摘要
为了验证Ca_3Mn_2O_7薄膜铁电性的存在,采用脉冲激光沉积法制备了Ca_3Mn_2O_7薄膜,分别利用X线衍射仪、原子力显微镜(AFM)、扫描电子显微镜(SEM)和压电力显微镜(PFM)对不同压强下制备所得样品进行结构表征、表面形貌表征和电学性质分析.分析结果表明:30 Pa的氧气压最有利于较高质量薄膜的生长.利用PFM对其进行电学性质测试,实现了点状区域铁电畴相位回线和振幅"蝴蝶"曲线的表征以及面状区域内外加电场调控铁电极化方向的改变,验证了理论预测的CMO中铁电性的存在.
In order to study the ferroelectricity of Ca_3Mn_2O_7 thin films,Ca_3Mn_2O_7 thin films were deposited with various oxygen pressure by pulsed laser deposition. Structure,morphology and electrical properties of the samples with different oxygen pressures were characterized by X-ray diffractometry,atomic force microscopy(AFM)and scanning electron microscopy(SEM)and piezoelectric force microscopy(PFM). The results show that the pressure of 30 Pa is most favorable condition for the deposition of higher quality films. The saturated phase hysteresis loop and the"butterfly"shaped amplitude curves were successfully obtained with PFM,as well as the modulation of ferro-electric domain direction via external biased voltage,which proved the theoretical prediction of the exist of ferroelectricity in the CMO.
引文
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