基于飞秒激光成丝的大幅面激光打标方法
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摘要
为了解决激光打标系统中聚焦透镜焦深短等原因导致的系统打标范围小等问题,提出了一种基于飞秒激光成丝效应进行大幅面激光打标的方法,系统地分析了打标范围和分辨率。实验结果表明:飞秒激光成丝可以有效地增大焦深,实现大幅面平面样品的打标以及曲面样品的打标,并在打标系统的有效工作范围内,使分辨率均匀性得到了提高。
In the conventional laser marking systems, the marking area is usually limited due to the short focal length. Herein, an alternative method is proposed to pursue large-area marking based on femtosecond laser filamentation, and the marking range and resolution are analyzed in detail. The experimental results show that the femtosecond laser filamentation can effectively increase the focal depth and complete marking on large-area flat or curved surface samples. Furthermore, the resolution uniformity is improved within the effective working range of the marking system.
In the conventional laser marking systems, the marking area is usually limited due to the short focal length. Herein, an alternative method is proposed to pursue large-area marking based on femtosecond laser filamentation, and the marking range and resolution are analyzed in detail. The experimental results show that the femtosecond laser filamentation can effectively increase the focal depth and complete marking on large-area flat or curved surface samples. Furthermore, the resolution uniformity is improved within the effective working range of the marking system.
引文
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[11] Duocastella M,Arnold C B.Bessel and annular beams for materials processing[J].Laser & Photonics Reviews,2012,6(5):607-621.
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[13] Kohno M,Matsuoka Y.Microfabrication and drilling using diffraction-free pulsed laser beam generated with axicon lens[J].JSME International Journal Series B,2004,47(3):497-500.
[14] Xu S Q.Study of intensity clamping during femtosecond laser filamentation[D].Tianjin:Nankai University,2012.徐圣奇.飞秒激光成丝现象中光强钳制效应研究[D].天津:南开大学,2012.
[15] Moloney J V,Newell A C.Nonlinear optics[J].Physica D:Nonlinear Phenomena,1990,44(1/2):1-37.
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[17] Talebpour A,Abdel-Fattah M,Chin S L.Focusing limits of intense ultrafast laser pulses in a high pressure gas:road to new spectroscopic source[J].Optics Communications,2000,183(5/6):479-484.
[18] Feit M D,Fleck J A,Jr.Effect of refraction on spot-size dependence of laser-induced breakdown[J].Applied Physics Letters,1974,24(4):169-172.
[19] Liu W,Hosseini A,Luo Q,et al.Experimental observation and simulations of the self-action of white light laser pulse propagating in air[J].New Journal of Physics,2004,6:6.
[20] Ak?zbek N,Scalora M,Bowden C M,et al.White-light continuum generation and filamentation during the propagation of ultra-short laser pulses in air[J].Optics Communications,2001,191(3/4/5/6):353-362.
[21] Chin S L,Liu W W,Théberge F,et al.Some fundamental concepts of femtosecond laser filamentation[M]//Progress in Ultrafast Intense Laser Science III.Berlin,Heidelberg:Springer Berlin Heidelberg,2008:243-264.
[22] Daigle J F,Kosareva O,Panov N,et al.A simple method to significantly increase filaments′ length and ionization density[J].Applied Physics B,2009,94(2):249-257.
[23] Luo Q,Liu W,Chin S L.Lasing action in air induced by ultra-fast laser filamentation[J].Applied Physics B:Lasers and Optics,2003,76(3):337-340.
[24] Fu M M,Chen P F,Wang Y,et al.Optical design of super wide angle f-theta lens with large operation area[J].Journal of Applied Optics,2011,32(6):1083-1087.付敏敏,陈培锋,王英,等.超广角大工作面f-theta镜头的光学设计[J].应用光学,2011,32(6):1083-1087.
[2] Klein-Wiele J H,Bekesi J,Simon P.Sub-micron patterning of solid materials with ultraviolet femtosecond pulses[J].Applied Physics A,2004,79(4/5/6):775-778.
[3] Wang X L,Lu P X,Dai N L,et al.Femtosecond laser direct fabrication of metallic microcantilevers for a micro-corrosion-fatigue test[J].Journal of Micromechanics and Microengineering,2007,17(7):1307-1313.
[4] Pavlov I,Tokel O,Pavlova S,et al.Femtosecond laser written waveguides deep inside silicon[J].Optics Letters,2017,42(15):3028-3031.
[5] Chen G Y,Piantedosi F,Otten D,et al.Femtosecond-laser-written microstructured waveguides in BK7 glass[J].Scientific Reports,2018,8:10377.
[6] Kawata S,Sun H B,Tanaka T,et al.Finer features for functional microdevices[J].Nature,2001,412(6848):697-698.
[7] Zhou Y F,Zhao H F,Huang Z Q.Laser lithography system and its technological research[J].Electronic Design Engineering,2011,19(2):126-129.周永飞,赵海峰,黄子强.激光打标系统及工艺研究[J].电子设计工程,2011,19(2):126-129.
[8] Xu B Z,Liu T G,Wang M,et al.Research on laser marking technology for free-form surface[J].Chinese Journal of Lasers,2010,37(8):2165-2169.许宝忠,刘铁根,王萌,等.空间自由曲面激光标刻技术研究[J].中国激光,2010,37(8):2165-2169.
[9] Su R W.Design and implementation of 3D laser flexible marking system[D].Dalian:Dalian University of Technology,2014.苏荣伟.三维柔性激光打标系统的设计与实现[D].大连:大连理工大学,2014.
[10] Durnin J,Miceli J J,Eberly J H.Diffraction-free beams[J].Physical Review Letters,1987,58(15):1499-1501.
[11] Duocastella M,Arnold C B.Bessel and annular beams for materials processing[J].Laser & Photonics Reviews,2012,6(5):607-621.
[12] Sadao M R.Side lobe suppression of a Bessel beam for high aspect ratio laser processing[J].Precision Engineering,2015,39:79-85.
[13] Kohno M,Matsuoka Y.Microfabrication and drilling using diffraction-free pulsed laser beam generated with axicon lens[J].JSME International Journal Series B,2004,47(3):497-500.
[14] Xu S Q.Study of intensity clamping during femtosecond laser filamentation[D].Tianjin:Nankai University,2012.徐圣奇.飞秒激光成丝现象中光强钳制效应研究[D].天津:南开大学,2012.
[15] Moloney J V,Newell A C.Nonlinear optics[J].Physica D:Nonlinear Phenomena,1990,44(1/2):1-37.
[16] Levenson M.The principles of nonlinear optics[J].IEEE Journal of Quantum Electronics,1985,21(4):400.
[17] Talebpour A,Abdel-Fattah M,Chin S L.Focusing limits of intense ultrafast laser pulses in a high pressure gas:road to new spectroscopic source[J].Optics Communications,2000,183(5/6):479-484.
[18] Feit M D,Fleck J A,Jr.Effect of refraction on spot-size dependence of laser-induced breakdown[J].Applied Physics Letters,1974,24(4):169-172.
[19] Liu W,Hosseini A,Luo Q,et al.Experimental observation and simulations of the self-action of white light laser pulse propagating in air[J].New Journal of Physics,2004,6:6.
[20] Ak?zbek N,Scalora M,Bowden C M,et al.White-light continuum generation and filamentation during the propagation of ultra-short laser pulses in air[J].Optics Communications,2001,191(3/4/5/6):353-362.
[21] Chin S L,Liu W W,Théberge F,et al.Some fundamental concepts of femtosecond laser filamentation[M]//Progress in Ultrafast Intense Laser Science III.Berlin,Heidelberg:Springer Berlin Heidelberg,2008:243-264.
[22] Daigle J F,Kosareva O,Panov N,et al.A simple method to significantly increase filaments′ length and ionization density[J].Applied Physics B,2009,94(2):249-257.
[23] Luo Q,Liu W,Chin S L.Lasing action in air induced by ultra-fast laser filamentation[J].Applied Physics B:Lasers and Optics,2003,76(3):337-340.
[24] Fu M M,Chen P F,Wang Y,et al.Optical design of super wide angle f-theta lens with large operation area[J].Journal of Applied Optics,2011,32(6):1083-1087.付敏敏,陈培锋,王英,等.超广角大工作面f-theta镜头的光学设计[J].应用光学,2011,32(6):1083-1087.