水下探测微电容超声波换能器线阵设计与封装
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摘要
提出一种应用于水下探测的低频微电容超声波换能器阵列。在分析微电容超声波换能器阵列复合结构和工作原理的基础上,建立了换能器阵元和一维线阵的指向性表达式,并通过分析结构参数对指向性的影响,确定了阵列几何参数。针对微电容超声波换能器水下应用需求,研究了阵列水下封装方法,通过封装结构设计和封装材料的选取,完成了换能器阵列水密封装。同时,制定了换能器阵列性能测试方案,并搭建了相应的测试、探测系统,经测试换能器线阵-3dB主瓣宽度为5°,最大旁瓣级为-13.5dB,可实现水下1m范围内的目标清晰探测。实验表明,提出的微电容超声波换能器阵列设计和封装方法合理,为改善微电容超声波换能器阵列水下探测性能提供了设计依据。
A low frequency capacitive micromachined ultrasonic transducer(CMUT)array is presented to detect underwater.Based on the analysis of CMUT array structure and work principle,the directivity expressions of CMUT element and the one-dimensional array is established combined with the array composite structure,the geometric parameters are determined in view of the influence on the directivity of CMUT array.According to the application requirement of CMUT underwater detection,the paper studies underwater packaging methods of CMUT array complete the CMUT array water sealing through package structure design and packaging material selection.At the same time,the paper develops a CMUT array performance test scheme and sets up the corresponding test and detection system.The test results show the low-frequency CMUT has better detecting directivity,the-3 dB main beam width and maximum sidelobe level for CMUT array are respectively 5°and-13.5 dB,and the CMUT array can realize clear underwater detection within the scope of 1 m.The experiment results show the proposed design and encapsulation method is reasonable,and provide the design basis for improving the underwater detection performance of CMUT array.
A low frequency capacitive micromachined ultrasonic transducer(CMUT)array is presented to detect underwater.Based on the analysis of CMUT array structure and work principle,the directivity expressions of CMUT element and the one-dimensional array is established combined with the array composite structure,the geometric parameters are determined in view of the influence on the directivity of CMUT array.According to the application requirement of CMUT underwater detection,the paper studies underwater packaging methods of CMUT array complete the CMUT array water sealing through package structure design and packaging material selection.At the same time,the paper develops a CMUT array performance test scheme and sets up the corresponding test and detection system.The test results show the low-frequency CMUT has better detecting directivity,the-3 dB main beam width and maximum sidelobe level for CMUT array are respectively 5°and-13.5 dB,and the CMUT array can realize clear underwater detection within the scope of 1 m.The experiment results show the proposed design and encapsulation method is reasonable,and provide the design basis for improving the underwater detection performance of CMUT array.
引文
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[16]赵鹏,张国军,刘源,等.纳机电矢量水听器耐压结构设计[J].传感技术学报,2014,27(5):610-615.Zhao Pen,Zhang Guojun,Liu Yuan,et al.The design of pressure-resisting structure for NEMS vector hydrophone[J].Chinese Journal of Sensors and Actuators,2014,27(5):610-615.(in Chinese)
[2]栾桂冬.电容MEMS超声换能器研究进展[J].应用声学,2012,31(4):241-248.Luan Guidong.Progress in capacitive MEMS ultrasonic transducer[J].Applied Acoustics,2012,31(4):241-248.(in Chinese)
[3]Cheng Xiaoyang,Chen Jingkuang,Li Chuan,et al.Aminiature capacitive ultrasonic imager array[J].IEEESensors Journal,2009,9(6):569-577.
[4]Liu Chiahung,Chen Peitai.Surface micromachined capacitive ultrasonic transducer for underwater imaging[J].Journal of the Chinses Institute of Engineers,2007,30(3):447-458.
[5]Doody C B,Cheng X,Rich C A,et al.Modeling and characterization of CMOS-Fabricated capacitive micromachined ultrasound transducers[J].Journal of Microelectromechanical Systems,2011,20(1):104-118.
[6]Miao Jing,Shen Wenjiang,He Changde,et al.Microelectro-mechanical systems capacitive ultrasonic transducer with a higher electromechanical coupling coefficient[J].Micro&Nano Letters,2015,10(10):541-544.
[7]张慧,赵晓楠,张雯,等.空气耦合式电容微超声换能器的设计与分析[J].仪器仪表学报,2016,37(10):2218-2225.Zhang Hui,Zhao Xiaonan,Zhang Wen,et al.Design and analysis of air-coupled capacitive micromachined ultrasonic transducers[J].Chinese Journal of Scientific Instrument,2016,37(10):2218-2225.(in Chinese)
[8]Oralkan,Ergun A S,Johnson J A,et al.Capacitive micromachined ultrasonic transducers:next-generation arrays for acoustic imaging[J].IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2002,49:1596-1610.
[9]Song Jinglong,Xue Chenyang,He Changde,et al.Capacitive micromachined ultrasonic transducers(CMUTs)for underwater imaging applications[J].Sensors,2015,15:23205-23217.
[10]于佳琪.基于Si-SOI键合的微电容超声波换能器设计[D].太原:中北大学,2014.
[11]王志凌,袁慎芳,邱雷,等.基于压电超声相控阵方法的结构多损伤监测[J].振动、测试与诊断,2014,34(5):796-801.Wang Zhiling,Yuan Shenfang,Qiu Lei,et al.Structure multi-damage monitoring based on the piezoelectric ultrasonic phased array[J].Journal of Vibration,Measurement&Diagnosis,2014,34(5):796-801.(in Chinese)
[12]杜功焕,朱哲民,龚秀芳.声学基础[M].3版.南京:南京大学出版社,2012:222-223.
[13]栾桂冬,张金铎,王仁乾.压电换能器和换能器阵[M].北京:北京大学出版社,2005:1-476.
[14]Li Yuping,He Changde,Zhang Juanting,et al.Design and analysis of capacitive micromachined ultrasonic transducer based on SU-8[J].Key Engineering Materials,2015,645-646:577-582.
[15]Shih R C,Chang Y F,Chang C H,et al.Ultrasonic synthetic aperture focusing using the root-mean-square velocity[J].Journal of Nondestructive Evaluation,2014,33(1):12-22.
[16]赵鹏,张国军,刘源,等.纳机电矢量水听器耐压结构设计[J].传感技术学报,2014,27(5):610-615.Zhao Pen,Zhang Guojun,Liu Yuan,et al.The design of pressure-resisting structure for NEMS vector hydrophone[J].Chinese Journal of Sensors and Actuators,2014,27(5):610-615.(in Chinese)