干涉条纹密度的计算及其应用研究
|
摘要
采用光的干涉方法检测曲面光学表面的加工质量时,都需要事先设计好系统光路的最佳检测技术参数,并能对检测的难度进行有效的评估,从而确保检测的精度。该研究采用了一种计算干涉条纹密度的新方法,对任意光学曲面检测的难度进行评估,并用于确定球面参考光点光源的最佳位置。以非球面为例,计算了非球面的最接近球面的半径和最大非球面度以及非球面检测时球面参考光点光源的最佳位置,说明了计算干涉条纹密度方法在确定干涉检测系统光路调试最佳条件的优越性,可为各种干涉检测系统的设计以及优化调试过程提供理论依据和分析指导。
When using optical interferometry to inspect curved optical surfaces,the best technology parameters of light path were always designed in advance and the difficulty of inspection was evaluated in order to ensure the accuracy of inspection.A new way for calculating the interference fringe density was adopted to evaluate the difficulty of inspection for any curved optical surface and to determine the best position of reference spotlight source.Taking the aspheric surface for example,the radius of the best fitting sphere of aspheric surface,the max asphericity and the best position of reference spotlight source were calculated.Result shows the superiority of the new way in choosing the best condition of adjusting the light path of optical interference system.It can provide theoretical basis and analytical guidance for the design of interference inspecting system and the optimization debugging process.
When using optical interferometry to inspect curved optical surfaces,the best technology parameters of light path were always designed in advance and the difficulty of inspection was evaluated in order to ensure the accuracy of inspection.A new way for calculating the interference fringe density was adopted to evaluate the difficulty of inspection for any curved optical surface and to determine the best position of reference spotlight source.Taking the aspheric surface for example,the radius of the best fitting sphere of aspheric surface,the max asphericity and the best position of reference spotlight source were calculated.Result shows the superiority of the new way in choosing the best condition of adjusting the light path of optical interference system.It can provide theoretical basis and analytical guidance for the design of interference inspecting system and the optimization debugging process.
引文
[1]谢枫,郝群,朱秋东.基于斜率非球面度的非球面最佳参考球面定义[J].光学学报,2010,30(11):3197-3202.XIE Feng,HAO Qun,ZHU Qiu-dong.Best-fit sphe-ric surface definition based on slope asphericity foraspheric surface[J].Acta Opitca Sinica,2010,30(11):3197-3202.(in Chinese with an English ab-stract)
[2]刘惠兰,沙定国,郝群,等.一种高次光学非球面度的计算方法[J].光电工程,2004,31(6):44-47.LIU Hui-lan,SHA Ding-guo,HAO Qun,et al.Amethod for calculating asphericity of high order opti-cal aspheric surface[J].Opto-Electronic Engineer-ing,2004,31(6):44-47.(in Chinese with an Englishabstract)
[3]龙夫年,郭秀梅,刘剑峰.利用ZYGO干涉仪进行非球面检测技术研究[J].哈尔滨工业大学学报,2005,37(2):231-233.LONG Fu-nian,GUO Xiu-mei,LIU Jian-feng.Technical study for testing of aspheres by using ZY-GO interferometer[J].Journal of harbin institute oftechnology,2005,37(2):231-233.(in Chinese withan English abstract)
[4]朱勇建,潘卫清.非球面面形测量技术[J].激光与光电子学进展,2010,47(1):11202.ZHU Yong-jian,PAN Wei-qing.Measurement of as-pheric surface[J].Laser&Optoelectronics Pro-gress,2010,47(1):11202(in Chinese with an Englishabstract).
[5]袁吕军,杨帆.非球面数字波面检测技术[J].应用光学,2012,33(6):1123-1128.YUAN Lü-jun,YANG Fan.Method of digital wavefront for testing asphere[J].Journal of Applied Op-tics,2012,33(6):1118-1122.(in Chinese with anEnglish abstract)
[6]韦资华,沈卫星.一种新的光学非球面度计算方法[J].光子学报,2007,36(4):730-732.WEI Zi-hua,SHEN Wei-xing.A new method forcalculating asphericity of optical aspheric surface[J].Acta Photonica Sinica,2007,36(4):730-732.(in Chi-nese with an English abstract)
[7]杜玉军,任海霞,刘中本.光学非球面元件非球面度计算方法[J].应用光学,2002,23(5):42-45.DU Yu-jun,REN Hai-xia,LIU Zhong-ben.Themethod of calculation to asphericity of optical aspher-ic surface component[J].J.Appl.Opl.,2002,23(5):42-45.(in Chinese with an English abstract)
[8]韩娟,段嘉友,张钧.大口径非球面主反射镜的装调方法研究[J].应用光学,2012,33(3):490-495.HAN Juan,DUAN Jia-you;ZHANG Jun.Align-ment method for large aperture aspheric mirror[J].Journal of Applied Optics,2012,33(3):490-495.(in Chinese with an English abstract)
[9]王红军,田爱玲,杜玉军.非球面最适球面的确定方法--三点法[J].应用光学,2004,25(4):63-65.WANG Hong-jun,TIAN Ai-ling,DU Yu-jun.De-termination of aspheric reference sphere by tri-pointmethod[J].Journal of Applied Optics,2004,25(4):63-65.(in Chinese with an English abstract)
[10]潘君骅.光学非球面的设计、加工与检验[M].苏州:苏州大学出版社,2004.PAN Jun-hua.The Design manufacture and test of theaspherical optical surfaces[M].Suzhou:Soochow Uni-versity Press,2004.(in Chinese)
[2]刘惠兰,沙定国,郝群,等.一种高次光学非球面度的计算方法[J].光电工程,2004,31(6):44-47.LIU Hui-lan,SHA Ding-guo,HAO Qun,et al.Amethod for calculating asphericity of high order opti-cal aspheric surface[J].Opto-Electronic Engineer-ing,2004,31(6):44-47.(in Chinese with an Englishabstract)
[3]龙夫年,郭秀梅,刘剑峰.利用ZYGO干涉仪进行非球面检测技术研究[J].哈尔滨工业大学学报,2005,37(2):231-233.LONG Fu-nian,GUO Xiu-mei,LIU Jian-feng.Technical study for testing of aspheres by using ZY-GO interferometer[J].Journal of harbin institute oftechnology,2005,37(2):231-233.(in Chinese withan English abstract)
[4]朱勇建,潘卫清.非球面面形测量技术[J].激光与光电子学进展,2010,47(1):11202.ZHU Yong-jian,PAN Wei-qing.Measurement of as-pheric surface[J].Laser&Optoelectronics Pro-gress,2010,47(1):11202(in Chinese with an Englishabstract).
[5]袁吕军,杨帆.非球面数字波面检测技术[J].应用光学,2012,33(6):1123-1128.YUAN Lü-jun,YANG Fan.Method of digital wavefront for testing asphere[J].Journal of Applied Op-tics,2012,33(6):1118-1122.(in Chinese with anEnglish abstract)
[6]韦资华,沈卫星.一种新的光学非球面度计算方法[J].光子学报,2007,36(4):730-732.WEI Zi-hua,SHEN Wei-xing.A new method forcalculating asphericity of optical aspheric surface[J].Acta Photonica Sinica,2007,36(4):730-732.(in Chi-nese with an English abstract)
[7]杜玉军,任海霞,刘中本.光学非球面元件非球面度计算方法[J].应用光学,2002,23(5):42-45.DU Yu-jun,REN Hai-xia,LIU Zhong-ben.Themethod of calculation to asphericity of optical aspher-ic surface component[J].J.Appl.Opl.,2002,23(5):42-45.(in Chinese with an English abstract)
[8]韩娟,段嘉友,张钧.大口径非球面主反射镜的装调方法研究[J].应用光学,2012,33(3):490-495.HAN Juan,DUAN Jia-you;ZHANG Jun.Align-ment method for large aperture aspheric mirror[J].Journal of Applied Optics,2012,33(3):490-495.(in Chinese with an English abstract)
[9]王红军,田爱玲,杜玉军.非球面最适球面的确定方法--三点法[J].应用光学,2004,25(4):63-65.WANG Hong-jun,TIAN Ai-ling,DU Yu-jun.De-termination of aspheric reference sphere by tri-pointmethod[J].Journal of Applied Optics,2004,25(4):63-65.(in Chinese with an English abstract)
[10]潘君骅.光学非球面的设计、加工与检验[M].苏州:苏州大学出版社,2004.PAN Jun-hua.The Design manufacture and test of theaspherical optical surfaces[M].Suzhou:Soochow Uni-versity Press,2004.(in Chinese)