Growth of high quality N-polar n-GaN on vicinal C-face n-SiC substrates for vertical conducting devices
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The full width at half maximum of N-polar GaNlineImage" height="17" width="40" alt="View the MathML source" title="View the MathML source" src="/sd/grey_pxl.gif" data-inlimgeid="1-s2.0-S0042207X16301361-si1.gif">ω-rocking curve is ∼335 arcsec.

SiNx interlayer is an effective way to improve the properties of N-polar GaN films.

Our structure is vertical conducting.

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