Ultraviolet photodetectors based on MgZnO thin film grown by RF magnetron sputtering

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• 作者：Jr-Shiang Shiau^a ; Sanjaya Brahma^a ; Chuan-Pu Liu^a ; ^{cpliu@mail.ncku.edu.tw} ; Jow-Lay Huang^a ; ^b ; ^c
• 关键词：ZnO ; MgZnO ; Magnetron sputtering ; Photodetector
• 刊名：Thin Solid Films
• 出版年：2016
• 出版时间：1 December 2016
• 年：2016
• 卷：620
• 期：Complete
• 页码：170-174
• 全文大小：1033 K
• 卷排序：620

文摘

We have deposited the nanorod-like MgZnO thin film with high Mg content maintain Wurtzite phase and no buffer layer. The Mg content of MgxZn1-xO alloys can be varied in a large range by changing the substrate temperature. The photo responsivity result reveals that the photodetector can detect the UV-B region.