Ordered silicon nanowire arrays prepared by an improved nanospheres self-assembly in combination with Ag-assisted wet chemical etching

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Ordered silicon nanowire arrays prepared by an improved nanospheres self-assembly in combination with Ag-assisted wet chemical etching

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作者：Guobin Jia ; ^{guobin.jia@ipht-jena.de" class="auth_mail" title="E-mail the corresponding author} ; ^{jiaguobin83@hotmail.com" class="auth_mail" title="E-mail the corresponding author} ; Jasper Westphalen ; Jan Drexler ; Jonathan Plentz ; Jan Dellith ; Andrea Dellith ; Gudrun Andrä ; Fritz Falk
关键词：Ordered silicon nanowire array ; Langmui&ndash ; Blodgett ; Porous silicon ; Nanosphere lithography ; Ag-assisted wet chemical etching
刊名：Photonics and Nanostructures - Fundamentals and Applications
出版年：2016
出版时间：April 2016
年：2016
卷：19
期：Complete
页码：64-70
全文大小：2656 K

文摘

•: An improved Langmuir–Blodgett (LB) process independent to surface states is presented.
•: Issues in the nanosphere lithography combined with Ag-assisted wet chemical etching discussed.
•: Experimental evidence of the origin of formation of porous structures.
•: Ordered silicon nanowire array free of porous structure was prepared.
•: Ordered silicon nanowire array with aspect ratio >100 was prepared.

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