Spectroscopic Gas Sensing Using a Silicon Slab Waveguide

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• 作者：Christian Ranacher^a ; ^{christian.ranacher@ctr.at} ; Cristina Consani^a ; Franz Josef Maier^a ; Ursula Hedenig^b ; Reyhaneh Jannesari^c ; Ventsislav Lavchiev^c ; Andreas Tortschanoff^a ; Thomas Grille^b ; Bernhard Jakoby^c
• 关键词：Optical Gas Sensing ; Silicon Photonics ; Silicon Waveguide ; Evanescent-Field Absorption ; Absorption Spectroscopy
• 刊名：Procedia Engineering
• 出版年：2016
• 出版时间：2016
• 年：2016
• 卷：168
• 期：Complete
• 页码：1265-1269
• 全文大小：226 K
• 卷排序：168

文摘

We present an evanescent-field absorption gas sensor based on a silicon slab waveguide. We describe the finite element simulations that were used to design the waveguide structures and furthermore present spectroscopic measurements of CO2, which show that we can resolve the rotational-vibrational spectrum of the gas under test. Although the used slab waveguides are not capable of sensing ppm concentrations, due to the short interaction length with the gas, the results demonstrate the feasibility of the approach and provide valuable input for the design of the next generation of sensor structures.