子孔径拼接中系统误差的修正方法
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摘要
为了提高大口径光学元件子孔径拼接测量的检测精度,提出一种平面绝对测量技术,修正子孔径拼接过程中产生的系统误差。利用改进的三面互检法获得参考平面的面形数据,采用这些测量数据构建基于Zernike多项式的参考面面形误差修正波面,在拼接过程中运用误差修正波面对获得的子孔径测量数据进行实时修正,并与全口径直接测量结果进行对比,结果 PV(peak value,PV,峰谷值)误差从0.072 1λ减少到0.028 6λ。结果表明该方法有效减少了参考平面系统误差对拼接测量精度的影响,提高了大口径光学元件的检测精度。
In order to improve the detection accuracy of the measurement of large aperture optics stitching,a simple and effective absolute measurement was proposed to amend the system error of the sub-aperture stitching measurements.Firstly,an improved three-flat test was used to obtain the surface shape data of the reference plane and the surface error wave-front based on the Zernike polynomial was established which was used to correct the error of the sub-aperture measurement data.Then the directly measured values were compared with the full aperture surface stitching results,and the surface error peak value(DV) was reduced from 0.072 1 λ to 0.028 6 λ.The results show that the method is effective in reducing the system error that caused by the reference plane and can effectively improve the detection accuracy of the large aperture optics stitching.
In order to improve the detection accuracy of the measurement of large aperture optics stitching,a simple and effective absolute measurement was proposed to amend the system error of the sub-aperture stitching measurements.Firstly,an improved three-flat test was used to obtain the surface shape data of the reference plane and the surface error wave-front based on the Zernike polynomial was established which was used to correct the error of the sub-aperture measurement data.Then the directly measured values were compared with the full aperture surface stitching results,and the surface error peak value(DV) was reduced from 0.072 1 λ to 0.028 6 λ.The results show that the method is effective in reducing the system error that caused by the reference plane and can effectively improve the detection accuracy of the large aperture optics stitching.
引文
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[2]刘智颖,张磊,胡原,等.子孔径拼接技术应用的研究[J].应用光学,2008,29(6):1009-1012.LIU Zhi-Ying,ZHANG Lei,HU Yuan,et al.Ap-plication of sub-aperture stitching technique[J].Journal of Applied Optics,2008,29(6):1009-1012.(in Chinese with an English abstract)
[3]XU C,CHEN L,YIN J.Method for absolute flat-ness measurement of optical surfaces[J].AppliedOptics,2009,48(13):2536-2541.
[4]张明意,李新南.子孔径拼接检验法中倾斜的影响及消除方法[J].光电工程,2006,33(8):117-122.ZHANG Ming-yi,LI Xin-nan.Influence of tilt institching interferometry and how to eliminate it[J].Opto-Electronic Engineering,2006,33(8):117-122.(in Chinese with an English abstract)
[5]GRIESMANN U,WANG Q,SOONS J.Three-flattests including mounting-induced deformations[J].Optical Engineering,2007,46(9):093601-15.
[6]徐晨,陈磊.光学平面绝对检验方法的研究[J].光学技术,2006,32(5):775-778.XU Chen,CHEN Lei.Absolute flatness measure-ment of optical surfaces[J].Optical Technique,2006,32(5):775-778.(in Chinese with an Englishabstract)
[7]VANNONI M,MOLESINI G.Iterative algorithmfor three flat test[J].Optics Express,2007,15(11):6809-6816.
[8]赵华伟,王军.一种用于光学平面面形误差绝对测量的新方法[J].应用光学,1991,12(2):53-55.ZHAO Hua-wei,WANG Jun.A new method of ab-solutely measuring the surface shape error of opticalplane[J].Journal of Applied Optics,1991,12(2):53-55.(in Chinese with an English abstract)
[9]GRIESMANN U.Three-flat test solutions based onsimple mirror symmetry[J].Applied optics,2006,45(23):5856-5865.
[10]田爱玲,郑显锋,刘丙才,等.三维面型的绝对测量[J].西安工业大学学报,2012,32(6):431-436.TIAN Ai-ling,ZHENG Xian-feng,LIU Bing-cai,et al.Absolute measurement of 3Dsurface.[J].Journal of Xian Technological University,2012,32(6):431-436.(in Chinese with an English ab-stract)