The samples investigated in this work are sliced from the same bulk crystal.
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The dislocation density of samples ranges from 2.4×106 cm−2 to 2.3×105 cm−2.
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The evolution of dislocation and impurity with thickness is presented.
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The mechanism determining the electrical properties of bulk GaN is discussed.
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HVPE is identified as an effective approach in growing thick bulk GaN.
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