渗氮处理对Zr4合金表面TiAlSiN涂层性能的影响
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摘要
采用多弧离子镀技术在表面经过渗氮处理的Zr4合金基体上制备Ti Al Si N涂层。利用扫描电镜对涂层进行表面和截面的微观形貌观察;利用自动划痕仪对涂层的力学性能进行检测;利用高温热处理炉对涂层进行800℃高温抗氧化和1200℃高温淬火试验;利用X射线衍射仪对涂层进行物相分析。结果表明:Zr4合金渗氮处理后,涂层与渗氮层之间膜层分明,且涂层厚度均匀,涂层表面有少许大颗粒物质存在;膜基结合力约为28 N;涂层短时间内高温抗氧化性能较好;当渗氮剂量达到一定值后,会有Zr N物相生成。
TiAlSiN coating was deposited on nitrided Zr4 alloy surface by multi-arc ion plating. Surface and cross-section micromorphology of the coating were observed by scanning electron microscope. Mechanical properties of the coating were tested by an automatic scratch tester.High temperature oxidation resistance test at 800 ℃ and quenching test at 1200 ℃ of the coating were carried out by high temperature heat treatment furnace. And phases of the coating were analyzed by X-ray diffractometer. The results show that after Zr4 alloy nitrided,the film between the coating and the nitride layer can be clearly seen,and the coating thickness is uniform,and there is a large amount of granular material on the surface of the coating. The bonding force between substrate and coating is about 28 N,and high temperature oxidation resistance of the coating in short time is better. When the nitriding dose reaches a certain value,the Zr N phase can be formed.
TiAlSiN coating was deposited on nitrided Zr4 alloy surface by multi-arc ion plating. Surface and cross-section micromorphology of the coating were observed by scanning electron microscope. Mechanical properties of the coating were tested by an automatic scratch tester.High temperature oxidation resistance test at 800 ℃ and quenching test at 1200 ℃ of the coating were carried out by high temperature heat treatment furnace. And phases of the coating were analyzed by X-ray diffractometer. The results show that after Zr4 alloy nitrided,the film between the coating and the nitride layer can be clearly seen,and the coating thickness is uniform,and there is a large amount of granular material on the surface of the coating. The bonding force between substrate and coating is about 28 N,and high temperature oxidation resistance of the coating in short time is better. When the nitriding dose reaches a certain value,the Zr N phase can be formed.
引文
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[18]刘文,梁文萍,缪强,等.TC21合金表面Al-Cr涂层的制备及其高温抗氧化性[J].南京航空航天大学学报,2015,47(5):702-708.Liu Wen,Liang Wenping,Miu Qiang,et al.Preparation and oxidation resistance of Al-Cr composite coating on TC21 alloy surface[J].Journal of Nanjing University of Aeronautics and Astronautics,2015,47(5):702-708.
[2]范清松,杨忠波,赵文金,等.Sn和Nb对Zr-Sn-Nb-Fe锆合金第二相粒子的影响[J].热加工工艺,2014,43(11):1-4.Fan Qingsong,Yang Zhongbo,Zhao Wenjin,et al.Effects of Sn and Nb on second phase particles of Zr-Sn-Nb-Fe zirconium alloy[J].Hot Working Technology,2014,43(11):1-4.
[3]吴华,范洪远,应诗浩,等.表面处理对锆合金性能的影响[J].金属热处理,2006,31(1):17-19.Wu Hua,Fan Hongyuan,Ying Shihao,et al.Effect of surface treatment on the properties of zirconium alloys[J].Heat Treatment of Metals,2006,31(1):17-19.
[4]罗扬,林庆选.锆合金860705的表面渗氮处理[J].金属热处理,2014,39(12):64-66.Luo Yang,Lin Qingxuan.Surface nitriding treatment of zirconium alloy860705[J].Heat Treatment of Metals,2014,39(12):64-66.
[5]王欣.激光表面改性核电Zr-1Nb合金的组织与性能研究[D].北京:北京工业大学,2014.
[6]文强.激光熔凝复合处理对核燃料包壳Zr-1Nb合金微观组织与耐蚀性能的影响[D].北京:北京工业大学,2015.
[7]张立杰,范洪远,应诗浩,等.锆合金氧化膜研究进展[J].材料导报,2006,20(S2):422-424.Zhang Lijie,Fan Hongyuan,Ying Shihao,et al.Progress in study on zircaloy oxide film[J].Materials Review,2006,20(S2):422-424.
[8]王浩然,邱长军.锆合金表面技术的研究进展[J].世界有色金属,2016(18):46-47.Wang Haoran,Qiu Changjun.Research trend of zirconium alloy surface technologies[J].World Nonferrous Metals,2016(18):46-47.
[9]胡汝骞,樊湘芳,丰振东,等.Zr4合金离子氮化和软氮化表面处理的研究[J].热加工工艺,2016(14):130-132.Hu Ruqian,Fan Xiangfang,Feng Zhendong,et al.Research on Zr4alloy after Ion nitriding and soft nitriding surface treatment[J].Hot Working Technology,2016(14):130-132.
[10]Tang G,Choi B H,Kim W,et al.The characteristics of surface oxidation and corrosion resistance of nitrogen implanted zircaloy-4[J].Surface and Coatings Technology,1997,89(3):252-257.
[11]陈昌浩,金永中,陈建,等.弧电流对多弧离子镀Ti N涂层形貌及力学性能的影响[J].热加工工艺,2016(14):117-119.Chen Changhao,Jin Yongzhong,Chen Jian,et al.Effects of arc current on morphology and mechanical properties of Ti N coating deposited by multi-arc ion plating[J].Hot Working Technology,2016(14):117-119.
[12]朱鹏志,朱颖,李刘合.Ti Al Si N涂层刀具的发展与应用[J].新技术新工艺,2014(5):105-110.Zhu Peng Zhi,Zhu Ying,Li Liuhe.Development and application of Ti A1Si N coated tools[J].New Technology and New Process,2014(5):105-110.
[13]张会霞,战宏伟,冯光光,等.多弧离子镀靶电流对膜层形貌与性能的影响[J].热加工工艺,2012,41(22):151-152.Zhang Huixia,Zhan Hongwei,Feng Guangguang,et al.Effects of target current on surface pattern Ti0.33Al0.67N films by multi-arc ion and properties of plating[J].Hot Working Technology,2012,41(22):151-152.
[14]毛延发,宫永辉,杨琳,等.多弧离子镀Ti Al N涂层熔滴工艺参数的影响[J].内蒙古民族大学学报,2007,22(5):514-517.Mao Yanfa,Gong Yonghui,Yang Lin,et al.Influence of technical parameters on droplets of Ti AIN coating deposited by multi-arc ion plating[J].Journal of Inner Mongolia University for Nationalities,2007,22(5):514-517.
[15]丁旺,钱闯,陈耀东,等.涂层与基体间结合力的检测与评定方法[J].现代车用动力,2014(4):55-58.Ding Wang,Qian Chuang,Chen Yaodong,et al.Methods of measurement and evaluation of adhesion force between film and base body[J].Modern Vehicle Power,2014(4):55-58.
[16]胡树兵,李志章.过渡层对Ti N涂层结合力的影响[J].材料保护,2001,34(9):1-3.Hu Shubin,Li Zhizhang.Effects of interlayer on adhesion strength of Ti N coating[J].Materials Protection,2001,34(9):1-3.
[17]胡社军,黄浩.渗硅-离子氮化复合处理提高钼合金高温抗氧化性能[J].机电工程技术,1993(3):19-22.Hu Shejun,Huang Hao.High temperature oxidation resistance of molybdenum alloy by the compound treatment of silicon-ion nitrification[J].Mechanical and Electrical Engineering Technology,1993(3):19-22.
[18]刘文,梁文萍,缪强,等.TC21合金表面Al-Cr涂层的制备及其高温抗氧化性[J].南京航空航天大学学报,2015,47(5):702-708.Liu Wen,Liang Wenping,Miu Qiang,et al.Preparation and oxidation resistance of Al-Cr composite coating on TC21 alloy surface[J].Journal of Nanjing University of Aeronautics and Astronautics,2015,47(5):702-708.