三叶转子罗茨真空泵内气体过程的热力学计算
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摘要
本文以三叶转子罗茨泵为研究对象,从其基本结构和工作原理出发,对泵内被抽气体的输运过程进行热力学分析。对被抽气体在泵内经历的过程作时序分析,将其分解为吸气、输运、反冲、排气四个阶段,详细讨论各个阶段的特点和机理。应用热力学基本原理,建模计算气体返流量,对吸气、输运、排气进行定量分析,得到被抽气体的压强、容积、总质量、总内能等热力学参数随时间变化的计算公式;探究排气功率与进出口压力之间的关系。
In this paper, the trilobal Roots pump is taken as the research object, starting from its basic structure and working principle, its internal gas transport process was analyzed thermodynamically. Taking the gas as the research object, the time sequence analysis was carried out, and the process of the gas in the pump was decomposed into intake, transport, recoil,discharge, and discussing the characteristics and mechanism of each stage in detail. The knowledge of thermodynamics and the amount of backflow were taken into account. Calculating gas backflow through model. The quantitative analysis of each phase was carried out, and the time-variation formulas of thermodynamic parameters were deduced, such as pressure, volume, mass, and internal energy. The formula was used to explore the relationship between exhaust power and import and export pressure.
In this paper, the trilobal Roots pump is taken as the research object, starting from its basic structure and working principle, its internal gas transport process was analyzed thermodynamically. Taking the gas as the research object, the time sequence analysis was carried out, and the process of the gas in the pump was decomposed into intake, transport, recoil,discharge, and discussing the characteristics and mechanism of each stage in detail. The knowledge of thermodynamics and the amount of backflow were taken into account. Calculating gas backflow through model. The quantitative analysis of each phase was carried out, and the time-variation formulas of thermodynamic parameters were deduced, such as pressure, volume, mass, and internal energy. The formula was used to explore the relationship between exhaust power and import and export pressure.
引文
[1]赵永东,单忠臣,穆乃旺.三叶罗茨泵转子的型线设计与VBA参数化编程绘图[J].应用科技,2002(01):1-3.
[2]Wang P Y,Fong Z H,Fang H S.Design constraints of five-arc Roots vacuum pumps[J].Proceedings of the Institution of Mechanical Engineers-Part C,2002,216(2):225-234.
[3]秦丽秋,刘玉岱.罗茨泵圆弧转子型线研究[J].真空,1990(01):32-39.
[4]戴映红,钟云会,黄智敏,等.三叶转子气冷式罗茨真空泵的流场数值分析[J].真空,2010,4706:37-40.
[5]王超,高逊懿,罗根松,等.机械真空泵噪声机理研究与控制[J].真空科学与技术学报,2017,37(10):939-945.
[6]杨华飞,董秀娇,罗根松,等.罗茨泵噪声测量方法研究[J].真空,2013,50(01):80-83.
[7]陈晓东,陈心昭,陆益民,等.罗茨真空泵振动噪声机理的研究[J].合肥工业大学学报(自然科学版),2002(06):1101-1106.
[8]陈晓东,李志远,陈心昭,等.罗茨真空泵噪声源识别的实验研究[J].真空科学与技术,2001(06):46-49.
[9]陈长琦,王旭迪.罗茨泵径向间隙泄漏量的研究与建模[J].流体机械,2002(11):29-31.
[10]郭梁,赵俊生,郭彦青.大泄漏率真空设备抽漏气理论计算[J].真空科学与技术学报,2017,37(11):1044-1049.
[11]杨乃恒.真空获得设备(第一版)[M],北京:冶金工业出版社,1987,76-99.
[2]Wang P Y,Fong Z H,Fang H S.Design constraints of five-arc Roots vacuum pumps[J].Proceedings of the Institution of Mechanical Engineers-Part C,2002,216(2):225-234.
[3]秦丽秋,刘玉岱.罗茨泵圆弧转子型线研究[J].真空,1990(01):32-39.
[4]戴映红,钟云会,黄智敏,等.三叶转子气冷式罗茨真空泵的流场数值分析[J].真空,2010,4706:37-40.
[5]王超,高逊懿,罗根松,等.机械真空泵噪声机理研究与控制[J].真空科学与技术学报,2017,37(10):939-945.
[6]杨华飞,董秀娇,罗根松,等.罗茨泵噪声测量方法研究[J].真空,2013,50(01):80-83.
[7]陈晓东,陈心昭,陆益民,等.罗茨真空泵振动噪声机理的研究[J].合肥工业大学学报(自然科学版),2002(06):1101-1106.
[8]陈晓东,李志远,陈心昭,等.罗茨真空泵噪声源识别的实验研究[J].真空科学与技术,2001(06):46-49.
[9]陈长琦,王旭迪.罗茨泵径向间隙泄漏量的研究与建模[J].流体机械,2002(11):29-31.
[10]郭梁,赵俊生,郭彦青.大泄漏率真空设备抽漏气理论计算[J].真空科学与技术学报,2017,37(11):1044-1049.
[11]杨乃恒.真空获得设备(第一版)[M],北京:冶金工业出版社,1987,76-99.