LED产业含氨含氢废气处理技术发展现状
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摘要
LED外延片生产过程中金属有机物化学气相沉积(MOCVD)工艺会产生大量废气,其主要成分为NH_3,H_2,N_2和少量金属有机化合物(MO源),必须进行无害化处理,工业上常用的方法有燃烧法、水吸收法和化学法等。由赛科康仑公司设计开发的新型LED废气资源化装置以精馏蒸氨为原理,通过参数设计、设备集成优化,一步实现废气水淋洗液被浓缩得到浓度为20%的高纯浓氨水,可进一步制成氨气或液氨返回生产工艺,氨回收率大于99%,具有占地面积小、操作弹性大、资源化效率高的特点。
In the production of LED epitaxy wafers, the metal organic chemical vapor deposition(MOCVD) process produces a large amount of waste gas, whose main components are NH_3,H_2,N_2 and a small amount of metal organic compounds(MO sources), which must be treated harmlessly. The commonly used methods in industry are combustion method, water absorption method and chemical method. Based on the principle of distillation, a new type of LED waste gas recycling device designed and developed by Cycle Columbus Company can concentrate the leachate of waste gas into high purity concentrated ammonia water with a concentration of 20% by one-step. It can be further made into ammonia gas or liquid ammonia to return to the production process. The ammonia recovery rate is more than 99%. It has the characteristics of small floor area, large occupation flexibility of operation and high efficiency of resource utilization.
In the production of LED epitaxy wafers, the metal organic chemical vapor deposition(MOCVD) process produces a large amount of waste gas, whose main components are NH_3,H_2,N_2 and a small amount of metal organic compounds(MO sources), which must be treated harmlessly. The commonly used methods in industry are combustion method, water absorption method and chemical method. Based on the principle of distillation, a new type of LED waste gas recycling device designed and developed by Cycle Columbus Company can concentrate the leachate of waste gas into high purity concentrated ammonia water with a concentration of 20% by one-step. It can be further made into ammonia gas or liquid ammonia to return to the production process. The ammonia recovery rate is more than 99%. It has the characteristics of small floor area, large occupation flexibility of operation and high efficiency of resource utilization.
引文
[1]毛兴武,张艳雯,周建军,等.新一代绿色光源LED及其应用技术[M].北京:人民邮电出版社,2008:116-117.
[2]方志烈.半导体照明技术[M].北京:电子工业出版社,2009:164-165.
[3]欧阳欣.MOCVD法制备Ga N基LED外延尾气处理技术进展[J].轻工机械,2013,31(3):96-98.
[4]刘琪,刘泽航.印刷行业有机废气治理工程实例[J].环境科技,2016,29(5):47-49.
[5]李婧颖,唐晓龙,易红宏,等.铜基催化剂应用于含氨废气选择性催化氧化的研究进展[J].化工进展,2017,36(1):174-180.
[6]吴纳新,吴彦敏.LED外延含氨尾气去污染资源化和循环利用[J].低温与特气,2015,33(4):41-44.
[7]王竹槽,胡志军,徐明,等.食用香精生产废气治理工程实例分析[J].环境科技,2017,30(2):43-46
[8]吴纳新.蓝光LED氮化镓外延过程尾气回收:ZL201110398618.4[P].2015-06-10.
[9]苏州金宏气体有限公司.氨水法回收LED制造中废氨气再利用的方法:ZL 201210484804.4[P].2014-08-06.
[10]李梁萌,郑述平.含氨典型废气净化及工程示范装置运行总结[J].中氮肥,2012,7(4):1-4.
[11]杨友发,李义娟.硫酸铵结晶技术处理氨气的工艺和设备:ZL201110268763.0[P].2016-12-21.
[12]孙猛,李荷庆,金向华.LED行业用废氨气处理技术[J].低温与特气,2016,34(1):43-46.
[13]赵培,薛群,王璠.Ga N基LED外延片含氨废气的处理与回收利用[J].科研,2016(25):167-169.
[14]北京赛科康仑环保科技有限公司.一种LED芯片生产过程中MOCVD废气的资源化处理工艺系统:ZL201420755333.0[P].2015-05-20.
[2]方志烈.半导体照明技术[M].北京:电子工业出版社,2009:164-165.
[3]欧阳欣.MOCVD法制备Ga N基LED外延尾气处理技术进展[J].轻工机械,2013,31(3):96-98.
[4]刘琪,刘泽航.印刷行业有机废气治理工程实例[J].环境科技,2016,29(5):47-49.
[5]李婧颖,唐晓龙,易红宏,等.铜基催化剂应用于含氨废气选择性催化氧化的研究进展[J].化工进展,2017,36(1):174-180.
[6]吴纳新,吴彦敏.LED外延含氨尾气去污染资源化和循环利用[J].低温与特气,2015,33(4):41-44.
[7]王竹槽,胡志军,徐明,等.食用香精生产废气治理工程实例分析[J].环境科技,2017,30(2):43-46
[8]吴纳新.蓝光LED氮化镓外延过程尾气回收:ZL201110398618.4[P].2015-06-10.
[9]苏州金宏气体有限公司.氨水法回收LED制造中废氨气再利用的方法:ZL 201210484804.4[P].2014-08-06.
[10]李梁萌,郑述平.含氨典型废气净化及工程示范装置运行总结[J].中氮肥,2012,7(4):1-4.
[11]杨友发,李义娟.硫酸铵结晶技术处理氨气的工艺和设备:ZL201110268763.0[P].2016-12-21.
[12]孙猛,李荷庆,金向华.LED行业用废氨气处理技术[J].低温与特气,2016,34(1):43-46.
[13]赵培,薛群,王璠.Ga N基LED外延片含氨废气的处理与回收利用[J].科研,2016(25):167-169.
[14]北京赛科康仑环保科技有限公司.一种LED芯片生产过程中MOCVD废气的资源化处理工艺系统:ZL201420755333.0[P].2015-05-20.