多层梯度结构对TiAlSiN涂层摩擦磨损性能的影响
|
摘要
为提高304不锈钢耐磨损性能,采用磁过滤阴极弧等离子体沉积的方法制备TiAlSiN多层梯度涂层,研究多层梯度结构对涂层摩擦磨损性能的影响。采用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)、纳米压痕仪和划痕仪等方法对涂层的表面形貌、物相结构以及力学性能进行表征,并通过MST-3001摩擦磨损试验仪测试不同结构涂层的摩擦磨损性能。结果表明:与TiAlSiN单层涂层相比,TiAlSiN多层梯度涂层具有更高的结合力和韧性;两种涂层的摩擦因数和磨损率都远小于304不锈钢,其中TiAlSiN多层梯度涂层具有比单层涂层更低的磨损率,磨损率由2.6×104μm3/(N·m)降至8.5×103μm3/(N·m),降低了67.8%,TiAlSiN多层梯度涂层磨痕表面光滑致密,主要磨损机制为轻微粘着磨损、磨粒磨损和氧化磨损的协同作用。
TiAlSiN gradient multilayer coating was deposited on 304 stainles steel by magnetic filtered arc ion plating to improve the wear resistance. The effect of the gradient multilayer structure on tribology properties of the TiAlSiN coating was studied. The surface morphology, phase composition, mechanical properties and tribology performance were investigated by SEM, XRD, XPS, nanoindention/scratching method, and ball-on-disk test, respectively. The results show that the adhesion strength of TiAlSiN gradient the multilayer coating is higher than that of the monolayer coating, and the gradient multilayer structure can improve the toughness of the TiAlSiN coating. The friction coefficient and wear rate of TiAlSiN coating are much lower than that of the 304 stainless steel substrate. Additionally, the wear rate of the TiAlSiN gradient multilayer coating exhibits a lower wear rate of 8.5×103 μm3/(N·m) than that of TiAlSiN monolayer, 2.6×104 μm3/(N·m), decreasing by 67.8%.The main wear mechanisms of TiAlSiN gradient multilayer coating are slight adhesion wear, abrasive wear and oxidative wear.
TiAlSiN gradient multilayer coating was deposited on 304 stainles steel by magnetic filtered arc ion plating to improve the wear resistance. The effect of the gradient multilayer structure on tribology properties of the TiAlSiN coating was studied. The surface morphology, phase composition, mechanical properties and tribology performance were investigated by SEM, XRD, XPS, nanoindention/scratching method, and ball-on-disk test, respectively. The results show that the adhesion strength of TiAlSiN gradient the multilayer coating is higher than that of the monolayer coating, and the gradient multilayer structure can improve the toughness of the TiAlSiN coating. The friction coefficient and wear rate of TiAlSiN coating are much lower than that of the 304 stainless steel substrate. Additionally, the wear rate of the TiAlSiN gradient multilayer coating exhibits a lower wear rate of 8.5×103 μm3/(N·m) than that of TiAlSiN monolayer, 2.6×104 μm3/(N·m), decreasing by 67.8%.The main wear mechanisms of TiAlSiN gradient multilayer coating are slight adhesion wear, abrasive wear and oxidative wear.
引文
[1]VEPREK S,VEPREK-HEIJMAN M J G.Industrial applications of superhard nanocomposite coatings[J].Surface&Coatings Technology,2008,202(21):5063-5073.
[2]付德君,杨慧娟,吴大维,等.刀具涂层技术的新进展[J].航空制造技术,2009,13:80-83.FU D J,YANG H J,WU D W,et al.New development of tool coating technology[J].Aeronautical Manufacturing Technology,2009,13:80-83(in Chinese).
[3]RODRíGUEZ-BARACALDO R,BENITO J A,PUCHI-CABRERA E S,et al.High temperature wear resistance of(Ti Al)N PVD coating on untreated and gas nitrided AISIH13 steel with different heat treatments[J].Wear,2007,262(3-4):380-389.
[4]PANJAN P,NAVIN?EK B,?EKADA M,et al.Oxidation behaviour of Ti Al N coatings sputtered at low temperature[J].Vacuum,1999,53(1):127-131.
[5]RIEDL H,KOLLER C M,MUNNIK F,et al.Influence of oxygen impurities on growth morphology,structure and mechanical properties of Ti-Al-N thin films[J].Thin Solid Films,2016,603:39-49.
[6]WANG S Q,CHEN L,YANG B,et al.Effect of Si addition on microstructure and mechanical properties of Ti-Al-Ncoating[J].International Journal of Refractory Metals&Hard Materials,2010,28(5):593-596.
[7]PHILIPPON D,GODINHO V,NAGY P M,et al.Endurance of Ti Al Si N coatings:Effect of Si and bias on wear and adhesion[J].Wear,2015,270(7):541-549.
[8]XIE Z W,WANG L P,WANG X F,et al.Influence of Si content on structure and mechanical properties of Ti Al Si Ncoatings deposited by multi-plasma immersion ion implantation and deposition[J].Transations of Nonferrous Metals Society of China,2011,21(31):S476-S482.
[9]HOLLECK H,SCHIER V.Multilayer PVD coatings for wear protection[J].Surface&Coatings Technology,1995,S76-77(95):328-336.
[10]杜军,朱晓莹,王红美,等.纳米多层结构实现硬质薄膜韧化的方法、机理与应用[J].材料工程,2017,45(8):102-114.DU J,ZHU X Y,WANG H M.Nano multilayer structure toughening of hard coatings-method,mechanism,application[J].Journal of Materials Engineering,2017,45(8):102-114(in Chinese).
[11]李戈扬,虞晓江.Ta N/Nb N纳米多层膜的力学性能与耐磨性[J].真空科学与技术学报,2002,22(1):1-4.LI G Y,YU X J,WU Z G.Mechanical and antiwear proper-ties of Ta N/Nb N nano multilayers[J].Vacuum Science and Technology,2002,22(1):1-4(in Chinese).
[12]AZADI M,ROUHAGHDAM A S,AHANGARANI S,et al.Mechanical behavior of Ti N/Ti C multilayer coatings fabricated by plasma assisted chemical vapor deposition on AISIH13 hot work tool steel[J].Surface&Coatings Technology,2014,245(5):156-166.
[13]ARIAS D F,GóMEZ A,VéLEZ J M,et al.A mechanical and tribological study of Cr/Cr N multilayer coatings[J].Materials Chemistry&Physics,2015,160:131-140.
[14]裴晨蕊,孙德恩,Sam Zhang,等.硬质陶瓷涂层增韧及其评估研究进展[J].中国表面工程,2016,29(2):1-9.PEI C R,SUN D E,ZHANG S,et al.Toughening and toughness evaluation of hard ceramic coatings:a critical reciew[J].China Surface Engineering,2016,29(2):1-9(in Chinese).
[15]DOBRZA?SKI L A,?UKOWSKA L W,MIKU?A J,et al.Structure and mechanical properties of gradient PVD coatings[J].Journal of Materials Processing Technology,2008,201(1-3):310-314.
[16]CUI W,QIN G,DUAN J,et al.A graded nano-Ti N coating on biomedical Ti alloy:Low friction coefficient,good bonding and biocompatibility[J].Materials Science&Engineering C,2016,71:520-528.
[17]ALI R,SEBASTIANI M,BEMPORAD E.Influence of TiTi N multilayer PVD-coatings design on residual stresses and adhesion[J].Materials&Design,2015,75:47-56.
[18]龚海飞,邵天敏.Ti N/Ti多层膜韧性对摩擦学性能的影响[J].材料工程,2009,10(10):26-31.GONG H F,SHAO T M.Influence of toughness on tribological performance of Ti N/Ti multilayer coatings[J].Journal of Materials Engineering,2009,10(10):26-31(in Chinese).
[19]安健,张庆瑜.Ti N/Ta N多层膜的结构和摩擦学性能[J].摩擦学学报,2005,25(1):7-12.AN J,ZHANG Q Y.Structures and tribological properties of Ti N/Ta N multilayer coatings deposited on silicon wafer by magnetron sputtering[J].Tribology,2005,25(1):7-12(in Chinese).
[20]WO P C,ZHAO X L,MUNROE P R,et al.Extremely hard,damage-tolerant ceramic coatings with functionally graded,periodically varying architecture[J].Acta Materialia,2013,61(1):193-204.
[21]赵升升,梅海娟,程律莎,等.大厚度Ti Al N涂层力学性能的研究[J].材料研究学报,2016,30(8):614-620.ZHAO S S,MEI H J,CHEN L S,et al.Study on mechanical property of Ti Al N coatings of large thickness[J].Chinese Journal of Materials Research,2016,30(8):614-620(in Chinese).
[22]NIEDERHOFER A,NESLáDEK P,M?NNLING H D,et al.Structural properties,internal stress and thermal stability of nc-Ti N/a-Si3N4,nc-Ti N/Ti Six,and nc-(Ti1-y Aly Six)N superhard nanocomposite coatings reaching the hardness of diamond[J].Surface&Coatings Technology,1999,S120-121(99):173-178.
[23]KIM S K,VINH P V,KIM J H,et al.Deposition of superhard Ti Al Si N thin films by cathodic arc plasma deposition[J].Surface&Coatings Technology,2005,200(5-6):1391-1394.
[24]M?NNLING H D,PATIL D S,MOTO K,et al.Thermal stability of superhard nanocomposite coatings consisting of immiscible nitrides[J].Surface&Coatings Technology,2001,S146-147(1):263-267.
[25]SAKHAROVA N A,FERNANDES J V,OLIVEIRA M C,et al.Influence of ductile interlayers on mechanical behaviour of hard coatings under depth-sensing indentation:a numerical study on Ti Al N[J].Journal of Materials Science,2010,45(14):3812-3823.
[26]王鑫,王振玉,冯再新,等.N掺杂对V-Al-C涂层微观结构、力学及摩擦性能的影响[J].金属学报,2017(6):709-718.WANG X,WANG Z Y,FENG Z X,et al.Effect of N doping on microstructure,mechanical and tribological properties of V-Al-C coatings[J].Acta Metallurgica Sinica,2017(6):709-718(in Chinese).
[27]American Society of Testing Materials.C1624-2005(2015).Standard test method for adhesion strength and mechanical failure modes of ceramic coatings by quantitative single point scratch testing[S].
[28]党超群,白雪冰,李金龙,等.Ti Si N/Ag纳米多层涂层的抗菌及摩擦学性能研究[J].摩擦学学报,2017,37(1):1-10.DANG C Q,BAI X B,LI J L,et al.Antibacterial and tribological properties of Ti Si N/Ag nano-multilayer coating[J].Tribology,2017,37(1):1-10(in Chinese).
[2]付德君,杨慧娟,吴大维,等.刀具涂层技术的新进展[J].航空制造技术,2009,13:80-83.FU D J,YANG H J,WU D W,et al.New development of tool coating technology[J].Aeronautical Manufacturing Technology,2009,13:80-83(in Chinese).
[3]RODRíGUEZ-BARACALDO R,BENITO J A,PUCHI-CABRERA E S,et al.High temperature wear resistance of(Ti Al)N PVD coating on untreated and gas nitrided AISIH13 steel with different heat treatments[J].Wear,2007,262(3-4):380-389.
[4]PANJAN P,NAVIN?EK B,?EKADA M,et al.Oxidation behaviour of Ti Al N coatings sputtered at low temperature[J].Vacuum,1999,53(1):127-131.
[5]RIEDL H,KOLLER C M,MUNNIK F,et al.Influence of oxygen impurities on growth morphology,structure and mechanical properties of Ti-Al-N thin films[J].Thin Solid Films,2016,603:39-49.
[6]WANG S Q,CHEN L,YANG B,et al.Effect of Si addition on microstructure and mechanical properties of Ti-Al-Ncoating[J].International Journal of Refractory Metals&Hard Materials,2010,28(5):593-596.
[7]PHILIPPON D,GODINHO V,NAGY P M,et al.Endurance of Ti Al Si N coatings:Effect of Si and bias on wear and adhesion[J].Wear,2015,270(7):541-549.
[8]XIE Z W,WANG L P,WANG X F,et al.Influence of Si content on structure and mechanical properties of Ti Al Si Ncoatings deposited by multi-plasma immersion ion implantation and deposition[J].Transations of Nonferrous Metals Society of China,2011,21(31):S476-S482.
[9]HOLLECK H,SCHIER V.Multilayer PVD coatings for wear protection[J].Surface&Coatings Technology,1995,S76-77(95):328-336.
[10]杜军,朱晓莹,王红美,等.纳米多层结构实现硬质薄膜韧化的方法、机理与应用[J].材料工程,2017,45(8):102-114.DU J,ZHU X Y,WANG H M.Nano multilayer structure toughening of hard coatings-method,mechanism,application[J].Journal of Materials Engineering,2017,45(8):102-114(in Chinese).
[11]李戈扬,虞晓江.Ta N/Nb N纳米多层膜的力学性能与耐磨性[J].真空科学与技术学报,2002,22(1):1-4.LI G Y,YU X J,WU Z G.Mechanical and antiwear proper-ties of Ta N/Nb N nano multilayers[J].Vacuum Science and Technology,2002,22(1):1-4(in Chinese).
[12]AZADI M,ROUHAGHDAM A S,AHANGARANI S,et al.Mechanical behavior of Ti N/Ti C multilayer coatings fabricated by plasma assisted chemical vapor deposition on AISIH13 hot work tool steel[J].Surface&Coatings Technology,2014,245(5):156-166.
[13]ARIAS D F,GóMEZ A,VéLEZ J M,et al.A mechanical and tribological study of Cr/Cr N multilayer coatings[J].Materials Chemistry&Physics,2015,160:131-140.
[14]裴晨蕊,孙德恩,Sam Zhang,等.硬质陶瓷涂层增韧及其评估研究进展[J].中国表面工程,2016,29(2):1-9.PEI C R,SUN D E,ZHANG S,et al.Toughening and toughness evaluation of hard ceramic coatings:a critical reciew[J].China Surface Engineering,2016,29(2):1-9(in Chinese).
[15]DOBRZA?SKI L A,?UKOWSKA L W,MIKU?A J,et al.Structure and mechanical properties of gradient PVD coatings[J].Journal of Materials Processing Technology,2008,201(1-3):310-314.
[16]CUI W,QIN G,DUAN J,et al.A graded nano-Ti N coating on biomedical Ti alloy:Low friction coefficient,good bonding and biocompatibility[J].Materials Science&Engineering C,2016,71:520-528.
[17]ALI R,SEBASTIANI M,BEMPORAD E.Influence of TiTi N multilayer PVD-coatings design on residual stresses and adhesion[J].Materials&Design,2015,75:47-56.
[18]龚海飞,邵天敏.Ti N/Ti多层膜韧性对摩擦学性能的影响[J].材料工程,2009,10(10):26-31.GONG H F,SHAO T M.Influence of toughness on tribological performance of Ti N/Ti multilayer coatings[J].Journal of Materials Engineering,2009,10(10):26-31(in Chinese).
[19]安健,张庆瑜.Ti N/Ta N多层膜的结构和摩擦学性能[J].摩擦学学报,2005,25(1):7-12.AN J,ZHANG Q Y.Structures and tribological properties of Ti N/Ta N multilayer coatings deposited on silicon wafer by magnetron sputtering[J].Tribology,2005,25(1):7-12(in Chinese).
[20]WO P C,ZHAO X L,MUNROE P R,et al.Extremely hard,damage-tolerant ceramic coatings with functionally graded,periodically varying architecture[J].Acta Materialia,2013,61(1):193-204.
[21]赵升升,梅海娟,程律莎,等.大厚度Ti Al N涂层力学性能的研究[J].材料研究学报,2016,30(8):614-620.ZHAO S S,MEI H J,CHEN L S,et al.Study on mechanical property of Ti Al N coatings of large thickness[J].Chinese Journal of Materials Research,2016,30(8):614-620(in Chinese).
[22]NIEDERHOFER A,NESLáDEK P,M?NNLING H D,et al.Structural properties,internal stress and thermal stability of nc-Ti N/a-Si3N4,nc-Ti N/Ti Six,and nc-(Ti1-y Aly Six)N superhard nanocomposite coatings reaching the hardness of diamond[J].Surface&Coatings Technology,1999,S120-121(99):173-178.
[23]KIM S K,VINH P V,KIM J H,et al.Deposition of superhard Ti Al Si N thin films by cathodic arc plasma deposition[J].Surface&Coatings Technology,2005,200(5-6):1391-1394.
[24]M?NNLING H D,PATIL D S,MOTO K,et al.Thermal stability of superhard nanocomposite coatings consisting of immiscible nitrides[J].Surface&Coatings Technology,2001,S146-147(1):263-267.
[25]SAKHAROVA N A,FERNANDES J V,OLIVEIRA M C,et al.Influence of ductile interlayers on mechanical behaviour of hard coatings under depth-sensing indentation:a numerical study on Ti Al N[J].Journal of Materials Science,2010,45(14):3812-3823.
[26]王鑫,王振玉,冯再新,等.N掺杂对V-Al-C涂层微观结构、力学及摩擦性能的影响[J].金属学报,2017(6):709-718.WANG X,WANG Z Y,FENG Z X,et al.Effect of N doping on microstructure,mechanical and tribological properties of V-Al-C coatings[J].Acta Metallurgica Sinica,2017(6):709-718(in Chinese).
[27]American Society of Testing Materials.C1624-2005(2015).Standard test method for adhesion strength and mechanical failure modes of ceramic coatings by quantitative single point scratch testing[S].
[28]党超群,白雪冰,李金龙,等.Ti Si N/Ag纳米多层涂层的抗菌及摩擦学性能研究[J].摩擦学学报,2017,37(1):1-10.DANG C Q,BAI X B,LI J L,et al.Antibacterial and tribological properties of Ti Si N/Ag nano-multilayer coating[J].Tribology,2017,37(1):1-10(in Chinese).