Handbook of microlithography, micromachining, and microfabrication.

详细信息    Handbook of microlithography, micromachining, and microfabrication.

• 翻译题名：显微平版印刷术、显微机械加工和显微构造手册，第2卷－－显微机械加工和显微构造.
• 丛编题名：SPIE Press monograph ; ; IEE materials and devices series ;
• 出版日期：c1997.
• 出版者：SPIE Optical Engineering Press,
• 页数：viii, 692 p. :
• 出版地：London :
• 第一责任说明：P. Rai-Choudhury, editor.
• 尺寸：26 cm.
• 分类号：a840
• ISBN：0-8194-2379-3(hb.) :

MARC全文

0200009631 20021015101041.0 021015s enka fr |00||||eng 0-8194-2379-3(hb.) : CNY1322.10 NGL a840 显微平版印刷术、显微机械加工和显微构造手册，第2卷－－显微机械加工和显微构造. chi Handbook of microlithography, micromachining, and microfabrication. v.2, Micromachining and microfabrication / P. Rai-Choudhury, editor. London : SPIE Optical Engineering Press, c1997. viii, 692 p. : ill. ; 26 cm. SPIE Press monograph ; ; IEE materials and devices series ; 40 ; 12B Microlithography ; Micromachining. ; Microfabrication. aRai-Choudhury, P. aCN bNGL NGL EB00063055 840 C45 v2 ; r￥1322.10 ahm b1 e2002h9