基于权重的子孔径拼接优化算法研究
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摘要
为了提高大口径光学元件面形拼接检测准确度,减少传统子孔径拼接算法带来的误差传递和积累,并在原有全局优化拼接算法的基础上引入权重系数,使全口径内各相邻子孔径之间的重叠区域达到最优匹配,使拼接误差最小化.利用该优化算法对平面进行了多孔径拼接仿真模拟,在此基础上对150mm口径的平面镜进行了实验,并提出基于图像边缘轮廓特征提取的子孔径定位新方法,分析了影响拼接误差的因素.仿真和实验结果均证明了基于权重的全局优化拼接算法的有效性和可行性.
In order to obtain the whole lens′precision surface information and reduce its errors transfer and accumulation,a new global optimization stitching algorithm based on weight coefficient is presented.The common region of the two neighborhood sub-aperture can reach the optimal match and the stitching error is minimized by using this algorithm.The multi-apertures stitching simulation is carried out,and an actual experiment is carried to the flat lens of 150mm.A new sub-aperture position method based on the image edge contour feature extraction is introduced and the error factors are analyzed for stitching.Both the simulation and the experiment results show that this global optimization stitching algorithm is good for reducing the transfer and accumulation error,which exist in the traditional method,and realizing the high precision sub-aperture stitching measurement.
In order to obtain the whole lens′precision surface information and reduce its errors transfer and accumulation,a new global optimization stitching algorithm based on weight coefficient is presented.The common region of the two neighborhood sub-aperture can reach the optimal match and the stitching error is minimized by using this algorithm.The multi-apertures stitching simulation is carried out,and an actual experiment is carried to the flat lens of 150mm.A new sub-aperture position method based on the image edge contour feature extraction is introduced and the error factors are analyzed for stitching.Both the simulation and the experiment results show that this global optimization stitching algorithm is good for reducing the transfer and accumulation error,which exist in the traditional method,and realizing the high precision sub-aperture stitching measurement.
引文
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[15]YANG Peng-qian,HIPPLER Stefan,YAN Zhao-jun,et al.Surface figure measurement of flat mirrors based on the sub-aperture stitching interferometry[C].SPIE,2012,8417:841723-1～6.
[2]GUO Hong-wei,CHEN Ming-yi.An iterative algorithm ofmulti-aperture transformation and connection technique incylind-rical coordinates[J].Acta Optica Sinica,2000,20(8):1047-1052.郭红卫,陈明仪.圆柱坐标系下的多孔径扫描拼接技术的迭代方法[J].光学学报,2000,20(8):1047-1052.
[3]LIU Jun,SHU Xiao-wu,BAI Jian,et al.Reserch ontechnique of large aperture-digital wavefront test[J].OpticalInstruments,2003,25(06):3-7.刘军,舒晓武,白剑,等.大口径数字波面检测技术的研究[J].光学仪器,2003,25(06):3-7.
[4]ZHANG P,ZHAO H,LIU B,et al.Simple method for theimplementation of subaperture stitching interferometry[J].Optical Engineering,2011,50(9):095601-095601-8.
[5]ZHANG Rong-zhu,SHI Qi-kai,CAI Bang-wei,et al.Studyon the experiments of the stitching interferometer[J].OpticalTechnique,2004,30(02):173-175.张蓉竹,石琪凯,蔡邦维,等.子孔径拼接干涉检测实验研究[J].光学技术,2004,30(02):173-175.
[6]ZHU Li-ming.The research on the testing methods ofaspheric mirror based on sub-aperture stitching[D].Harbin:Harbin Institute of Technology,2009.朱黎明.基于子孔径拼接的非球面检测方法研究[D].哈尔滨:哈尔滨工业大学,2009.
[7]ZHANG Ming-yi,LI Xin-nan.Influence of tilt in stitchingInterferometry and how to eliminate it[J].Opto-ElectronicEngineering,2006,33(08):117-122.张明意,李新南.子孔径拼接检验法中倾斜的影响及消除方法[J].光电工程,2006,33(08):117-122.
[8]LI Xin-nan,ZHANG Ming-yi.Study on the sub-aperturestitching interferometry for large plano-optics[J].OpticalTechnique,2006,32(04):514-517.李新南,张明意.大口径光学平面的子孔径拼接检验研究[J].光学技术,2006,32(04):514-517.
[9]WANG Li-hua,WU Shi-bin,HOU Xi,et al.Measurement offlat wavefront by sub-aperture stitching interferometry[J].Opto-Electronic Engineering,2009,36(06):126-130.汪利华,吴时彬,侯溪,等.子孔径拼接干涉检测大口径平面波前[J].光电工程,2009,36(06):126-130.
[10]WANG Xiao-kun,ZHENG Li-gong,ZHANG Xue-jun,etal.Testing an off-axis asphere by subaperture stitchinginterferometry[J].Acta Photonica Sinica,2011,40(01):92-97.王孝坤,郑立功,张学军,等.子孔径拼接干涉检测离轴非球面研究[J].光子学报,2011,40(01):92-97.
[11]YUN Yu,PENG Yong,TIAN Xiao-qiang,et al.Largeaperture optical components test based on sub-aperturestitching[J].High Power Laser and Particle Beams,2011,23(07):1831-1834.云宇,彭勇,田小强,等.基于子孔径拼接原理检测大口径光学元件[J].强激光与粒子束,2011,23(07):1831-1834.
[12]BURGE J H,ZHAO C.Applications of subaperturestitching interferometry for very large mirrors[C].SPIE,2012,8450:84500X-1～10.
[13]SU P,BURGE J H,PARKS R E.Application of maximumlikelihood reconstruction of sub-aperture data formeasurement of large flat mirrors[J].Applied Optics,2010,49(1):21-31.
[14]HOU X,WU F,YANG L,et al.Full-aperture wavefrontreconstruction from annular subaperture interferometric databy use of Zernike annular polynomials and a matrix methodfor testing large aspheric surfaces[J].Applied optics,2006,45(15):3442-3455.
[15]YANG Peng-qian,HIPPLER Stefan,YAN Zhao-jun,et al.Surface figure measurement of flat mirrors based on the sub-aperture stitching interferometry[C].SPIE,2012,8417:841723-1～6.