用于瞬态波前检测的四波横向剪切干涉系统
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摘要
为检测瞬态波前的三维分布,提出了一种共光路结构的剪切干涉测试系统。该系统使用棋盘光栅与光阑,将待测波前分解为四支互相错位的波前,这些波前两两相干,最终叠加形成一幅高载频的干涉图。根据光强传输方程以及傅里叶光学理论,建立了剪切干涉测试系统的理论模型,采用傅里叶变换算法提取待测波前。提出了一种剪切量标定算法,通过讨论线性载频的影响因素与光栅的衍射效率,给出了棋盘光栅的具体设计参数。实验搭建了瞬态波前检测装置,实现了自动化高精度测量,波面检测结果的峰谷(PV)值、均方根(RMS)值以及Zernike拟合系数均与SID4波前探测器所测波面结果一致。因此采用该技术能够实现瞬态波前检测。
In order to detect the three-dimensional distribution of transient wavefront, a shearing interferometric measurement system with common path configuration is proposed. The system uses a chessboard grating and aperture to divide the wavefront under test into four replicas with shear. Each two of the replicas are coherent to form an interferogram with high carrier frequency. According to the transport of intensity equation and Fourier optics, the theoretical model of shearing interferometric measurement system is established and the wavefront under test is reconstructed by Fourier transform algorithm. A calibration method of shear is proposed. The design of chessboard grating is given by discussing linear carrier frequency and diffraction efficiency of the grating. Experimentally the proposed system is applied to measure transient wavefront, and automatic measurement with high precision is achieved. Peak-to-valley(PV) value, root-mean-square(RMS) value and Zernike fitting coefficient of the measured result are in good agreement with those obtained by SID4 wavefront sensor. This system can be applied to transient wavefront measurement.
In order to detect the three-dimensional distribution of transient wavefront, a shearing interferometric measurement system with common path configuration is proposed. The system uses a chessboard grating and aperture to divide the wavefront under test into four replicas with shear. Each two of the replicas are coherent to form an interferogram with high carrier frequency. According to the transport of intensity equation and Fourier optics, the theoretical model of shearing interferometric measurement system is established and the wavefront under test is reconstructed by Fourier transform algorithm. A calibration method of shear is proposed. The design of chessboard grating is given by discussing linear carrier frequency and diffraction efficiency of the grating. Experimentally the proposed system is applied to measure transient wavefront, and automatic measurement with high precision is achieved. Peak-to-valley(PV) value, root-mean-square(RMS) value and Zernike fitting coefficient of the measured result are in good agreement with those obtained by SID4 wavefront sensor. This system can be applied to transient wavefront measurement.
引文
1 Daniel Malacara.Optical Shop Testing[M].New York:John Wiley&Sons,2007.
2 T Shirai,T H Barnes,T G Haskell.Adaptive wave-front correction by means of all-optical feedback interferometry[J].Opt Lett,2000,25(11):773-775.
3 C Hernandez-Gomez,J L Collier,S J Hawkes,et al..Wave-front control of a large-aperture laser system by use of a static phase corrector[J].Appl Opt,2000,39(12):1954-1961.
4 J Primot.Theoretical description of Shack-Hartmann wave-front sensor[J].Opt Commun,2003,222(1):81–92.
5 J Primot,N Guérineau.Extended Hartmann test based on the pseudoguiding property of a Hartmann mask completed by a phase chessboard[J].Appl Opt,2000,39(31):5715-5720.
6 Fuzhong Bai,Xiaoqiang Wang,Kaizheng Huang,et al..Analysis of spatial resolution and pinhole size for single-shot pointdiffraction interferometer using in closed-loop adaptive optics[J].Opt Commun,2013,297:27-31.
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9 V Ronchi.Forty years of history of a grating interferometer[J].Appl Opt,1964,3(4):437-451.
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11 Tong Ling,Dong Liu,Yongying Yang,et al..Off-axis cyclic radial shearing interferometer for measurement of centrally blocked transient wavefront[J].Opt Lett,2013,38(14):2493-2495.
12 Dong Liu,Yongying Yang,Lin Wang,et al..Real time diagnosis of transient pulse laser with high repetition by radial shearing interferometer[J].Appl Opt,2007,46(34):8305-8314.
13 P Bon,G Maucort,B Wattellier,et al..Quadriwave lateral shearing interferometry for quantitative phase microscopy of living cells[J].Opt Express,2009,17(15):13080-13094.
14 C Rouyer,S Mousset.Piston measurement by quadriwave lateral shearing interferometry[J].Opt Lett,2006,31(17):2634-2636.
15 S Velghe,J Primot,N Guérineau,et al..Wave-front reconstruction from multidirectional phase derivatives generated by multilateral shearing interferometers[J].Opt Lett,2005,30(3):245-247.
16 S Velghe,J Primot,N Guérineau,et al..Advanced wave-front sensing by quadri-wave lateral shearing interferometry[C].SPIE,2006,6292:62920E.
17 J C F Chanteloup,M Cohen.Compact high resolution four wave lateral shearing interferometer[C].SPIE,2004,5252:282-292.
18 F Roddier,C Roddier.Wavefront reconstruction using iterative Fourier transforms[J].Appl Opt,1991,30(11):1325-1327.
19 S Velghe,R Ha?dar,N Guérineau,et al..In situ optical testing of infrared lenses for high-performance cameras[J].Appl Opt,2006,45(23):5903-5909.
20 M Takeda,H Ina,S Kobayashi.Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry[J].J Opt Soc Am,1982,72(1):156-160.
21 C Roddier,F Roddier.Interferogram analysis using Fourier transform techniques[J].Appl Opt,1987,26(9):1668-1673.
22 W W Macy.Two-dimensional fringe-pattern analysis[J].Appl Opt,1983,22(23):3898-3901.
23 B Bhaduri,M P Kothiyal,N K Mohan.Curvature measurement using three-aperture digital shearography and fast Fourier transform[J].Opt&Lasers in Eng,2007,45(10):1001-1004.
24 T W Ng,F S Chau.Automated linear shear measurements in digital shearing speckle interferometry[J].Opt Eng,1994,33(5):1728-1729.
25 Xu Wenyu,Bai Tingzhu,Liu Yang,et al..Real-time laser facula detection based on top-three-neighborhood-region continuous-pixels numbering[J].Acta Optica Sinica,2013,33(12):1212002.徐文宇,白廷柱,刘洋,等.基于上三邻域连续点计数的激光光斑实时检测[J].光学学报,2013,33(12):1212002.
26 Wu Congjun,Yan Changxiang,Liu Wei.Analysis of optical aberration impact on acquisition performance[J].Chinese J Lasers,40(10):1005004.吴从均,颜昌翔,刘伟.像差对通信捕获光斑质心的影响分析[J].中国激光,2013,40(10):1005004.
27 Fang Bo.Research on Wavefront Measurement by Four-Wave Lateral Shear Interferometry Based on Phase Grating[D].Nanjing:Nanjing University of Science and Technology,2014:26-27.方波.基于位相光栅的四波横向剪切干涉法波前检测技术研究[D].南京:南京理工大学,2014:26-27.
2 T Shirai,T H Barnes,T G Haskell.Adaptive wave-front correction by means of all-optical feedback interferometry[J].Opt Lett,2000,25(11):773-775.
3 C Hernandez-Gomez,J L Collier,S J Hawkes,et al..Wave-front control of a large-aperture laser system by use of a static phase corrector[J].Appl Opt,2000,39(12):1954-1961.
4 J Primot.Theoretical description of Shack-Hartmann wave-front sensor[J].Opt Commun,2003,222(1):81–92.
5 J Primot,N Guérineau.Extended Hartmann test based on the pseudoguiding property of a Hartmann mask completed by a phase chessboard[J].Appl Opt,2000,39(31):5715-5720.
6 Fuzhong Bai,Xiaoqiang Wang,Kaizheng Huang,et al..Analysis of spatial resolution and pinhole size for single-shot pointdiffraction interferometer using in closed-loop adaptive optics[J].Opt Commun,2013,297:27-31.
7 J E Millerd,N J Brock,J B Hayes,et al..Instantaneous phase-shift point-diffraction interferometer[C].SPIE,2004,5531:264-272.
8 R M Neal,J C Wyant.Polarization phase-shifting point-diffraction interferometer[J].Appl Opt,2006,45(15):3463-3476.
9 V Ronchi.Forty years of history of a grating interferometer[J].Appl Opt,1964,3(4):437-451.
10 P Hariharan,D Sen.Radial shearing interferometer[J].J Scientific Instruments,1961,38(11):428.
11 Tong Ling,Dong Liu,Yongying Yang,et al..Off-axis cyclic radial shearing interferometer for measurement of centrally blocked transient wavefront[J].Opt Lett,2013,38(14):2493-2495.
12 Dong Liu,Yongying Yang,Lin Wang,et al..Real time diagnosis of transient pulse laser with high repetition by radial shearing interferometer[J].Appl Opt,2007,46(34):8305-8314.
13 P Bon,G Maucort,B Wattellier,et al..Quadriwave lateral shearing interferometry for quantitative phase microscopy of living cells[J].Opt Express,2009,17(15):13080-13094.
14 C Rouyer,S Mousset.Piston measurement by quadriwave lateral shearing interferometry[J].Opt Lett,2006,31(17):2634-2636.
15 S Velghe,J Primot,N Guérineau,et al..Wave-front reconstruction from multidirectional phase derivatives generated by multilateral shearing interferometers[J].Opt Lett,2005,30(3):245-247.
16 S Velghe,J Primot,N Guérineau,et al..Advanced wave-front sensing by quadri-wave lateral shearing interferometry[C].SPIE,2006,6292:62920E.
17 J C F Chanteloup,M Cohen.Compact high resolution four wave lateral shearing interferometer[C].SPIE,2004,5252:282-292.
18 F Roddier,C Roddier.Wavefront reconstruction using iterative Fourier transforms[J].Appl Opt,1991,30(11):1325-1327.
19 S Velghe,R Ha?dar,N Guérineau,et al..In situ optical testing of infrared lenses for high-performance cameras[J].Appl Opt,2006,45(23):5903-5909.
20 M Takeda,H Ina,S Kobayashi.Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry[J].J Opt Soc Am,1982,72(1):156-160.
21 C Roddier,F Roddier.Interferogram analysis using Fourier transform techniques[J].Appl Opt,1987,26(9):1668-1673.
22 W W Macy.Two-dimensional fringe-pattern analysis[J].Appl Opt,1983,22(23):3898-3901.
23 B Bhaduri,M P Kothiyal,N K Mohan.Curvature measurement using three-aperture digital shearography and fast Fourier transform[J].Opt&Lasers in Eng,2007,45(10):1001-1004.
24 T W Ng,F S Chau.Automated linear shear measurements in digital shearing speckle interferometry[J].Opt Eng,1994,33(5):1728-1729.
25 Xu Wenyu,Bai Tingzhu,Liu Yang,et al..Real-time laser facula detection based on top-three-neighborhood-region continuous-pixels numbering[J].Acta Optica Sinica,2013,33(12):1212002.徐文宇,白廷柱,刘洋,等.基于上三邻域连续点计数的激光光斑实时检测[J].光学学报,2013,33(12):1212002.
26 Wu Congjun,Yan Changxiang,Liu Wei.Analysis of optical aberration impact on acquisition performance[J].Chinese J Lasers,40(10):1005004.吴从均,颜昌翔,刘伟.像差对通信捕获光斑质心的影响分析[J].中国激光,2013,40(10):1005004.
27 Fang Bo.Research on Wavefront Measurement by Four-Wave Lateral Shear Interferometry Based on Phase Grating[D].Nanjing:Nanjing University of Science and Technology,2014:26-27.方波.基于位相光栅的四波横向剪切干涉法波前检测技术研究[D].南京:南京理工大学,2014:26-27.