Sn掺杂ZnO纳米结构湿度传感器的制备与特性
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摘要
首先采用水热法制备了四种不同Sn掺杂量的一维Zn1-xSnxO纳米结构材料,然后通过介电泳纳米操控技术将制备的四种纳米结构排布到预先设计的Ti/Au电极之间,进而构建四种湿度传感器,并进行传感特性测试。通过对四种传感结构的测试结果分析发现,采用原子数分数为3%的Sn掺杂ZnO纳米材料构建的传感器具有较好的传感特性,相对湿度在11.3%～97.3%内其最大灵敏度为7 397%,响应与恢复时间均为2 s。结合湿度多层吸附理论深入研究掺杂对湿度传感特性的影响。结果表明,通过Sn掺杂对纳米结构中载流子浓度以及晶格应变的调控,可以有效改善材料的电导与表面特性,提升Zn1-xSnxO纳米湿度传感器的灵敏度、响应与恢复时间和迟滞等传感特性。
Four kinds of one-dimensional Zn1-xSnxO nano-structure materials doped with different amounts of Sn were firstly prepared with the hydrothermal method.Then four nano-structures were arranged between the previously designed Ti/Au electrodes by using dielectrophoresis nanomanipulation technology.Subsequently,four kinds of humidity sensors were constructed,and the sensing characteristics were tested.By analyzing the test results of the four kinds of sensing structures,it is found that the sensor constructed with the ZnO nano-material doped with Sn atom fraction of 3% has excellent sensing properties,such as the maximum sensitivity of 7 397%and response/recovery time of 2 s/2 s for the relative humidity range of 11.3%-97.3%.Based on the humidity multi-layer adsorption mechanism,the influence of the doping on the humidity sensing properties was studied in depth.The results show that the conductivity and surface properties of the materials can be effectively improved by the regulation of the doping amount of Sn to the carrier concentration and lattice strain of the nano-structure.Therefore,the sensitivity,response time,recovery time,hysteresis and other sensing properties of the Zn1-xSnxO nano humidity sensors were improved.
Four kinds of one-dimensional Zn1-xSnxO nano-structure materials doped with different amounts of Sn were firstly prepared with the hydrothermal method.Then four nano-structures were arranged between the previously designed Ti/Au electrodes by using dielectrophoresis nanomanipulation technology.Subsequently,four kinds of humidity sensors were constructed,and the sensing characteristics were tested.By analyzing the test results of the four kinds of sensing structures,it is found that the sensor constructed with the ZnO nano-material doped with Sn atom fraction of 3% has excellent sensing properties,such as the maximum sensitivity of 7 397%and response/recovery time of 2 s/2 s for the relative humidity range of 11.3%-97.3%.Based on the humidity multi-layer adsorption mechanism,the influence of the doping on the humidity sensing properties was studied in depth.The results show that the conductivity and surface properties of the materials can be effectively improved by the regulation of the doping amount of Sn to the carrier concentration and lattice strain of the nano-structure.Therefore,the sensitivity,response time,recovery time,hysteresis and other sensing properties of the Zn1-xSnxO nano humidity sensors were improved.
引文
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[2]LI W,LIU J,DING C,et al.Fabrication of ordered SnO2nanostructures with enhanced humidity sensing performance[J].Sensors,2017,17(10):1-7.
[3]KAUR G,SAINI K,TRIPATHI A K,et al.Room temperature growth and field emission characteristics of CuO nanostructures[J].Vacuum,2017,139:136-142.
[4]ZHAO X,CHEN X,YU X,et al.Humidity-sensitive properties of TiO2nanorods grown between electrodes on Au interdigital electrode substrate[J].IEEE Sensors Journal,2015,17(19):6148-6152.
[5]GARDE A S.Humidity sensing properties of WO3,thick film resistor prepared by screen printing technique[J].Journal of Alloys&Compounds,2014,617:367-373.
[6]CHO Y,JI H,KIM H,et al.New insights into mechanism of surface reactions of ZnO nanorods during electrons beam irradiation[J].Journal of Nanoscience and Nanotechnology,2018,18(9):5996-6000.
[7]PRADEL K C,UZUHASHI J,TAKEI T,et al.Investigation of nanoscale voids in Sb-doped p-type ZnO nanowires[J].Nanotechnology,2018,29(33):1.
[8]LIU H,SHI L,LI D,et al.Rational design of hierarchical ZnO@Carbon nanoflower for high performance lithium ion battery anodes[J].Journal of Power Source,2018,387:64-71.
[9]TIT N,OCHMAN W,SHAHEEN A,et al.Selectivity of N-doped ZnO nano-ribbons in detecting H2,O2and CO2molecules:effect of negative-differential resistance on gas-sensing[J].Sensors and Actuators:B,2018,270:167-168.
[10]SHEN Z,ZHANG X,MI R,et al.On the high response towards TEA of gas sensors based on Ag-loaded3D porous ZnOmicrospheres[J].Sensors and Actuators:B,2018,270:492-499.
[11]YOO R,LI D,RIM H J,et al.High sensitivity in Al-doped ZnO nanoparticles for detection of acetaldehyde[J].Sensors and Actuators:B,2018,266:883-888.
[12]AGARWAL M B,SHARMA A,MALAIDURAI M,et al.Effect of Sn doping on structural,mechanical,optical and electrical properties of ZnO nanoarrays prepared by sol-gel and hydrothermal process[J].Superlattices and Microstructures,2018,117:342-350.
[13]BEURA R,PACHAIAPPAN R,THANGADURAI P,et al.A detailed study on Sn4+doped ZnO for enhanced photocatalytic degradation[J].Applied Surface Science,2018,433:887-898.
[14]HUANG C,TIAN X,LIU J,et al.The assembly and fabrication of single CuO nanowire electronic device based on controllable DWS-DEP technology[J].IEEE Transactions on Nanotechnology,2015,14(1):101-107.
[15]PARK H,KIM Y,JI I.Influence of Sn doping on structural and optical properties of zinc oxide nanorods prepared via hydrothermal process[J].Journal of Nanoscience and Nanotechnology,2014,14(11):8482-8488.
[16]ARSHAD M,QAYYUM A,ABBAS G,et al.Influence of different solvents on portrayal and photocatalytic activity of tin-doped zinc oxide nanoparticles[J].Journal of Molecular Liduds,2018,260:272-278.
[17]FAROOQ M,HUSSAIN R,IQBAL M,et al.Fabrication and magnetic properties of Sn-doped ZnO microstructures via hydrothermal method[J].Journal of Nanoscience and Nanotechnology,2016,16(1):898-902.
[18]TALA-LGHIL R,BENSOUICI F,LARAB B,et al.Optimized tin-doped and undoped zinc oxide thin layers for photovoltaic application[J].Optoelectronics and Advanced Materails-Rapid Communications,2017,11(5/6):332-336.
[19]ISMAIL A S,MAMAT M H,BANU I B S,et al.Modulation of Sn concentration in ZnO nanorod array:intensification on the conductivity and humidity sensing properties[J].Journal of Materials Science-Materials in Electronics,2018,29(14):12076-12088.
[20]姜慧娜,宋小军,刘伟景.纳米氧化铜尺寸效应对其湿度传感特性的影响[J].微纳电子技术,2018,55(9):630-634.
[21]WETCHAKUN K,SAMERJAI T,TAMAEKONG N,et al.Semiconducting metal oxides as sensors for environmentally hazardous gases[J].Sensors and Actuators:B,2011,160(1):580-591.
[22]YUPENG Z,YING Z,FU B,et al.Sodium titanate nanorod moisture sensor and its sensing mechanism[J].IEEE Electron Device Letters,2013,34(11):1424-1426.
[23]ALFA S,YOGENDRA K,KUSHAL M,et al.Controlled Zn1-xNixO nanostructures for an excellent humidity sensor and plausible sensing mechanism[J].New Journal of Chemietry,2018,42(11):8445-8457.