非球面数字波面检测技术
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摘要
提出了一种快速检测浅度非球面(非球面度小于0.01mm)的方法,该方法无需补偿器或其他辅助光学元件进行零位补偿。用移相干涉仪直接测量正轴或离轴的浅度凹非球面,剔除平移、倾斜、失焦等调整误差后,得到实际被测镜面的面形分布数据;根据正轴或离轴的浅度凹非球面矢高方程计算理想非球面的面形分布数据,得到理论波面数据,用实测的面形分布数据减去理论的面形分布数据即可得到被检非球面的剩余波像差,即面形误差。利用该方法测量了一口径为135mm的双曲面,并用零位补偿法加以验证。两种方法的检测结果精度相当,说明数字波面法可实际应用于正轴或离轴的浅度凹非球面的检测。
A method for fast testing aspheric surface with small asphericity(less than 0.01 mm) was proposed,which does not need compensation system or other optical elements.First the practical wavefront aberration was measured by phase-shifting interferometer,and the adjustment errors were eliminated.Then the theoretical wavefront aberration of aspheric surface on-axis or off-axis was calculated based on the equation of aspheric surface.At last the residual wavefront aberration(surface error) was obtained by subtracting the theoretical wavefront from practical wavefront.A hyperboloidal mirror with the diameter of 135 mm was measured by this method,meanwhile this mirror was tested by null compensation;the tested results by these two methods are similar.It concludes that the method of digital wavefront for testing aspheric surface is feasible.
A method for fast testing aspheric surface with small asphericity(less than 0.01 mm) was proposed,which does not need compensation system or other optical elements.First the practical wavefront aberration was measured by phase-shifting interferometer,and the adjustment errors were eliminated.Then the theoretical wavefront aberration of aspheric surface on-axis or off-axis was calculated based on the equation of aspheric surface.At last the residual wavefront aberration(surface error) was obtained by subtracting the theoretical wavefront from practical wavefront.A hyperboloidal mirror with the diameter of 135 mm was measured by this method,meanwhile this mirror was tested by null compensation;the tested results by these two methods are similar.It concludes that the method of digital wavefront for testing aspheric surface is feasible.
引文
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[2]BURGE J H,ANDERSON D S.Full-aperture inter-ferometric test of convex secondary mirrors usingholographic test plates[J].SPIE,1994,2199:181-190.
[3]WALKER D D,BEAUCAMP A T H,BINGHAMR G.The precessions process for efficient productionof aspheric optics for large telescopes and their in-strumentation[J].SPIE,2003,4842:73-84.
[4]王春霞,伍凡,侯德胜,等.计算机产生全息图对补偿器检测的技术研究[J].光子学报,2003,32(5):592-594.WANG Chun-xia,WU Fan,HOU De-sheng,et al.Research on testing the null corrector using the com-puter-generated hologram[J].Acta Photonica Sinica,2003,32(5):592-594.(in Chinese with an Englishabstract)
[5]潘君骅.光学非球面的设计、加工与检验[M].苏州:苏州大学出版社,2004.PAN Jun-hua.The design,manufacture and test ofthe aspherical optical surfaces[M].Suzhou:Soo-chow University Press,2004.(in Chinese)
[6]张以谟.应用光学[M].北京:电子工业出版社,2008.ZHANG Yi-mo.Applied optics[M].Beijing:Pub-lishing House of Electronics Industry,2008.(inChinese)
[7]王红军,田爱玲,杜玉军.非球面最适球面的确定方法——三点法[J].应用光学,2004,25(4):63-65.WANG Hong-jun,TIAN Ai-ling,DU Yu-jun.De-termination of aspheric reference sphere by tri-pointmethod[J].Journal of Applied Optics,2004,25(4):63-65.(in Chinese with an English abstract)
[8]MALACARA D.Optical shop testing[M].3rd ed.Hoboken:John Wiley&Sons,Inc,2007.
[9]王孝坤,王丽辉,张学军.干涉法实时测量浅度非球面技术[J].光学精密工程,2008,16(2):184-189.WANG Xiao-kun,WANG Li-hui,ZHANG Xue-jun.Testing of weak aspheric surface by real-time inter-ferometry[J].Optics and Precision Engineering,2008,16(2):184-189.(in Chinese with an Englishabstract)
[10]段存丽,田爱玲,陈志超.光学非球面器件检测新方法探究[J].应用光学,2004,25(5):62-66.DUAN Cun-li,TIAN Ai-ling,CHEN Zhi-chao.Simulation calculation of measuring optical asphericsurface based on light pattern projection[J].Journalof Applied Optics,2004,25(5):62-66.(in Chi-nese with an English abstract)