基于光学性能评价自由曲面离轴三反系统加工误差分析
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摘要
超精密加工过程存在的加工误差影响着器件的面形误差,进而影响光学性能。制造者往往从面形精度方面来评价加工精度,但是光学性能才是光学系统的最终评价指标,仅仅关注加工过程中加工误差对单个面的面形误差影响是不够的,加工误差对系统光学性能的影响需要进一步研究。基于多体系统理论和光线追迹理论建立了加工误差影响分析模型,探索了加工误差对面形误差和光学性能的影响,得出了系统主要的面形误差形式及其对系统调制传递函数(MTF)的影响关系,并根据系统对光学性能的要求得出了加工误差、面形误差和角度公差,从而找到了影响三反系统光学性能的重点加工误差,研究结果可为离轴三反系统加工误差的控制及光学质量可控制造的实现提供理论指导。
There are many machining errors in the ultra-precision machining process that affect the surface-shape error of devices,so they also affect the optical performance.Manufacturers always evaluate machining accuracy based on surface form accuracy.But optical performance is the final evaluated index for the optical system,so it is insufficient to evaluate the effect of the machining error on the surface-shape error of only one mirror in machining process.The effect of machining error on optical performance needs further research.Analysis model of machining error influence is established based on the multi-body system theory and the optical ray tracing theory.The effect of the machining errors on the surface-shape error and the optical performance is researched.The main form of the surface-shape error in the system and its influences on modulation transfer function(MTF)are obtained.Then,the tolerance of the machining errors,main surface-shape error and angle error are obtained based on the requirements of optical performance.The main machining errors are found,which affect the optical performances of three-mirror system.The results provide a theoretical support to the control of the main machining errors and the realization of the performance-controllable manufacture for the off-axis three-mirror system.
There are many machining errors in the ultra-precision machining process that affect the surface-shape error of devices,so they also affect the optical performance.Manufacturers always evaluate machining accuracy based on surface form accuracy.But optical performance is the final evaluated index for the optical system,so it is insufficient to evaluate the effect of the machining error on the surface-shape error of only one mirror in machining process.The effect of machining error on optical performance needs further research.Analysis model of machining error influence is established based on the multi-body system theory and the optical ray tracing theory.The effect of the machining errors on the surface-shape error and the optical performance is researched.The main form of the surface-shape error in the system and its influences on modulation transfer function(MTF)are obtained.Then,the tolerance of the machining errors,main surface-shape error and angle error are obtained based on the requirements of optical performance.The main machining errors are found,which affect the optical performances of three-mirror system.The results provide a theoretical support to the control of the main machining errors and the realization of the performance-controllable manufacture for the off-axis three-mirror system.
引文
[1]Xue Donglin,Zheng Ligong,Zhang Feng.Off-axis three-mirror system based on freeform mirror[J].Optics and Precision Engineering,2011,19(12):2813-2820.薛栋林,郑立功,张峰.基于光学自由曲面的离轴三反光学系统[J].光学精密工程,2011,19(12):2813-2820.
[2]Yang T,Zhu J,Hou W,et al.Design method of freeform off-axis reflective imaging systems with a direct construction process[J].Optics Express,2014,22(8):9193-9205.
[3]Chen Wei,Xue Chuang.Design of wide field-of-view off-axis three-mirror telescope for imaging spectrometer[J].Acta Photonica Sinica,2013,42(8):950-955.陈伟,薛闯.用于成像光谱仪的宽视场离轴三反望远镜设计[J].光子学报,2013,42(8):950-955.
[4]Gong G B,Wei J,Shen W M.Design of off-axis three-mirror system with Zernike surface[C].SPIE,2010,7544:754441.
[5]Hou W,Zhu J,Yang T,et al.Construction method through forward and reverse ray tracing for a design of ultra-wide linear field-of-view off-axis freeform imaging systems[J].Journal of Optics,2015,17(5):055603.
[6]Chen Zhe,Zhang Xingxiang,Chen Changzheng,et al.Coaxial and off-axial hybrid three-mirror optical system with long focal length[J].Chinese J Lasers,2016,43(4):0416002.陈哲,张星祥,陈长征,等.长焦距同离轴混合式三反光学系统[J].中国激光,2016,43(4):0416002.
[7]Zhu J,Hou W,Zhang X D,et al.Design of a low F-number freeform off-axis three-mirror system with rectangular field-of-view[J].Journal of Optics,2014,17(1):015605.
[8]Meng Q Y,Wang W,Ma H C,et al.Easy-aligned off-axis three-mirror system with wide field of view using freeform surface based on integration of primary and tertiary mirror[J].Applied Optics,2014,53(14):3028-3034.
[9]Gao Duorui,Hu Hui,Wang Wei,et al.Optical design for a kind of simply processed and installed off-axis threereflection[J].Chinese J Lasers,2015,42(6):0616001.高铎瑞,胡辉,汪伟,等.一种改进的易于加工、装调的离轴三反光学系统设计[J].中国激光,2015,42(6):0616001.
[10]Pang Zhihai.Study on computer aided alignment technology for off-axis optical system[D].Xi′an:Xi′an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,2013.庞志海.离轴反射光学系统计算机辅助装调技术研究[D].西安:中国科学院西安光学精密机械研究所,2013.
[11]Wang Hong,Hu Zhong.Tolerance analysis and research of multispectral optical imaging system[J].Optics&Optoelectronic Technology,2013,11(4):67-71.王红,胡忠.多光谱相机光学系统公差分析与研究[J].光学与光电技术,2013,11(4):67-71.
[12]Li Shengyi,Dai Yifan,Yin Ziqiang.Precision and ultra precision machine tool accuracy modeling technology[M].Changsha:National University of Defense Technology Press,2007.李圣怡,戴一帆,尹自强.精密和超精密机床精度建模技术[M].长沙:国防科技大学出版社,2007.
[13]Liu X L,Zhang X D,Fang F Z,et al.Influence of machining errors on form errors of microlens arrays in ultraprecision turning[J].International Journal of Machine Tools&Manufacture,2015,96:80-93.
[14]Tamkin J M,Milster T D,Dallas W.Theory of modulation transfer function artifacts due to mid-spatial-frequency errors and its application to optical tolerancing[J].Applied Optics,2010,49(25):4825-4835.
[15]Lawson J K,Aikens D M,English Jr R E,et al.Power spectral density specifications for high-power laser systems[C].SPIE,1996,2775:345-356.
[16]Tian Fei,Liu Xianlei,Zhang Xiaodong,et al.Influence of manufacture error on optical performance of micro lens array[J].Acta Optica Sinica,2016,36(2):0222002.田霏,刘现磊,张效栋,等.微透镜阵列加工误差对光学性能的影响[J].光学学报,2016,36(2):0222002.
[17]Zhang X D,Fang F Z,Wu Q Q,et al.Coordinate transformation machining of off-axis aspheric mirrors[J].International Journal of Advanced Manufacturing Technology,2013,67(9/12):2217-2224.
[18]Liu X,Zhang X,Fang F,et al.Identification and compensation of main machining errors on surface form accuracy in ultra-precision diamond turning[J].International Journal of Machine Tools&Manufacture,2016,105:45-57.
[19]Yudaoyin,Tan Hengying.Engineering optics[M].Beijing:China Machine Press,2006.郁道银,谈恒英.工程光学[M].北京:机械工业出版社,2006.
[2]Yang T,Zhu J,Hou W,et al.Design method of freeform off-axis reflective imaging systems with a direct construction process[J].Optics Express,2014,22(8):9193-9205.
[3]Chen Wei,Xue Chuang.Design of wide field-of-view off-axis three-mirror telescope for imaging spectrometer[J].Acta Photonica Sinica,2013,42(8):950-955.陈伟,薛闯.用于成像光谱仪的宽视场离轴三反望远镜设计[J].光子学报,2013,42(8):950-955.
[4]Gong G B,Wei J,Shen W M.Design of off-axis three-mirror system with Zernike surface[C].SPIE,2010,7544:754441.
[5]Hou W,Zhu J,Yang T,et al.Construction method through forward and reverse ray tracing for a design of ultra-wide linear field-of-view off-axis freeform imaging systems[J].Journal of Optics,2015,17(5):055603.
[6]Chen Zhe,Zhang Xingxiang,Chen Changzheng,et al.Coaxial and off-axial hybrid three-mirror optical system with long focal length[J].Chinese J Lasers,2016,43(4):0416002.陈哲,张星祥,陈长征,等.长焦距同离轴混合式三反光学系统[J].中国激光,2016,43(4):0416002.
[7]Zhu J,Hou W,Zhang X D,et al.Design of a low F-number freeform off-axis three-mirror system with rectangular field-of-view[J].Journal of Optics,2014,17(1):015605.
[8]Meng Q Y,Wang W,Ma H C,et al.Easy-aligned off-axis three-mirror system with wide field of view using freeform surface based on integration of primary and tertiary mirror[J].Applied Optics,2014,53(14):3028-3034.
[9]Gao Duorui,Hu Hui,Wang Wei,et al.Optical design for a kind of simply processed and installed off-axis threereflection[J].Chinese J Lasers,2015,42(6):0616001.高铎瑞,胡辉,汪伟,等.一种改进的易于加工、装调的离轴三反光学系统设计[J].中国激光,2015,42(6):0616001.
[10]Pang Zhihai.Study on computer aided alignment technology for off-axis optical system[D].Xi′an:Xi′an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,2013.庞志海.离轴反射光学系统计算机辅助装调技术研究[D].西安:中国科学院西安光学精密机械研究所,2013.
[11]Wang Hong,Hu Zhong.Tolerance analysis and research of multispectral optical imaging system[J].Optics&Optoelectronic Technology,2013,11(4):67-71.王红,胡忠.多光谱相机光学系统公差分析与研究[J].光学与光电技术,2013,11(4):67-71.
[12]Li Shengyi,Dai Yifan,Yin Ziqiang.Precision and ultra precision machine tool accuracy modeling technology[M].Changsha:National University of Defense Technology Press,2007.李圣怡,戴一帆,尹自强.精密和超精密机床精度建模技术[M].长沙:国防科技大学出版社,2007.
[13]Liu X L,Zhang X D,Fang F Z,et al.Influence of machining errors on form errors of microlens arrays in ultraprecision turning[J].International Journal of Machine Tools&Manufacture,2015,96:80-93.
[14]Tamkin J M,Milster T D,Dallas W.Theory of modulation transfer function artifacts due to mid-spatial-frequency errors and its application to optical tolerancing[J].Applied Optics,2010,49(25):4825-4835.
[15]Lawson J K,Aikens D M,English Jr R E,et al.Power spectral density specifications for high-power laser systems[C].SPIE,1996,2775:345-356.
[16]Tian Fei,Liu Xianlei,Zhang Xiaodong,et al.Influence of manufacture error on optical performance of micro lens array[J].Acta Optica Sinica,2016,36(2):0222002.田霏,刘现磊,张效栋,等.微透镜阵列加工误差对光学性能的影响[J].光学学报,2016,36(2):0222002.
[17]Zhang X D,Fang F Z,Wu Q Q,et al.Coordinate transformation machining of off-axis aspheric mirrors[J].International Journal of Advanced Manufacturing Technology,2013,67(9/12):2217-2224.
[18]Liu X,Zhang X,Fang F,et al.Identification and compensation of main machining errors on surface form accuracy in ultra-precision diamond turning[J].International Journal of Machine Tools&Manufacture,2016,105:45-57.
[19]Yudaoyin,Tan Hengying.Engineering optics[M].Beijing:China Machine Press,2006.郁道银,谈恒英.工程光学[M].北京:机械工业出版社,2006.