摘要
提出了一种快速检测浅度非球面(非球面度小于0.01mm)的方法,该方法无需补偿器或其他辅助光学元件进行零位补偿。用移相干涉仪直接测量正轴或离轴的浅度凹非球面,剔除平移、倾斜、失焦等调整误差后,得到实际被测镜面的面形分布数据;根据正轴或离轴的浅度凹非球面矢高方程计算理想非球面的面形分布数据,得到理论波面数据,用实测的面形分布数据减去理论的面形分布数据即可得到被检非球面的剩余波像差,即面形误差。利用该方法测量了一口径为135mm的双曲面,并用零位补偿法加以验证。两种方法的检测结果精度相当,说明数字波面法可实际应用于正轴或离轴的浅度凹非球面的检测。
A method for fast testing aspheric surface with small asphericity(less than 0.01 mm) was proposed,which does not need compensation system or other optical elements.First the practical wavefront aberration was measured by phase-shifting interferometer,and the adjustment errors were eliminated.Then the theoretical wavefront aberration of aspheric surface on-axis or off-axis was calculated based on the equation of aspheric surface.At last the residual wavefront aberration(surface error) was obtained by subtracting the theoretical wavefront from practical wavefront.A hyperboloidal mirror with the diameter of 135 mm was measured by this method,meanwhile this mirror was tested by null compensation;the tested results by these two methods are similar.It concludes that the method of digital wavefront for testing aspheric surface is feasible.
引文
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