细粉末研究．武汉工业大学学报．第16卷第1期，1994：1-6．
[35] Y.X.Yang,M.A.Howson and S.J.Milne.Solution-based processing of YBa_2Cu_3O_x superconducting thin films. Journal of Non-Crystalline Solids 147&148 (1992) 715-719.
[36] Fueng-Ho Chen,Horng-Show Koo,and Tseung-Yuen Tseng.Characteristics of the High-Tc Superconducting Bi-Pb-Sr-Ca-Cu Oxides Derived from an Ethylenediamenetetraacetic Acid Precursor.J.Am.Soc.75(1992) 96-102.
[37] 郭海，张慰萍等．溶胶—凝胶法制备的Y_2O_3薄膜的光波导性质研究．中国稀土学报．第19卷第6期．2001：511-515．
[38] Wenjian Weng,Juan Yang and Zishang Ding.The sol-gel process of the yttrium complex from yttrium acetate Journal of Non-Crystalline Solids. 169(1994)177-182.
[39] 杨娟、翁文剑等．乙醇铜溶胶凝胶过程的结构变化．材料研究学报，第8卷第4期．1994：362-368．
[40] Wenjian Weng,Juan Yang,and Zishang Ding. A complexing approach to inducing sol-gel process of insoluble Cu ethoxide-evolution of local environment of Cu complex species.Non-Crystalline Solids. 170(1994) 134-142.
[41] 丁子上，翁文剑等．化学络合法在溶胶—凝胶过程中的应用．硅酸
盐学报．第23卷第5期．1995：571-578．
[42] M.W.Rupich,B.Lagos,and J.P.Hachey.Synthesis of YBa_2Cu_3O_(7-x) from a soluble Y-Ba-Cu precursor Appl.Phys.Lett.55(23)1989:2447-2449.
[43] T.Sei,T.Okano,T.Tsuchiya.High temperature superconducting BSCCO thin film from sol-gel process and properties. Journal of Non-Crystalline Solids. 147&148 (1992) 711-714.
[44] Hirohiko Murakami,Seiji Yaegashi,Junya Nishino.Yuh Shiohara and Shoji Tanaka.Synthesis of YBa_2Cu_4O_8 Powders by Sol-Gel Method under Ambient Pressure.Japanese Jouranal of Applied Physics.29 (1990) L445-L446.
[45] Martina Falter, Brigitte Schlobach.Chemical solution deposition of YBa_2Cu_3O_(7-δ) films by dip coating.Physica C.372-376 (2002) 46-49.
[46] 赵虹．含氧化物的红外光谱特征．光谱学和光谱分析．第21卷第4期．2001：506-507．
[47] 荆煦瑛、陈式棣和么思云，红外光谱实用指南．天津：天津科学技术出版社1992：1-100．
[48] 兰艳梅，刘明登和邓希敏．溶胶—凝胶法制备BST铁电薄膜材料的机理研究．广西师范大学学报(自然科学版)第14卷第2期.1996：53-57．
[49] 胡建华．si上直接生长Bi_2Sr_2CaCu_2O_x超导薄膜的难点分析．低温与超导．第25卷第3期．1997：28-31．
[50] 章天金、王世敏等．Sol-Gel法制备ZrO_2超微粉末的反应机理研究．湖北大学学报(自然科学版)．第18卷第4期．1996：361-366．
[51] 周彩华、何超等．氧氯化锆前驱体氧化锆溶胶的制备与研究．玻璃与搪瓷．第29卷4期．2001：41-44．
[52] 章天金、唐超群等．YSZ薄膜Sol-Gel法制备及结构分析．无机材料
学报．第12卷第2期．1997：200-207．
[53] Zhao Gaoyang,Zhang Weihua.Photosensitive.PZT Film and Fine Patterning by Sol-Gel process,the 8th IUMRS international Conference on Electronic Materials.2002:309-312.
[54] 徐明霞，郑嘹赢等．无机盐原料溶胶—凝胶工艺合成高纯超细钛酸 锶粉料．硅酸盐学报．第28卷第2期．2000：184．187．
[55] 罗安．双面YBCO高温超导薄膜的研制及在微波谐振器中的应用． 电子科技大学硕士学位论文．3,2001：24-25．
[56] 李国桢，曹光丽等．高温超导薄膜的研制．红外技术．第11卷第5期．1989：25-29．
[57] 王雪．Ag基带上制备YBCO高温超导带材的研究．北京工业大学硕士论文．6,2000：24-25．
[58] Y.A.Jee,M.Li and B.Ma.Comparison of texture development and superconducting properties of YBCO thin films prepared by TFA and PLD processes.Physica C.356 (2001)297-303.
[59] Y-A Jee,B Ma,and V A Maroni.Texture development and superconducting properties of YBa_2Cu_3O(7-) thin films prepared by a solution process in low oxygen partial pressure.Supercond.Sci. Technol. 14 (2001) 285-291.
[60] Ziya Aslanoglu, Yalcin Akin and Marwan I. E1-Kawni.Influence of the low oxygen partial pressures on thick YBCO coated conductor by sol-gel process.Physica C.384 (2003) 501-506.
[61] 周午纵、梁维耀．《高温超导基础研究》．上海科学技术出版社．12．1999:135．
[62] 邹小卫．掺杂对MTG-YBCO临界电流密度的影响．中国科学院博士研究生学位论文．5,2001：4-7．
[63] Hirohiko Murakami,Seiji Yaegashi.Jun'ya Nishino,Yuh ShioHara and
Shoji Tanaka.Low-Temperature Synthesis of YBa_2Cu_3O_(7-δ) and YBa_2Cu_4O_8 by Sol-Gel Method .Japanese Journal of Applied Physics.29(1990)2715-2716.
[2] 刘敬乾．超导物理发展的启示．成都大学学报，第13卷第2期．1994：53-58．
[3] 刘景和，李艳红等．高Tc超导材料的进展及其在军事上的应用．长春光学精密机械学院学报，第21卷第3期，1998：104-107．
[4] 李宏成，王瑞兰等．高温超导薄膜红外探测器研究．低温与超导，第22卷第3期，1994：42-47．
[5] 李言荣等．电子材料导论．北京：清华大学出版社．2001：137-175．
[6] 贾德昌．周玉等．电子材料．哈尔滨：哈尔滨工业大学出版社．2000：130-150．
[7] 杨烈宇，关文译，顾卓明编著．材料表面薄膜技术．北京：人民交通出版社，1991：673-692．
[8] 李灏，刘安生等．YBCO／CeO_2／Si多层膜超导材料的分析电镜研究．中国稀土学报．第14卷第3期．1996：234-238．
[9] 王又青，粟飙，王秋良等．在金属基片上激光沉积YBCO超导薄膜．光学学报．第19卷第5期．1999：647-650．
[10] 张宏，吴艺雄等．用MOCVD法在YSZ衬底上制备YBCO膜．低温物理学报．第21卷第4期．1999：269-273．
[11] 杨坚，李汉青.MOD法制备YBCO超导薄膜．稀有金属．第18卷第3期．1994：182-186．
[12] M L Kullbergt, M T LanaganS.A sol-gel method for preparing oriented YBa_2Cu_3O_(7-δ) films on silver substrates.Supercond.Sci.Tech 4(1991) 337-342.
[13] 朱卫东．溶胶—凝胶法制备BST薄膜及性能研究．兰州大学．硕士论文．5,2001:5-8．
[14] 徐如人，庞文琴等．无机合成与制备化学．北京：高等教育出版社．2001：560-570．
[15] 张玉根．氧化物超导体研究中的金属配合物．化学通报．第7期.1994：25-29．
[16] 尹邦跃，王零森等．乙二醇在络合物溶胶—凝胶法中的应用研究．第27卷第3期．1999：338-341．
[17] 张德等．溶胶—凝胶法的技术发展与应用现状．地质科技情报1999：103-106．
[18] Takashi MONDE, Hiromitsu KOZUKA,and Sumio SAKKA.Superconducting Oxide Thin Films Prepared by Sol-Gel Technique Using Metal Alkoxides.Chemistry Letters,1998:287-290
[19] Shingo Katayama and Masahiro Sekine.Fabrication of highly oriented YBa_2Cu_4O_8 films by alkoxide sol-gel methods. Journal of Applied Physics.71 (1992)2795-2798.
[20] Hirohiko Murakami,Seiji Yaegashi,Junya Nishino,Yuh Shiohara and Shoji Tanaka.Low-Temperature Synthesis of YBa_2Cu_3O_(7-δ) and YBa_2Cu_4O_8 by Sol-Gel Method. Japanese Jouranal of Applied Physics.29 (1990) 2715-2719.
[21] Toshiya Kumagai,Takaaki Manabe,Wakichi Kondo,Hidehiro Minamiue ,Susumu Mizuta.Effects od Heat Treatment Conditions on the Critical Current Densities of Ba_2YCu_3O_(7-y) Films Prepared by the Dipping-Pyrolysis Process.Japanese Jouranal of Applied Physics.29 (1990) L940-L942.
[22] Toshiya KUMAGAI,Hiroshi YOKOTA,Kenji KAWAGUCHI and Susumu MIZUTA.Preparation of Superconducting YBa_2Cu_3O_(7-δ) Thin Films by the Dipping-Pyrolysis Process Using Organic Acid Salts.Chemistry Letters. 1987:1645-1646.
[23] Srlvatsan Satnyamurtny. Kamel Salma. metal-organic decomposition techniques for the deposition of buffer layers and Y123 for coated-conductor fabrication. Physica C. 329 (2000) 58-68.
[24] B.Zhao, Z.Y. Sun . K.Shi.Preparation of YBa_2Cu_3O(7-δ) .films by MOD method using trifluoroacetate as precursor.Physica C .386 (2003) 342-347.
[25] Martina Falter, Brigitte Schlobach.Chemical solution deposition of YBa_2Cu_3O_(7-δ) films by dip coating.Physica C.372-376 (2002) 46-49.
[26] J,T.Dawley, P.G.Clem,M.P.Siegal,D.L.Overmyer,and.A.Rodriguez. Thick Sol-gel Derived YBa_2Cu_3O_(7-δ) Films. IEEE Transactions on Applied Supperconductivity. 11(2001)2873-2876.
[27] B.Zhao.H.B.Yao.Effect of precursor stoichiometry on the superconducting properties of fluorine-free sol-gel YBCO thin films.Physica C.386 (2003) 348-352.
[28] L.F.Admaiai, L.Daza, P.Grange, B.Delmon.Synthesis of YBa_2Cu_3O(7-x) superconductor with fibre structure by the sol-gel method.Journal of materials science letters.13(1994) 668-670.
[29] H.Kozuka, and H.R.Zhuang.Preparation of superconducting Bi-Sr-Ca-Cu-O ceramics by the sol-gel method. Journal Of Materials Science.25 (1990)4762-4766.
[30] L.S.Hung,S.T.Lee,and G.H.Braunstein.Epitaxially oriented YBa_2Cu_3O_(7-δ) thin fihns on<100>MgO prepared by metallo-organic decomposition J.Appl.phys.66(1), 1989:463-466.
[31] T.nishio ,Y.fujiki. Preparation of superconducting YBa_2Cu_3O_(7-x) fibres through metal citrate gel as a precursor.Journal of materials science letters 12(1993)394-398.
[32] Aiko Aoki, Satoru Ohno and Yuji Muramatsu.Preparation of
Y-Ba-Cu oxide precursor by the citrate gel process. Journal of Non-Crystalline Solids 147&148 (1992) 720-723.
[33] R.S.Liu,W.N.Wang,C.T.Chang and P.T.Wu.Synthesis and Characterization of High-Tc Superconducting Oxides by the Modified Citrate Gel Process.Japanese Jouranal of Applied Physics.28 (1989) L2155-L2157.
[34] 袁启华，唐福龙，雷家衍.sol-Gel法制备YBa_2Cu_3O_(7-δ)超细粉末研究．武汉工业大学学报．第16卷第1期，1994：1-6．
[35] Y.X.Yang,M.A.Howson and S.J.Milne.Solution-based processing of YBa_2Cu_3O_x superconducting thin films. Journal of Non-Crystalline Solids 147&148 (1992) 715-719.
[36] Fueng-Ho Chen,Horng-Show Koo,and Tseung-Yuen Tseng.Characteristics of the High-Tc Superconducting Bi-Pb-Sr-Ca-Cu Oxides Derived from an Ethylenediamenetetraacetic Acid Precursor.J.Am.Soc.75(1992) 96-102.
[37] 郭海，张慰萍等．溶胶—凝胶法制备的Y_2O_3薄膜的光波导性质研究．中国稀土学报．第19卷第6期．2001：511-515．
[38] Wenjian Weng,Juan Yang and Zishang Ding.The sol-gel process of the yttrium complex from yttrium acetate Journal of Non-Crystalline Solids. 169(1994)177-182.
[39] 杨娟、翁文剑等．乙醇铜溶胶凝胶过程的结构变化．材料研究学报，第8卷第4期．1994：362-368．
[40] Wenjian Weng,Juan Yang,and Zishang Ding. A complexing approach to inducing sol-gel process of insoluble Cu ethoxide-evolution of local environment of Cu complex species.Non-Crystalline Solids. 170(1994) 134-142.
[41] 丁子上，翁文剑等．化学络合法在溶胶—凝胶过程中的应用．硅酸
盐学报．第23卷第5期．1995：571-578．
[42] M.W.Rupich,B.Lagos,and J.P.Hachey.Synthesis of YBa_2Cu_3O_(7-x) from a soluble Y-Ba-Cu precursor Appl.Phys.Lett.55(23)1989:2447-2449.
[43] T.Sei,T.Okano,T.Tsuchiya.High temperature superconducting BSCCO thin film from sol-gel process and properties. Journal of Non-Crystalline Solids. 147&148 (1992) 711-714.
[44] Hirohiko Murakami,Seiji Yaegashi,Junya Nishino.Yuh Shiohara and Shoji Tanaka.Synthesis of YBa_2Cu_4O_8 Powders by Sol-Gel Method under Ambient Pressure.Japanese Jouranal of Applied Physics.29 (1990) L445-L446.
[45] Martina Falter, Brigitte Schlobach.Chemical solution deposition of YBa_2Cu_3O_(7-δ) films by dip coating.Physica C.372-376 (2002) 46-49.
[46] 赵虹．含氧化物的红外光谱特征．光谱学和光谱分析．第21卷第4期．2001：506-507．
[47] 荆煦瑛、陈式棣和么思云，红外光谱实用指南．天津：天津科学技术出版社1992：1-100．
[48] 兰艳梅，刘明登和邓希敏．溶胶—凝胶法制备BST铁电薄膜材料的机理研究．广西师范大学学报(自然科学版)第14卷第2期.1996：53-57．
[49] 胡建华．si上直接生长Bi_2Sr_2CaCu_2O_x超导薄膜的难点分析．低温与超导．第25卷第3期．1997：28-31．
[50] 章天金、王世敏等．Sol-Gel法制备ZrO_2超微粉末的反应机理研究．湖北大学学报(自然科学版)．第18卷第4期．1996：361-366．
[51] 周彩华、何超等．氧氯化锆前驱体氧化锆溶胶的制备与研究．玻璃与搪瓷．第29卷4期．2001：41-44．
[52] 章天金、唐超群等．YSZ薄膜Sol-Gel法制备及结构分析．无机材料
学报．第12卷第2期．1997：200-207．
[53] Zhao Gaoyang,Zhang Weihua.Photosensitive.PZT Film and Fine Patterning by Sol-Gel process,the 8th IUMRS international Conference on Electronic Materials.2002:309-312.
[54] 徐明霞，郑嘹赢等．无机盐原料溶胶—凝胶工艺合成高纯超细钛酸 锶粉料．硅酸盐学报．第28卷第2期．2000：184．187．
[55] 罗安．双面YBCO高温超导薄膜的研制及在微波谐振器中的应用． 电子科技大学硕士学位论文．3,2001：24-25．
[56] 李国桢，曹光丽等．高温超导薄膜的研制．红外技术．第11卷第5期．1989：25-29．
[57] 王雪．Ag基带上制备YBCO高温超导带材的研究．北京工业大学硕士论文．6,2000：24-25．
[58] Y.A.Jee,M.Li and B.Ma.Comparison of texture development and superconducting properties of YBCO thin films prepared by TFA and PLD processes.Physica C.356 (2001)297-303.
[59] Y-A Jee,B Ma,and V A Maroni.Texture development and superconducting properties of YBa_2Cu_3O(7-) thin films prepared by a solution process in low oxygen partial pressure.Supercond.Sci. Technol. 14 (2001) 285-291.
[60] Ziya Aslanoglu, Yalcin Akin and Marwan I. E1-Kawni.Influence of the low oxygen partial pressures on thick YBCO coated conductor by sol-gel process.Physica C.384 (2003) 501-506.
[61] 周午纵、梁维耀．《高温超导基础研究》．上海科学技术出版社．12．1999:135．
[62] 邹小卫．掺杂对MTG-YBCO临界电流密度的影响．中国科学院博士研究生学位论文．5,2001：4-7．
[63] Hirohiko Murakami,Seiji Yaegashi.Jun'ya Nishino,Yuh ShioHara and
Shoji Tanaka.Low-Temperature Synthesis of YBa_2Cu_3O_(7-δ) and YBa_2Cu_4O_8 by Sol-Gel Method .Japanese Journal of Applied Physics.29(1990)2715-2716.