大口径标准平面镜主动校正仿真分析
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摘要
为了让大口径标准平面镜能在多个不同工作状态下均能保持良好面形,采用主动校正的方法对重力引起的镜面支撑变形进行校正。整个支撑系统由主动校正系统和被动支撑系统组成,通过轴向支撑和侧向支撑相结合的被动支撑方式使标准平面镜保持平衡;当工作状态改变时,通过泽尼克拟合建立刚度矩阵,结合实际测得面形与最小二乘法计算校正力,将得到的相应的主动校正力作为第二级加载在轴向的支撑点上,使镜面面形恢复。仿真结果表明,不考虑镜子本身的加工误差,镜面改变45°时,主动支撑可将重力引起的面形误差从初始的RMS=λ/8(λ=632.8 nm)校正到λ/74;镜面改变90°时,主动支撑能将重力引起的面形误差从初始RMS=λ/6校正到λ/70。这种主动支撑方法能降低大口径标准平面镜在不同工作状态下引起的支撑变形,为大口径标准镜在多种工作状态下都能保持良好面形提供了依据。
In order to keep a good surface-profile in many different conditions,active correction is carried out to correct the surface-profile error of the large-aperture standard planar mirror. The support system consists of an active correction system and a passive support system. The mirror is balanced by a passive support system combining axial support and lateral support. When mirror's conditions changes,the active corrective forces are calculated by establishing stiffness matrix by Zerniker Polynomials and using the least square method. Then surface-profile of the mirror will be corrected by loading the active corrective forces on axial support. Regardless of the production error of the mirror and consider the influence by gravity,The simulation results show that When the mirror working in 45°,the surface-profile error can be corrected from the initial RMS=λ/8(λ=632.8 nm)to λ/74.When it works horizontally,the surface-profile error can be corrected from the initial RMS=λ/6 to λ/70.The simulation results show that the active support method can keep a good surface-profile of large-aperture standard planar mirror in different conditions. It provides a basis that large-aperture standard planar mirror can maintain good surface-profile in many working conditions.
In order to keep a good surface-profile in many different conditions,active correction is carried out to correct the surface-profile error of the large-aperture standard planar mirror. The support system consists of an active correction system and a passive support system. The mirror is balanced by a passive support system combining axial support and lateral support. When mirror's conditions changes,the active corrective forces are calculated by establishing stiffness matrix by Zerniker Polynomials and using the least square method. Then surface-profile of the mirror will be corrected by loading the active corrective forces on axial support. Regardless of the production error of the mirror and consider the influence by gravity,The simulation results show that When the mirror working in 45°,the surface-profile error can be corrected from the initial RMS=λ/8(λ=632.8 nm)to λ/74.When it works horizontally,the surface-profile error can be corrected from the initial RMS=λ/6 to λ/70.The simulation results show that the active support method can keep a good surface-profile of large-aperture standard planar mirror in different conditions. It provides a basis that large-aperture standard planar mirror can maintain good surface-profile in many working conditions.
引文
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[15] ZHANG Yufang,LI Guoping.Design of voice coil force actuators in thin mirror active optical system[J].Optical and Precision Engineering,2013,21(11):2836-2843.(in Chinese)张玉方,李国平.用于薄镜面主动光学的音圈力促动器设计[J].光学精密工程,2013,21(11):2836-2843.
[16] HU Jianing.Study on corrected technology of large aperture primary mirror based on SiC thick mirror[D].Beijing:University of Chinese Academy of Science.2016.(in Chinese)胡佳宁.基于SiC厚镜的大口径主镜面形校正技术的研究[D].北京:中国科学院大学,2016.
[2] FAN Yong,CHEN Niannian,ZHANG Jinfeng.Topography measurement system of large flat mirror[J].Computer Measurment & Control.2010,18(4):785-790.(in Chinese)范勇,陈念年,张劲峰.大口径光学平面镜面形检测系统初步研究[J].计算机测量与控制,2010,18(4):785-790.
[3] LIU Yongqi,WU Jinghu,HU Mingyong,et,al.Research on support system for 1.5m aperture mirror[J].Optical Technology,2011,37(4):429-432.(in Chinese)刘永奇,吴金虎,胡明勇,等.1.5级大口径标准镜面支撑系统的研究[J].光学技术,2011,37(4):429-432.
[4] CHEN Fulin.Research on the active support of 620mm thin meniscus mirror[D].Beijing:University of Chinese Academy of Science.2012.(in Chinese)陈夫林.620mm弯月形薄镜主动光学支撑研究[D].北京:中国科学院大学,2012.
[5] WANG Fuguo,WU Xiaoxia,SHAO Liang,et,al.Review of foreign ground-based telescope primary mirror support[J].Laser﹠Infrared.2012,42(3):237-243.(in Chinese)王富国,吴小霞,邵亮,等.国外大型地基望远镜主镜支撑综述[J].激光与红外,2012,42(3):237-243.
[6] LI Hongzhuang,LIN Xudong,LIU Xinyue,et,al.Experiment system of 400mm thin-mirror active optics[J].Optical and Precision Engineering,2009,17(9):2077-2082.(in Chinese)李宏壮,林旭东,刘欣悦,等.400mm薄镜面主动光学实验系统[J].光学精密工程,2009,17(9):2077-2082.
[7] LI Hongzhuang,ZHANG Jingxu,ZHANG Zhangzhenduo,et,al.Correction experiment of 620mm thin mirror active optics telescope[J].Infrared and Laser Engineering,2014,43(1):167-171.(in Chinese)李宏壮,张景旭,张振铎,等.620mm薄镜面主动光学望远镜校正实验[J].红外与激光工程,2014,43(1):167-171.
[8] Su D Q,Jiang S T,Zou W Y.Experiment system of thin-mirror active optics[J].Proceeding of SPIE-The International Society for Optical Engineering,1994,2199:609-621.
[9] Wilson R N,Franza F,Noethe L.Active optics system for optimizing the optical quality and reducing the costs of large telescopes[J].Journal of Modern Optics,1987,34(4):485-509.
[10] D G Holloway.The physical properties of glass[M].You E P,Transl.Beijing:Light Industry Press,1985.(in Chinese)D G霍洛威.玻璃的物理性质[M].游恩溥,等译.北京:轻工业出版社,1985.
[11] LIU Tingyu.Research on flexure mounts for a 1.23m SiC lightweight primary mirror[D].Beijing:University of Chinese Academy of Science.2012.(in Chinese)刘婷毓.1.23m SiC轻量化主镜柔性支撑技术的研究[D].北京:中国科学院大学,2012.
[12] WU Xiaoxia,LI Jianfeng,et al.Active support system for 4m SiC lightweight primary mirror[J].Optical and Precision Engineering,2014,22(9):2452-2456.(in Chinese)吴小霞,李剑锋,等.4mSiC轻量化主镜的主动支撑系统[J].光学精密工程,2014,22(9):2452-2456.
[13] 梁奕瑾.长焦距真空平行光管像差测量及标定方法[D].南京:南京理工大学,2016.
[14] TIAN Hailei,WANG Yuefeng,Zhang W.Design of the off-axis parabolic reflective infrared collimator[J].Infrared Technology,2007,29(12):701-707.(in Chinese)田海雷,汪岳峰,张伟.离轴抛物面反射式红外平行光管设计[J].红外技术,2007,29(12):701-707.
[15] ZHANG Yufang,LI Guoping.Design of voice coil force actuators in thin mirror active optical system[J].Optical and Precision Engineering,2013,21(11):2836-2843.(in Chinese)张玉方,李国平.用于薄镜面主动光学的音圈力促动器设计[J].光学精密工程,2013,21(11):2836-2843.
[16] HU Jianing.Study on corrected technology of large aperture primary mirror based on SiC thick mirror[D].Beijing:University of Chinese Academy of Science.2016.(in Chinese)胡佳宁.基于SiC厚镜的大口径主镜面形校正技术的研究[D].北京:中国科学院大学,2016.