晶硅太阳电池多层减反射膜设计与分析
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摘要
采用等效界面概念,通过导纳矩阵法,建立晶硅太阳电池多层膜模型,利用PC1D进行仿真设计研究,优化多层膜各层的厚度、折射率等参数,给出了多层膜的设计方法,得出优化后的多层膜参数。通过对一、二、三层膜优化设计及仿真对比,表明三层膜在单层膜的基础上使电池功率提高1.81%,为实际电池的工艺改进和性能提升提供了一种方法。
Adopting the concept of equivalent interface, the multilayer model of crystalline silicon solar cell was established by admittance matrix method. The simulation design of PC1 D is used to optimize the thickness and refractive index of each layer of multilayer. It gives the design method of multilayer and obtains parameters of multilayer after optimization. The results of optimization design and comparative simulation analysis of single, double,three layers cell show that the three-layer film can improve the solar cell power by 1.81% on the basis of the monolayer film cell, which provides a method for improving the process and the performance of the solar cell.
Adopting the concept of equivalent interface, the multilayer model of crystalline silicon solar cell was established by admittance matrix method. The simulation design of PC1 D is used to optimize the thickness and refractive index of each layer of multilayer. It gives the design method of multilayer and obtains parameters of multilayer after optimization. The results of optimization design and comparative simulation analysis of single, double,three layers cell show that the three-layer film can improve the solar cell power by 1.81% on the basis of the monolayer film cell, which provides a method for improving the process and the performance of the solar cell.
引文
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[3] IMAIZUMI M, ITO T. Effect of grain size and dislocation density on the performance of thin film polycrystalline silicon solar cells[J].Journal of Applied Physics, 1997, 81(11):7635-7640.
[4] LELIEVRE J F, KAMINSKI A, BOYEAUX J P, et al. Optical properties of PECVD and UVCVD SiNx:H antireflection coatings for silicon solar cells[C]//Conference Record of the IEEE Photovoltaic Specialists Conference. Washington DC, USA:IEEE,2005:1111-1114.
[5]卢进军,刘卫国,潘永强.光学薄膜技术[M].西安:西北工业大学出版社,2005:4-5.
[6]杨文华,吴鼎祥.空间高效硅太阳电池减反射膜设计与数值分析[J].半导体学报,2004(9):1118-1122.
[7] JIANG C, LI T Z. Simulation of silicon solar cell using PCID[J].Advanced Materials Research, 2012, 383/390:7032-7036.
[8]刘志平.双层氮化硅减反膜晶体硅太阳能电池的研究[D].北京:北京交通大学,2011:64-67.
[9]孙占峰,王伟.三层氮化硅减反射膜的工艺研究[J].科技资讯,2014(19):4.
[10] LIANG Z C,CHEN D M.Study on the SiNx/Al rear reflectance performance of crystalline silicon solar cells[J]. Science China(Technological Sciences), 2010(12):3209-3213.