搜索页_+Proton+beam+micromachining

常用资源

电子图书

期刊论文

学位会议

外文资源

特色专题

内部出版物

SpringerLink电子期刊(5)

Elsevier电子期刊(44)

在“Elsevier电子期刊”中，命中：44条，耗时：0.0199948 秒

在所有数据库中总计命中：49条

1.High aspect ratio channels in glass and porous silicon

作者：H.D. Liang^a ; ^b ; Z.Y. Dang^a ; J.F. Wu^a ; ^c ; J.A. van Kan^a ; S. Qureshi^a ; M.D. Ynsa^d ; ^e ; V. Torres-Costa^d ; ^e ; A. Maira^d ; T.V. Venkatesan^b ; M.B.H. Breese^a ; ^{phymbhb@nus.edu.sg}

关键词：Proton beam irradiation ; High-aspect-ratio channel ; Porous silicon

刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

出版年：2017

2.Micromachining of commodity plastics by proton beam writing and fabrication of spatial resolution test-chart for neutron radiography

作者：T. Sakai^a ; ^{sakai.takuro@jaea.go.jp} ; R. Yasuda^a ; H. Iikura^a ; T. Nojima^a ; M. Matsubayashi^a ; W. Kada^b ; M. Kohka^b ; T. Satoh^b ; T. Ohkubo^b ; Y. Ishii^b ; K. Takano^c

关键词：Proton beam writing ; Micromachining ; Acrylic resin ; Neutron radiography

刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

出版年：2013

3.Fabrication of micro-prominences on PTFE surface using proton beam writing

作者：Akane Kitamura(Ogawa)^a ; ^{ogawa.akane@jaea.go.jp} ; Takahiro Satoh^a ; Masashi Koka^a ; Tomohiro Kobayashi^b ; Tomihiro Kamiya^a

关键词：Proton beam writing ; Fluoropolymer ; Microfabrication

刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

出版年：2013

4.Greyscale proton beam writing in p-type Gallium Arsenide

作者：D. Diering^a ; ^{david.diering@gmx.de} ; D. Spemann^a ; ^{spemann@uni-leipzig.de} ; J. Lenzner^b ; St. Mü ; ller^b ; T. Bö ; ntgen^b ; H. von Wenckstern^b

关键词：PBW ; p-Type GaAs ; Greyscale lithography

刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

出版年：2013

5.Improvements in the angular current density of inductively coupled plasma ion source for focused heavy ion beams

作者：Ranjini Menon^a ; P.Y. Nabhiraj^a ; ^{npy@vecc.gov.in} ; ^{yalagoud.nabhiraj@gmail.com} ; R.K. Bhandari^b

关键词：ICP ion source ; Angular current density ; Brightness ; Micromachining

刊名：Vacuum

出版年：2013

6.Fabrication of large area silicon nanothickness membranes for channeling experiments

作者：A. Mazzolari ; V. Guidi ; D. De Salvador ; L. Bacci

关键词：Beams in accelerators ; Channeling in crystals

刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

出版年：2013

7.Electroforming of Ni mold for imprint lithography using high-aspect-ratio PMMA microstructures fabricated by proton beam writing

作者：Yusuke Tanabe^a ; ^{nishi@sic.shibaura-it.ac.jp"" rel=""nofollow} ; Hiroyuki Nishikawa^a ; Yoshihiro Seki^a ; Takahiro Satoh^b ; Yasuyuki Ishii^b ; Tomihiro Kamiya^b ; Tohru Watanabe^a ; Atsushi Sekiguchi^c

关键词：Proton beam writing ; Mold ; Electroforming ; Imprint lithography

刊名：Microelectronic Engineering

出版年：2011

8.PDMS patterning by proton beam

作者：S.Z. Szilasi ; R. Huszank ; A. Csik ; C. Cserhá ; ti ; I. Rajta

关键词：PDMS ; Proton beam micromachining (PBM) ; Proton beam writing (PBW) ; Irradiation

刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

出版年：2009

9.Sub-100 keV ion beam generation with a Van De Graaff accelerator using an external DC voltage supply

作者：T.K. Chan ; ; ; ^{phyctk@nus.edu.sg} ; J. Song ; T.F. Choo ; M.B.H. Breese

关键词：Van de Graaff ; Medium energy ion beam ; Ion beam irradiation

刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

出版年：2011

10.Creation of 3D microsculptures in PMMA by multiple angle proton irradiation

作者：T. Andrea^a ; ; ^{tobias.andrea@physik.uni-leipzig.de} ; M. Rothermel^a ; T. Reinert^a ; ; ^b ; T. Koal^a ; T. Butz^a

关键词：Proton beam writing ; PMMA ; Tomography

刊名：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

出版年：2011

按检索点细分(44)

题名(14)

关键词(16)

文摘(30)

按出版年细分(44)

2017年(1)

2013年(5)

2011年(3)

2009年(4)

2008年(2)

2007年(4)

2006年(1)

2005年(4)

2004年(1)

2003年(5)

2002年(2)

2001年(3)

2000年(2)

2000年及以前(7)

地址：北京市海淀区学院路29号邮编：100083

电话：办公室：(+86 10)66554848；文献借阅、咨询服务、科技查新：66554700