An Al2O3 front contact passivation layer is introduced to Cu(In, Ga)Se2 solar cells.
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The ALD Al2O3 is thin enough to allow for tunneling.
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Detrimental effect of openings in buffer layer is mitigated by passivation.
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CIGSe/Al2O3 interface exhibits lower defect density compared to CIGSe/ZnO interface.
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Heat treatment during Al2O3 deposition induces a larger space charge region width.
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