Synthesis and characterization of Ti₂AlC coatings by magnetron sputtering from three elemental targets and ex-situ annealing

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• 作者：C. Tang ; M. Klimenkov ; U. Jaentsch ; H. Leiste ; M. Rinke ; S. Ulrich ; M. Steinbrü ; ck ; H.J. Seifert ; M. Stueber ; ^{michael.stueber@kit.edu}
• 关键词：Nanoscale multilayers ; Magnetron sputtering ; Annealing ; Ti2AlC MAX phase ; Microstructural evolution
• 刊名：Surface and Coatings Technology
• 出版年：2017
• 出版时间：15 January 2017
• 年：2017
• 卷：309
• 期：Complete
• 页码：445-455
• 全文大小：2413 K
• 卷排序：309

文摘

Ti2AlC MAX phase formation induced by post annealing of elemental multilayers Ti-Al-C multilayers with nanoscale architecture deposited by magnetron sputtering Two substrate types were used: Si and thermally oxidized Si. No MAX phase formation observed for films on Si Phase-pure MAX phase formation observed for films on thermally oxidized Si at 800 °C