可用于小口径光束波前检测的横向剪切干涉仪
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摘要
提出了一种可用于小口径光束波面检测的横向剪切干涉仪。该干涉仪由偏振分光棱镜、光轴与其表面平行的晶体平板、1/4波片、反射镜及CCD构成。被测光束由偏振分光棱镜进行透射起偏和反射检偏,利用反射镜的反射两次经过晶体平板、1/4波片来实现剪切光束的等光程干涉。通过晶体平板剪切复制波面以获得小的剪切量,可用于小口径光束波面的检测。晶体平板的旋转可以改变剪切量,实现了不同口径不同波前的光束波面检测。对该干涉仪进行了仿真分析,得到了不同入射角情况下的剪切干涉图,仿真结果与理论分析结果相一致。实验中,旋转晶体平板得到的剪切干涉图与仿真结果相一致,很好地验证了该剪切干涉仪的有效性。
A lateral shearing interfeometer for the wavefront test of small beam is proposed.The interferometer is composed of a polarization beam splitter,a crystal plate,aquarter-wave plate,a mirror and a CCD detector.The polarization beam splitter is used both as a polarizer and an analyzer.The interferometer can test wavefront of low coherent light for its equal optical path length.Small shearing amount can be obtained by the crystal plate whose optical axis is parallel to its surface,thus it′s suitable for the wavefront test of small beam.The shearing amount can be continuously adjusted by rotating the crystal plate.Using ASAP software,the lateral shearing interferometer is simulated.The simulation result is well coincident with the theoretical derivation.In the experiments,the interferometer is built to obtain interferogram by rotating the crystal plate.The experimental result is well coincident with the simulation result.The usefulness of the interferometer is verified.
A lateral shearing interfeometer for the wavefront test of small beam is proposed.The interferometer is composed of a polarization beam splitter,a crystal plate,aquarter-wave plate,a mirror and a CCD detector.The polarization beam splitter is used both as a polarizer and an analyzer.The interferometer can test wavefront of low coherent light for its equal optical path length.Small shearing amount can be obtained by the crystal plate whose optical axis is parallel to its surface,thus it′s suitable for the wavefront test of small beam.The shearing amount can be continuously adjusted by rotating the crystal plate.Using ASAP software,the lateral shearing interferometer is simulated.The simulation result is well coincident with the theoretical derivation.In the experiments,the interferometer is built to obtain interferogram by rotating the crystal plate.The experimental result is well coincident with the simulation result.The usefulness of the interferometer is verified.
引文
1 Ma Chuntao,Luo Hongxin,Wang Jie,et al..Surface erroer measurement of plane mirrors based on oblique incidence[J].Laser&Optoelectronics Progress,2011,48(7):071201.马春桃,罗红心,王劼,等.斜入射法检测平面反射镜的面形误差[J].激光与光电子学进展,2011,48(7):071201.
2 Zhao Qi,Jiang Zewei,He Yong,et al..Development and calibration of a radial-shearing interferometer[J].Laser&Optoelectronics Progress,2012,49(4):041204.赵琦,蒋泽伟,何勇,等.径向剪切干涉仪系统的研制与校准研究[J].激光与光电子学进展,2012,49(4):041204.
3 Zheng Xiaoyi,Wang Yurong,Wang Qingpu,et al..Measurement of optical inhomogeneity with dual-wavelength phase-shifting interferometry[J].Chinese J Lasers,2011,38(s1):s108008.郑箫逸,王玉荣,王青圃,等.采用双波长相移干涉测量光学非均匀性的研究[J].中国激光,2011,38(s1):s108008.
4 Dong Liu,Yongying Yang,Lin Wang,et al..Real time diagnosis of transient pulse laser with high repetition by radial shearing interferometer[J].Appl Opt,2007,46(34):8305-8314.
5 Jiang Zongfu,Xi Fengjie,Hou Jing,et al..Optical effects measurements in a low velocity turbulent jet[J].Chinese J Lasers,2004,31(8):943-946.姜宗福,习锋杰,侯静,等.低速湍流中的气动光学效应实验研究[J].中国激光,2004,31(8):943-946.
6 Luan Zhu,Liu Liren,Liu Dean,et al..Double-shearing wavefront testing[J].Acta Optica Sinica,2004,24(10):1417-1420.栾竹,刘立人,刘德安,等.双剪切波面干涉测量法[J].光学学报,2004,24(10):1417-1420.
7 Zeng Xin,Ding Jianping,Liang Peiying,et al..Wave front reconstruction from shearing interferograms using least square fitting[J].Acta Optica Sinica,2005,25(3):335-340.曾新,丁建平,梁佩莹,等.二维剪切干涉波前的最小二乘法重建[J].光学学报,2005,25(3):335-340.
8 Luan Zhu,Wang Lijuan,Zhou Yu,et al..Large-aperture lateral double shearing laser interferometer[J].Chinese J Lasers,2010,37 (s1):273-276.栾竹,王利娟,周煜,等.大口径横向双剪切激光干涉仪[J].中国激光,2010,37(s1):273-276.
9 M V R K Murty,The use of a single plane parallel plate as a lateral shearing interfeometer with a visible gas laser source[J].Appl Opt,1964,3(4):531-534.
10 Zheng Xin,Guo Xiuzhen,Xiong Xueshuang,et al..Real-time inspection of collimated light beam with small aperture[J].Journal of Jilin University,2006,44(2):246-249.郑欣,国秀珍,熊雪霜,等.小口径光束准直性的实时检测[J].吉林大学学报,2006,44(2):246-249.
11 ST Lin,S H Shih,H N Feng,et al..Phase-shifting Savart shearing interferometer[J].Opt Eng,2006,45(12):125602.
2 Zhao Qi,Jiang Zewei,He Yong,et al..Development and calibration of a radial-shearing interferometer[J].Laser&Optoelectronics Progress,2012,49(4):041204.赵琦,蒋泽伟,何勇,等.径向剪切干涉仪系统的研制与校准研究[J].激光与光电子学进展,2012,49(4):041204.
3 Zheng Xiaoyi,Wang Yurong,Wang Qingpu,et al..Measurement of optical inhomogeneity with dual-wavelength phase-shifting interferometry[J].Chinese J Lasers,2011,38(s1):s108008.郑箫逸,王玉荣,王青圃,等.采用双波长相移干涉测量光学非均匀性的研究[J].中国激光,2011,38(s1):s108008.
4 Dong Liu,Yongying Yang,Lin Wang,et al..Real time diagnosis of transient pulse laser with high repetition by radial shearing interferometer[J].Appl Opt,2007,46(34):8305-8314.
5 Jiang Zongfu,Xi Fengjie,Hou Jing,et al..Optical effects measurements in a low velocity turbulent jet[J].Chinese J Lasers,2004,31(8):943-946.姜宗福,习锋杰,侯静,等.低速湍流中的气动光学效应实验研究[J].中国激光,2004,31(8):943-946.
6 Luan Zhu,Liu Liren,Liu Dean,et al..Double-shearing wavefront testing[J].Acta Optica Sinica,2004,24(10):1417-1420.栾竹,刘立人,刘德安,等.双剪切波面干涉测量法[J].光学学报,2004,24(10):1417-1420.
7 Zeng Xin,Ding Jianping,Liang Peiying,et al..Wave front reconstruction from shearing interferograms using least square fitting[J].Acta Optica Sinica,2005,25(3):335-340.曾新,丁建平,梁佩莹,等.二维剪切干涉波前的最小二乘法重建[J].光学学报,2005,25(3):335-340.
8 Luan Zhu,Wang Lijuan,Zhou Yu,et al..Large-aperture lateral double shearing laser interferometer[J].Chinese J Lasers,2010,37 (s1):273-276.栾竹,王利娟,周煜,等.大口径横向双剪切激光干涉仪[J].中国激光,2010,37(s1):273-276.
9 M V R K Murty,The use of a single plane parallel plate as a lateral shearing interfeometer with a visible gas laser source[J].Appl Opt,1964,3(4):531-534.
10 Zheng Xin,Guo Xiuzhen,Xiong Xueshuang,et al..Real-time inspection of collimated light beam with small aperture[J].Journal of Jilin University,2006,44(2):246-249.郑欣,国秀珍,熊雪霜,等.小口径光束准直性的实时检测[J].吉林大学学报,2006,44(2):246-249.
11 ST Lin,S H Shih,H N Feng,et al..Phase-shifting Savart shearing interferometer[J].Opt Eng,2006,45(12):125602.