长焦距测量系统的像差误差校正方法研究
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摘要
针对长焦距测量中被测透镜像差引入的焦距测量误差提出了一种校正方法。传统长焦距测量中使用高斯公式来计算被测透镜的焦距值,未考虑被测透镜像差引入的误差。在采用发散光作为测量光束的大口径光学元件焦距测量中,该误差成为了影响测量精度的重要因素。详细分析了基于发散光和泰伯效应的长焦距测量法,利用数值方法获得了误差修正值,并与Zemax的仿真结果进行了对比。利用Visual C++编程,实现了测量结果的自动校正功能。对名义焦距值为13500mm和31251mm透镜的测量数据分别进行校正后,其相对于名义焦距值的测量精度分别优于0.007%和0.022%。将校正后的测量精度与干涉仪法的测量精度进行了对比,结果充分说明了该方法是可靠和有效的。
A high accuracy calibration method for errors resulted from aberration in long focal length measurement,is presented.Generally,Gaussian equation is used for calculation without consideration of the errors caused by aberration.However,the errors become the key factor affecting the accuracy in the measurement system,based on divergent light,of a large aperture and long focal length lens.An effective way is proposed to calibrate the errors,with detailed analysis of the long focal length measurement based on divergent light and Talbot interferometry.Aberration errors are obtained by numerical method and compared with results simulated by Zemax.Then,autocorrection is achieved with the help of Visual C+ + software and the modified measurement results of 13500 mm focal length lens and 31251 mm focal length lens reveal that the relative accuracy is better than 0.007% and0.022%,respectively.By comparing the modified relative accuracy with relative accuracy obtained in interferometer measurement,the proposed method is proved to be highly effective and reliable.
A high accuracy calibration method for errors resulted from aberration in long focal length measurement,is presented.Generally,Gaussian equation is used for calculation without consideration of the errors caused by aberration.However,the errors become the key factor affecting the accuracy in the measurement system,based on divergent light,of a large aperture and long focal length lens.An effective way is proposed to calibrate the errors,with detailed analysis of the long focal length measurement based on divergent light and Talbot interferometry.Aberration errors are obtained by numerical method and compared with results simulated by Zemax.Then,autocorrection is achieved with the help of Visual C+ + software and the modified measurement results of 13500 mm focal length lens and 31251 mm focal length lens reveal that the relative accuracy is better than 0.007% and0.022%,respectively.By comparing the modified relative accuracy with relative accuracy obtained in interferometer measurement,the proposed method is proved to be highly effective and reliable.
引文
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12 Hou Changlun,Sun Chen,Bai Jian,et al..Long-focal length measurement based on Ronchi grating and Talbot interferometry[J].Acta Optica Sinica,2002,22(11):1328-1330.候昌伦,孙琛,白剑,等.基于龙基光栅塔尔博特效应的长焦距测量[J].光学学报,2002,22(11):1328-1330.
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14 Xiaorong Jin,Jinchun Zhang,Jian Bai,et al..Calibration method for high-accuracy measurement of long focal length with Talbot interferometry[J].Appl Opt,2012,51(13):2407-2413.
15 Li Xiaotong,Cen Zhaofeng.Geometrical Optics,Aberrations and Optical Design[M].Hangzhou:Zhejiang University Press,2003.6-7.李晓彤,岑兆丰.几何光学·相差·光学设计[M].杭州:浙江大学出版社,2003.6-7.
2 PSingh,M S Faridi,C Shakher,et al..Measurement of focallength with phase-shifting Talbot interferometry[J].Appl Opt,2005,44(9):1572-1576.
3 VI Meshcheryakov,M I Sinel′nikov,O K Filippov.Measuring the focal-lengths of long-focus optical systems[J].J Opt Technol,1991,66(5):458-459.
4 BDeboo,J Sasian.Precision focal-length measurement technique with a relative Fresnel-zone hologram[J].Appl Opt,2003,42(19):3903-3909.
5 B Deboo,J Sasian.Novel method for precise focal-length measurement[C].International Optical Design Conference,2002.IMCS5.
6 W Zhao,R Sun,L Qiu,et al..Laser differential confocal radius measurement[J].Opt Express,2010,18(3):2345-2360.
7 Zhu Xiangchang,Cao Xuedong,Wu Shibin,et al..Focal length of mircrlens by rotation method based on grating multislit diffraction[J].Acta Optica Sinica,2011,31(5):0523001.朱咸昌,曹学东,吴时彬,等.基于光栅多缝衍射的转角法测量微透镜[J].光学学报,2011,31(5):0523001.
8 Duan Yaxuan,Chen Yongquan,Zhao Jianke,et al..Focal length testing method of long focal length laser optical system[J].Chinese J Lasers,2013,40(4):0408005.段亚轩,陈永权,赵建科,等.长焦距激光光学系统焦距测试方法[J].中国激光,2013,40(4):0408005.
9 Y Nakano,K Murate.Talbot interferometry for measuring the small tilt angle variation of an object surface[J].Appl Opt,1986,25(15):2475-2477.
10 Y Nakano.Measurements of the small tilt-angle variation of an object surface using moire interferometry and digital image processing[J].Appl Opt,1987,26(8):3911-3914.
11 Hou Changlun,Sun Chen,Bai Jian,et al..Scanning method for focal length measurement of large aperture long focal mirror and lens[J].Acta Metrologica Sinica,2004,25(3):219-222.候昌伦,孙琛,白剑,等.大口径长焦距镜面和透镜的扫描法焦距测量技术[J].计量学报,2004,25(3):219-222.
12 Hou Changlun,Sun Chen,Bai Jian,et al..Long-focal length measurement based on Ronchi grating and Talbot interferometry[J].Acta Optica Sinica,2002,22(11):1328-1330.候昌伦,孙琛,白剑,等.基于龙基光栅塔尔博特效应的长焦距测量[J].光学学报,2002,22(11):1328-1330.
13 Li Yao,Bai Jian,Deng Yan,et al..Study on a wavefront detection system for long-focus lens by sun-wavefront scanning[J].Acta Optica Sinica,2010,30(9):2590-2595.李遥,白剑,邓燕,等.子波面扫描法长焦距透镜波面检测系统研究[J].光学学报,2010,30(9):2590-2595.
14 Xiaorong Jin,Jinchun Zhang,Jian Bai,et al..Calibration method for high-accuracy measurement of long focal length with Talbot interferometry[J].Appl Opt,2012,51(13):2407-2413.
15 Li Xiaotong,Cen Zhaofeng.Geometrical Optics,Aberrations and Optical Design[M].Hangzhou:Zhejiang University Press,2003.6-7.李晓彤,岑兆丰.几何光学·相差·光学设计[M].杭州:浙江大学出版社,2003.6-7.